CN1868121A - 具有可控制通带宽的解耦层叠体声谐振器带通滤波器 - Google Patents
具有可控制通带宽的解耦层叠体声谐振器带通滤波器 Download PDFInfo
- Publication number
- CN1868121A CN1868121A CN200480029947.XA CN200480029947A CN1868121A CN 1868121 A CN1868121 A CN 1868121A CN 200480029947 A CN200480029947 A CN 200480029947A CN 1868121 A CN1868121 A CN 1868121A
- Authority
- CN
- China
- Prior art keywords
- pass filter
- band pass
- fbar
- decoupling zero
- acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 143
- 230000008878 coupling Effects 0.000 claims abstract description 12
- 238000010168 coupling process Methods 0.000 claims abstract description 12
- 238000005859 coupling reaction Methods 0.000 claims abstract description 12
- 229920000265 Polyparaphenylene Polymers 0.000 claims description 26
- 239000004642 Polyimide Substances 0.000 claims description 19
- 229920001721 polyimide Polymers 0.000 claims description 19
- 239000002243 precursor Substances 0.000 claims description 16
- 239000004033 plastic Substances 0.000 claims description 7
- 229920003023 plastic Polymers 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 90
- 238000000151 deposition Methods 0.000 description 27
- 229910052751 metal Inorganic materials 0.000 description 27
- 239000002184 metal Substances 0.000 description 27
- 238000012856 packing Methods 0.000 description 24
- 230000008021 deposition Effects 0.000 description 17
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 16
- 229910052750 molybdenum Inorganic materials 0.000 description 16
- 239000011733 molybdenum Substances 0.000 description 16
- 239000000243 solution Substances 0.000 description 15
- 238000002360 preparation method Methods 0.000 description 12
- 238000004528 spin coating Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000003870 refractory metal Substances 0.000 description 6
- 239000002305 electric material Substances 0.000 description 5
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical group [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000005360 phosphosilicate glass Substances 0.000 description 4
- 229920000052 poly(p-xylylene) Polymers 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 229910017083 AlN Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 2
- 125000001309 chloro group Chemical group Cl* 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- UCWKJFXRPXCVCD-UHFFFAOYSA-N dicyclopentadiene ketone Chemical compound C12C=CCC2C2CC(=O)C1C2 UCWKJFXRPXCVCD-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000002902 bimodal effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920006037 cross link polymer Polymers 0.000 description 1
- 238000006352 cycloaddition reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 150000003738 xylenes Chemical class 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/587—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
- H03H9/584—Coupled Resonator Filters [CFR]
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
- H03H9/605—Electric coupling means therefor consisting of a ladder configuration
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/699,289 US7019605B2 (en) | 2003-10-30 | 2003-10-30 | Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth |
US10/699,481 US6946928B2 (en) | 2003-10-30 | 2003-10-30 | Thin-film acoustically-coupled transformer |
US10/699,481 | 2003-10-30 | ||
US10/699,289 | 2003-10-30 | ||
PCT/US2004/036150 WO2005043755A1 (en) | 2003-10-30 | 2004-10-29 | Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1868121A true CN1868121A (zh) | 2006-11-22 |
CN1868121B CN1868121B (zh) | 2012-01-11 |
Family
ID=34423441
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200480039134.9A Expired - Fee Related CN100505535C (zh) | 2003-10-30 | 2004-10-29 | 有温度补偿的薄膜体声谐振器 |
CN200480032452.2A Expired - Fee Related CN1879300B (zh) | 2003-10-30 | 2004-10-29 | 去耦叠层体声谐振器器件 |
CN200480029947.XA Expired - Fee Related CN1868121B (zh) | 2003-10-30 | 2004-10-29 | 具有可控制通带宽的解耦层叠体声谐振器带通滤波器 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200480039134.9A Expired - Fee Related CN100505535C (zh) | 2003-10-30 | 2004-10-29 | 有温度补偿的薄膜体声谐振器 |
CN200480032452.2A Expired - Fee Related CN1879300B (zh) | 2003-10-30 | 2004-10-29 | 去耦叠层体声谐振器器件 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7019605B2 (zh) |
EP (1) | EP1528674B1 (zh) |
JP (1) | JP2005137002A (zh) |
CN (3) | CN100505535C (zh) |
DE (1) | DE602004012511T2 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111740003A (zh) * | 2020-06-22 | 2020-10-02 | 济南晶正电子科技有限公司 | 一种压电薄膜体及其制备方法、空腔型器件及其制备方法 |
WO2022028401A1 (zh) * | 2020-08-06 | 2022-02-10 | 诺思(天津)微系统有限责任公司 | 带声学解耦层的体声波谐振器组件及制造方法、滤波器及电子设备 |
Families Citing this family (100)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7275292B2 (en) | 2003-03-07 | 2007-10-02 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Method for fabricating an acoustical resonator on a substrate |
US7332985B2 (en) * | 2003-10-30 | 2008-02-19 | Avago Technologies Wireless Ip (Singapore) Pte Ltd. | Cavity-less film bulk acoustic resonator (FBAR) devices |
US7019605B2 (en) * | 2003-10-30 | 2006-03-28 | Larson Iii John D | Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth |
US7400217B2 (en) * | 2003-10-30 | 2008-07-15 | Avago Technologies Wireless Ip Pte Ltd | Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith |
US6946928B2 (en) * | 2003-10-30 | 2005-09-20 | Agilent Technologies, Inc. | Thin-film acoustically-coupled transformer |
EP1528677B1 (en) * | 2003-10-30 | 2006-05-10 | Agilent Technologies, Inc. | Film acoustically-coupled transformer with two reverse c-axis piezoelectric elements |
KR20050066104A (ko) * | 2003-12-26 | 2005-06-30 | 삼성전기주식회사 | Fbar 소자 및 그 제조방법 |
US7388454B2 (en) | 2004-10-01 | 2008-06-17 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using alternating frame structure |
DE102004054895B4 (de) * | 2004-11-12 | 2007-04-19 | Infineon Technologies Ag | Dünnschicht-BAW-Filter sowie Verfahren zur Herstellung eines Dünnschicht-BAW-Filters |
US8981876B2 (en) * | 2004-11-15 | 2015-03-17 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Piezoelectric resonator structures and electrical filters having frame elements |
US7202560B2 (en) | 2004-12-15 | 2007-04-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Wafer bonding of micro-electro mechanical systems to active circuitry |
US7791434B2 (en) | 2004-12-22 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric |
US7427819B2 (en) * | 2005-03-04 | 2008-09-23 | Avago Wireless Ip Pte Ltd | Film-bulk acoustic wave resonator with motion plate and method |
US7369013B2 (en) | 2005-04-06 | 2008-05-06 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using filled recessed region |
US7436269B2 (en) * | 2005-04-18 | 2008-10-14 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustically coupled resonators and method of making the same |
US7934884B2 (en) * | 2005-04-27 | 2011-05-03 | Lockhart Industries, Inc. | Ring binder cover |
US7562429B2 (en) * | 2005-06-20 | 2009-07-21 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Suspended device and method of making |
US7443269B2 (en) | 2005-07-27 | 2008-10-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method and apparatus for selectively blocking radio frequency (RF) signals in a radio frequency (RF) switching circuit |
US7868522B2 (en) | 2005-09-09 | 2011-01-11 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Adjusted frequency temperature coefficient resonator |
US7391286B2 (en) * | 2005-10-06 | 2008-06-24 | Avago Wireless Ip Pte Ltd | Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters |
US7525398B2 (en) * | 2005-10-18 | 2009-04-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustically communicating data signals across an electrical isolation barrier |
US7425787B2 (en) * | 2005-10-18 | 2008-09-16 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator |
US7423503B2 (en) * | 2005-10-18 | 2008-09-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating film acoustically-coupled transformer |
US7675390B2 (en) | 2005-10-18 | 2010-03-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator |
US7737807B2 (en) | 2005-10-18 | 2010-06-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators |
US7463499B2 (en) | 2005-10-31 | 2008-12-09 | Avago Technologies General Ip (Singapore) Pte Ltd. | AC-DC power converter |
EP1944866B1 (en) * | 2005-11-04 | 2011-12-28 | Murata Manufacturing Co., Ltd. | Piezoelectric thin film resonator |
US7561009B2 (en) * | 2005-11-30 | 2009-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator (FBAR) devices with temperature compensation |
US7612636B2 (en) * | 2006-01-30 | 2009-11-03 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Impedance transforming bulk acoustic wave baluns |
US20070210724A1 (en) * | 2006-03-09 | 2007-09-13 | Mark Unkrich | Power adapter and DC-DC converter having acoustic transformer |
US7746677B2 (en) | 2006-03-09 | 2010-06-29 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | AC-DC converter circuit and power supply |
US7479685B2 (en) * | 2006-03-10 | 2009-01-20 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Electronic device on substrate with cavity and mitigated parasitic leakage path |
US20070228876A1 (en) * | 2006-03-31 | 2007-10-04 | Chien-Min Sung | Diamond Frequency Control Devices and Associated Methods |
US7598827B2 (en) * | 2006-06-19 | 2009-10-06 | Maxim Integrated Products | Harmonic termination of power amplifiers using BAW filter output matching circuits |
US7586389B2 (en) * | 2006-06-19 | 2009-09-08 | Maxim Integrated Products, Inc. | Impedance transformation and filter using bulk acoustic wave technology |
US8925163B2 (en) | 2006-09-18 | 2015-01-06 | Teknologian Tutkimuskeskus Vtt | Method of manufacturing laterally coupled BAW thin films |
FI121722B (fi) * | 2006-09-18 | 2011-03-15 | Valtion Teknillinen | Levykondensaattori- tai levyresonaattorijärjestely |
US7508286B2 (en) * | 2006-09-28 | 2009-03-24 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | HBAR oscillator and method of manufacture |
