CN120035488A - 基材清洗装置 - Google Patents

基材清洗装置 Download PDF

Info

Publication number
CN120035488A
CN120035488A CN202380070197.3A CN202380070197A CN120035488A CN 120035488 A CN120035488 A CN 120035488A CN 202380070197 A CN202380070197 A CN 202380070197A CN 120035488 A CN120035488 A CN 120035488A
Authority
CN
China
Prior art keywords
mist
substrate
cleaning
air
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380070197.3A
Other languages
English (en)
Chinese (zh)
Inventor
后藤洸圣
平松孝浩
织田容征
一濑明大
波户信义
柳本博
黑田圭儿
森连太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
TMEIC Corp
Original Assignee
Toyota Motor Corp
TMEIC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp, TMEIC Corp filed Critical Toyota Motor Corp
Publication of CN120035488A publication Critical patent/CN120035488A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/022—Cleaning travelling work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B08B5/023—Cleaning travelling work
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
CN202380070197.3A 2023-09-21 2023-09-21 基材清洗装置 Pending CN120035488A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/034315 WO2025062573A1 (ja) 2023-09-21 2023-09-21 基材洗浄装置

Publications (1)

Publication Number Publication Date
CN120035488A true CN120035488A (zh) 2025-05-23

Family

ID=95072355

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380070197.3A Pending CN120035488A (zh) 2023-09-21 2023-09-21 基材清洗装置

Country Status (6)

Country Link
JP (1) JP7827837B2 (https=)
KR (1) KR20250070073A (https=)
CN (1) CN120035488A (https=)
DE (1) DE112023003433T5 (https=)
TW (1) TW202514776A (https=)
WO (1) WO2025062573A1 (https=)

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095991U (ja) * 1983-12-02 1985-06-29 株式会社　東京精密 洗浄用ノズル
JP3565690B2 (ja) 1997-09-02 2004-09-15 株式会社プレテック 密閉型洗浄装置およびこの装置を用いて精密基板を洗浄する方法
WO2001000336A1 (en) * 1999-06-24 2001-01-04 Sumitomo Heavy Industries, Ltd. Method and device for washing by fluid spraying
JP2005012197A (ja) * 2003-05-26 2005-01-13 Sumitomo Heavy Ind Ltd エアロゾル洗浄方法及び装置
JP2005166792A (ja) * 2003-12-01 2005-06-23 Dainippon Screen Mfg Co Ltd 基板処理装置
JP3769583B1 (ja) * 2004-07-09 2006-04-26 積水化学工業株式会社 基材処理装置及び方法
JP2006140306A (ja) * 2004-11-12 2006-06-01 Dainippon Screen Mfg Co Ltd 基板洗浄装置および基板洗浄方法
JP2007033730A (ja) 2005-07-26 2007-02-08 Optrex Corp 洗浄装置及び液晶パネルの製造方法
JP4802002B2 (ja) * 2006-01-30 2011-10-26 芝浦メカトロニクス株式会社 基板の洗浄処理装置及び洗浄処理方法
JP4938357B2 (ja) * 2006-05-31 2012-05-23 ナノミストテクノロジーズ株式会社 洗浄方法と洗浄装置
JP2009136742A (ja) 2007-12-05 2009-06-25 Pioneer Electronic Corp 基板洗浄装置
JP4413266B1 (ja) * 2008-12-15 2010-02-10 アクアサイエンス株式会社 対象物洗浄方法及び対象物洗浄システム
JP5757003B1 (ja) * 2014-12-12 2015-07-29 アクアサイエンス株式会社 液滴噴射流生成装置及び液滴噴射流生成方法
JP2020018993A (ja) 2018-08-03 2020-02-06 三菱重工業株式会社 洗浄装置、表面処理装置および洗浄方法

Also Published As

Publication number Publication date
JP7827837B2 (ja) 2026-03-10
WO2025062573A1 (ja) 2025-03-27
KR20250070073A (ko) 2025-05-20
JPWO2025062573A1 (https=) 2025-03-27
TW202514776A (zh) 2025-04-01
DE112023003433T5 (de) 2025-06-12

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