CN1820229A - 在浸润光刻系统中监视及控制成像的方法 - Google Patents
在浸润光刻系统中监视及控制成像的方法 Download PDFInfo
- Publication number
- CN1820229A CN1820229A CNA2004800195324A CN200480019532A CN1820229A CN 1820229 A CN1820229 A CN 1820229A CN A2004800195324 A CNA2004800195324 A CN A2004800195324A CN 200480019532 A CN200480019532 A CN 200480019532A CN 1820229 A CN1820229 A CN 1820229A
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- Prior art keywords
- refractive index
- immersion medium
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- wafer
- immersion
- Prior art date
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Links
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000000671 immersion lithography Methods 0.000 title claims abstract description 17
- 238000012544 monitoring process Methods 0.000 title abstract 3
- 238000003384 imaging method Methods 0.000 title description 27
- 238000007654 immersion Methods 0.000 claims abstract description 85
- 239000007788 liquid Substances 0.000 claims abstract description 8
- 238000005259 measurement Methods 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 claims description 2
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- 230000008569 process Effects 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 238000002310 reflectometry Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 6
- 239000003570 air Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
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- 238000012546 transfer Methods 0.000 description 2
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- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- ISQINHMJILFLAQ-UHFFFAOYSA-N argon hydrofluoride Chemical compound F.[Ar] ISQINHMJILFLAQ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
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- 229910052731 fluorine Inorganic materials 0.000 description 1
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- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/628,021 US7006209B2 (en) | 2003-07-25 | 2003-07-25 | Method and apparatus for monitoring and controlling imaging in immersion lithography systems |
US10/628,021 | 2003-07-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1820229A true CN1820229A (zh) | 2006-08-16 |
CN100538523C CN100538523C (zh) | 2009-09-09 |
Family
ID=34080711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004800195324A Active CN100538523C (zh) | 2003-07-25 | 2004-07-23 | 在浸润光刻系统中监视及控制成像的方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7006209B2 (zh) |
EP (1) | EP1652008B1 (zh) |
JP (1) | JP4465356B2 (zh) |
KR (1) | KR101071966B1 (zh) |
CN (1) | CN100538523C (zh) |
TW (1) | TWI372947B (zh) |
WO (1) | WO2005013008A2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103885301A (zh) * | 2014-03-21 | 2014-06-25 | 浙江大学 | 浸没式光刻机中浸液传送系统的控制时序的模型匹配方法 |
Families Citing this family (110)
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- 2003-07-25 US US10/628,021 patent/US7006209B2/en not_active Expired - Lifetime
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- 2004-07-23 KR KR1020067001296A patent/KR101071966B1/ko not_active IP Right Cessation
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- 2004-07-23 EP EP04757263A patent/EP1652008B1/en not_active Expired - Fee Related
- 2004-07-23 TW TW093122007A patent/TWI372947B/zh not_active IP Right Cessation
- 2004-07-23 CN CNB2004800195324A patent/CN100538523C/zh active Active
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103885301A (zh) * | 2014-03-21 | 2014-06-25 | 浙江大学 | 浸没式光刻机中浸液传送系统的控制时序的模型匹配方法 |
CN103885301B (zh) * | 2014-03-21 | 2015-09-16 | 浙江大学 | 浸没式光刻机中浸液传送系统的控制时序的模型匹配方法 |
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KR101071966B1 (ko) | 2011-10-11 |
WO2005013008A2 (en) | 2005-02-10 |
US20050018208A1 (en) | 2005-01-27 |
WO2005013008A3 (en) | 2005-11-10 |
US7006209B2 (en) | 2006-02-28 |
KR20060058684A (ko) | 2006-05-30 |
TW200510965A (en) | 2005-03-16 |
EP1652008B1 (en) | 2011-06-08 |
JP2007500449A (ja) | 2007-01-11 |
TWI372947B (en) | 2012-09-21 |
EP1652008A2 (en) | 2006-05-03 |
CN100538523C (zh) | 2009-09-09 |
JP4465356B2 (ja) | 2010-05-19 |
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