GB9324926D0 - Combined interferometer and refractometer - Google Patents

Combined interferometer and refractometer

Info

Publication number
GB9324926D0
GB9324926D0 GB939324926A GB9324926A GB9324926D0 GB 9324926 D0 GB9324926 D0 GB 9324926D0 GB 939324926 A GB939324926 A GB 939324926A GB 9324926 A GB9324926 A GB 9324926A GB 9324926 D0 GB9324926 D0 GB 9324926D0
Authority
GB
United Kingdom
Prior art keywords
refractometer
combined interferometer
interferometer
combined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB939324926A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Priority to GB939324926A priority Critical patent/GB9324926D0/en
Publication of GB9324926D0 publication Critical patent/GB9324926D0/en
Priority to DE69426808T priority patent/DE69426808T2/en
Priority to EP94308719A priority patent/EP0657713B1/en
Priority to US08/350,137 priority patent/US5517308A/en
Priority to JP29978694A priority patent/JP3830547B2/en
Priority to CN94119390A priority patent/CN1047841C/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
GB939324926A 1993-12-04 1993-12-04 Combined interferometer and refractometer Pending GB9324926D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB939324926A GB9324926D0 (en) 1993-12-04 1993-12-04 Combined interferometer and refractometer
DE69426808T DE69426808T2 (en) 1993-12-04 1994-11-25 Combined interferometer and refractometer
EP94308719A EP0657713B1 (en) 1993-12-04 1994-11-25 Combined interferometer and refractometer
US08/350,137 US5517308A (en) 1993-12-04 1994-11-29 Interferometric measuring apparatus employing fixed non-zero path length difference
JP29978694A JP3830547B2 (en) 1993-12-04 1994-12-02 Interference applied measuring equipment
CN94119390A CN1047841C (en) 1993-12-04 1994-12-03 Combined interferometer and refractometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939324926A GB9324926D0 (en) 1993-12-04 1993-12-04 Combined interferometer and refractometer

Publications (1)

Publication Number Publication Date
GB9324926D0 true GB9324926D0 (en) 1994-01-26

Family

ID=10746158

Family Applications (1)

Application Number Title Priority Date Filing Date
GB939324926A Pending GB9324926D0 (en) 1993-12-04 1993-12-04 Combined interferometer and refractometer

Country Status (6)

Country Link
US (1) US5517308A (en)
EP (1) EP0657713B1 (en)
JP (1) JP3830547B2 (en)
CN (1) CN1047841C (en)
DE (1) DE69426808T2 (en)
GB (1) GB9324926D0 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6229619B1 (en) 1996-02-12 2001-05-08 Massachusetts Institute Of Technology Compensation for measurement uncertainty due to atmospheric effects
GB2365142B (en) * 2000-07-27 2002-06-19 Michael John Downs Jamin-type interferometers and components therefor
AU2004252815A1 (en) * 2003-06-04 2005-01-06 Tomophase Corporation Measurements of optical inhomogeneity and other properties in substances using propagation modes of light
US7006209B2 (en) 2003-07-25 2006-02-28 Advanced Micro Devices, Inc. Method and apparatus for monitoring and controlling imaging in immersion lithography systems
US7061578B2 (en) 2003-08-11 2006-06-13 Advanced Micro Devices, Inc. Method and apparatus for monitoring and controlling imaging in immersion lithography systems
GB2414812B (en) * 2004-06-03 2007-05-02 Nanobeam Ltd Laser interferometer mirror assembly
US20060063989A1 (en) * 2004-08-19 2006-03-23 Hogan Josh N Compact non-invasive analysis system
US20080198369A1 (en) * 2007-02-14 2008-08-21 Nikon Corporation Interferometer air-fluctuation monitors and systems comprising same
DE102007055665A1 (en) * 2007-11-21 2009-05-28 Dr. Johannes Heidenhain Gmbh Interferometer arrangement and method for their operation
JPWO2011145289A1 (en) * 2010-05-19 2013-07-22 コニカミノルタ株式会社 Interferometric optics
CN105589326A (en) * 2014-10-23 2016-05-18 北京自动化控制设备研究所 Manufacturing method for micro-miniature atomic air chamber
GB2551968A (en) * 2016-06-28 2018-01-10 Oclaro Tech Ltd Optical locker
NL2022400A (en) * 2018-01-31 2019-08-05 Asml Netherlands Bv Wavelength tracking system, Method to calibrate a wavelength tracking system, Lithographic apparatus, Method to determine an absolute position of a movable object, and Interferometer system
WO2020139096A1 (en) * 2018-12-24 2020-07-02 Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Образования Балтийский Государственный Технический Университет "Военмех" Им. Д.Ф.Устинова (Бгту "Военмех") Interferometric system for measuring absolute length
WO2023182359A1 (en) * 2022-03-24 2023-09-28 長野計器株式会社 Interferometer and physical quantity measurement device
CN117347287A (en) * 2023-12-06 2024-01-05 山东大学 Optical interference structural self-compensating seawater salinity measuring device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4813783A (en) * 1987-11-03 1989-03-21 Carl-Zeiss-Stiftung Interferometer system for making length or angle measurements
GB8903725D0 (en) * 1989-02-18 1989-04-05 Cambridge Consultants Coherent tracking sensor
US5064289A (en) * 1989-02-23 1991-11-12 Hewlett-Packard Company Linear-and-angular measuring plane mirror interferometer
DE69222219T2 (en) * 1991-03-08 1998-01-15 Renishaw Transducer Syst Absolute gas refractometer

Also Published As

Publication number Publication date
CN1117131A (en) 1996-02-21
EP0657713A3 (en) 1999-06-16
DE69426808D1 (en) 2001-04-12
EP0657713A2 (en) 1995-06-14
DE69426808T2 (en) 2001-06-13
JPH07239208A (en) 1995-09-12
US5517308A (en) 1996-05-14
EP0657713B1 (en) 2001-03-07
JP3830547B2 (en) 2006-10-04
CN1047841C (en) 1999-12-29

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