JP2008172711A (ja) | 2007-01-15 | 2008-07-24 | Hitachi Media Electoronics Co Ltd | 薄膜バルク弾性波共振器およびフィルタおよびそれを用いた高周波モジュール |
JP2008245243A (ja) * | 2007-02-26 | 2008-10-09 | Epson Toyocom Corp | 輪郭振動子、輪郭振動子の調整方法 |
US20080202239A1 (en) * | 2007-02-28 | 2008-08-28 | Fazzio R Shane | Piezoelectric acceleration sensor |
US7777318B2 (en) * | 2007-07-24 | 2010-08-17 | Northrop Grumman Systems Corporation | Wafer level packaging integrated hydrogen getter |
DK2141846T3 (da) | 2007-09-06 | 2013-03-11 | Sharp Kk | Kommunikationsapparat og kommunikationsfremgangsmåde |
US20090079520A1 (en) * | 2007-09-20 | 2009-03-26 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustically coupled resonators having resonant transmission minima |
US20090079514A1 (en) | 2007-09-24 | 2009-03-26 | Tiberiu Jamneala | Hybrid acoustic resonator-based filters |
US7791435B2 (en) | 2007-09-28 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Single stack coupled resonators having differential output |
US7786826B2 (en) * | 2007-10-12 | 2010-08-31 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Apparatus with acoustically coupled BAW resonators and a method for matching impedances |
JP5279068B2 (ja) * | 2008-02-15 | 2013-09-04 | 太陽誘電株式会社 | 圧電薄膜共振子、フィルタ、通信モジュール、および通信装置 |
US7732977B2 (en) | 2008-04-30 | 2010-06-08 | Avago Technologies Wireless Ip (Singapore) | Transceiver circuit for film bulk acoustic resonator (FBAR) transducers |
US7855618B2 (en) | 2008-04-30 | 2010-12-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator electrical impedance transformers |
JP5226409B2 (ja) | 2008-07-17 | 2013-07-03 | 太陽誘電株式会社 | 共振デバイス、通信モジュール、通信装置、共振デバイスの製造方法 |
JP5086447B2 (ja) | 2009-01-09 | 2012-11-28 | 太陽誘電株式会社 | フィルタ素子、分波器および電子装置 |
US8291559B2 (en) * | 2009-02-24 | 2012-10-23 | Epcos Ag | Process for adapting resonance frequency of a BAW resonator |
US8198958B1 (en) * | 2009-03-30 | 2012-06-12 | Triquint Semiconductor, Inc. | Power amplifier matching RF system and method using bulk acoustics wave device |
US8902023B2 (en) | 2009-06-24 | 2014-12-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having an electrode with a cantilevered portion |
US8248185B2 (en) | 2009-06-24 | 2012-08-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator structure comprising a bridge |
US9847768B2 (en) * | 2009-11-23 | 2017-12-19 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Polarity determining seed layer and method of fabricating piezoelectric materials with specific C-axis |
US8193877B2 (en) | 2009-11-30 | 2012-06-05 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Duplexer with negative phase shifting circuit |
US8796904B2 (en) | 2011-10-31 | 2014-08-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer |
US9243316B2 (en) | 2010-01-22 | 2016-01-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method of fabricating piezoelectric material with selected c-axis orientation |
US8283999B2 (en) * | 2010-02-23 | 2012-10-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator structures comprising a single material acoustic coupling layer comprising inhomogeneous acoustic property |
US8587391B2 (en) * | 2010-02-23 | 2013-11-19 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic coupling layer for coupled resonator filters and method of fabricating acoustic coupling layer |
JP5519326B2 (ja) * | 2010-02-25 | 2014-06-11 | 太陽誘電株式会社 | フィルタ、デュープレクサ、通信モジュール、通信装置 |
US8390397B2 (en) * | 2010-03-29 | 2013-03-05 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator structure comprising hybrid electrodes |
US20120066876A1 (en) * | 2010-09-16 | 2012-03-22 | Huffman James D | Creating an improved piezoelectric layer for transducers |
CN101958696B (zh) * | 2010-09-27 | 2013-04-17 | 张�浩 | 温度补偿薄膜体波谐振器及加工方法 |
JP5643056B2 (ja) | 2010-11-01 | 2014-12-17 | 太陽誘電株式会社 | 弾性波デバイス |
US8962443B2 (en) | 2011-01-31 | 2015-02-24 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Semiconductor device having an airbridge and method of fabricating the same |
US9083302B2 (en) | 2011-02-28 | 2015-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator |
US9154112B2 (en) | 2011-02-28 | 2015-10-06 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge |
US9203374B2 (en) | 2011-02-28 | 2015-12-01 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator comprising a bridge |
US9048812B2 (en) | 2011-02-28 | 2015-06-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer |
US9148117B2 (en) | 2011-02-28 | 2015-09-29 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge and frame elements |
US9425764B2 (en) | 2012-10-25 | 2016-08-23 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having composite electrodes with integrated lateral features |
US9136818B2 (en) | 2011-02-28 | 2015-09-15 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked acoustic resonator comprising a bridge |
US9401692B2 (en) | 2012-10-29 | 2016-07-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator having collar structure |
US8575820B2 (en) | 2011-03-29 | 2013-11-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator |
US9490418B2 (en) | 2011-03-29 | 2016-11-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer |
US9490771B2 (en) | 2012-10-29 | 2016-11-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising collar and frame |
US9444426B2 (en) | 2012-10-25 | 2016-09-13 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having integrated lateral feature and temperature compensation feature |
US8350445B1 (en) | 2011-06-16 | 2013-01-08 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising non-piezoelectric layer and bridge |
JP5394451B2 (ja) * | 2011-07-26 | 2014-01-22 | 株式会社アドバンテスト | アクチュエータの製造方法、スイッチ装置、伝送路切替装置、および試験装置 |
US8922302B2 (en) | 2011-08-24 | 2014-12-30 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator formed on a pedestal |
US11595760B2 (en) | 2011-12-23 | 2023-02-28 | Shenzhen Shokz Co., Ltd. | Bone conduction speaker and compound vibration device thereof |
US9608592B2 (en) * | 2014-01-21 | 2017-03-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic wave resonator (FBAR) having stress-relief |
US8941286B2 (en) * | 2012-02-14 | 2015-01-27 | Taiyo Yuden Co., Ltd. | Acoustic wave device |
US9385684B2 (en) | 2012-10-23 | 2016-07-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator having guard ring |
TWI493868B (zh) | 2013-01-02 | 2015-07-21 | Ind Tech Res Inst | 微機電共振裝置 |
JP6185292B2 (ja) * | 2013-06-10 | 2017-08-23 | 太陽誘電株式会社 | 弾性波デバイス |
CN103607178B (zh) * | 2013-09-17 | 2016-10-05 | 诺思(天津)微系统有限公司 | 薄膜体波谐振器及提高其品质因数的方法 |
CN103701425B (zh) * | 2013-10-25 | 2017-05-03 | 诺思(天津)微系统有限公司 | 滤波器及其制造方法 |
US11627419B2 (en) | 2014-01-06 | 2023-04-11 | Shenzhen Shokz Co., Ltd. | Systems and methods for suppressing sound leakage |
DE102014111993B4 (de) * | 2014-08-21 | 2017-12-21 | Snaptrack, Inc. | Mikroakustische Bauelement mit verbesserter Temperaturkompensation |
CN107340317A (zh) * | 2017-06-19 | 2017-11-10 | 天津大学 | 一种气体识别方法、气体传感器及气体识别装置 |
CN107453729B (zh) * | 2017-06-28 | 2021-04-06 | 中国电子科技集团公司第五十五研究所 | 一种基于复合结构的温度补偿薄膜体声波谐振器 |
US10476480B1 (en) | 2018-07-06 | 2019-11-12 | Globalfoundries Singapore Pte. Ltd. | Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making |
JP2022531254A (ja) | 2019-04-30 | 2022-07-06 | シェンツェン・ショックス・カンパニー・リミテッド | 音響出力装置 |
CN110082376B (zh) * | 2019-05-20 | 2024-01-30 | 中国人民大学 | 一种双列单晶中子分析器单元 |
CN110460307B (zh) * | 2019-07-31 | 2023-07-14 | 华南理工大学 | 一种温度自适应fbar振荡电路 |
CN112383286B (zh) * | 2020-08-04 | 2021-09-21 | 诺思(天津)微系统有限责任公司 | 体声波谐振器组件及其制造方法、滤波器及电子设备 |
Family Cites Families (149)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1307476A (fr) * | 1960-12-12 | 1962-10-26 | U S Sonics Corp | Amplificateur sélecteur de fréquences |
US3189851A (en) * | 1962-06-04 | 1965-06-15 | Sonus Corp | Piezoelectric filter |
US3321648A (en) * | 1964-06-04 | 1967-05-23 | Sonus Corp | Piezoelectric filter element |
GB1207974A (en) | 1966-11-17 | 1970-10-07 | Clevite Corp | Frequency selective apparatus including a piezoelectric device |
US3422371A (en) * | 1967-07-24 | 1969-01-14 | Sanders Associates Inc | Thin film piezoelectric oscillator |
US3826931A (en) | 1967-10-26 | 1974-07-30 | Hewlett Packard Co | Dual crystal resonator apparatus |
US3582839A (en) | 1968-06-06 | 1971-06-01 | Clevite Corp | Composite coupled-mode filter |
US3607761A (en) | 1968-12-09 | 1971-09-21 | Continental Oil Co | Soap bars containing salts of fatty acids derived from the guerbet reaction |
US3610969A (en) * | 1970-02-06 | 1971-10-05 | Mallory & Co Inc P R | Monolithic piezoelectric resonator for use as filter or transformer |
US3845402A (en) | 1973-02-15 | 1974-10-29 | Edmac Ass Inc | Sonobuoy receiver system, floating coupler |
FR2380666A1 (fr) | 1977-02-14 | 1978-09-08 | Cii Honeywell Bull | Systeme de commande de decoupage pour convertisseur dans une alimentation electrique continue |
US4084217A (en) | 1977-04-19 | 1978-04-11 | Bbc Brown, Boveri & Company, Limited | Alternating-current fed power supply |
GB2033185B (en) | 1978-09-22 | 1983-05-18 | Secr Defence | Acoustic wave device with temperature stabilisation |
US4281299A (en) | 1979-11-23 | 1981-07-28 | Honeywell Inc. | Signal isolator |
ZA81781B (en) | 1980-02-13 | 1982-03-31 | Int Computers Ltd | Digital systems |
US4320365A (en) | 1980-11-03 | 1982-03-16 | United Technologies Corporation | Fundamental, longitudinal, thickness mode bulk wave resonator |
JPS58137317A (ja) | 1982-02-09 | 1983-08-15 | Nec Corp | 圧電薄膜複合振動子 |
GB2137056B (en) | 1983-03-16 | 1986-09-03 | Standard Telephones Cables Ltd | Communications apparatus |
US4625138A (en) | 1984-10-24 | 1986-11-25 | The United States Of America As Represented By The Secretary Of The Army | Piezoelectric microwave resonator using lateral excitation |
US4719383A (en) | 1985-05-20 | 1988-01-12 | The United States Of America As Represented By The United States Department Of Energy | Piezoelectric shear wave resonator and method of making same |
SE465946B (sv) | 1986-09-11 | 1991-11-18 | Bengt Henoch | Anordning foer oeverfoering av elektrisk energi till elektrisk utrustning genom omagnetiska och elektriskt isolerande material |
US4906840A (en) | 1988-01-27 | 1990-03-06 | The Board Of Trustees Of Leland Stanford Jr., University | Integrated scanning tunneling microscope |
US4841429A (en) | 1988-03-24 | 1989-06-20 | Hughes Aircraft Company | Capacitive coupled power supplies |
US4836882A (en) | 1988-09-12 | 1989-06-06 | The United States Of America As Represented By The Secretary Of The Army | Method of making an acceleration hardened resonator |
US5118982A (en) | 1989-05-31 | 1992-06-02 | Nec Corporation | Thickness mode vibration piezoelectric transformer |
US5048036A (en) | 1989-09-18 | 1991-09-10 | Spectra Diode Laboratories, Inc. | Heterostructure laser with lattice mismatch |
CA2043048C (en) | 1990-05-22 | 2000-10-03 | Hidejiro Kadowaki | Information recording apparatus |
US5241456A (en) | 1990-07-02 | 1993-08-31 | General Electric Company | Compact high density interconnect structure |
JP2995076B2 (ja) | 1990-07-24 | 1999-12-27 | 富士通株式会社 | 半導体装置 |
US5162691A (en) | 1991-01-22 | 1992-11-10 | The United States Of America As Represented By The Secretary Of The Army | Cantilevered air-gap type thin film piezoelectric resonator |
US5294898A (en) * | 1992-01-29 | 1994-03-15 | Motorola, Inc. | Wide bandwidth bandpass filter comprising parallel connected piezoelectric resonators |
US5382930A (en) | 1992-12-21 | 1995-01-17 | Trw Inc. | Monolithic multipole filters made of thin film stacked crystal filters |
US5384808A (en) | 1992-12-31 | 1995-01-24 | Apple Computer, Inc. | Method and apparatus for transmitting NRZ data signals across an isolation barrier disposed in an interface between adjacent devices on a bus |
US5448014A (en) | 1993-01-27 | 1995-09-05 | Trw Inc. | Mass simultaneous sealing and electrical connection of electronic devices |
US5465725A (en) | 1993-06-15 | 1995-11-14 | Hewlett Packard Company | Ultrasonic probe |
US5587620A (en) | 1993-12-21 | 1996-12-24 | Hewlett-Packard Company | Tunable thin film acoustic resonators and method for making the same |
US5594705A (en) | 1994-02-04 | 1997-01-14 | Dynamotive Canada Corporation | Acoustic transformer with non-piezoelectric core |
US5864261A (en) * | 1994-05-23 | 1999-01-26 | Iowa State University Research Foundation | Multiple layer acoustical structures for thin-film resonator based circuits and systems |
JPH0878786A (ja) | 1994-09-02 | 1996-03-22 | Mitsubishi Electric Corp | 歪量子井戸の構造 |
US5692279A (en) | 1995-08-17 | 1997-12-02 | Motorola | Method of making a monolithic thin film resonator lattice filter |
CN1183587C (zh) | 1996-04-08 | 2005-01-05 | 德克萨斯仪器股份有限公司 | 用于把两个集成电路直流上相互隔离的方法和设备 |
US5714917A (en) | 1996-10-02 | 1998-02-03 | Nokia Mobile Phones Limited | Device incorporating a tunable thin film bulk acoustic resonator for performing amplitude and phase modulation |
US5873154A (en) * | 1996-10-17 | 1999-02-23 | Nokia Mobile Phones Limited | Method for fabricating a resonator having an acoustic mirror |
US6087198A (en) | 1998-02-12 | 2000-07-11 | Texas Instruments Incorporated | Low cost packaging for thin-film resonators and thin-film resonator-based filters |
US5872493A (en) | 1997-03-13 | 1999-02-16 | Nokia Mobile Phones, Ltd. | Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror |
US5853601A (en) | 1997-04-03 | 1998-12-29 | Northrop Grumman Corporation | Top-via etch technique for forming dielectric membranes |
US6339048B1 (en) * | 1999-12-23 | 2002-01-15 | Elementis Specialties, Inc. | Oil and oil invert emulsion drilling fluids with improved anti-settling properties |
US6040962A (en) | 1997-05-14 | 2000-03-21 | Tdk Corporation | Magnetoresistive element with conductive films and magnetic domain films overlapping a central active area |
US5910756A (en) * | 1997-05-21 | 1999-06-08 | Nokia Mobile Phones Limited | Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators |
JP3378775B2 (ja) | 1997-07-07 | 2003-02-17 | 株式会社村田製作所 | 圧電共振子およびその周波数調整方法 |
US5982297A (en) | 1997-10-08 | 1999-11-09 | The Aerospace Corporation | Ultrasonic data communication system |
US6873065B2 (en) * | 1997-10-23 | 2005-03-29 | Analog Devices, Inc. | Non-optical signal isolator |
US6197261B1 (en) * | 1998-02-02 | 2001-03-06 | Richard A. Linville | Machine for opening blood segments |
US5936150A (en) | 1998-04-13 | 1999-08-10 | Rockwell Science Center, Llc | Thin film resonant chemical sensor with resonant acoustic isolator |
US5953479A (en) | 1998-05-07 | 1999-09-14 | The United States Of America As Represented By The Secretary Of The Army | Tilted valance-band quantum well double heterostructures for single step active and passive optical waveguide device monolithic integration |
KR100328807B1 (ko) | 1998-05-08 | 2002-03-14 | 가네코 히사시 | 제조비용이 저렴하고 충분한 접착 강도가 수득될 수 있는 수지구조물 및 이의 제조 방법 |
JPH11345406A (ja) | 1998-05-29 | 1999-12-14 | Sony Corp | マスクパターンの形成方法及び薄膜磁気ヘッドの製造方法 |
US6060818A (en) | 1998-06-02 | 2000-05-09 | Hewlett-Packard Company | SBAR structures and method of fabrication of SBAR.FBAR film processing techniques for the manufacturing of SBAR/BAR filters |
DE19826152A1 (de) | 1998-06-12 | 1999-12-16 | Thomson Brandt Gmbh | Anordnung mit einem Schaltnetzteil und einem Mikroprozessor |
US6150703A (en) | 1998-06-29 | 2000-11-21 | Trw Inc. | Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials |
US6252229B1 (en) | 1998-07-10 | 2001-06-26 | Boeing North American, Inc. | Sealed-cavity microstructure and microbolometer and associated fabrication methods |
WO2000028606A1 (en) | 1998-11-09 | 2000-05-18 | Richard Patten Bishop | Multi-layer piezoelectric electrical energy transfer device |
EP1079497A4 (en) | 1998-12-22 | 2004-03-17 | Seiko Epson Corp | ENERGY SUPPLY SYSTEM, ENERGY RECEPTION SYSTEM, POWER TRANSMISSION SYSTEM, POWER TRANSMISSION METHOD, PORTABLE DEVICE AND TIMER |
FI113211B (fi) * | 1998-12-30 | 2004-03-15 | Nokia Corp | Balansoitu suodatinrakenne ja matkaviestinlaite |
JP3438690B2 (ja) * | 1999-01-22 | 2003-08-18 | 株式会社村田製作所 | 弾性表面波装置の周波数調整方法 |
US6215375B1 (en) * | 1999-03-30 | 2001-04-10 | Agilent Technologies, Inc. | Bulk acoustic wave resonator with improved lateral mode suppression |
JP3531522B2 (ja) | 1999-04-19 | 2004-05-31 | 株式会社村田製作所 | 圧電共振子 |
US6262637B1 (en) * | 1999-06-02 | 2001-07-17 | Agilent Technologies, Inc. | Duplexer incorporating thin-film bulk acoustic resonators (FBARs) |
DE19931297A1 (de) * | 1999-07-07 | 2001-01-11 | Philips Corp Intellectual Pty | Volumenwellen-Filter |
JP4420538B2 (ja) | 1999-07-23 | 2010-02-24 | アバゴ・テクノロジーズ・ワイヤレス・アイピー(シンガポール)プライベート・リミテッド | ウェーハパッケージの製造方法 |
US6265246B1 (en) | 1999-07-23 | 2001-07-24 | Agilent Technologies, Inc. | Microcap wafer-level package |
US6228675B1 (en) | 1999-07-23 | 2001-05-08 | Agilent Technologies, Inc. | Microcap wafer-level package with vias |
US6107721A (en) * | 1999-07-27 | 2000-08-22 | Tfr Technologies, Inc. | Piezoelectric resonators on a differentially offset reflector |
US6292336B1 (en) | 1999-09-30 | 2001-09-18 | Headway Technologies, Inc. | Giant magnetoresistive (GMR) sensor element with enhanced magnetoresistive (MR) coefficient |
JP2001196883A (ja) | 1999-11-01 | 2001-07-19 | Murata Mfg Co Ltd | 圧電共振素子の周波数調整方法 |
US6307447B1 (en) | 1999-11-01 | 2001-10-23 | Agere Systems Guardian Corp. | Tuning mechanical resonators for electrical filter |
US6441539B1 (en) | 1999-11-11 | 2002-08-27 | Murata Manufacturing Co., Ltd. | Piezoelectric resonator |
JP2001244778A (ja) * | 1999-12-22 | 2001-09-07 | Toyo Commun Equip Co Ltd | 高周波圧電振動子 |
EP1117017B1 (fr) * | 2000-01-10 | 2009-09-09 | ETA SA Manufacture Horlogère Suisse | Dispositif pour produire un signal ayant une fréquence sensiblement indépendante de la température |
US6479320B1 (en) | 2000-02-02 | 2002-11-12 | Raytheon Company | Vacuum package fabrication of microelectromechanical system devices with integrated circuit components |
US6521477B1 (en) * | 2000-02-02 | 2003-02-18 | Raytheon Company | Vacuum package fabrication of integrated circuit components |
US6466418B1 (en) | 2000-02-11 | 2002-10-15 | Headway Technologies, Inc. | Bottom spin valves with continuous spacer exchange (or hard) bias |
US6262600B1 (en) | 2000-02-14 | 2001-07-17 | Analog Devices, Inc. | Isolator for transmitting logic signals across an isolation barrier |
DE10007577C1 (de) | 2000-02-18 | 2001-09-13 | Infineon Technologies Ag | Piezoresonator |
US6441481B1 (en) * | 2000-04-10 | 2002-08-27 | Analog Devices, Inc. | Hermetically sealed microstructure package |
US6384697B1 (en) | 2000-05-08 | 2002-05-07 | Agilent Technologies, Inc. | Cavity spanning bottom electrode of a substrate-mounted bulk wave acoustic resonator |
GB0012439D0 (en) * | 2000-05-24 | 2000-07-12 | Univ Cranfield | Improvements to filters |
US6420820B1 (en) * | 2000-08-31 | 2002-07-16 | Agilent Technologies, Inc. | Acoustic wave resonator and method of operating the same to maintain resonance when subjected to temperature variations |
US6377137B1 (en) | 2000-09-11 | 2002-04-23 | Agilent Technologies, Inc. | Acoustic resonator filter with reduced electromagnetic influence due to die substrate thickness |
US6530515B1 (en) | 2000-09-26 | 2003-03-11 | Amkor Technology, Inc. | Micromachine stacked flip chip package fabrication method |
US6486751B1 (en) * | 2000-09-26 | 2002-11-26 | Agere Systems Inc. | Increased bandwidth thin film resonator having a columnar structure |
JP2002120364A (ja) * | 2000-10-17 | 2002-04-23 | Fuji Xerox Co Ltd | 音響波インクジェット記録ヘッド及び音響波インクジェット記録装置 |
US6542055B1 (en) | 2000-10-31 | 2003-04-01 | Agilent Technologies, Inc. | Integrated filter balun |
AU2002218005A1 (en) | 2000-11-03 | 2002-05-15 | Paratek Microwave, Inc. | Method of channel frequency allocation for rf and microwave duplexers |
US6515558B1 (en) * | 2000-11-06 | 2003-02-04 | Nokia Mobile Phones Ltd | Thin-film bulk acoustic resonator with enhanced power handling capacity |
