TW200712444A - Light wave interference device - Google Patents

Light wave interference device

Info

Publication number
TW200712444A
TW200712444A TW095134217A TW95134217A TW200712444A TW 200712444 A TW200712444 A TW 200712444A TW 095134217 A TW095134217 A TW 095134217A TW 95134217 A TW95134217 A TW 95134217A TW 200712444 A TW200712444 A TW 200712444A
Authority
TW
Taiwan
Prior art keywords
wave interference
light wave
optical axis
reflecting mirror
inspection lens
Prior art date
Application number
TW095134217A
Other languages
English (en)
Chinese (zh)
Other versions
TWI292033B (enrdf_load_stackoverflow
Inventor
Nobuaki Ueki
Original Assignee
Fujinon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujinon Corp filed Critical Fujinon Corp
Publication of TW200712444A publication Critical patent/TW200712444A/zh
Application granted granted Critical
Publication of TWI292033B publication Critical patent/TWI292033B/zh

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW095134217A 2005-09-15 2006-09-15 Light wave interference device TW200712444A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005269217A JP4738949B2 (ja) 2005-09-15 2005-09-15 光波干渉装置

Publications (2)

Publication Number Publication Date
TW200712444A true TW200712444A (en) 2007-04-01
TWI292033B TWI292033B (enrdf_load_stackoverflow) 2008-01-01

Family

ID=37878386

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095134217A TW200712444A (en) 2005-09-15 2006-09-15 Light wave interference device

Country Status (3)

Country Link
JP (1) JP4738949B2 (enrdf_load_stackoverflow)
CN (1) CN1932432B (enrdf_load_stackoverflow)
TW (1) TW200712444A (enrdf_load_stackoverflow)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4947774B2 (ja) * 2006-08-18 2012-06-06 富士フイルム株式会社 光波干渉測定装置および光波干渉測定方法
JP2009008594A (ja) * 2007-06-29 2009-01-15 Konica Minolta Opto Inc 光学素子ユニット及び干渉計
JP2009145081A (ja) * 2007-12-11 2009-07-02 Fujinon Corp 回転非対称収差の発生要因誤差量測定方法および装置
JP5025501B2 (ja) * 2008-01-17 2012-09-12 オリンパス株式会社 光学素子保持機構および光学素子測定装置
JP2009236694A (ja) * 2008-03-27 2009-10-15 Konica Minolta Opto Inc レンズ測定装置、レンズ測定方法、及びレンズ生産方法
JP5095539B2 (ja) * 2008-07-17 2012-12-12 富士フイルム株式会社 収差測定誤差補正方法
JP5044495B2 (ja) * 2008-07-17 2012-10-10 富士フイルム株式会社 平行平板の厚み測定方法
JP5235591B2 (ja) * 2008-10-10 2013-07-10 富士フイルム株式会社 複屈折性光学素子の透過波面測定方法
JP5208075B2 (ja) * 2008-10-20 2013-06-12 富士フイルム株式会社 光波干渉測定装置
JP4573252B2 (ja) * 2008-11-06 2010-11-04 キヤノンマーケティングジャパン株式会社 アライメントシステム、アライメントシステムの制御方法、プログラム及び測定装置
JP5473743B2 (ja) * 2010-04-20 2014-04-16 富士フイルム株式会社 軸外透過波面測定装置
JP5525367B2 (ja) * 2010-07-28 2014-06-18 Ｈｏｙａ株式会社 レンズ位置調整機構
DE112015006198T5 (de) * 2015-03-27 2017-11-09 Olympus Corporation Wellenfrontmessvorrichtung und wellenfrontmessverfahren
CN114323582A (zh) * 2021-12-22 2022-04-12 光皓光学(江苏)有限公司 一种带平台透镜的波前测试方法及装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61195328A (ja) * 1985-02-26 1986-08-29 Asahi Optical Co Ltd 半球レンズを用いた干渉計
JPS63163137A (ja) * 1986-12-25 1988-07-06 Hitachi Electronics Eng Co Ltd レンズ表面欠陥検査装置
JPH07167630A (ja) * 1993-10-14 1995-07-04 Asahi Optical Co Ltd 干渉測定装置および干渉測定方法
JP3758279B2 (ja) * 1997-03-06 2006-03-22 ソニー株式会社 光学ピックアップ用対物レンズの調整方法及び調整装置
JP2003066300A (ja) * 2001-08-29 2003-03-05 Sony Corp 対物レンズ製造装置及び対物レンズ製造方法
JP2005127914A (ja) * 2003-10-24 2005-05-19 Fujinon Corp 干渉計装置の被検レンズ載置台

Also Published As

Publication number Publication date
CN1932432A (zh) 2007-03-21
JP4738949B2 (ja) 2011-08-03
TWI292033B (enrdf_load_stackoverflow) 2008-01-01
JP2007078593A (ja) 2007-03-29
CN1932432B (zh) 2010-09-15

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees