1228437 玖、發明說明： 【發^明戶斤屬之^ 糊員】 發明領域 本發明涉及-種薄膜去除裝置及薄膜去除方法，例如 5涉及能夠高效率地進行用於去除玻璃基板上薄膜的剝離、 收集、體積減量（或壓縮）等一系列步驟的薄膜去除裝置及薄 膜去除方法。 發明背景 10 衆所周知，在TFT—LCD(薄膜電晶體驅動彩色液晶顯 示器）、PDP(Plasma Display Panel等離子顯示面板）、 EL(Electroluminescence電致發光）等平面顯示器（Flat Display)的製造領域中採用的玻璃基板是，將用玻璃溶化爐 炫化的水玻璃（石夕酸鈉）供給溶液成形器，製成玻璃基板後， 15 按原始標準切斷，並在其表面被覆保護用薄膜之後，運至] 玻璃基板加工線上。在玻璃基板加工線，從玻璃基板剝離 了薄膜之後，將玻璃基板再切斷成符合平面顯示器規格的 尺寸。並且，在其後的被覆步驟中，在玻璃基板的表面， 例如作爲絕緣膜被覆二氧化矽（Si〇2)膜，作爲導電膜被覆 20 ITO(Indium tinoxide，銦錫氧化物）膜。 在一般的玻璃基板的薄膜去除裝置中’利用滾筒式輸 送機’ 一邊傳送玻璃基板’一邊在具有黏性的氣基甲酸乙 酯滾筒的表面上黏附傳送的玻璃基板的薄膜’進行薄膜剝 1228437 另外’在專利文獻i中公開了一種從玻璃基板去除薄膜 的技術’遠技術是沿著加壓滾筒的外面卷取地供應黏著帶 ，一邊用加壓滾筒壓附玻璃基板的薄膜，一邊在黏著帶上 黏附薄膜，然後，一邊移動加壓滾筒，一邊用與加壓滾筒 5連動的紙管從玻璃基板去除薄膜。 專利文獻1:曰本專利特開平4-189260號公報 但是，如果在上述氨基甲酸乙酯滚筒的表面附著粉塵 等異物，會降低氨基甲酸乙酯滚筒的黏著力，失去其功能 。因此必須周期性地停止薄膜去除裝置的運轉，周期性地 1〇清掃氨基甲酸乙醋滾筒的表面，這樣就存在大大降低生産 率的問題。特別是，爲了再生氨基甲酸乙酯滾筒的黏著力 ，必須使用對人體有害的如甲基乙基甲酮等溶劑進行清洗 ，因此，還存在損害作業環境的弊端。而且，利用氨^甲 酸乙酯滾筒從玻璃基板剝離的廢薄膜，需要作業者另外收 15集、廢茶’費工費時，通過減小廢薄膜的體積進行廢棄處 理，需要投入較多的時間和努力，存在增加生産費用的問 題。-般’作業者爲了高效率地收走廢薄膜，大射小時進 打-次收集作業，在作業者不收走廢薄膜，原封不動地放 在加工線上的情況下，廢薄膜散落在加工線的周圍，不僅 20損害作業環境，還有進入加工線設備中引發事故的危險。 此外，上述專利文獻1的技術在黏著帶的連續性供給方 面還存在許多難題。即使在該技術中，操作者也必須手工 去除貼附在加壓滾筒的黏著帶上的薄膜，由於廢棄廢薄膜 需要收走及壓縮或體積減量的作業，不僅使生產效率降低 1228437 ’還存在增加生産費用的問題。 【發明内容3 發明概要 =是爲解決上述現有技術的種種問 膜nr供一種可高效率地進行爲從玻璃基板上去除薄 膜的剝離、收集、體積減量等一 ， 率、且能夠大大降低生產_1列步驟、能夠提高生産 方法。 生產費用的缚臈去除裝置及薄膜去除 10 15 上剝的彳 立即收_狀構件 裝置及薄膜去除方法夠改善工作環境的薄膜去除 此外，本發明的另一 薄膜的體積、並可降低廢奈普種能使容易減少廢 除方法。 用的薄膜去除裝置及薄膜去 爲達到上述目的，本發 驟：傳#牛驟.^ 兮、云除方法包括如下步 外得运步驟，其利用傳送裝置 膜的板狀構件· ，、置傳送被覆有薄 步驟’在傳送裝置的^番 向上述板狀構件的 去除位置， + α 的傳迗方向前端喷射壓縮空氣，俨而^ μ 述板狀構件剝離薄膜;廢薄膜排出步驟，利:直:而攸上 動裝置的真空吸附，從傳送裝置的去除位吸附滾 狀構件剝離的廢薄腺· ’、置排出從上述板 m，廢薄膜收集步驟，利闲从隹此 入並收集由真空吸附利用收集k置吸 麼縮從收集裝置排出、★排的廢薄膜；屢縮步驟， 直辨出的廢薄膜。 圖式簡單說明 20 !228437 弟1圖疋表示本發明的優選實施方式的薄膜去除 中滾筒式輸送機、空氣嘖射哭亩 、置 风工孔贺射為、真空吸附滾動裝置及 I置的結構的斷面圖。 第2圖是表示本發明的優選實施方式的薄膜 中滾筒式輸送機、空氣嘖身 省 、、 老晋— 附滾動裳置及驅動 衣置的結構的正視圖。 實施方式的薄膜去除裝置 真空吸附滾動裝置及驅動 第3圖是表示本發明的優選 中滾筒式輸送機、空氣噴射器、 裝置的結構的側面圖。 10 15 第4圖是表不本發明的優選實施方式的薄膜去除裝置 中真技附滾動裝置及仏空氣吸引裝置的結構的正視圖。 第5圖是部分放大表示本發明的優選實施方式的薄膜 去除裝置中真空吸附滾動裝置結構的斷面圖。 、 第6圖是沿第5圖所示的i — j線的斷面圖。 第7(A)圖及第7(B)圖是說明本發明的優選實施方式的 薄膜去除裝置中空氣喷射器工作的側面圖。 第8(A)圖及第8(B)圖是說明本發明的優選實施方式的 薄膜去除裝置中真空吸附滾動裝置工作的斷面圖。 第9圖是表示本發明的優選實施方式的薄膜去除裝置 中收集裝置的吸入罩、渦旋集塵器、第i及第2空氣吸弓丨裝 置以及自動壓縮機結構的系統圖。 第10圖是表示安裝在本發明的優選實施方式的薄膜去 除裝置中渦旋集塵器出口上的翻轉閘門的結構的斜視圖。 第11圖是說明本發明的優選實施方式中玻璃基板的薄 20 1228437 膜去除方法的流程圖。 +第12圖是說明本發明的優選實施方式中玻璃基板的薄 膜去除方法的接續第11圖的流程圖。 【實摊*方式】 5較佳實施例之詳細說明 以下’根據附圖詳細說明本發明的薄膜去除裝置及去 除方法的最佳實施方式。 首先，如參照第i圖〜第3圖，本發明的薄膜去除裝置 ’具有作爲傳送裝㈣滾筒式輸送機1G。這種滾筒式輸送 10機10，將厚度爲〇·5〜lmm左右的薄板狀構件玻璃基板工， 向去除其表面被覆的薄膜2的去除位置P1傳送，此時使薄膜 2朝下。另外，玻璃基板1的縱向（mm)x橫向（mm)的尺寸可 在如 370x470 〜1150x1300 左右。 如第1圖及第3圖所示，在滾筒式輸送機1〇的框架只上 15 ’按規定的間隔排列有通過轉動運動傳送玻璃基板1的多個 傳送滾筒（供料滾筒）12。滾筒式輸送機1〇的傳送滾筒12通過 共知的電機和傳遞該電機驅動力的動力傳遞用鏈條、動力 傳遞用皮帶等傳送裝置，一邊轉動一邊沿傳送方向13傳送 玻璃基板1。此外，如第1圖所示，在滾筒式輸送機10的框 20 架11上設置有感測器14，該感測器14檢測玻璃基板i的傳送 方向前端是否到達滾筒式輸送機w的去除位置P1。感測器 14由發射光信號的發光感測器14&和接收從該發光感測器 14a發送的光信號的受光感測器14b構成。在本實施例中， 感測器14也可以由非接觸式的感測器構成。 1228437 如參照第1圖〜第3圖、第7(A)圖及第7(B)圖，在滾筒 式輸送機10的去除位置P1，作爲通過向玻璃基板2的傳送方 向前端噴射壓縮空氣，從而從玻璃基板i剝離薄膜2的空氣 噴射裝置，設置了空氣噴射器2〇。空氣噴射器2〇與滾筒式 5輸送機10的傳送滾筒12平行配置。空氣噴射器20由與空氣 供應裝置21連接形成空氣通路的中空型通氣管22和多個空 氣噴頭23構成，該多個空氣噴頭23安裝在通氣管22外面， 使其可向玻璃基板1的傳送方向的前端喷射壓縮空氣。空氣 供應裝置21可以由産生壓縮空氣的空氣壓縮機、控制來自 1〇該空氣壓縮機的空氣供應的空氣控制器、以及控制空氣壓 力和流量的閥門及壓力錶等附屬裝置構成，該閥門及壓力 錶安裝在連接通氣管22和空氣控制器的進氣管上。在本實 施例中，也可以用鼓風機代替空氣供應裝置21的空氣壓縮 機。 、 15 此外，通過作爲工作裝置的一對第1氣缸24的工作，空 氣喷射器20在滾筒式輸送機1〇的去除位置ρι和允許傳送破 璃基板1的待機位置P2(參照第7(B)圖）之間進行升降運動。 一對第1氣缸24通過固定托架25分別配置在框架的兩上部 。在第1氣缸24的氣缸桿24a上連接有連接托架26。 2〇 在連接托架26的側端安裝有第2氣缸27,其使空氣噴射 器20，相對於位於去除位置P1上的玻璃基板1的傳送方向前 端，在水平方向上運動而接近或分隔。第2氣缸27的氣缸桿 27a連接在通氣管22的側端。 在連接托架26的下面，通過軸承29可轉動地安裝有失 1228437 送滾筒28的側端。夾送滾筒28由具有柔軟性的材料如氨基 甲酸乙酯製作，以防止損傷玻璃基板1。 如第7(A)圖所示，通過第1氣缸24的工作，空氣噴射器 2〇—從待機位置P2降到去除位置P1，夾送滾筒28就留出沿 5 滾筒式輸送機1〇的傳送滾筒12傳送的玻璃基板1可通過的 間隔，靠近真空吸附滾動裝置30(後述）。如第7(B)圖所示， 如果空氣贺射器20處於待機位置P2 ’夾送滾筒28就脫離真 空吸附滾動裝置30，以能夠通過滾筒式輸送機1〇的動作自 由傳送玻璃基板1。 10 如果參照第1圖〜第6圖，在滾筒式輸送機10的去除位 置P1設置真空吸附滾動裝置30，該真空吸附滾動裝置3〇利 用空氣噴射器20的動作吸附從玻璃基板1剝離的廢薄膜2a( 參,¾第8(B)圖）’使其脫離玻璃基板；[，並從框架η的下部排 出。真空吸附滾動裝置30具有中空型主滾筒31，其可轉動 15地與傳送滾筒12平行地設置在滾筒式輸送機10的去除位置 Ρ1。在该主滾筒31上設有多個吸引孔3ia，該吸引孔3；^通 過吸入空氣吸附從玻璃基板i剝離的薄膜2a，並沿長度方向 及圓周方向按規定的間隔整齊排列，形成群體。主滾筒31 的吸引孔31a沿長度方向形成細長的長方形槽。在主滾筒 20的兩側端各自連接有嵌合了轴承32的中空型連轴器311)。 此外，在主滾筒31的内側安裝有中空型吸引管33。在 罪近滾甸式輸送機10的去除位置P1的吸引管33的上部，連 通主/衰阂31的吸引孔3 la等來形成空氣通路的吸引孔33a等 ，/σ吸引管33的長度方向形成爲一列。在吸引管幻的兩端 11 1228437 安裝有接合器33b。接合器现貫通固定*滾筒式輪送⑽ 的框架11上的固定托架34被固定。安裝在主滾筒”的連轴 器31b上的軸承32被支承在接合器33b的外面。此外，。由 管33插入於主滾筒31的内側，使至少形成有吸引孔幻° 引管33的外面與主滾筒31的内面相隔離。 的吸 如第4圖詳細所示，吸引管33的接合器观通過進襄其 35a與第1空氣吸引裝置35連接。第i空氣吸引裝置％由 吸引管33吸入、排出空氣的鼓風機36構成。第丄空氣吸= 置35也可以由真空泵代替鼓風機36構成。在主滾筒& = 1〇面，以按規定間隔圍住主滾筒31的吸引孔31a的方式， 有多個副滾筒37等，該副滾筒37由摩擦係數大的材料= 基甲酸乙醋、橡膠、具有柔軟性的聚酿等製成，用於保^ 玻璃基板1，增大對廢薄膜2a的吸附力。 ”叹 在副滾筒37上，與主滾筒31的吸引孔犯各自對應地形 15成有吸引孔37a。並且，在相鄰的副滾筒”之間分別設置有 保持副滚筒37間隔的隔離環38a。位於主滾筒31的^側端 料副賴37’安裝爲㈣各自具有不同長㈣隔離 %38b，與主滾筒31的端部保持適當的間隔。 另外，如第8(A)圖及第8⑼圖所示，通過運 加置叫參照第3圖），真空吸附滾動裝置3〇的主向璃 基幻的傳送方向單方向轉動。如第3圖所示，驅動裝置4〇 由固疋在滾筒式輸送機10的框架、提供驅動力的電機 Μ，和向主滾筒31傳遞該電機41_動力軸力傳遞用皮 帶42構成。動力傳遞用皮帶42由安裝在電機41的驅動轴化 12 Ϊ228437 上的驅動皮帶輪(driving pulley)42a、安裝在主滾筒31的一 側端的從動皮帶輪(driven pulley )42b和套在驅動皮帶輪42a 及從動皮帶輪42b上的皮帶42c構成。 如參照第9圖，本發明的薄膜去除裝置具有收集裝置5〇 5 ’該收集裝置5〇利用真空吸附滾動裝置30的真空吸附，收集 從滾筒式輸送機10的去除位置P1排出的廢薄膜2a。該收集 裝置50由吸入罩（進氣)51和渦旋集塵器53構成。吸入罩51 通過真工吸附滾動裝置30收容從玻璃基板1剝離、脫落並從 去除位置P1排出的廢薄膜2a。渦旋集塵器53通過第1薄膜傳 10送官道52與吸入罩51連接。在該渦旋集塵器53上，上下形 成有吸入廢薄膜2a的入口 53a及排出廢薄膜2a的出口 53b。 吸入罩51的入口 51a配置爲靠近真空吸附滾動裝置3〇 的下部。在吸入罩51的一側端形成的出口 51b上連接有第工 薄膜傳送管道52。在渦旋集塵器53的入口 53a及出口 53b上 15連接有第1薄膜傳送管道52。垂直配置渦旋集塵器53的入口 53a及出口 53b。渦旋集塵器53的入口 53a通過第1薄膜傳送 管道52與吸入罩51的出口 51b連接。 在第9圖中示出了一個吸入罩51，但是，可僅提供與在 多個玻璃基板加工線上構成的滾筒式輸送機1〇的去除位置 20 對應數目的吸入罩51，吸入罩51也可通過第1薄膜傳送管 道52連接在渦旋集塵器53的入口 53a上。在本實施方式中， 也可以利用渦旋集塵器53的入口 53a直接吸入並收集廢薄 膜2a，來代替採用吸入罩51和第i薄膜傳送管道&。 如參照第9圖，在渦旋集塵器53的出口 53b上安裝有從 13 1228437 5 10 15 渦方疋集塵裔53排出廢薄膜2a的翻轉閘門54。如第糊所示 ，該翻轉閘門54由提供驅動力的電機％、可轉動地靠近: 旋集塵器53的出口 53b的相互平行地安裳的“葉輪^第 2葉輪57、向第i葉輪56及第2葉輪57中_個如第i葉輪⑽ 遞電機55的驅動力的動力傳遞用皮帶兄、以及向第2葉輪^ 傳遞第1葉輪56的轉動力的齒輪組59構成。 一 第1茱輪56及第2葉輪57各自具有圓筒型滾筒加、w ’在壓縮滾筒56a、57a的外面，沿長度方向放射狀地形成 有多個翼片56b、57b，其相互合作送出廢薄膜仏。在滚筒 56a、57a的兩端側，貫通渦旋集塵器53的兩側壁可突出地 延長設置有軸56c、57c。第！葉輪56及第2葉輪57各自的轴 56c、57c，被已知的軸承可轉動地支承在渦旋集塵器”的 兩端側壁上。動力傳遞皮帶58由安裝在電機55的驅動輛祝 上的驅動皮帶輪58a、安裝在第丨葉輪56的軸56c上的從動皮 帶輪58b和套在驅動皮帶輪58a及從動皮帶輪58b上的皮帶 58c構成。齒輪組59由驅動齒輪59a和從動齒輪59b構成，驅 動齒輪59a女裝在與驅動皮帶輪58a相反位置的第^葉輪％ 的軸56c上，從動齒輪59b安裴在第2葉輪57的軸57c上，可 與驅動齒輪59a咬合轉動。 