GB0029090D0 (en) * | 2000-11-29 | 2001-01-10 | Univ Cranfield | Improvements in or relating to filters |
US6550664B2 (en) | 2000-12-09 | 2003-04-22 | Agilent Technologies, Inc. | Mounting film bulk acoustic resonators in microwave packages using flip chip bonding technology |
US6424237B1 (en) | 2000-12-21 | 2002-07-23 | Agilent Technologies, Inc. | Bulk acoustic resonator perimeter reflection system |
US6407649B1 (en) | 2001-01-05 | 2002-06-18 | Nokia Corporation | Monolithic FBAR duplexer and method of making the same |
US6518860B2 (en) | 2001-01-05 | 2003-02-11 | Nokia Mobile Phones Ltd | BAW filters having different center frequencies on a single substrate and a method for providing same |
US6512300B2 (en) * | 2001-01-10 | 2003-01-28 | Raytheon Company | Water level interconnection |
US6462631B2 (en) | 2001-02-14 | 2002-10-08 | Agilent Technologies, Inc. | Passband filter having an asymmetrical filter response |
US6583374B2 (en) | 2001-02-20 | 2003-06-24 | Rockwell Automation Technologies, Inc. | Microelectromechanical system (MEMS) digital electrical isolator |
US6714102B2 (en) * | 2001-03-01 | 2004-03-30 | Agilent Technologies, Inc. | Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method |
US6566979B2 (en) | 2001-03-05 | 2003-05-20 | Agilent Technologies, Inc. | Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method |
US6469597B2 (en) | 2001-03-05 | 2002-10-22 | Agilent Technologies, Inc. | Method of mass loading of thin film bulk acoustic resonators (FBAR) for creating resonators of different frequencies and apparatus embodying the method |
US6874211B2 (en) * | 2001-03-05 | 2005-04-05 | Agilent Technologies, Inc. | Method for producing thin film bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method |
US6483229B2 (en) | 2001-03-05 | 2002-11-19 | Agilent Technologies, Inc. | Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method |
JP4058970B2 (ja) * | 2001-03-21 | 2008-03-12 | セイコーエプソン株式会社 | ニオブ酸カリウム圧電薄膜を有する表面弾性波素子、周波数フィルタ、発振器、電子回路、及び電子機器 |
US6472954B1 (en) | 2001-04-23 | 2002-10-29 | Agilent Technologies, Inc. | Controlled effective coupling coefficients for film bulk acoustic resonators |
US6476536B1 (en) | 2001-04-27 | 2002-11-05 | Nokia Corporation | Method of tuning BAW resonators |
US6489688B1 (en) | 2001-05-02 | 2002-12-03 | Zeevo, Inc. | Area efficient bond pad placement |
JP2005236337A (ja) * | 2001-05-11 | 2005-09-02 | Ube Ind Ltd | 薄膜音響共振器及びその製造方法 |
KR100398365B1 (ko) * | 2001-06-25 | 2003-09-19 | 삼성전기주식회사 | 폭방향 파동이 억제되는 박막 공진기 |
JP3903842B2 (ja) * | 2001-07-03 | 2007-04-11 | 株式会社村田製作所 | 圧電共振子、フィルタおよび電子通信機器 |
US6710681B2 (en) * | 2001-07-13 | 2004-03-23 | Agilent Technologies, Inc. | Thin film bulk acoustic resonator (FBAR) and inductor on a monolithic substrate and method of fabricating the same |
US6808955B2 (en) * | 2001-11-02 | 2004-10-26 | Intel Corporation | Method of fabricating an integrated circuit that seals a MEMS device within a cavity |
US6720844B1 (en) * | 2001-11-16 | 2004-04-13 | Tfr Technologies, Inc. | Coupled resonator bulk acoustic wave filter |
US6710508B2 (en) * | 2001-11-27 | 2004-03-23 | Agilent Technologies, Inc. | Method for adjusting and stabilizing the frequency of an acoustic resonator |
US6510703B1 (en) * | 2001-11-27 | 2003-01-28 | Cohand Technology Co., Ltd. | Method for controlling corresponding energy supply of a heat source unit of a refrigeration air conditioning system based on required energy value calculated from output power value |
DE10160617A1 (de) * | 2001-12-11 | 2003-06-12 | Epcos Ag | Akustischer Spiegel mit verbesserter Reflexion |
US6670866B2 (en) * | 2002-01-09 | 2003-12-30 | Nokia Corporation | Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers |
US6873529B2 (en) * | 2002-02-26 | 2005-03-29 | Kyocera Corporation | High frequency module |
DE60300311T2 (de) * | 2002-03-15 | 2005-06-23 | Matsushita Electric Industrial Co., Ltd., Kadoma | Symmetrische Hochfrequenzvorrichtung mit einem Oberflächenwellenfilter. |
JP2004001928A (ja) * | 2002-05-30 | 2004-01-08 | Sharp Corp | シート体供給搬送装置 |
JP4039322B2 (ja) * | 2002-07-23 | 2008-01-30 | 株式会社村田製作所 | 圧電フィルタ、デュプレクサ、複合圧電共振器および通信装置、並びに、圧電フィルタの周波数調整方法 |
US6944432B2 (en) * | 2002-11-12 | 2005-09-13 | Nokia Corporation | Crystal-less oscillator transceiver |
FR2848036B1 (fr) * | 2002-11-28 | 2005-08-26 | St Microelectronics Sa | Support pour resonateur acoustique, resonateur acoustique et circuit integre correspondant |
JP3889351B2 (ja) * | 2002-12-11 | 2007-03-07 | Tdk株式会社 | デュプレクサ |
DE10258422A1 (de) * | 2002-12-13 | 2004-06-24 | Epcos Ag | Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren |
DE10301261B4 (de) * | 2003-01-15 | 2018-03-22 | Snaptrack, Inc. | Mit akustischen Volumenwellen arbeitendes Bauelement und Verfahren zur Herstellung |
DE10319554B4 (de) * | 2003-04-30 | 2018-05-09 | Snaptrack, Inc. | Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren |
EP1489740A3 (en) * | 2003-06-18 | 2006-06-28 | Matsushita Electric Industrial Co., Ltd. | Electronic component and method for manufacturing the same |
