CN1322582C - 使用蒸发微冷却的电子学器件和相关方法 - Google Patents
使用蒸发微冷却的电子学器件和相关方法 Download PDFInfo
- Publication number
- CN1322582C CN1322582C CNB018221297A CN01822129A CN1322582C CN 1322582 C CN1322582 C CN 1322582C CN B018221297 A CNB018221297 A CN B018221297A CN 01822129 A CN01822129 A CN 01822129A CN 1322582 C CN1322582 C CN 1322582C
- Authority
- CN
- China
- Prior art keywords
- integrated circuit
- pair
- electronic device
- package
- microfluidic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
- H01L23/4735—Jet impingement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/741,772 US6459581B1 (en) | 2000-12-19 | 2000-12-19 | Electronic device using evaporative micro-cooling and associated methods |
| US09/741,772 | 2000-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1502130A CN1502130A (zh) | 2004-06-02 |
| CN1322582C true CN1322582C (zh) | 2007-06-20 |
Family
ID=24982125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB018221297A Expired - Fee Related CN1322582C (zh) | 2000-12-19 | 2001-12-11 | 使用蒸发微冷却的电子学器件和相关方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6459581B1 (enExample) |
| EP (1) | EP1362370A2 (enExample) |
| JP (1) | JP2005501392A (enExample) |
| KR (1) | KR100553170B1 (enExample) |
| CN (1) | CN1322582C (enExample) |
| AU (1) | AU2002226065A1 (enExample) |
| WO (1) | WO2002050901A2 (enExample) |
Families Citing this family (79)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1176496A1 (en) * | 2000-07-24 | 2002-01-30 | Hewlett-Packard Company, A Delaware Corporation | Voltage regulation in an integrated circuit |
| WO2002096166A1 (en) * | 2001-05-18 | 2002-11-28 | Corporation For National Research Initiatives | Radio frequency microelectromechanical systems (mems) devices on low-temperature co-fired ceramic (ltcc) substrates |
| US7032392B2 (en) * | 2001-12-19 | 2006-04-25 | Intel Corporation | Method and apparatus for cooling an integrated circuit package using a cooling fluid |
| US6891385B2 (en) * | 2001-12-27 | 2005-05-10 | Formfactor, Inc. | Probe card cooling assembly with direct cooling of active electronic components |
| US7064953B2 (en) * | 2001-12-27 | 2006-06-20 | Formfactor, Inc. | Electronic package with direct cooling of active electronic components |
| US6606251B1 (en) * | 2002-02-07 | 2003-08-12 | Cooligy Inc. | Power conditioning module |
| US6736192B2 (en) * | 2002-03-08 | 2004-05-18 | Ting-Fei Wang | CPU cooler |
| US6673649B1 (en) * | 2002-07-05 | 2004-01-06 | Micron Technology, Inc. | Microelectronic device packages and methods for controlling the disposition of non-conductive materials in such packages |
| US6988534B2 (en) | 2002-11-01 | 2006-01-24 | Cooligy, Inc. | Method and apparatus for flexible fluid delivery for cooling desired hot spots in a heat producing device |
| AU2003270882A1 (en) | 2002-09-23 | 2004-05-04 | Cooligy, Inc. | Micro-fabricated electrokinetic pump with on-frit electrode |
| US6994151B2 (en) | 2002-10-22 | 2006-02-07 | Cooligy, Inc. | Vapor escape microchannel heat exchanger |
| US7156159B2 (en) | 2003-03-17 | 2007-01-02 | Cooligy, Inc. | Multi-level microchannel heat exchangers |
| US7836597B2 (en) | 2002-11-01 | 2010-11-23 | Cooligy Inc. | Method of fabricating high surface to volume ratio structures and their integration in microheat exchangers for liquid cooling system |
| US6986382B2 (en) | 2002-11-01 | 2006-01-17 | Cooligy Inc. | Interwoven manifolds for pressure drop reduction in microchannel heat exchangers |
| WO2004042306A2 (en) | 2002-11-01 | 2004-05-21 | Cooligy, Inc. | Method and apparatus for achieving temperature uniformity and hot spot cooling in a heat producing device |
| US7000684B2 (en) | 2002-11-01 | 2006-02-21 | Cooligy, Inc. | Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device |
| US6988535B2 (en) * | 2002-11-01 | 2006-01-24 | Cooligy, Inc. | Channeled flat plate fin heat exchange system, device and method |
| US8464781B2 (en) | 2002-11-01 | 2013-06-18 | Cooligy Inc. | Cooling systems incorporating heat exchangers and thermoelectric layers |
| US7201012B2 (en) | 2003-01-31 | 2007-04-10 | Cooligy, Inc. | Remedies to prevent cracking in a liquid system |
| US7044196B2 (en) * | 2003-01-31 | 2006-05-16 | Cooligy,Inc | Decoupled spring-loaded mounting apparatus and method of manufacturing thereof |
| US7090001B2 (en) | 2003-01-31 | 2006-08-15 | Cooligy, Inc. | Optimized multiple heat pipe blocks for electronics cooling |
| US7293423B2 (en) | 2004-06-04 | 2007-11-13 | Cooligy Inc. | Method and apparatus for controlling freezing nucleation and propagation |
| US7017654B2 (en) | 2003-03-17 | 2006-03-28 | Cooligy, Inc. | Apparatus and method of forming channels in a heat-exchanging device |
| US7126822B2 (en) | 2003-03-31 | 2006-10-24 | Intel Corporation | Electronic packages, assemblies, and systems with fluid cooling |
| US7170155B2 (en) * | 2003-06-25 | 2007-01-30 | Intel Corporation | MEMS RF switch module including a vertical via |
| JP3778910B2 (ja) * | 2003-12-15 | 2006-05-24 | 株式会社ソニー・コンピュータエンタテインメント | 電子デバイス冷却装置、電子デバイス冷却方法および電子デバイス冷却制御プログラム |
| GB0410850D0 (en) * | 2004-05-14 | 2004-06-16 | Cambridge Consultants | Cooling |
| US7188662B2 (en) | 2004-06-04 | 2007-03-13 | Cooligy, Inc. | Apparatus and method of efficient fluid delivery for cooling a heat producing device |
| US20050269691A1 (en) * | 2004-06-04 | 2005-12-08 | Cooligy, Inc. | Counter flow micro heat exchanger for optimal performance |
| US7616444B2 (en) | 2004-06-04 | 2009-11-10 | Cooligy Inc. | Gimballed attachment for multiple heat exchangers |
| US7768619B2 (en) * | 2004-08-03 | 2010-08-03 | Harris Corporation | Method and apparatus for sealing flex circuits made with an LCP substrate |
| DE102005013762C5 (de) * | 2005-03-22 | 2012-12-20 | Sew-Eurodrive Gmbh & Co. Kg | Elektronisches Gerät und Verfahren zur Bestimmung der Temperatur eines Leistungshalbleiters |
| US7492595B2 (en) * | 2005-03-31 | 2009-02-17 | Tecnisco Limited | Semiconductor cooling device and stack of semiconductor cooling devices |
| US7516776B2 (en) * | 2005-05-19 | 2009-04-14 | International Business Machines Corporation | Microjet module assembly |
| US7255153B2 (en) * | 2005-05-25 | 2007-08-14 | International Business Machines Corporation | High performance integrated MLC cooling device for high power density ICS and method for manufacturing |
| JP5137379B2 (ja) * | 2005-11-14 | 2013-02-06 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 衝突冷却器 |
| US7272005B2 (en) * | 2005-11-30 | 2007-09-18 | International Business Machines Corporation | Multi-element heat exchange assemblies and methods of fabrication for a cooling system |
| US20070126103A1 (en) * | 2005-12-01 | 2007-06-07 | Intel Corporation | Microelectronic 3-D package defining thermal through vias and method of making same |
| DE102005058780A1 (de) * | 2005-12-09 | 2007-06-14 | Forschungszentrum Karlsruhe Gmbh | Mikrowärmeübertrager sowie die Verwendung desselben als Fluidkühler für elektronische Bauteile |
| US7515415B2 (en) * | 2006-02-02 | 2009-04-07 | Sun Microsystems, Inc. | Embedded microchannel cooling package for a central processor unit |
| TW200810676A (en) | 2006-03-30 | 2008-02-16 | Cooligy Inc | Multi device cooling |
| US7536870B2 (en) * | 2006-03-30 | 2009-05-26 | International Business Machines Corporation | High power microjet cooler |
| US7715194B2 (en) | 2006-04-11 | 2010-05-11 | Cooligy Inc. | Methodology of cooling multiple heat sources in a personal computer through the use of multiple fluid-based heat exchanging loops coupled via modular bus-type heat exchangers |
| US7709296B2 (en) | 2006-10-19 | 2010-05-04 | International Business Machines Corporation | Coupling metal clad fiber optics for enhanced heat dissipation |
| KR100906797B1 (ko) * | 2007-06-20 | 2009-07-09 | 삼성전기주식회사 | 냉각부를 갖는 광변조기 패키지, 광변조기의 냉각방법 및냉각방법을 수행하기 위한 프로그램이 기록된 기록매체 |
| TW200912621A (en) | 2007-08-07 | 2009-03-16 | Cooligy Inc | Method and apparatus for providing a supplemental cooling to server racks |
| WO2009042232A1 (en) * | 2007-09-25 | 2009-04-02 | Flextronics Ap, Llc | Thermally enhanced magnetic transformer |
| US8106505B2 (en) | 2007-10-31 | 2012-01-31 | International Business Machines Corporation | Assembly including plural through wafer vias, method of cooling the assembly and method of fabricating the assembly |
| US20090225514A1 (en) | 2008-03-10 | 2009-09-10 | Adrian Correa | Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door |
| US9297571B1 (en) | 2008-03-10 | 2016-03-29 | Liebert Corporation | Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door |
| JP5181874B2 (ja) * | 2008-06-30 | 2013-04-10 | 富士通株式会社 | ループヒートパイプおよび電子機器 |
| CN101958297A (zh) * | 2009-07-16 | 2011-01-26 | 王玉富 | 阵列柔性焊柱连接蒸发冷却半导体器件封装 |
| US8427832B2 (en) | 2011-01-05 | 2013-04-23 | Toyota Motor Engineering & Manufacturing North America, Inc. | Cold plate assemblies and power electronics modules |
| US8391008B2 (en) * | 2011-02-17 | 2013-03-05 | Toyota Motor Engineering & Manufacturing North America, Inc. | Power electronics modules and power electronics module assemblies |
| EP2736981A4 (en) * | 2011-07-29 | 2015-03-25 | SiOx ApS | CORROSION PROTECTION WITH REACTIVE SILICONE OXIDE PROCESSORS |
| US8565970B2 (en) * | 2011-08-17 | 2013-10-22 | GM Global Technology Operations LLC | Method for controlling powertrain pumps |
| DE102012207196A1 (de) | 2012-04-30 | 2013-10-31 | Robert Bosch Gmbh | Energiequelle und Verfahren zur Versorgung eines autarken elektrischen Verbrauchersystems und eine Verwendung derselben |
| US9035452B2 (en) * | 2012-08-07 | 2015-05-19 | General Electric Company | Electronic device cooling with autonomous fluid routing and method of assembly |
| US8643173B1 (en) | 2013-01-04 | 2014-02-04 | Toyota Motor Engineering & Manufacturing North America, Inc. | Cooling apparatuses and power electronics modules with single-phase and two-phase surface enhancement features |
| US9131631B2 (en) | 2013-08-08 | 2015-09-08 | Toyota Motor Engineering & Manufacturing North America, Inc. | Jet impingement cooling apparatuses having enhanced heat transfer assemblies |
| US20160093553A1 (en) * | 2014-09-25 | 2016-03-31 | Mani Prakash | On demand cooling of an nvm using a peltier device |
| RU2620732C1 (ru) * | 2016-06-27 | 2017-05-29 | Федеральное государственное бюджетное учреждение науки Институт теплофизики им. С.С. Кутателадзе Сибирского отделения Российской академии наук (ИТ СО РАН) | Устройство формирования пристенных капельных течений жидкости в микро- и мини-каналах |
| CN106409790B (zh) * | 2016-08-27 | 2018-08-28 | 电子科技大学 | 一种强效的芯片散热器 |
| IT201600104601A1 (it) | 2016-10-18 | 2018-04-18 | Menarini Silicon Biosystems Spa | Sistema microfluidico |
| CN107293496B (zh) * | 2017-05-09 | 2019-09-27 | 中国电子科技集团公司第五十五研究所 | 芯片级集成微流体散热模块及制备方法 |
| CN107949242B (zh) * | 2017-11-17 | 2020-08-28 | 珠海诚然科技服务有限公司 | 一种环保设备用双排散热器 |
| CN110034082B (zh) * | 2018-01-12 | 2021-01-01 | 创意电子股份有限公司 | 具有主动式散热的电子装置 |
| US10490482B1 (en) * | 2018-12-05 | 2019-11-26 | Toyota Motor Engineering & Manufacturing North America, Inc. | Cooling devices including jet cooling with an intermediate mesh and methods for using the same |
| WO2020210587A1 (en) | 2019-04-10 | 2020-10-15 | Jetcool Technologies, Inc. | Thermal management of electronics using co-located microjet nozzles and electronic elements |
| EP3977832B1 (en) * | 2019-04-14 | 2025-06-04 | Jetcool Technologies, Inc. | Direct contact fluid based cooling module |
| US20210134510A1 (en) * | 2019-10-31 | 2021-05-06 | Analog Devices International Unlimited Company | Electronic device |
| WO2022060898A1 (en) | 2020-09-15 | 2022-03-24 | Jetcool Technologies Inc. | High temperature electronic device thermal management system |
| US12289871B2 (en) | 2020-09-15 | 2025-04-29 | Jetcool Technologies Inc. | High temperature electronic device thermal management system |
| US20230392836A1 (en) * | 2020-12-02 | 2023-12-07 | Danfoss A/S | Motor cooling using impingement jets created by perforated cooling jacket |
| TW202236557A (zh) | 2021-01-20 | 2022-09-16 | 美商捷控技術有限公司 | 用於多晶電子組件之基板防流體的順應性冷卻組件 |
| US12048118B2 (en) | 2021-08-13 | 2024-07-23 | Jetcool Technologies Inc. | Flow-through, hot-spot-targeting immersion cooling assembly |
| US12315776B2 (en) | 2021-11-08 | 2025-05-27 | Analog Devices, Inc. | Integrated device package with an integrated heat sink |
| US12289861B2 (en) | 2021-11-12 | 2025-04-29 | Jetcool Technologies Inc. | Liquid-in-liquid cooling system for electronic components |
| TW202407925A (zh) | 2022-03-04 | 2024-02-16 | 美商捷控技術有限公司 | 用於電腦處理器及處理器組件之主動冷卻散熱蓋 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH023457A (ja) * | 1987-12-30 | 1990-01-09 | Ppg Ind Inc | ハイブリッド粉体塗装硬化系 |
| US4912600A (en) * | 1988-09-07 | 1990-03-27 | Auburn Univ. Of The State Of Alabama | Integrated circuit packaging and cooling |
| US5315239A (en) * | 1991-12-16 | 1994-05-24 | Hughes Aircraft Company | Circuit module connections |
| US6007309A (en) * | 1995-12-13 | 1999-12-28 | Hartley; Frank T. | Micromachined peristaltic pumps |
| US6108201A (en) * | 1999-02-22 | 2000-08-22 | Tilton; Charles L | Fluid control apparatus and method for spray cooling |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3774677A (en) * | 1971-02-26 | 1973-11-27 | Ibm | Cooling system providing spray type condensation |