如果利用動力傳遞皮帶58傳遞電機55的驅動力來轉動 第1葉輪56，則由齒輪組59將第1葉輪56的轉動力傳遞給第2 葉輪57，第2葉輪57向與第1葉輪56相反的方向轉動，第工葉 輪56及第2葉輪57的翼片56b、57b從渦旋集塵器53的出口 53b送出廢薄膜2a。 14 1228437 如再參照第9圖，第2空氣吸引裝置60的第丄渦輪鼓風機 61通過空氣管道60a連接在靠近渦旋集塵器53的入口 5知的 位置。在第2空氣吸引裝置6〇的空氣管道6〇a上，並列連接 具有與第1渦輪鼓風機61相同結構的第2渦輪鼓風機62。在 5本實施方式中，第1渦輪鼓風機61及第2渦輪鼓風機62的各 自風量設定爲14m3/min、風壓設定爲25〇mmAg。 在運轉本發明的薄膜去除裝置時，可只運轉第2空氣吸 引裝置60的第1渦輪鼓風機61及第2渦輪鼓風機62中的—個 如第1渦輪鼓風機61。第2渦輪鼓風機62是爲在第^尚輪鼓風 10機61發生故障時，不中斷地連續運行廢薄膜2a的收集而準 備的。在靠近渦旋集塵器53的出口 53b的位置，通過空氣管 道63a連接有第3空氣吸引裝置63的鼓風機64。在本實施方 式中’妓風機64的風量設定爲23m3/min、風壓設定爲 19〇mmAg。第1渦輪鼓風機61、第2渦輪鼓風機62及鼓風機 15 64也可以各自由真空泵構成。 此外，渦旋集塵器53的出口 53b通過第2薄膜傳送管道 71連接有自動壓縮機70,自動壓縮機7〇壓縮、捆紮(binding) 並排出由滿旋集塵器53供給的廢薄膜2a。自動壓縮機7〇由 市售的德國 Ancove公司（Ancove enterprise limited)生産的 2〇 WelSer SB2000系列自動壓縮機構成，第1薄膜傳送管道52 和第2薄膜傳送管道71各自由管道構成。 如第1圖所示，本發明的薄膜去除裝置具有滾筒式輸送 機10、控制空氣喷射器20、第1空氣吸引裝置35的鼓風機36 、驅動裝置40、翻轉閘門54、第2空氣吸引裝置60及第3空 15 122843 氣吸引裂置63等控制運轉的控制器8〇。控制器8〇上連接有 感測器14，根據從感測器輪入的信號控制空氣喷射器加的 運作。控制器80可以由能夠按定序程式控制各裳^作的 可程式化的控制H(可編程式的控制器）或計算機構成。 5 ，根據第11圖及第12圖說明利用具有上述構成的 本發明的玻璃基板薄膜去除裝置的薄膜去除方法。 如苓照第1圖、第4圖及第9圖，首先，利用控制器如 的控制，使第1空氣吸引裝置35的鼓風機36、翻轉閘門的 電機55、第2空氣吸引裝置60的第i渦輪鼓風機61及第3空氣 10吸引裝置63的鼓風機64運轉，準備收集從玻璃基板剝離、 排出的廢薄膜2a(S100)。 如第3圖及第7(A)圖所示，通過第}氣缸24的動作使氣 缸桿24a前進，使得空氣喷射器20從待機位置p2下降到滾筒 式輸送機10的去除位置P1，作準備（S101)。通過降下空氣 15噴射器20，夾送滾筒％分開，形成相對於真空吸附滾動裝 置30的副滾筒37能夠通過玻璃基板}的間隔。 如參照第1圖及第4圖，在薄膜2朝下向滾筒式輸送機1〇 的傳送滾阂12供給玻璃基板1後，一旦運轉滾筒式輸送機1〇 ，玻璃基板就通過傳送滾筒12的轉動運動，沿傳送方向13 2〇 傳送到去除位置P1(S102)。 利用滾筒式輸送機10的動作傳送的玻璃基板2被感測 器14檢測，感測器14將玻璃基板1的檢測信號輸入給控制器 80，控制器80根據從感測器14輸入的傳感信號判斷玻璃基 板1的傳送方向的前端是否到達去除位置？1(§1〇3)。 16 1228437 如果控制器8〇判斷爲玻璃基板1的傳送方向的前端到 達去除位置P1(YES)，則停止滚筒式輸送機10的工作（S104) 。在本實施方式中，如第7(A)圖所示，滾筒式輪送機10的 停止設定在玻璃基板1的傳送方向的前端通過夾送滾筒28 5和真空吸附滾動裝置30的副滾筒37之間的時刻。 如再參照第3圖及第7(A)圖，如果控制器80停止滾筒式 輸送機10的運作，通過運轉第2氣缸27使氣缸桿27a前進， 使空氣喷射器20的空氣喷頭23靠近玻璃基板1的傳送方向 的前端（第7(A)圖中用虛線表示），通過空氣喷射器2〇的空氣 10 喷頭23噴射壓縮空氣，從玻璃基板1剝離薄膜2(si〇5)。在用 工氣嘴射器20的空氣喷頭23向玻璃基板1的傳送方向的前 端喷射壓縮空氣時，有時因壓縮空氣的喷射力，産生玻j离 基板1的傳送方向的前端從真空吸附滾動裝置3〇的副滾筒 37浮起的情況，但如第7(A)圖所示，由於位於副滾筒37的 15 上方的夾送滾筒28壓住玻璃基板1的上面，可防止産生玻j离 基板1的浮起現象。 然後，如第7(B)圖所示，在剝離薄膜2後，利用第2氣 紅27的動作使氣缸桿27a後退，以使被傳送的玻璃基板1不 干擾空氣喷射器20。之後，使得空氣喷射器20的空氣噴碩 20 23離開玻璃基板1的傳送方向前端，利用第1氣缸24的動作 使氣缸桿24a後退，以使空氣噴射器20從去除位置P1恢復到 待機位置P2(S106)。 空氣喷射器20—恢復到待機位置p2，就通過運轉滾筒式 輸送機10再次傳送玻璃基板1，從去除位置P1排出（S107)。 17 1228437 如參照第3圖、第4圖、第8(A)圖及第8(B)圖，在通過 運轉滾筒式輸送機10排出玻璃基板1時，通過運轉空氣喷射 為20從玻璃基板1被剝離的廢薄膜2a，被通過副滾筒37的吸 弓丨孔37a等、主滾筒31的吸引孔31a等以及吸引管33的吸引 5 孔3%等傳遞的吸入力，吸附在副滾筒37的表面。利用動力 傳遞用皮帶42傳遞電機41的驅動力的真空吸附滾動裝置3〇 的主滾筒31向玻璃基板1的傳送方向轉動，通過轉動主滾筒 31，吸附在副滚筒37的表面的廢薄膜2a從玻璃基板i脫落， 並從滾筒式輸送機10的去除位置P1排出（S108)。此外，如 10第8(B)圖所示，通過轉動主滾筒31，吸附了廢薄膜仏的副 滾筒37的吸引孔37a—旦遠離吸引管33的吸引孔33a，作用 於該副滾筒37的吸引孔37a的吸引力就被減弱，吸附在副滾 筒37的表面上的廢薄膜2a順利地從副滾筒37脫落。通過這 樣運轉滾筒式輸送機10，可連續傳送被覆有薄膜2的玻璃基 15板1 ’利用空氣喷射器20的動作向玻璃基板1的傳送方向前 端喷射壓縮空氣，在剝離掉玻璃基板1上被覆的薄膜2後， 通過運轉真空吸附滾動裝置3〇迅速地從玻璃基板i排出從 玻璃基板1剝離的廢薄膜2a，從而能夠大幅提高生產率，能 夠容易貫現自動化去除薄膜2，降低生産費用。並且，通過 20 採用真空吸附滾動裝置30的真空吸附方式迅速自動排出廢 薄膜2a，能夠改善作業環境，並能有效地防土因廢薄膜2a 殘留在玻璃基板加工線上而誘發的加工線故障。 如弟9圖及弟1〇圖所示，被副滾筒π剝離、排出的廢薄 膜2a收集在收集裝置50的吸入罩51内。此時，在吸入罩51 18 1228437 的入口 51a，由於第χ渦輪鼓風機61的運轉産生的吸引力經 過第1薄膜傳送管道52作用於渦旋集塵器53，從真空吸附滾 動裝置30的副滾筒37剝離的廢薄膜2a立即收集在吸入罩51 的入口 51a内。並且，廢薄膜2a經過吸入罩51的出口 51b、 5第1薄膜傳送管道52及渦旋集塵器53的入口 53a，被吸入收 集在渦旋集塵器53的内側（S109)。由鼓風機64運轉產生的2 次吸引力控制作用於渦旋集塵器53的入口 53a及出口 53b的 内壓’以能夠在出口 53b排出渦旋集塵器53的入口 53a吸入 的廢薄膜2a。即，利用鼓風機64在渦旋集塵器53的出口 53b 10 一側産生的内壓比在入口53a産生的内壓變小。隨之，相對 於渦旋集塵器53的入口 53a—側，在出口 53b—側産生低内 壓’因此，能夠將在渦旋集塵器53的入口 53a吸入的廢薄膜 2a順利轉移到出口 53b並排出。 接著，通過利用動力傳遞用皮帶58傳遞電機55的驅動 15力來轉動第1葉輪56和第2葉輪57的翼片56a、57a的作用， 在渦旋集塵器53的出口 53b排出傳送到渦旋集塵器53的出 口 53b的廢薄膜2a，從渦旋集塵器53的出口 53b排出的廢薄 膜2a，經過第2薄膜傳送管道71供給自動壓縮機70(S110)。 自動壓縮機70將廢薄膜2a壓縮成塊狀(S111)。 20 將被壓縮的廢薄膜塊2b，用結束裝置例如金屬絲捆紮 後排出（S112)。此時，供給的廢薄膜2a—達到規定的數量， 自動壓縮機70便會自動進行壓縮，減少體積，通過自動壓 縮機70的動作結束的廢薄膜塊2b重約40〜6〇kg，體積(m3) 約爲500x 400x 600〜1200。因此，作業者恨容易廢棄從自 19 1228437 動壓縮機70排出的廢薄膜塊2b。 此外，在本實施方式中，對玻璃基板進行了說明，但 也同樣適用於其他材質如塑膠材質等基板。 以上，說明了本發明的優選實施方式，但在不脫離本 5 發明的宗旨及申請專利範圍的情況下，可進行種種變更和 修正，這對本領域技術人員應該是能夠理解的。 綜上所述，根據本發明的薄膜去除裝置及薄膜去除方 法，能夠高效率地進行爲從玻璃基板上去除薄膜的剝離、 收集、體積減量等一系列步驟，能夠提高生産率，降低生 10 産費用。此外，能夠立即收集從板狀構件上剝離、排出的 廢薄膜，改善作業環境，能夠有效地減小廢薄膜塊的體積 ，大大降低廢棄處理費用。 I：圖式簡單說明3 第1圖是表示本發明的優選實施方式的薄膜去除裝置 15 中滾筒式輸送機、空氣喷射器、真空吸附滾動裝置及驅動 裝置的結構的斷面圖。 第2圖是表示本發明的優選實施方式的薄膜去除裝置 中滾筒式輸送機、空氣喷射器、真空吸附滾動裝置及驅動 裝置的結構的正視圖。 20 第3圖是表示本發明的優選實施方式的薄膜去除裝置 中滾筒式輸送機、空氣喷射器、真空吸附滾動裝置及驅動 裝置的結構的側面圖。 第4圖是表示本發明的優選實施方式的薄膜去除裝置 中真空吸附滾動裝置及第1空氣吸引裝置的結構的正視圖。 20 1228437 第5圖是部分放大表示本發明的優選實施方式的薄膜 去除裝置中真空吸附滾動裝置結構的斷面圖。 第6圖是沿第5圖所示的I — I線的斷面圖。 第7(A)圖及第7(B)圖是說明本發明的優選實施方式的 5 薄膜去除裝置中空氣喷射器工作的側面圖。 第8(A)圖及第8(B)圖是說明本發明的優選實施方式的 薄膜去除裝置中真空吸附滾動裝置工作的斷面圖。 第9圖是表示本發明的優選實施方式的薄膜去除裝置 中收集裝置的吸入罩、渦旋集塵器、第1及第2空氣吸引裝 10 置以及自動壓縮機結構的系統圖。 第10圖是表示安裝在本發明的優選實施方式的薄膜去 除裝置中渦旋集塵器出口上的翻轉閘門的結構的斜視圖。 第11圖是說明本發明的優選實施方式中玻璃基板的薄 膜去除方法的流程圖。 15 第12圖是說明本發明的優選實施方式中玻璃基板的薄 膜去除方法的接續第11圖的流程圖。 【圖式之主要元件代表符號表1 1…玻璃基板 14…感測器 2…剝離薄膜 14a…發光傳感器 2a…發薄膜 14b…受光傳感器 10…滾筒式輸送機 20…空氣喷射器 11…框架 21…空氣供應裝置 12…傳送滾筒 22…中空型通氣管 13…傳送方向 23…空氣喷頭 21 1228437 24…第一氣缸 25…固定托架 26…連接托架 27…第二氣缸 27a…氣缸桿 28…夾送滾筒 29…通過轴承 30…滾動裝置 31…主滾筒 31a···吸引孔 31b…連軸器 32…轴承 33…吸引管 33a···吸引孔 33b…接合器 35…空氣吸引裝置 35a…進氣管 36…鼓風機 37…滾筒 37a···吸引孔 38a，38b···隔離杯 40…運轉驅動裝置 41…電機 41a…驅動軸 42…皮帶 42a···驅動皮帶輪 42b…從動皮帶輪 42c…皮帶 50…收集裝置 51···吸入署 52…傳送管道 53…旋轉收塵器 53a···入口 53b…出口 54…翻轉閘門 55…電機 56…傳遞電機 56…第1葉輪 56a、57a···滾筒 56b、57b…翼片 56c、57c···車由 57…第2葉輪 58…皮帶 58a···驅動皮帶輪 58b…從動皮帶輪 58c…皮帶 59…歯輪組 59a···驅動齒輪 22 1228437 59b…從動齒輪 60…第2空氣吸引裝置 60a···空氣管道 61…第1渦輪鼓風機 62…第2渦輪鼓風機 63…第3空氣吸引裝置 63a···空氣管道 64…鼓風機 70…自動壓縮機 71…第2薄膜傳送管道 80…控制器 P1…去除位置 P2…待機位置 231228437 发明 Description of the invention: [Developer of the family of the Ming family] Field of the invention The present invention relates to a thin film removing device and a thin film removing method. For example, 5 relates to the ability to efficiently perform peeling for removing a thin film on a glass substrate. Film removal device and film removal method for a series of steps such as collection, volume reduction (or compression). Background of the Invention 10 It is well known that it is used in the manufacture of flat displays such as TFT-LCD (thin-film transistor-driven color liquid crystal display), PDP (Plasma Display Panel), and EL (Electroluminescence). For the glass substrate, water glass (sodium oxalate) that has been dazzled with a glass melting furnace is supplied to a solution forming device. After being made into a glass substrate, the glass substrate is cut according to the