CN105589326A - Manufacturing method for micro-miniature atomic air chamber - Google Patents
Manufacturing method for micro-miniature atomic air chamber Download PDFInfo
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- CN105589326A CN105589326A CN201410573376.1A CN201410573376A CN105589326A CN 105589326 A CN105589326 A CN 105589326A CN 201410573376 A CN201410573376 A CN 201410573376A CN 105589326 A CN105589326 A CN 105589326A
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Abstract
The invention belongs to the technical field of atomic air chambers, and specifically relates to a manufacturing method for a micro-miniature atomic air chamber. The method comprises steps of material selecting and cutting, assembly polishing, assembling, surface polishing, exhaust pipe installation, and subsequent processing. The technical problem the method solves is that an atomic air chamber manufactured by an existing manufacturing method for a micro-miniature atomic air chamber cannot satisfies high-precision, low-stress, and high-purity technical requirements of a high-precision atomic component on the air chamber. The method realizes manufacturing of an air chamber glass bulb in high optical quality of a light transmission surface, low stress, and high air tightness.
Description
Technical field
The invention belongs to atomic air chamber technical field, be specifically related to a kind of making side of microminiature atomic air chamberMethod.
Background technology
Atomic air chamber is the core work part of atom device, is in the logical bare hull body of definite shape, closeClose gas and the alkali metal atom of encapsulation some and composition, according to the difference of air chamber purposes, gasComposition and pressure are had nothing in common with each other, and alkali-metal kind is also different, but as atomic air chamber, for ease of the external worldThe regulation and control to atom in air chamber such as light, thermal and magnetic field, technical requirement comprises: the logical higher optics of light face addsWork precision, specific wavelength is had to higher light intensity transmitance and lower material internal stress etc.; Air-tightnessWell, ensure that with this internal gas composition purity is high, pressure is accurate, and alkali metal atom quantity is stable. OrderBefore, atomic air chamber glass bulb is made general adopt traditional glass sintering technology or " micro-processing+anode linkage "Fabrication techniques. Traditional glass sintering technology adopts high temperature by glass melting reshaping, mainly by Glass lampWork operation, flame temperature is high and inhomogeneous, and cooling rear glass internal stress is larger; Meanwhile, the logical light of partFace machining accuracy is uncontrollable, especially in microminiature atomic air chamber is made, is difficult to realize meet atomic air chamberThe glass bulb processing requiring. " micro-processing+anode linkage " technology is to adopt micro-processing method to carry out partMachine-shaping, finally fits together different piece by anode linkage technology, completes air chamber and makes.The optical accuracy of the logical light face that micro-processing realizes is lower, and bonding process exists moment high temperature, in cooling procedureEasily in material, produce stress, how the simultaneously follow-up atomic operation that fills completes in glove box, is difficult to surpassHigh vacuum, causes gas indoor gas and atomic component impure, affects the final precision of subsequent device.Therefore, only on the basis of prior art scheme, carry out process modification and be difficult to meet high accuracy atom device pairThe technical requirement of air chamber, needs a kind of new glass bulb preparation method of design, completes high accuracy, low stress, heightThe air chamber of purity is made.
Summary of the invention
The technical issues that need to address of the present invention are: existing microminiature atomic air chamber preparation method is producedAtomic air chamber be difficult to meet high accuracy atom device to air chamber high accuracy, low stress, highly purified technologyRequirement.
Technical scheme of the present invention is as described below:
A preparation method for microminiature atomic air chamber, comprises selection cutting, part polishing, assembling, tableThe step of mirror polish, installation blast pipe and subsequent treatment.
