CN1491528A - 具有粗糙导线结构和至少一个部位带精密导线结构的布线制造方法 - Google Patents
具有粗糙导线结构和至少一个部位带精密导线结构的布线制造方法 Download PDFInfo
- Publication number
- CN1491528A CN1491528A CNA028048040A CN02804804A CN1491528A CN 1491528 A CN1491528 A CN 1491528A CN A028048040 A CNA028048040 A CN A028048040A CN 02804804 A CN02804804 A CN 02804804A CN 1491528 A CN1491528 A CN 1491528A
- Authority
- CN
- China
- Prior art keywords
- layer
- etch resistant
- conductor structure
- resistant layer
- matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0263—High current adaptations, e.g. printed high current conductors or using auxiliary non-printed means; Fine and coarse circuit patterns on one circuit board
- H05K1/0265—High current adaptations, e.g. printed high current conductors or using auxiliary non-printed means; Fine and coarse circuit patterns on one circuit board characterized by the lay-out of or details of the printed conductors, e.g. reinforced conductors, redundant conductors, conductors having different cross-sections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/062—Etching masks consisting of metals or alloys or metallic inorganic compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09727—Varying width along a single conductor; Conductors or pads having different widths
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0361—Stripping a part of an upper metal layer to expose a lower metal layer, e.g. by etching or using a laser
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/425—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
- H05K3/426—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in substrates without metal
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/146—Laser beam
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10106399A DE10106399C1 (de) | 2001-02-12 | 2001-02-12 | Verfahren zur Herstellung von Schaltungsträgern mit groben Leiterstrukturen und mindestens einem Bereich mit feinen Leiterstrukturen |
DE10106399.7 | 2001-02-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1491528A true CN1491528A (zh) | 2004-04-21 |
CN1222201C CN1222201C (zh) | 2005-10-05 |
Family
ID=7673721
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028048040A Expired - Fee Related CN1222201C (zh) | 2001-02-12 | 2002-01-22 | 具有粗糙导线结构和至少一个部位带精密导线结构的导线的制造方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6576402B2 (zh) |
EP (1) | EP1360881B1 (zh) |
JP (1) | JP2004518307A (zh) |
KR (1) | KR20030074806A (zh) |
CN (1) | CN1222201C (zh) |
DE (2) | DE10106399C1 (zh) |
TW (1) | TW543350B (zh) |
WO (1) | WO2002065822A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102958279A (zh) * | 2011-08-23 | 2013-03-06 | 北大方正集团有限公司 | Pcb的蚀刻方法和pcb在制板 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10127357C1 (de) * | 2001-06-06 | 2002-09-26 | Siemens Dematic Ag | Verfahren und Einrichtung zur Strukturierung von Leiterplatten |
DE10221552A1 (de) * | 2002-05-14 | 2003-11-27 | Rotra Leiterplatten Produktion | Mehrlagen-Leiterplatten-Verbundkörper sowie Verfahren zu dessen Herstellung |
US7387740B2 (en) * | 2003-01-17 | 2008-06-17 | Sutech Trading Limited | Method of manufacturing metal cover with blind holes therein |
JP7461437B1 (ja) | 2022-10-21 | 2024-04-03 | 旭東 陳 | 微細な相互接続を伴う回路基板を製造するためのサブトラクティブ方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2008886B2 (de) * | 1970-02-26 | 1972-05-10 | Krause, Willy, 8104 Grainau | Kunststoff-traegerplatte zur herstellung von gedruckten schaltungen |