original standard, and a protective film is coated on the surface. To] Glass substrate processing line. In the glass substrate processing line, after the film is peeled from the glass substrate, the glass substrate is cut to a size that meets the specifications of a flat panel display. In the subsequent coating step, a surface of the glass substrate is coated with, for example, a silicon dioxide (SiO2) film as an insulating film, and a 20 ITO (Indium tinoxide) film is coated as a conductive film. In a general film removing device for glass substrates, 'the roller conveyor is used to convey the glass substrate' while adhering the film of the glass substrate to the surface of the viscous ethyl formate roller, and performing the film peeling 1228437 In addition 'Patent Document i discloses a technology for removing a film from a glass substrate' A remote technology is to supply an adhesive tape by rolling it along the outside of a pressure roller, and while pressing the film of the glass substrate with the pressure roller, The film was adhered, and then the film was removed from the glass substrate with a paper tube connected to the pressure roller 5 while moving the pressure roller. Patent Document 1: Japanese Patent Application Laid-Open No. 4-189260 However, if foreign matter such as dust is adhered to the surface of the urethane roller, the adhesive force of the urethane roller is reduced and its function is lost. Therefore, it is necessary to periodically stop the operation of the film removing device and periodically clean the surface of the urethane roller, which has the problem of greatly reducing the productivity. In particular, in order to regenerate the adhesion of the urethane roller, it is necessary to use a solvent that is harmful to the human body, such as methyl ethyl ketone, to clean it. Therefore, there is also a disadvantage of damaging the working environment. In addition, the waste film peeled from the glass substrate using the urethane roller requires the operator to collect another 15 episodes, waste tea, which is labor-intensive and time-consuming. By reducing the volume of the waste film for waste disposal, more time and effort are required. Efforts have the problem of increasing production costs. -Generally, the operator shoots in small shots in order to efficiently collect the waste film. The collection operation does not collect the waste film and put it on the processing line intact. The waste film is scattered on the processing line. Not only does the surrounding environment damage the working environment, but also the danger of accidents caused by entering the processing line equipment. In addition, the technique of the aforementioned Patent Document 1 has many problems in terms of the continuous supply of the adhesive tape. Even in this technology, the operator must manually remove the film attached to the adhesive tape of the pressure roller. The waste film needs to be taken away and compressed or reduced in volume, which not only reduces the production efficiency 1228437 'but also increases The issue of production costs. [Summary of the Invention 3 Summary of the Invention = To solve the above-mentioned various problems of the conventional film nr, a method for efficiently peeling, collecting, and reducing the volume of the film from the glass substrate can be performed, and the production can be greatly reduced. One row of steps can improve production methods. Production cost restraint removal device and film removal 10 15 The peeled-off immediately-receiving-shaped member device and film removal method are capable of improving the film removal of the working environment. In addition, the volume of another film of the present invention can reduce waste nep This makes it easy to reduce the abolition method. In order to achieve the above-mentioned purpose, the present film removal method and the film removal method include the following steps: The method of removing the cloud includes the following steps. The method uses the plate-like member of the film of the conveying device. Covered with a thin step 'at the removal position of the conveying device toward the above-mentioned plate-shaped member, the compressed air is sprayed at the front end of the direction of + α, and the plate-shaped member peels off the film; the waste film discharge step is beneficial: : And the vacuum suction of the moving device adsorbs the waste thin glands that are peeled off from the roll-shaped member from the removal position of the conveying device. The waste thin glands are discharged from the above plate m, and the waste film collection step is carried out from there and collected by vacuum The waste film collected and discharged from the collection device is collected and collected; the waste film discharged from the collection device is discharged; the waste film is directly discerned after repeated shrinking steps. Brief description of the figure 20 228437 Figure 1 shows the structure of the film removal in the preferred embodiment of the present invention, the roller conveyor, the air jet shot, the air hole, the vacuum suction rolling device and the structure Section view. Fig. 2 is a front view showing the structure of a roller conveyor, an air-saving body, and an old-fashioned roll-mounted device and a driven clothing device in a film according to a preferred embodiment of the present invention. Film Removal Device of an Embodiment Vacuum Suspension Rolling Device and Drive FIG. 3 is a side view showing the structure of a preferred roller conveyor, an air ejector, and a device according to the present invention. 10 15 FIG. 4 is a front view showing a structure of a rolling device and a plutonium air suction device in a thin film removing device according to a preferred embodiment of the present invention. Fig. 5 is a partially enlarged sectional view showing a structure of a vacuum suction rolling device in a film removing device according to a preferred embodiment of the present invention. Fig. 6 is a sectional view taken along the line i-j shown in Fig. 5. Figures 7 (A) and 7 (B) are side views illustrating the operation of an air ejector in a thin film removing device according to a preferred embodiment of the present invention. Figures 8 (A) and 8 (B) are cross-sectional views illustrating the operation of a vacuum suction rolling device in a thin film removing device according to a preferred embodiment of the present invention. Fig. 9 is a system diagram showing the structure of a suction hood, a vortex dust collector, i-th and second air suction bows, and an automatic compressor of a collection device in a thin film removing device according to a preferred embodiment of the present invention. Fig. 10 is a perspective view showing the structure of a turning gate mounted on an outlet of a vortex dust collector in a film removing device according to a preferred embodiment of the present invention. FIG. 11 is a flowchart illustrating a thin film removal method for a glass substrate in a preferred embodiment of the present invention. Fig. 12 is a flowchart illustrating a method of removing a thin film of a glass substrate in a preferred embodiment of the present invention, and Fig. 12 is a flowchart following Fig. 11; [Treatment method *] Detailed description of 5 preferred embodiments Hereinafter, the best embodiment of the thin film removing device and the removing method of the present invention will be described in detail with reference to the drawings. First, as shown in FIGS. I to 3, the film removing device ′ of the present invention includes a roller conveyor 1G as a transfer device. This roller conveyor 10 transports a thin plate-like member glass substrate having a thickness of about 0.5 to 1 mm to a removal position P1 at which the film 2 on the surface is removed, and at this time, the film 2 faces downward. In addition, the length (mm) x width (mm) of the glass substrate 1 may be, for example, about 370x470 to 1150x1300. As shown in Figs. 1 and 3, a plurality of transfer rollers (feed rollers) 12 that transfer the glass substrate 1 by a rotating motion are arranged at predetermined intervals on the frame 15 of the roller conveyor 10 only. The conveying roller 12 of the roller conveyor 10 conveys the glass substrate 1 in a conveying direction 13 by a known motor and a conveying device such as a power transmitting chain or a power transmitting belt that transmits the driving force of the motor. In addition, as shown in FIG. 1, a sensor 14 is provided on the frame 20 and the rack 11 of the roller conveyor 10, and the sensor 14 detects whether the front end of the glass substrate i in the conveying direction reaches the removal of the roller conveyor w. Position P1. The sensor 14 is composed of a light emitting sensor 14 & which emits a light signal, and a light receiving sensor 14b which receives a light signal transmitted from the light emitting sensor 14a. In this embodiment, the sensor 14 may be configured by a non-contact sensor. 1228437 Referring to FIGS. 1 to 3, 7 (A), and 7 (B), at the removal position P1 of the roller conveyor 10, as the compressed air is sprayed to the front end of the glass substrate 2 in the conveying direction, In this way, the air jet device for peeling the film 2 from the glass substrate i was provided with an air jet 20. The air ejector 20 is arranged in parallel with the transfer drum 12 of the roller type 5 conveyor 10. The air ejector 20 is composed of a hollow-type ventilation pipe 22 connected to the air supply device 21 to form an air passage, and a plurality of air nozzles 23 which are installed outside the ventilation pipe 22 so that they can be transferred to the glass substrate 1 Compressed air is sprayed in the forward direction. The air supply device 21 may be composed of an auxiliary device such as an air compressor that generates compressed air, an air controller that controls air supply from the air compressor, and valves and pressure gauges that control air pressure and flow. The valve and pressure The meter is mounted on the air inlet pipe connecting the air pipe 22 and the air controller. In this embodiment, the air compressor of the air supply device 21 may be replaced by a blower. 15 In addition, by the operation of the pair of first cylinders 24 as working devices, the air ejector 20 is at the removal position ρ of the roller conveyor 10 and the standby position P2 allowing the conveyance of the broken glass substrate 1 (refer to Section 7 (B ))). A pair of first air cylinders 24 are respectively arranged on both upper portions of the frame via a fixing bracket 25. A connection bracket 26 is connected to a cylinder rod 24 a of the first cylinder 24. 20 A second cylinder 27 is attached to the side end of the connection bracket 26, and the air ejector 20 is moved in the horizontal direction with respect to the front end of the conveyance direction of the glass substrate 1 at the removal position P1 to approach or be separated. A cylinder rod 27a of the second cylinder 27 is connected to a side end of the breather pipe 22. Below the connection bracket 26, a side end of a feed roller 28 is rotatably mounted by a bearing 29. The pinch roller 28 is made of a flexible material such as urethane to prevent damage to the glass substrate 1. As shown in Fig. 7 (A), by the operation of the first cylinder 24, the air ejector 20 is lowered from the standby position P2 to the removal position P1, and the pinch roller 28 is left along the 5 roller conveyor 1o. The space through which the glass substrate 1 conveyed by the conveyance roller 12 passes is close to the vacuum suction rolling device 30 (described later). As shown in FIG. 7 (B), if the air ejector 20 is in the standby position P2 ', the pinch roller 28 is separated from the vacuum suction rolling device 30, and the glass substrate 1 can be freely transferred by the operation of the roller conveyor 10. 