CN117546011A - 透射x射线检查装置和透射x射线检查方法 - Google Patents

透射x射线检查装置和透射x射线检查方法 Download PDF

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Publication number
CN117546011A
CN117546011A CN202280044285.1A CN202280044285A CN117546011A CN 117546011 A CN117546011 A CN 117546011A CN 202280044285 A CN202280044285 A CN 202280044285A CN 117546011 A CN117546011 A CN 117546011A
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CN
China
Prior art keywords
ray
transmission
rays
sample
inspection apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280044285.1A
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English (en)
Chinese (zh)
Inventor
青山朋树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Publication of CN117546011A publication Critical patent/CN117546011A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G01N23/087—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays using polyenergetic X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/426—Imaging image comparing, unknown with known substance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/652—Specific applications or type of materials impurities, foreign matter, trace amounts

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN202280044285.1A 2021-06-30 2022-06-28 透射x射线检查装置和透射x射线检查方法 Pending CN117546011A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021108333 2021-06-30
JP2021-108333 2021-06-30
PCT/JP2022/025838 WO2023277039A1 (ja) 2021-06-30 2022-06-28 透過ｘ線検査装置、及び透過ｘ線検査方法

Publications (1)

Publication Number Publication Date
CN117546011A true CN117546011A (zh) 2024-02-09

Family

ID=84691447

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280044285.1A Pending CN117546011A (zh) 2021-06-30 2022-06-28 透射x射线检查装置和透射x射线检查方法

Country Status (4)

Country Link
JP (1) JP7846111B2 (https=)
CN (1) CN117546011A (https=)
DE (1) DE112022003317T5 (https=)
WO (1) WO2023277039A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025006215A (ja) * 2023-06-29 2025-01-17 アンリツ株式会社 Ｘ線検査装置および物品検査システムならびにｘ線画像形成装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5596620A (en) * 1993-04-30 1997-01-21 The University Of Connecticut X-ray based extensometry device for radiography
JPH10318943A (ja) * 1997-05-20 1998-12-04 Shimadzu Corp 異物検査装置
JP5329103B2 (ja) * 2008-02-01 2013-10-30 ジーイー・メディカル・システムズ・グローバル・テクノロジー・カンパニー・エルエルシー 画像処理装置及びｘ線ｃｔ装置
KR101228911B1 (ko) * 2010-08-06 2013-02-15 라드텍주식회사 이중 에너지 ｘ-선 흡광분석을 이용한 ｘ-선 영상장치
US8311184B2 (en) 2010-08-30 2012-11-13 General Electric Company Fan-shaped X-ray beam imaging systems employing graded multilayer optic devices
JP6783456B2 (ja) * 2016-08-24 2020-11-11 株式会社日立ハイテクサイエンス Ｘ線透過検査装置
JP6878038B2 (ja) * 2017-02-15 2021-05-26 キヤノン株式会社 放射線撮影装置、放射線撮影システム、画像処理装置、画像処理装置の作動方法、及びプログラム
JP6663374B2 (ja) 2017-02-28 2020-03-11 アンリツインフィビス株式会社 Ｘ線検査装置

Also Published As

Publication number Publication date
JP7846111B2 (ja) 2026-04-14
DE112022003317T5 (de) 2024-04-11
JPWO2023277039A1 (https=) 2023-01-05
WO2023277039A1 (ja) 2023-01-05

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