DE3113855A1 (de) * | 1981-04-06 | 1982-10-21 | Fritz Wittig Herstellung gedruckter Schaltungen, 8000 München | Verfahren zur herstellung von leiterplatten |
US4527041A (en) * | 1983-06-02 | 1985-07-02 | Kazuo Kai | Method of forming a wiring pattern on a wiring board |
GB2213325B (en) * | 1987-12-04 | 1992-01-02 | Marconi Electronic Devices | A method of forming electrical conductors |
JP3090453B2 (ja) * | 1989-07-10 | 2000-09-18 | 株式会社日立製作所 | 厚膜薄膜積層基板およびそれを用いた電子回路装置 |
IL105925A (en) * | 1992-06-22 | 1997-01-10 | Martin Marietta Corp | Ablative process for printed circuit board technology |
EP0602257B1 (de) * | 1992-12-12 | 1997-09-10 | International Business Machines Corporation | Leiterplatten mit lokal erhöhter Verdrahtungsdichte und Herstellungsverfahren für solche Leiterplatten |
EP0602258B1 (de) * | 1992-12-14 | 1997-04-09 | International Business Machines Corporation | Leiterplatten mit lokal erhöhter Verdrahtungsdichte und konischen Bohrungen sowie Herstellungsverfahren für solche Leiterplatten |
JP3149352B2 (ja) * | 1996-02-29 | 2001-03-26 | インターナショナル・ビジネス・マシーンズ・コーポレ−ション | 基板の導体層の形成方法 |
US5837427A (en) * | 1996-04-30 | 1998-11-17 | Samsung Electro-Mechanics Co Co., Ltd. | Method for manufacturing build-up multi-layer printed circuit board |
WO1998015159A1 (de) * | 1996-09-30 | 1998-04-09 | Siemens S.A. | Verfahren zur bildung von mindestens zwei verdrahtungsebenen auf elektrisch isolierenden unterlagen |
US5895581A (en) * | 1997-04-03 | 1999-04-20 | J.G. Systems Inc. | Laser imaging of printed circuit patterns without using phototools |
TW453139B (en) * | 1998-07-13 | 2001-09-01 | Siemens Ag | Method to produce circuit-plates with coarse conductive patterns and at least one region with fine conductive patterns |
-
2001
- 2001-02-12 DE DE10106399A patent/DE10106399C1/de not_active Expired - Fee Related
- 2001-04-16 US US09/835,336 patent/US6576402B2/en not_active Expired - Fee Related
-
2002
- 2002-01-22 DE DE50200662T patent/DE50200662D1/de not_active Expired - Fee Related
- 2002-01-22 JP JP2002565400A patent/JP2004518307A/ja active Pending
- 2002-01-22 CN CNB028048040A patent/CN1222201C/zh not_active Expired - Fee Related
- 2002-01-22 KR KR10-2003-7010460A patent/KR20030074806A/ko not_active Application Discontinuation
- 2002-01-22 WO PCT/DE2002/000190 patent/WO2002065822A1/de active IP Right Grant
- 2002-01-22 EP EP02703496A patent/EP1360881B1/de not_active Expired - Lifetime
- 2002-02-08 TW TW091102360A patent/TW543350B/zh active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102958279A (zh) * | 2011-08-23 | 2013-03-06 | 北大方正集团有限公司 | Pcb的蚀刻方法和pcb在制板 |
Also Published As
Publication number | Publication date |
---|---|
DE50200662D1 (de) | 2004-08-26 |
JP2004518307A (ja) | 2004-06-17 |
US6576402B2 (en) | 2003-06-10 |
TW543350B (en) | 2003-07-21 |
CN1222201C (zh) | 2005-10-05 |
WO2002065822A1 (de) | 2002-08-22 |
US20020110752A1 (en) | 2002-08-15 |
DE10106399C1 (de) | 2002-09-05 |
KR20030074806A (ko) | 2003-09-19 |
EP1360881B1 (de) | 2004-07-21 |
EP1360881A1 (de) | 2003-11-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: HITACHI VIA MACHINE CO., LTD. Free format text: FORMER OWNER: SIEMENS AG Effective date: 20060623 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20060623 Address after: Kanagawa Patentee after: Ri Li V Ia Machinery Corporation Address before: Munich, Germany Patentee before: Siemens AG |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20051005 Termination date: 20100222 |