JP2005057332A (ja) * | 2003-08-04 | 2005-03-03 | Tdk Corp | フィルタ装置およびそれを用いた分波器 |
ATE515108T1 (de) * | 2003-09-12 | 2011-07-15 | Panasonic Corp | Abstimmbarer dünnschicht-volumenwellen-resonator, herstellungsmethode dafür, filter, mehrschichtiges zusammengesetztes elektronisches bauelement und kommunikationsvorrichtung |
JP2005117641A (ja) * | 2003-09-17 | 2005-04-28 | Matsushita Electric Ind Co Ltd | 圧電体共振器、それを用いたフィルタ及び共用器 |
US7400217B2 (en) * | 2003-10-30 | 2008-07-15 | Avago Technologies Wireless Ip Pte Ltd | Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith |
US6946928B2 (en) * | 2003-10-30 | 2005-09-20 | Agilent Technologies, Inc. | Thin-film acoustically-coupled transformer |
US7332985B2 (en) * | 2003-10-30 | 2008-02-19 | Avago Technologies Wireless Ip (Singapore) Pte Ltd. | Cavity-less film bulk acoustic resonator (FBAR) devices |
US7019605B2 (en) * | 2003-10-30 | 2006-03-28 | Larson Iii John D | Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth |
US7280007B2 (en) * | 2004-11-15 | 2007-10-09 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Thin film bulk acoustic resonator with a mass loaded perimeter |
US20060087199A1 (en) * | 2004-10-22 | 2006-04-27 | Larson John D Iii | Piezoelectric isolating transformer |
US7675390B2 (en) * | 2005-10-18 | 2010-03-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator |
US7737807B2 (en) * | 2005-10-18 | 2010-06-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators |
US7525398B2 (en) * | 2005-10-18 | 2009-04-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustically communicating data signals across an electrical isolation barrier |
US20070085632A1 (en) * | 2005-10-18 | 2007-04-19 | Larson John D Iii | Acoustic galvanic isolator |
US7600371B2 (en) * | 2005-10-18 | 2009-10-13 | The Boeing Company | Thrust reversers including support members for inhibiting deflection |
US7425787B2 (en) * | 2005-10-18 | 2008-09-16 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator |
US7423503B2 (en) * | 2005-10-18 | 2008-09-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating film acoustically-coupled transformer |
-
2003
- 2003-10-30 US US10/699,289 patent/US7019605B2/en not_active Expired - Lifetime
-
2004
- 2004-06-22 EP EP04014569A patent/EP1528674B1/en not_active Expired - Fee Related
- 2004-06-22 DE DE602004012511T patent/DE602004012511T2/de not_active Expired - Lifetime
- 2004-10-28 JP JP2004314021A patent/JP2005137002A/ja active Pending
- 2004-10-29 CN CN200480039134.9A patent/CN100505535C/zh not_active Expired - Fee Related
- 2004-10-29 CN CN200480032452.2A patent/CN1879300B/zh not_active Expired - Fee Related
- 2004-10-29 CN CN200480029947.XA patent/CN1868121B/zh not_active Expired - Fee Related
-
2006
- 2006-01-12 US US11/332,665 patent/US7424772B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111740003A (zh) * | 2020-06-22 | 2020-10-02 | 济南晶正电子科技有限公司 | 一种压电薄膜体及其制备方法、空腔型器件及其制备方法 |
WO2022028401A1 (zh) * | 2020-08-06 | 2022-02-10 | 诺思(天津)微系统有限责任公司 | 带声学解耦层的体声波谐振器组件及制造方法、滤波器及电子设备 |
Also Published As
Publication number | Publication date |
---|---|
CN1879300B (zh) | 2011-12-21 |
JP2005137002A (ja) | 2005-05-26 |
CN1902819A (zh) | 2007-01-24 |
CN1879300A (zh) | 2006-12-13 |
CN100505535C (zh) | 2009-06-24 |
US20060114080A1 (en) | 2006-06-01 |
DE602004012511T2 (de) | 2009-04-30 |
EP1528674B1 (en) | 2008-03-19 |
US7019605B2 (en) | 2006-03-28 |
CN1868121B (zh) | 2012-01-11 |
US7424772B2 (en) | 2008-09-16 |
US20050093653A1 (en) | 2005-05-05 |
DE602004012511D1 (de) | 2008-04-30 |
EP1528674A1 (en) | 2005-05-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1868121A (zh) | 具有可控制通带宽的解耦层叠体声谐振器带通滤波器 | |
CN100555851C (zh) | 稳固安装的层叠体声谐振器 | |
US7400217B2 (en) | Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith | |
JP5059346B2 (ja) | 懸架型デバイスおよびその製造方法 | |
US7242270B2 (en) | Decoupled stacked bulk acoustic resonator-based band-pass filter | |
US7332985B2 (en) | Cavity-less film bulk acoustic resonator (FBAR) devices | |
JP5047594B2 (ja) | 温度補償型薄膜バルク音響共振器デバイス | |
JP4754803B2 (ja) | 逆方向のc軸圧電素子を備えた音響結合変成器 | |
JP2005512442A (ja) | 反射性の改善された音響鏡 | |
CN116633308A (zh) | 一种薄膜体声波谐振器及其制备方法和应用 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) CORPORAT Free format text: FORMER OWNER: AVAGO TECHNOLOGIES GENERAL IP Effective date: 20130507 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130507 Address after: Singapore Singapore Patentee after: Avago Technologies General IP (Singapore) Pte. Ltd. Address before: Singapore Singapore Patentee before: Avago Technologies Wireless IP (Singapore) Pte. Ltd. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20181018 Address after: Singapore Singapore Patentee after: Avago Technologies General IP (Singapore) Pte. Ltd. Address before: Singapore Singapore Patentee before: Avago Technologies General IP (Singapore) Pte. Ltd. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120111 |
|
CF01 | Termination of patent right due to non-payment of annual fee |