Wherein, the step of described selection cutting is selected correspondingly-sized according to the dimensional requirement of required atomic air chamberThe plate glass of specification is as raw material, then described raw material cut and are processed into be assembled into atomThe part of air chamber cube glass bulb;
The step of described part polishing is that mirror polish that the part of well cutting was in contact with one another in when assembling is to toolThe surface accuracy of standby optical cement;
The step of described assembling is that the part through polishing is assembled into atom according to corresponding specificationAir chamber cube glass bulb can form firmly optical cement assembling when assembling after two face contacts of polishing;
The step of described surface finish is that the air chamber glass bulb outer surface to assembling carries out polishing, makes wholeIndividual air chamber glass bulb smooth outer surface, makes the surface optical quality of its logical light face meet the logical light face of air chamber simultaneously and wantsAsk, the position that also makes to be used to optical cement reaches the surface accuracy of optical cement;
The step of described installation blast pipe is that an end face of blast pipe is polished to and meets optical cement and require rear lightGlue is to the corresponding position of air chamber glass bulb, as the interface of follow-up access vacuum exhaust platform;
Described subsequent treatment is that the air chamber glass bulb to assembling carries out Chemical cleaning, oven dry, burns by glassKnot access vacuum system, carries out application of vacuum, then alkali metal is transferred in glass bulb, and is filled with workGas, finally departs from vacuum system by glass sintering, completes air chamber and makes.
Preferably, the described coefficient of thermal expansion as raw-material plate glass is better than 3.3*10-6K-1。
Preferably, in described selection cutting step, select thickness and the air chamber glass bulb of raw material plate glassThickness identical, plate glass is cut at least six planar parts independent of each other, described six thatThis separate planar part is bolted together and forms the air chamber glass bulb that described dimensions requires, andIn six planar parts, any one planar part offers through hole along the center of its thickness direction.
Preferably, in described selection cutting step, select the identical and thickness of the thickness of thickness and air chamber glass bulbThe plate glass identical with arbitrary amount in the wide or high three of length of air chamber glass bulb, by dull and stereotyped two kinds of raw materials glassThe plate glass that in glass, thickness is large is cut into square frame shape part, and the plate glass that thickness is little cuts into the upper and lower endPortion's part, square frame shape part and upper and lower base element are the air chamber glass bulb of required size after assembling; CutThe arbitrary part having cut in simultaneously any in rear selection square frame shape part four sides or upper and lower base element existsIts thickness direction is offered through hole.
Preferably, in described selection cutting step, select the identical and thickness of the thickness of thickness and air chamber glass bulbThe plate glass identical with arbitrary amount in the wide or high three of length of air chamber glass bulb, by dull and stereotyped two kinds of raw materials glassThe plate glass that in glass, thickness is large is cut into square box shape part, and the plate glass that thickness is little cuts into base element,After square box shape part and base element assembling, be the air chamber glass bulb of required size; Cut rear selecting partyIn five of case shape parts, one side or base element are offered through hole at its thickness direction arbitrarily.
Preferably, alkali metal being transferred to system vacuum degree required in glass bulb is 10-4Pa or more than.
Beneficial effect of the present invention is:
(1) the present invention proposes the especially preparation method of air chamber glass bulb of a kind of microminiature atomic air chamber, itsMain advantage is to adopt optics to add the assemble method of optical cement, realized high pass light face optical quality,Low firmly, the making of high-air-tightness air chamber glass bulb, solved the logical light that air chamber that prior art makes existsThe problem that face optical quality is low, stress is large, air-tightness is low;
(2) propose the processing step of the air chamber glass bulb of making this type, ensured the feasibility of this technology.
Brief description of the drawings
Fig. 1 is the profile schematic diagram of microminiature atomic air chamber;
Fig. 2 is a kind of assembling parts schematic diagram of method of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, specific embodiments of the invention are elaborated. In the following description,For explanation, nonrestrictive object, has set forth detail, to help to understand all sidedly the present invention.But, it will be apparent to those skilled in the art that also and can depart from these detailsOther embodiment in put into practice the present invention. Figure 1 shows that the microminiature that method of the present invention will make is formerSub-air chamber.
Embodiment 1
A preparation method for microminiature atomic air chamber, comprises following steps:
Step 1, selection cutting
If appearance and size length and width and height that air chamber requires are respectively a, b and h, in the present embodiment air chamberThe length and width of appearance and size and high definition can exchange arbitrarily, and the wall thickness of air chamber is l, and blast pipe internal diameter is d,Select thickness be the plate glass of l as raw material, raw material plate glass is cut into respectively to specificationFor the part of a × (h-2l) × l, (b-2l) × (h-2l) × l and a × b × l, as shown in Figure 2, each specificationAt least two of parts, and select arbitrary specification part, at the center drilling of the selected specification part of half, thisDiameter is offered at part dimension a × b Mian center that the specification that is chosen in half quantity in embodiment is a × b × lFor the through hole of d.