| FR2157094A5 (enExample) * | 1971-10-18 | 1973-06-01 | Thomson Csf | |
| FR2580060B1 (enExample) * | 1985-04-05 | 1989-06-09 | Nec Corp | |
| JPH065700B2 (ja) * | 1987-07-22 | 1994-01-19 | 株式会社日立製作所 | 電子回路デバイスの冷却装置 |
| US5105336A (en) * | 1987-07-29 | 1992-04-14 | Lutron Electronics Co., Inc. | Modular multilevel electronic cabinet |
| US5770029A (en) | 1996-07-30 | 1998-06-23 | Soane Biosciences | Integrated electrophoretic microdevices |
| SE470347B (sv) | 1990-05-10 | 1994-01-31 | Pharmacia Lkb Biotech | Mikrostruktur för vätskeflödessystem och förfarande för tillverkning av ett sådant system |
| JPH0423457A (ja) * | 1990-05-18 | 1992-01-27 | Fujitsu Ltd | 浸漬冷却装置 |
| US5170319A (en) | 1990-06-04 | 1992-12-08 | International Business Machines Corporation | Enhanced multichip module cooling with thermally optimized pistons and closely coupled convective cooling channels |
| US5161089A (en) | 1990-06-04 | 1992-11-03 | International Business Machines Corporation | Enhanced multichip module cooling with thermally optimized pistons and closely coupled convective cooling channels, and methods of manufacturing the same |
| JPH06342990A (ja) * | 1991-02-04 | 1994-12-13 | Internatl Business Mach Corp <Ibm> | 統合冷却システム |
| SE9100392D0 (sv) | 1991-02-08 | 1991-02-08 | Pharmacia Biosensor Ab | A method of producing a sealing means in a microfluidic structure and a microfluidic structure comprising such sealing means |
| US5237484A (en) * | 1991-07-08 | 1993-08-17 | Tandem Computers Incorporated | Apparatus for cooling a plurality of electronic modules |
| JP2500757B2 (ja) | 1993-06-21 | 1996-05-29 | 日本電気株式会社 | 集積回路の冷却構造 |
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-
2000
- 2000-12-19 US US09/741,772 patent/US6459581B1/en not_active Expired - Lifetime
-
2001
- 2001-12-11 AU AU2002226065A patent/AU2002226065A1/en not_active Abandoned
- 2001-12-11 JP JP2002551905A patent/JP2005501392A/ja active Pending
- 2001-12-11 KR KR1020037008196A patent/KR100553170B1/ko not_active Expired - Lifetime
- 2001-12-11 WO PCT/US2001/047637 patent/WO2002050901A2/en not_active Ceased
- 2001-12-11 EP EP01995486A patent/EP1362370A2/en not_active Withdrawn
- 2001-12-11 CN CNB018221297A patent/CN1322582C/zh not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH023457A (ja) * | 1987-12-30 | 1990-01-09 | Ppg Ind Inc | ハイブリッド粉体塗装硬化系 |
| US4912600A (en) * | 1988-09-07 | 1990-03-27 | Auburn Univ. Of The State Of Alabama | Integrated circuit packaging and cooling |
| US5315239A (en) * | 1991-12-16 | 1994-05-24 | Hughes Aircraft Company | Circuit module connections |
| US6007309A (en) * | 1995-12-13 | 1999-12-28 | Hartley; Frank T. | Micromachined peristaltic pumps |
| US6108201A (en) * | 1999-02-22 | 2000-08-22 | Tilton; Charles L | Fluid control apparatus and method for spray cooling |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1362370A2 (en) | 2003-11-19 |
| US20020075651A1 (en) | 2002-06-20 |
| KR100553170B1 (ko) | 2006-02-21 |
| WO2002050901A2 (en) | 2002-06-27 |
| CN1502130A (zh) | 2004-06-02 |
| JP2005501392A (ja) | 2005-01-13 |
| WO2002050901A3 (en) | 2003-09-12 |
| US6459581B1 (en) | 2002-10-01 |
| KR20040014438A (ko) | 2004-02-14 |
| AU2002226065A1 (en) | 2002-07-01 |
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