CN1296264C - 薄膜去除装置及薄膜去除方法 - Google Patents
薄膜去除装置及薄膜去除方法 Download PDFInfo
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- CN1296264C CN1296264C CNB031545599A CN03154559A CN1296264C CN 1296264 C CN1296264 C CN 1296264C CN B031545599 A CNB031545599 A CN B031545599A CN 03154559 A CN03154559 A CN 03154559A CN 1296264 C CN1296264 C CN 1296264C
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Abstract
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Claims (18)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020020053436A KR100596046B1 (ko) | 2002-09-05 | 2002-09-05 | 유리기판의 필름 제거방법 |
KR053438/2002 | 2002-09-05 | ||
KR053437/2002 | 2002-09-05 | ||
KR1020020053437A KR100591391B1 (ko) | 2002-09-05 | 2002-09-05 | 유리기판의 필름 제거장치 |
KR053436/2002 | 2002-09-05 | ||
KR1020020053438A KR100596057B1 (ko) | 2002-09-05 | 2002-09-05 | 유리기판의 폐필름 처리장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1486916A CN1486916A (zh) | 2004-04-07 |
CN1296264C true CN1296264C (zh) | 2007-01-24 |
Family
ID=32303322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031545599A Expired - Lifetime CN1296264C (zh) | 2002-09-05 | 2003-08-15 | 薄膜去除装置及薄膜去除方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP3970813B2 (zh) |
CN (1) | CN1296264C (zh) |
TW (1) | TWI228437B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102756536A (zh) * | 2012-07-13 | 2012-10-31 | 深圳市华星光电技术有限公司 | 偏光板撕除的方法和装置 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4445457B2 (ja) * | 2005-11-11 | 2010-04-07 | 株式会社アドテックエンジニアリング | フィルム剥離装置 |
CN100388063C (zh) * | 2006-02-28 | 2008-05-14 | 友达光电股份有限公司 | 收集装置 |
KR100759214B1 (ko) | 2006-06-07 | 2007-09-14 | 주식회사 포스코 | 열간 프레스 성형용 금형의 스케일 제거 장치 |
JP5278247B2 (ja) * | 2009-08-28 | 2013-09-04 | 旭硝子株式会社 | ガラス基板用スペーサ分離装置及びガラス基板の製造方法 |
KR101182169B1 (ko) * | 2010-06-30 | 2012-09-12 | 에이피시스템 주식회사 | 레이저 열전사용 필름 제거 장치 |
KR101182171B1 (ko) * | 2010-06-30 | 2012-09-12 | 에이피시스템 주식회사 | 레이저 열전사용 필름 제거 장치 |
CN102485357B (zh) * | 2010-12-03 | 2014-11-05 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种载板清洗方法、装置及基片镀膜设备 |
CN102556739A (zh) * | 2010-12-27 | 2012-07-11 | 镇江现代印刷机器厂 | 立体袋袋底折叠分送滚筒装置 |
TWI542470B (zh) * | 2012-11-14 | 2016-07-21 | 財團法人工業技術研究院 | 薄膜剝離裝置及其方法 |
JP6365086B2 (ja) * | 2014-08-05 | 2018-08-01 | 日本電気硝子株式会社 | ガラスフィルムの剥離方法および電子デバイスの製造方法 |
CN106341955B (zh) * | 2016-10-14 | 2023-07-21 | 广东思沃先进装备有限公司 | 收废膜装置及贴膜机 |
CN108176677A (zh) * | 2017-12-27 | 2018-06-19 | 安徽中能电源有限公司 | 一种快速去除电池表面薄膜纸的方法 |
CN108819205B (zh) * | 2018-05-10 | 2020-06-30 | 深圳市志凌伟业技术股份有限公司 | 一种能够处理废膜的大型压膜机 |
CN112992690B (zh) * | 2021-02-08 | 2024-03-19 | 杭州航鹏机电科技有限公司 | 一种集成电路制造工艺 |
CN113002904B (zh) * | 2021-02-22 | 2023-03-24 | 河北光兴半导体技术有限公司 | 玻璃基板除膜机 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1015381B (zh) * | 1987-07-27 | 1992-02-05 | 江汉石油管理局钻头厂 | 钢齿牙轮钻头牙齿表面喷焊超硬材料的方法 |
JPH04189260A (ja) * | 1990-11-20 | 1992-07-07 | Mitsubishi Heavy Ind Ltd | ガラス板のフィルム剥し装置 |
CN1021347C (zh) * | 1989-02-21 | 1993-06-23 | 日本钢管株式会社 | 镍矿石的熔炼还原方法 |
CN1335533A (zh) * | 2000-07-25 | 2002-02-13 | 达碁科技股份有限公司 | 薄膜晶体管液晶显示器及其制造方法 |
CN1340847A (zh) * | 2000-08-29 | 2002-03-20 | 达碁科技股份有限公司 | 薄膜晶体管显示器的电子元件的制作方法 |
-
2003
- 2003-07-23 JP JP2003200663A patent/JP3970813B2/ja not_active Expired - Lifetime
- 2003-08-15 CN CNB031545599A patent/CN1296264C/zh not_active Expired - Lifetime
- 2003-08-27 TW TW92123589A patent/TWI228437B/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1015381B (zh) * | 1987-07-27 | 1992-02-05 | 江汉石油管理局钻头厂 | 钢齿牙轮钻头牙齿表面喷焊超硬材料的方法 |
CN1021347C (zh) * | 1989-02-21 | 1993-06-23 | 日本钢管株式会社 | 镍矿石的熔炼还原方法 |
JPH04189260A (ja) * | 1990-11-20 | 1992-07-07 | Mitsubishi Heavy Ind Ltd | ガラス板のフィルム剥し装置 |
CN1335533A (zh) * | 2000-07-25 | 2002-02-13 | 达碁科技股份有限公司 | 薄膜晶体管液晶显示器及其制造方法 |
CN1340847A (zh) * | 2000-08-29 | 2002-03-20 | 达碁科技股份有限公司 | 薄膜晶体管显示器的电子元件的制作方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102756536A (zh) * | 2012-07-13 | 2012-10-31 | 深圳市华星光电技术有限公司 | 偏光板撕除的方法和装置 |
CN102756536B (zh) * | 2012-07-13 | 2015-07-22 | 深圳市华星光电技术有限公司 | 偏光板撕除的方法和装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI228437B (en) | 2005-03-01 |
JP2004099321A (ja) | 2004-04-02 |
JP3970813B2 (ja) | 2007-09-05 |
TW200407202A (en) | 2004-05-16 |
CN1486916A (zh) | 2004-04-07 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: SUMSUNG KANGNING PRECISION MATERIAL CO., LTD. Free format text: FORMER NAME: SAMSUNG CORNING PRECISION GLASS |
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CP01 | Change in the name or title of a patent holder |
Address after: Gyeongbuk, South Korea Patentee after: SAMSUNG CORNING PRECISION MATERIALS Co.,Ltd. Address before: Gyeongbuk, South Korea Patentee before: SAMSUNG CORNING PRECISION GLASS CO.,LTD. |
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C56 | Change in the name or address of the patentee |
Owner name: KANGNING PRECISION MATERIAL CO., LTD. Free format text: FORMER NAME: SAMSUNG CORNING PRECISION MATERIALS CO., LTD. |
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CP03 | Change of name, title or address |
Address after: Chungnam, South Korea Patentee after: CORNING PRECISION MATERIALS Co.,Ltd. Address before: Gyeongbuk, South Korea Patentee before: SAMSUNG CORNING PRECISION MATERIALS Co.,Ltd. |
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CX01 | Expiry of patent term |
Granted publication date: 20070124 |