Step 2, part polishing
The size of the part that is a × b × l to specification be in the two sides of a × b wherein one side, specification be a ×(h-2l) size of the part of × l is that one side, the specification in the two sides of a × (h-2l) is (b-2l) × (h-2l) × lThe size of part be the two sides of (h-2l) × l, make aforesaid face possess the surface accuracy of optical cement, conventionally wantAsk as surface roughness≤0.01mm N≤0.01, △ N≤0.005.
Step 3, assembling
Be that a × (h-2l) × l, (b-2l) × (h-2l) × two kinds of l assembling parts become a × b × (h-2l) by polished specificationSquare frame-shaped assembly, and two, square frame place end face is carried out to polishing, make it possess the surface accuracy of optical cement.The polishing that the size of the part that is a × b × l by two specifications again (each with holes and not with holes) is a × bFace is assembled into two, square frame place end face, completes the cube air chamber glass bulb assembling of a × b × h, when combinationThe face of each part polishing is contacted and can form firmly optical cement assembling, in assembling process, according to toolBody situation, for meeting optical cement requirement, can carry out second polishing or repeatedly polishing to associated component on demand,And in conjunction with Chemical cleaning, carry out the clean of optical cement face.
Step 4, surface finish
The air chamber glass bulb outer surface assembling is carried out to suitable polishing, make whole air chamber glass bulb appearanceFace is smooth, makes the surface optical quality of its logical light face meet the logical light face requirement of air chamber simultaneously, should make in additionDescribed hole outer surface around meets optical cement requirement.
Step 5, installation blast pipe
An end face of blast pipe is polished to and meets optical cement demand, then by blast pipe optical cement to cubeThe corresponding position of an outer surface with holes, makes the hole on cube align with the endoporus of blast pipe, is used asThe interface of follow-up access vacuum exhaust platform.
Step 6, subsequent treatment
The air chamber glass bulb assembling is carried out to Chemical cleaning, oven dry, accesses vacuum system by glass sintering,Carry out application of vacuum, system vacuum degree reaches 10-4Pa or when above, is transferred to alkali metal in glass bulb,And be filled with working gas, and finally depart from vacuum system by glass sintering, complete air chamber and make.
Embodiment 2
A preparation method for microminiature atomic air chamber, comprises following steps:
Step 1, selection cutting
If appearance and size length and width and height that air chamber requires are respectively a, b and h, in the present embodiment air chamberThe length and width of appearance and size and high definition can exchange arbitrarily, and the wall thickness of air chamber is l, and blast pipe internal diameter is d.Select thickness be the plate glass of h-2l and l as raw material, the dull and stereotyped glass of the raw material that are h-2l by thicknessGlass cuts into cross section size for a × b, is highly h-2l, and wall thickness is the square frame part of l, by thicknessFor the raw material plate glass of l cuts into the base element that dimensions is a × b × l, described square frame partCompare for 1:2 with the quantity of base element. And at any one side center of square frame part, or half quantityThe center drilling of base element. In the present embodiment, be a × b in the size of the base element of half quantityThe through hole that diameter is d is offered at face center.
Step 2, part polishing
Being a × b by cross section size, is highly h-2l, the upper and lower end face of the square frame part that wall thickness is l,Carry out polishing with base element size for any one side in the two sides of a × b, make aforesaid face possess optical cementSurface accuracy, conventionally require as surface roughness≤0.01mm N≤0.01, △ N≤0.005.
Step 3, assembling
Polished part is assembled into the cube air chamber glass of a × b × h according to corresponding specificationShell, makes the face of each part polishing contact and can form firmly optical cement assembling, at assembling process when combinationIn, as the case may be, for meeting optical cement requirement, can carry out on demand second polishing or repeatedly polishing,And in conjunction with Chemical cleaning, carry out the clean of optical cement face.