10 Referring to FIGS. 1 to 6, a vacuum suction rolling device 30 is provided at the removal position P1 of the roller conveyor 10. The vacuum suction rolling device 30 absorbs the waste peeled from the glass substrate 1 by the operation of the air ejector 20. The film 2a (see FIG. 8 (B)) 'makes it detach from the glass substrate; [, and is discharged from the lower part of the frame n. The vacuum suction rolling device 30 has a hollow main drum 31 which is rotatably provided in the removal position P1 of the drum conveyor 10 in parallel with the transfer drum 12. The main drum 31 is provided with a plurality of suction holes 3ia. The suction holes 3 are sucked into the film 2a peeled from the glass substrate i by suction air, and are arranged at regular intervals in the longitudinal direction and the circumferential direction to form a group. The suction hole 31a of the main drum 31 is formed with an elongated rectangular groove in the longitudinal direction. A hollow coupling 311 in which a bearing 32 is fitted is connected to each of both side ends of the main drum 20). A hollow suction pipe 33 is mounted inside the main drum 31. In the upper part of the suction pipe 33 of the removal position P1 of the sin near roller conveyor 10, the suction holes 33a and the like of the main / decay 31 are communicated to form the suction holes 33a and the like of the air passage, and the length direction of the / σ suction pipe 33 Formed as a column. At both ends of the suction tube 11 1228437, an adapter 33b is installed. The adapter is now fixed through the fixing bracket 34 on the frame 11 of the fixed * roller carousel. The bearing 32 mounted on the coupling 31b of the main roller is supported outside the adapter 33b. In addition, the pipe 33 is inserted inside the main roller 31 so that at least the suction hole is formed outside the guide pipe 33 It is isolated from the inner surface of the main drum 31. As shown in FIG. 4 in detail, the adapter 28 of the suction pipe 33 is connected to the first air suction device 35 through the inlet 35a. The i-th air suction device is composed of the suction pipe 33%. The blower 36 sucks and discharges air. The first air suction device 35 may also be configured by a vacuum pump instead of the blower 36. On the main drum & = 10 side, the suction holes 31a of the main drum 31 are enclosed at predetermined intervals. There are multiple sub-rollers 37, etc. The sub-roller 37 is made of a material with a high friction coefficient = ethyl acetate, rubber, flexible polymer, etc., which is used to protect the glass substrate 1 and increase the waste film 2a. "Sigh on the auxiliary roller 37, there are suction holes 37a corresponding to the terrain 15 corresponding to the suction holes of the main roller 31, respectively. In addition, isolation rings 38a are provided between adjacent sub-rollers "to keep the sub-rollers 37 spaced apart. The side-end material sub-rollers 37 'located on the main side of the main roller 31 are installed so that they each have a different length. The ends of the main drum 31 are kept at a proper interval. In addition, as shown in FIG. 8 (A) and FIG. The conveying direction rotates in one direction. As shown in FIG. 3, the driving device 40 is fixed to the frame of the roller conveyor 10, a motor M that provides a driving force, and transmits the motor 41_power shaft force to the main roller 31. The transmission belt 42 is composed of a driving pulley 42a mounted on the driving shaft 12 Ϊ 228437 of the motor 41, a driven pulley 42b mounted on one end of the main drum 31, and The belt 42c is placed on the driving pulley 42a and the driven pulley 42b. As shown in FIG. 9, the film removing device of the present invention has a collecting device 505 '. The collecting device 50 uses the vacuum suction of the vacuum suction rolling device 30, Collect from roll The waste film 2a discharged from the removal position P1 of the conveyor 10. The collecting device 50 is composed of a suction hood (intake) 51 and a vortex dust collector 53. The suction hood 51 accommodates the glass substrate 1 from the actual suction rolling device 30 The waste film 2a that is peeled off, and discharged from the removal position P1. The scroll dust collector 53 is connected to the suction cover 51 through the first film conveyance path 52 and the suction cover 51. A suction is formed on the scroll dust collector 53 up and down The inlet 53a of the waste film 2a and the outlet 53b from which the waste film 2a is discharged. The inlet 51a of the suction cover 51 is disposed close to the lower part of the vacuum suction rolling device 30. An outlet 51b formed at one end of the suction cover 51 is connected to a first worker. Film conveying duct 52. The first film conveying duct 52 is connected to the inlet 53a and the outlet 53b of the scroll dust collector 53. The inlet 53a and the outlet 53b of the scroll dust collector 53 are arranged vertically. The scroll dust collector 53 The inlet 53a is connected to the outlet 51b of the suction hood 51 through the first film transfer pipe 52. Although one suction hood 51 is shown in FIG. 9, it is possible to provide only a drum-type conveyance for a plurality of glass substrate processing lines. Removal position 20 of machine 10 The number of suction hoods 51 can be connected to the inlet 53a of the vortex dust collector 53 through the first film transfer pipe 52. In the present embodiment, the inlet 53a of the vortex dust collector 53 can also be used Directly suck and collect the waste film 2a instead of using the suction cover 51 and the i-th film conveying pipe & As shown in FIG. 9, an outlet 53b of the vortex dust collector 53 is installed with a vortex from 13 1228437 5 10 15 The dust collector 53 discharges the turning gate 54 of the waste film 2a. As shown in the second paste, the turning gate 54 is rotatably approached by a motor that provides a driving force: the exit 53b of the spin dust collector 53 and the “impeller ^ the second impeller 57 and the i-th impeller” 56 and the second impeller 57 are constituted by a belt transmission gear for transmitting power such as the driving force of the i-th impeller 电机 motor 55 and a gear set 59 which transmits the rotational force of the first impeller 56 to the second impeller ^. The jujube 56 and the second impeller 57 each have a cylindrical drum, and a plurality of wings 56b and 57b are formed radially outside the compression drums 56a and 57a along the longitudinal direction, and they cooperate to send out a waste film. On both ends of the rollers 56a and 57a, shafts 56c and 57c are protruded and extended on both side walls of the through-scroller 53. The respective shafts 56c and 57c of the impeller 56 and the second impeller 57 have been extended. The known bearing is rotatably supported on both side walls of the vortex dust collector. The power transmission belt 58 is composed of a driving pulley 58a mounted on the driving wheel of the motor 55, a driven pulley 58b mounted on the shaft 56c of the first impeller 56, and a belt 58c sleeved on the driving pulley 58a and the driven pulley 58b. . The gear set 59 is composed of a driving gear 59a and a driven gear 59b. The driving gear 59a is on the shaft 56c of the ^ th impeller% opposite to the driving pulley 58a, and the driven gear 59b is on the shaft 57c of the second impeller 57. It can be engaged with the driving gear 59a to rotate. If the driving force of the motor 55 is transmitted by the power transmission belt 58 to rotate the first impeller 56, the rotational force of the first impeller 56 is transmitted to the second impeller 57 by the gear set 59, and the second impeller 57 is opposite to the first impeller 56. When the blades 56b and 57b of the first impeller 56 and the second impeller 57 are rotated in the same direction, the waste film 2a is sent out from the outlet 53b of the scroll dust collector 53. 14 1228437 As shown in FIG. 9 again, the first turbo blower 61 of the second air suction device 60 is connected to a position close to the inlet 5 of the vortex dust collector 53 through an air duct 60a. A second turbo blower 62 having the same structure as the first turbo blower 61 is connected in parallel to the air duct 60a of the second air suction device 60. In this embodiment, each of the first turbine air blower 61 and the second turbine air blower 62 has an air volume of 14 m3 / min and a wind pressure of 25 mmAg. When the film removing device of the present invention is operated, only one of the first turbo blower 61 and the second turbo blower 62 of the second air suction device 60 may be operated, such as the first turbo blower 61. The second turbine blower 62 is prepared to continuously operate the collection of the waste film 2a without interruption in the event of failure of the second wheel blower 10. A blower 64 of a third air suction device 63 is connected to the outlet 53b of the vortex dust collector 53 via an air pipe 63a. In this embodiment, the air volume of the 'prostitute fan 64' is set to 23 m3 / min and the wind pressure is set to 19 mm Ag. The first turbo blower 61, the second turbo blower 62, and the blower 15 64 may each be constituted by a vacuum pump. In addition, an automatic compressor 70 is connected to the outlet 53b of the scroll dust collector 53 through a second film transfer pipe 71, and the automatic compressor 70 compresses, binds, and discharges the waste film 2a supplied from the full dust collector 53 . The automatic compressor 70 is composed of a commercially available WelSer SB2000 series automatic compressor manufactured by Ancove Enterprise Limited of Germany, and the first film transfer pipe 52 and the second film transfer pipe 71 are each a pipe. As shown in FIG. 1, the film removing device of the present invention includes a roller conveyor 10, a blower 36 that controls an air ejector 20, a first air suction device 35, a driving device 40, a turning gate 54, and a second air suction device 60. And the third air 15 122843 the air suction cracking 63 and other controllers 80 for controlling the operation. A sensor 14 is connected to the controller 80, and controls the operation of the air ejector according to a signal input from the sensor. The controller 80 may be constituted by a programmable control H (programmable controller) or a computer capable of controlling each operation in a sequential program. 5. A thin film removing method using the glass substrate thin film removing device of the present invention having the above-mentioned configuration will be described with reference to Figs. 11 and 12. As shown in FIGS. 1, 4 and 9, first, using the control of the controller, the blower 36 of the first air suction device 35, the motor 55 for turning the shutter, and the i-th of the second air suction device 60 are controlled. The turbo blower 61 and the blower 64 of the third air 10 suction device 63 are operated, and the waste film 2a peeled and discharged from the glass substrate is collected (S100). As shown in FIGS. 3 and 7 (A), the cylinder rod 24a is advanced by the action of the} th cylinder 24, so that the air ejector 20 is lowered from the standby position p2 to the removal position P1 of the roller conveyor 10 to prepare (S101). By lowering the air 15 of the ejector 20, the pinch rollers are separated from each other, so that the sub-roller 37 can pass through the glass substrate with respect to the vacuum suction rolling device 30. As shown in FIG. 1 and FIG. 4, after the glass substrate 1 is supplied to the transfer roller 12 of the roller conveyor 10 with the film 2 facing downward, once the roller conveyor 10 is operated, the glass substrate passes through the The rotary motion is transferred to the removal position P1 in the transfer direction 13 2O (S102). The glass substrate 2 transmitted by the operation of the roller conveyor 10 is detected by the sensor 14, and the sensor 14 inputs a detection signal of the glass substrate 1 to the controller 80, and the controller 80 receives the detection signal input from the sensor 14. Does the signal determine whether the tip of the glass substrate 1 in the conveying direction has reached the removal position? 1 (§103). 16 1228437 If the controller 80 determines that the leading edge of the glass substrate 1 in the conveying direction has reached the removal position P1 (YES), the operation of the roller conveyor 10 is stopped (S104). In the present embodiment, as shown in FIG. 7 (A), the stop of the roller conveyor 10 is set at the leading end of the glass substrate 1 in the conveying direction, and the pinch roller 28 5 and the auxiliary roller 37 of the vacuum suction rolling device 30 are set. Between moments. Referring to FIG. 3 and FIG. 7 (A) again, if the controller 80 stops the operation of the roller conveyor 10, the second cylinder 27 is operated to advance the cylinder rod 27a, and the air nozzle 23 of the air ejector 20 is brought close to The front end of the glass substrate 1 in the conveying direction (indicated by a dotted line in FIG. 7 (A)), the compressed air is ejected by the air 10 nozzle 23 of the air ejector 20, and the film 2 is peeled from the glass substrate 1 (si05). When the compressed air is sprayed toward the front end of the glass substrate 1 in the conveying direction by the air nozzle 23 of the gas nozzle ejector 20, the front end of the glass 1 may be moved away from the front end of the substrate 1 in the conveying direction due to the spraying force of the compressed air. The sub roller 37 of the device 30 floats. However, as shown in FIG. 7 (A), the pinch roller 28 located above 15 of the sub roller 37 presses the upper surface of the glass substrate 1 to prevent glass separation. A floating phenomenon of the substrate 1. Then, as shown in Fig. 7 (B), after the film 2 is peeled off, the cylinder rod 27a is retracted by the action of the second gas red 27 so that the glass substrate 1 being transported does not interfere with the air ejector 20. After that, the air ejector 20 23 of the air ejector 20 is separated from the front end of the glass substrate 1 in the conveying direction, and the cylinder rod 24 a is retracted by the action of the first cylinder 24 to return the air ejector 20 from the removal position P1 to the standby position P2 (S106). The air ejector 20 is returned to the standby position p2, and the glass substrate 1 is transported again by the running roller conveyor 10, and is discharged from the removal position P1 (S107). 17 1228437 As shown in FIGS. 3, 4, 8 (A), and 8 (B), when the glass substrate 1 is discharged by the operation of the roller conveyor 10, the air is ejected to 20 from the glass substrate 1 by the operation air. The stripped waste film 2a is absorbed by the suction force transmitted through the suction bows 37a and the like of the auxiliary drum 37, the suction holes 31a and the like of the main drum 31, and the suction 5 and 3% of the suction pipe 33, etc. surface. The main roller 31 of the vacuum suction rolling device 30 that transmits the driving force of the motor 41 using the power transmission belt 42 is rotated toward the conveying direction of the glass substrate 1. By rotating the main roller 31, the waste film 2 a adsorbed on the surface of the sub roller 37 is driven from The glass substrate i falls off and is discharged from the removal position P1 of the roller conveyor 10 (S108). In addition, as shown in FIG. 8 (B) of FIG. 10, by rotating the main drum 31, the suction hole 37a of the sub-roller 37 that has adsorbed the waste film 仏-once away from the suction hole 33a of the suction pipe 33, acts on the sub-roller 37. The attractive force of the suction hole 37a is weakened, and the waste film 2a adsorbed on the surface of the sub roll 37 is smoothly detached from the sub roll 37. By operating the roller conveyor 10 in this manner, the glass-based 15 plate 1 covered with the film 2 can be continuously conveyed. The compressed air is sprayed toward the front end of the glass substrate 1 in the conveying direction by the action of the air ejector 20, and the glass substrate 1 is peeled and covered. After the thin film 2 is operated, the waste film 2a peeled from the glass substrate 1 can be quickly discharged from the glass substrate i by operating the vacuum suction rolling device 30, so that the productivity can be greatly improved, the automatic removal of the film 2 can be easily implemented, and the production cost can be reduced. Furthermore, the waste film 2a can be quickly and automatically discharged by the vacuum suction method using the vacuum suction rolling device 30, which can improve the working environment and effectively prevent the processing line failure caused by the waste film 2a remaining on the glass substrate processing line. As shown in Fig. 9 and Fig. 10, the waste film 2a peeled and discharged by the auxiliary roller π is collected in the suction cover 51 of the collection device 50. At this time, at the inlet 51a of the suction cover 51 18 1228437, the attraction force generated by the operation of the x-th turbo blower 61 acts on the vortex dust collector 53 through the first film transfer pipe 52, and is sucked from the auxiliary roller of the vacuum rolling device 30 The peeled waste film 2a is immediately collected in the inlet 51a of the suction cover 51. The waste film 2a passes through the outlet 51b, 5 of the suction cover 51, and the first film transfer duct 52 and the inlet 53a of the scroll dust collector 53 and is sucked and collected inside the scroll dust collector 53 (S109). The secondary attraction force generated by the operation of the blower 64 controls the internal pressure 'acting on the inlet 53a and the outlet 53b of the scroll dust collector 53 to discharge the waste film 2a sucked in by the inlet 53a of the scroll dust collector 53 at the outlet 53b. That is, the internal pressure generated by the blower 64 on the outlet 53b 10 side of the scroll dust collector 53 is smaller than the internal pressure generated on the inlet 53a. Accordingly, a low internal pressure is generated on the side of the inlet 53a of the scroll dust collector 53 on the side of the outlet 53b. Therefore, the waste film 2a sucked in the inlet 53a of the scroll dust collector 53 can be smoothly transferred to the outlet. 53b and discharged. Then, the driving force of the motor 55 is transmitted by the power transmission belt 58 to rotate the blades 56a and 57a of the first impeller 56 and the second impeller 57 to be discharged to the vortex at the outlet 53b of the scroll dust collector 53. The waste film 2a at the outlet 53b of the rotary dust collector 53 and the waste film 2a discharged from the outlet 53b of the scroll dust collector 53 are supplied to the automatic compressor 70 through the second film transfer pipe 71 (S110). The automatic compressor 70 compresses the waste film 2a into a block shape (S111). 20 The compressed waste film block 2b is bundled with an end device such as a wire and discharged (S112). At this time, the supplied waste film 2a reaches a predetermined amount, and the automatic compressor 70 will automatically compress to reduce the volume. The waste film block 2b that has been completed by the operation of the automatic compressor 70 weighs about 40 to 60 kg, and the volume ( m3) Approximately 500x 400x 600 ~ 1200. Therefore, the operator hates to easily discard the waste film block 2b discharged from the mobile compressor 70 from 191228437. In addition, although the glass substrate has been described in this embodiment, it is also applicable to other materials such as a plastic material. The preferred embodiments of the present invention have been described above, but various changes and modifications can be made without departing from the spirit of the present invention and the scope of patent application, which should be understood by those skilled in the art. In summary, according to the thin film removing device and the thin film removing method of the present invention, a series of steps such as peeling, collecting, and volume reduction for removing a thin film from a glass substrate can be efficiently performed, which can improve productivity and reduce production. cost. In addition, the waste film peeled and discharged from the plate-like member can be collected immediately, the working environment can be improved, the volume of the waste film block can be effectively reduced, and the disposal cost can be greatly reduced. I: Brief Description of Drawings 3 FIG. 1 is a cross-sectional view showing the structure of a roller conveyor, an air ejector, a vacuum suction rolling device, and a driving device in a film removal device 15 according to a preferred embodiment of the present invention. Fig. 2 is a front view showing the configuration of a roller conveyor, an air ejector, a vacuum suction rolling device, and a driving device in a film removal device according to a preferred embodiment of the present invention. 20 FIG. 3 is a side view showing the configuration of a roller conveyor, an air ejector, a vacuum suction rolling device, and a driving device in a film removal device according to a preferred embodiment of the present invention. Fig. 4 is a front view showing the configuration of a vacuum suction rolling device and a first air suction device in a film removal device according to a preferred embodiment of the present invention. 20 1228437 Fig. 5 is a partially enlarged cross-sectional view showing the structure of a vacuum suction rolling device in a film removing device according to a preferred embodiment of the present invention. Fig. 6 is a sectional view taken along the line I-I shown in Fig. 5. Figures 7 (A) and 7 (B) are side views illustrating the operation of an air ejector in a thin film removing device according to a preferred embodiment of the present invention. Figures 8 (A) and 8 (B) are cross-sectional views illustrating the operation of a vacuum suction rolling device in a thin film removing device according to a preferred embodiment of the present invention. Fig. 9 is a system diagram showing the structure of a suction cover, a vortex dust collector, first and second air suction devices, and an automatic compressor of a collection device in a thin film removing device according to a preferred embodiment of the present invention. Fig. 10 is a perspective view showing the structure of a turning gate mounted on an outlet of a vortex dust collector in a film removing device according to a preferred embodiment of the present invention. Fig. 11 is a flowchart illustrating a method for removing a thin film from a glass substrate in a preferred embodiment of the present invention. 15 FIG. 12 is a flowchart illustrating a method of removing a thin film on a glass substrate in a preferred embodiment of the present invention, and is a flowchart subsequent to FIG. 11. [Representative symbols for main components of the drawing 1 1 ... glass substrate 14 ... sensor 2 ... peeling film 14a ... light emitting sensor 2a ... hair emitting film 14b ... light receiving sensor 10 ... roller conveyor 20 ... air ejector 11 ... frame 21 ... Air supply device 12 ... Transport roller 22 ... Hollow vent tube 13 ... Transfer direction 23 ... Air nozzle 21 1228437 24 ... First cylinder 25 ... Fix bracket 26 ... Connecting bracket 27 ... Second cylinder 27a ... Cylinder rod 28 ... pinch roller 29 ... through bearing 30 ... rolling device 31 ... main roller 31a ... suction hole 31b ... coupling 32 ... bearing 33 ... suction tube 33a ... suction hole 33b ... adapter 35 ... air suction device 35a ... intake pipe 36 ... blower 37 ... roller 37a ... suction holes 38a, 38b ... isolation cup 40 ... driving drive device 41 ... motor 41a ... drive shaft 42 ... belt 42a ... drive pulley 42b ... driven pulley 42c ... belt 50 ... collector 51 ... inhalation department 52 ... transmission pipe 53 ... rotary dust collector 53a ... inlet 53b ... outlet 54 ... turn gate 55 ... motor 56 ... transfer motor 56 ... first impeller 56a, 57a ··· Roller 56 b, 57b ... Fingers 56c, 57c ... The vehicle is composed of 57 ... the second impeller 58 ... the belt 58a ... the drive pulley 58b ... the driven pulley 58c ... the belt 59 ... the wheel set 59a ... the drive gear 22 1228437 59b ... driven gear 60 ... second air suction device 60a ... air duct 61 ... first turbo blower 62 ... second turbo blower 63 ... third air suction device 63a ... air duct 64 ... blower 70 ... automatic compressor 71 ... 2nd film transfer pipe 80 ... Controller P1 ... Remove position P2 ... Standby position 23