CN1932432B - 光波干涉装置 - Google Patents

光波干涉装置 Download PDF

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Publication number
CN1932432B
CN1932432B CN2006101536596A CN200610153659A CN1932432B CN 1932432 B CN1932432 B CN 1932432B CN 2006101536596 A CN2006101536596 A CN 2006101536596A CN 200610153659 A CN200610153659 A CN 200610153659A CN 1932432 B CN1932432 B CN 1932432B
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China
Prior art keywords
lens
detected
detected lens
benchmark
light
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Expired - Fee Related
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CN2006101536596A
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English (en)
Chinese (zh)
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CN1932432A (zh
Inventor
植木伸明
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Fujinon Corp
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Fujinon Corp
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  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
CN2006101536596A 2005-09-15 2006-09-12 光波干涉装置 Expired - Fee Related CN1932432B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005269217 2005-09-15
JP2005269217A JP4738949B2 (ja) 2005-09-15 2005-09-15 光波干渉装置
JP2005-269217 2005-09-15

Publications (2)

Publication Number Publication Date
CN1932432A CN1932432A (zh) 2007-03-21
CN1932432B true CN1932432B (zh) 2010-09-15

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Family Applications (1)

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CN2006101536596A Expired - Fee Related CN1932432B (zh) 2005-09-15 2006-09-12 光波干涉装置

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JP (1) JP4738949B2 (enrdf_load_stackoverflow)
CN (1) CN1932432B (enrdf_load_stackoverflow)
TW (1) TW200712444A (enrdf_load_stackoverflow)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4947774B2 (ja) * 2006-08-18 2012-06-06 富士フイルム株式会社 光波干渉測定装置および光波干渉測定方法
JP2009008594A (ja) * 2007-06-29 2009-01-15 Konica Minolta Opto Inc 光学素子ユニット及び干渉計
JP2009145081A (ja) * 2007-12-11 2009-07-02 Fujinon Corp 回転非対称収差の発生要因誤差量測定方法および装置
JP5025501B2 (ja) * 2008-01-17 2012-09-12 オリンパス株式会社 光学素子保持機構および光学素子測定装置
JP2009236694A (ja) * 2008-03-27 2009-10-15 Konica Minolta Opto Inc レンズ測定装置、レンズ測定方法、及びレンズ生産方法
JP5044495B2 (ja) * 2008-07-17 2012-10-10 富士フイルム株式会社 平行平板の厚み測定方法
JP5095539B2 (ja) * 2008-07-17 2012-12-12 富士フイルム株式会社 収差測定誤差補正方法
JP5235591B2 (ja) * 2008-10-10 2013-07-10 富士フイルム株式会社 複屈折性光学素子の透過波面測定方法
JP5208075B2 (ja) * 2008-10-20 2013-06-12 富士フイルム株式会社 光波干渉測定装置
JP4573252B2 (ja) * 2008-11-06 2010-11-04 キヤノンマーケティングジャパン株式会社 アライメントシステム、アライメントシステムの制御方法、プログラム及び測定装置
JP5473743B2 (ja) * 2010-04-20 2014-04-16 富士フイルム株式会社 軸外透過波面測定装置
JP5525367B2 (ja) * 2010-07-28 2014-06-18 Ｈｏｙａ株式会社 レンズ位置調整機構
JP6426274B2 (ja) * 2015-03-27 2018-11-21 オリンパス株式会社 波面計測装置及び波面計測方法
CN114323582A (zh) * 2021-12-22 2022-04-12 光皓光学(江苏)有限公司 一种带平台透镜的波前测试方法及装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1609547A (zh) * 2003-10-24 2005-04-27 富士能株式会社 干涉仪装置的被检透镜载置台

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61195328A (ja) * 1985-02-26 1986-08-29 Asahi Optical Co Ltd 半球レンズを用いた干渉計
JPS63163137A (ja) * 1986-12-25 1988-07-06 Hitachi Electronics Eng Co Ltd レンズ表面欠陥検査装置
JPH07167630A (ja) * 1993-10-14 1995-07-04 Asahi Optical Co Ltd 干渉測定装置および干渉測定方法
JP3758279B2 (ja) * 1997-03-06 2006-03-22 ソニー株式会社 光学ピックアップ用対物レンズの調整方法及び調整装置
JP2003066300A (ja) * 2001-08-29 2003-03-05 Sony Corp 対物レンズ製造装置及び対物レンズ製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1609547A (zh) * 2003-10-24 2005-04-27 富士能株式会社 干涉仪装置的被检透镜载置台

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2004-340693A 2004.12.02
JP特开平7-83609A 1995.03.28

Also Published As

Publication number Publication date
TW200712444A (en) 2007-04-01
CN1932432A (zh) 2007-03-21
JP4738949B2 (ja) 2011-08-03
JP2007078593A (ja) 2007-03-29
TWI292033B (enrdf_load_stackoverflow) 2008-01-01

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