Step 4, surface finish
The air chamber glass bulb outer surface assembling is carried out to suitable polishing, make whole air chamber glass bulb appearanceFace is smooth, makes the surface optical quality of its logical light face meet the logical light face requirement of air chamber simultaneously, should make in additionDescribed hole outer surface around meets optical cement requirement.
Step 5, installation blast pipe
An end face of blast pipe is polished to and meets optical cement demand, then by blast pipe optical cement to cubeThe corresponding position of an outer surface with holes, makes the hole on cube align with the endoporus of blast pipe, is used asThe interface of follow-up access vacuum exhaust platform.
Step 6, subsequent treatment
The air chamber glass bulb assembling is carried out to Chemical cleaning, oven dry, accesses vacuum system by glass sintering,Carry out application of vacuum, system vacuum degree reaches 10-4Pa or when above, is transferred to alkali metal in glass bulb,And be filled with working gas, and finally depart from vacuum system by glass sintering, complete air chamber and make.
Embodiment 3
A preparation method for microminiature atomic air chamber, comprises following steps:
Step 1, selection cutting
If appearance and size length and width and height that air chamber requires are respectively a, b and h, in the present embodiment air chamberThe length and width of appearance and size and high definition can exchange arbitrarily, and the wall thickness of air chamber is l, and blast pipe internal diameter is d,Select thickness be the plate glass of h-l and l as raw material, raw material plate glass is cut into respectivelyCross section size is a × b, is highly h-l, and wall thickness is the square box shape part at l and the supreme end, and sizeSpecification is the base element of a × b × l, and the quantity of described square box shape part and base element is than being 1:1.And at any one side center of square box shape part, or the center drilling of base element. In the present embodimentThe size of base element is that the through hole that diameter is d is offered at a × b Mian center.
Step 2, part polishing
Be a × b by cross section size, be highly h-1, and wall thickness is the square box shape part at l and the supreme endSquare frame-shaped end face, and any one side in the base element size two sides that is a × b carries out polishing, makes aforementionedFace possess the surface accuracy of optical cement, conventionally require as surface roughness≤0.01mm N≤0.01, △ N≤0.005。
Step 3, assembling
Polished part is assembled into the cube air chamber glass of a × b × h according to corresponding specificationShell, makes the face of each part polishing contact and can form firmly optical cement assembling, at assembling process when combinationIn, as the case may be, for meeting optical cement requirement, can carry out on demand second polishing or repeatedly polishing,And in conjunction with Chemical cleaning, carry out the clean of optical cement face.
Step 4, surface finish
The polishing that the air chamber glass bulb outer surface assembling is carried out, makes whole air chamber glass bulb outer surface lightSliding, make the surface optical quality of its logical light face meet the logical light face requirement of air chamber, described in should making in addition simultaneouslyHole outer surface around meets optical cement requirement.
Step 5, installation blast pipe
An end face of blast pipe is polished to and meets optical cement demand, then by blast pipe optical cement to cubeThe corresponding position of an outer surface with holes, makes the hole on cube align with the endoporus of blast pipe, is used asThe interface of follow-up access vacuum exhaust platform.
Step 6, subsequent treatment
The air chamber glass bulb assembling is carried out to Chemical cleaning, oven dry, accesses vacuum system by glass sintering,Carry out application of vacuum, system vacuum degree reaches 10-4Pa or when above, is transferred to alkali metal in glass bulb,And be filled with working gas, and finally depart from vacuum system by glass sintering, complete air chamber and make.
Embodiment 4
A preparation method for microminiature atomic air chamber, comprises following steps:
Step 1, selection cutting
If appearance and size length and width and height that air chamber requires are respectively a, b and h, in the present embodiment air chamberThe length and width of appearance and size and high definition can exchange arbitrarily, and the wall thickness of air chamber is l, and blast pipe internal diameter is d,Select thickness be the plate glass of l as raw material, raw material plate glass is cut into respectively to specificationFor the part of a × n (h-2l) × l, (b-2l) × n (h-2l) × l and a × b × l, the quantity ratio of three kinds of parts is1:1:2n, at least 2 of the parts of every kind of specification, and the part that is a × b × l in the specification of half quantitySize a × b Mian offers the through hole that diameter is d in center.
Step 2, part polishing
The size that is the part of a × n (h-2l) × l to specification be in the two sides of a × n (h-2l) wherein one side,The size of the part that specification is (b-2l) × n (h-2l) × l is that l × two sides (h-2l), specification are a × b × lThe size of the part two sides that is a × b, make aforesaid face possess the surface accuracy of optical cement, conventionally require to beSurface roughness≤0.01mm, N≤0.01, △ N≤0.005.
Step 3, assembling
Polished part is first assembled into the square frame of a × b × n (h-2l) according to corresponding specification,Cut into again the square frame of n a × b × (h-2l), then polishing is carried out in surface, each square frame place, makeIt possesses the surface accuracy of optical cement. The part that is a × b × l by each square frame place plane and specification again largeLittle is a × b face optical cement combination, makes the face of each part polishing contact and can form firmly optical cement when combinationAssembling, in assembling process, as the case may be, and for meeting optical cement requirement, can be on demand to relevant groupPart carries out second polishing or repeatedly polishing, and in conjunction with Chemical cleaning, carries out the clean of optical cement face.
Step 4, surface finish
The air chamber glass bulb outer surface assembling is carried out to suitable polishing, make whole air chamber glass bulb appearanceFace is smooth, makes the surface optical quality of its logical light face meet the logical light face requirement of air chamber simultaneously, should make in additionDescribed hole outer surface around meets optical cement requirement.
Step 5, installation blast pipe
An end face of blast pipe is polished to and meets optical cement demand, then by blast pipe optical cement to cubeThe corresponding position of an outer surface with holes, makes the hole on cube align with the endoporus of blast pipe, is used asThe interface of follow-up access vacuum exhaust platform.
Step 6, subsequent treatment
The air chamber glass bulb assembling is carried out to Chemical cleaning, oven dry, accesses vacuum system by glass sintering,Carry out application of vacuum, system vacuum degree reaches 10-4Pa or when above, is transferred to alkali metal in glass bulb,And be filled with working gas, and finally depart from vacuum system by glass sintering, complete air chamber and make.
Claims (6)
1. a preparation method for microminiature atomic air chamber, comprise selection cutting, part polishing, assembling,The step of surface finish, installation blast pipe and subsequent treatment, is characterized in that:
The dimensional requirement of the required atomic air chamber of step foundation of described selection cutting is selected correspondingly-sized specificationPlate glass is as raw material, then described raw material cut and are processed into that to be assembled into atomic air chamber verticalThe part of side's body glass bulb;
The step of described part polishing is that mirror polish that the part of well cutting was in contact with one another in when assembling is to toolThe surface accuracy of standby optical cement;
The step of described assembling is that the part through polishing is assembled into atom according to corresponding specificationAir chamber cube glass bulb can form firmly optical cement assembling when assembling after two face contacts of polishing;
The step of described surface finish is that the air chamber glass bulb outer surface to assembling carries out polishing, makes wholeIndividual air chamber glass bulb smooth outer surface, makes the surface optical quality of its logical light face meet the logical light face of air chamber simultaneously and wantsAsk, the position that also makes to be used to optical cement reaches the surface accuracy of optical cement;
The step of described installation blast pipe is that an end face of blast pipe is polished to and meets optical cement and require rear lightGlue is to the corresponding position of air chamber glass bulb, as the interface of follow-up access vacuum exhaust platform;
Described subsequent treatment is that the air chamber glass bulb to assembling carries out Chemical cleaning, oven dry, burns by glassKnot access vacuum system, carries out application of vacuum, then alkali metal is transferred in glass bulb, and is filled with workGas, finally departs from vacuum system by glass sintering, completes air chamber and makes.
2. the preparation method of microminiature atomic air chamber as claimed in claim 1, is characterized in that: described inCoefficient of thermal expansion as raw-material plate glass is better than 3.3*10-6K-1。
3. the preparation method of microminiature atomic air chamber as claimed in claim 1, is characterized in that: described inIn selection cutting step, select the thickness of raw material plate glass identical with the thickness of air chamber glass bulb, flat boardGlass is cut at least six planar parts independent of each other, described six planes that are mutually independentPart is bolted together and forms the air chamber glass bulb that described dimensions requires, and appoints in six planar partsThe planar part of anticipating offers through hole along the center of its thickness direction.
4. the preparation method of microminiature atomic air chamber as claimed in claim 1, is characterized in that: described inIn selection cutting step, select the thickness of thickness and air chamber glass bulb identical and thickness and air chamber glass bulb length orThe identical plate glass of arbitrary amount in wide or high three, by the large flat board of thickness in two kinds of raw material plate glassGlass is cut into square frame shape part, and the plate glass that thickness is little cuts into upper and lower base element, square frame shape zeroAfter part and the assembling of upper and lower base element, be the air chamber glass bulb of required size; Cut rear selection square frameIn shape part four sides, the arbitrary part simultaneously or in upper and lower base element is offered logical at its thickness direction arbitrarilyHole.
5. the preparation method of microminiature atomic air chamber as claimed in claim 1, is characterized in that: described inIn selection cutting step, select the thickness of thickness and air chamber glass bulb identical and thickness and air chamber glass bulb length orThe identical plate glass of arbitrary amount in wide or high three, by the large flat board of thickness in two kinds of raw material plate glassGlass is cut into square box shape part, and the plate glass that thickness is little cuts into base element, square box shape part and the endAfter portion's assembling parts, be the air chamber glass bulb of required size; Cut in five of rear selection square box shape partsOne side or base element are offered through hole at its thickness direction arbitrarily.
6. the preparation method of microminiature atomic air chamber as claimed in claim 1, is characterized in that: by alkaliMetal transfer to required system vacuum degree in glass bulb is 10-4Pa or more than.
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| CN110320480A (en) * | 2019-05-17 | 2019-10-11 | 北京航空航天大学 | A kind of cube shaped alkali metal gas chamber of corner list tail pipe convenient for cleaning |
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| CN111058013A (en) * | 2018-10-17 | 2020-04-24 | 北京自动化控制设备研究所 | Micro-miniature coating atomic air chamber packaging process |
| CN111058013B (en) * | 2018-10-17 | 2022-07-15 | 北京自动化控制设备研究所 | Micro-miniature coating atomic air chamber packaging process |
| CN110320479B (en) * | 2019-05-17 | 2020-11-03 | 北京航空航天大学 | Double-tail-pipe cubic alkali metal air chamber convenient to clean |
| CN110320479A (en) * | 2019-05-17 | 2019-10-11 | 北京航空航天大学 | A kind of cube shaped alkali metal gas chamber of double tail pipes convenient for cleaning |
| CN110320480A (en) * | 2019-05-17 | 2019-10-11 | 北京航空航天大学 | A kind of cube shaped alkali metal gas chamber of corner list tail pipe convenient for cleaning |
| CN111039552A (en) * | 2019-12-24 | 2020-04-21 | 北京航天控制仪器研究所 | Fusion sealing method for positive pressure filling glass air chamber based on low-temperature phase-change solder |
| CN111039552B (en) * | 2019-12-24 | 2022-01-04 | 北京航天控制仪器研究所 | Fusion sealing method for positive pressure filling glass air chamber based on low-temperature phase-change solder |
| CN112876054A (en) * | 2021-01-22 | 2021-06-01 | 宜兴市晶科光学仪器有限公司 | Method for manufacturing atomic gas chamber glass shell |
| CN114199481A (en) * | 2021-11-11 | 2022-03-18 | 北京自动化控制设备研究所 | Method for manufacturing vacuum atomic gas chamber and device using same |
| CN117309768A (en) * | 2023-11-28 | 2023-12-29 | 中北大学 | Preparation method and application of ultra-bandwidth terahertz detection-oriented micro atomic gas chamber |
| CN117309768B (en) * | 2023-11-28 | 2024-02-20 | 中北大学 | Preparation method and application of ultra-bandwidth terahertz detection-oriented micro atomic gas chamber |
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Application publication date: 20160518 |