DE112022003317T5 - Transmissions-röntgenprüfvorrichtung und transmissions-röntgenprüfverfahren - Google Patents

Transmissions-röntgenprüfvorrichtung und transmissions-röntgenprüfverfahren Download PDF

Info

Publication number
DE112022003317T5
DE112022003317T5 DE112022003317.7T DE112022003317T DE112022003317T5 DE 112022003317 T5 DE112022003317 T5 DE 112022003317T5 DE 112022003317 T DE112022003317 T DE 112022003317T DE 112022003317 T5 DE112022003317 T5 DE 112022003317T5
Authority
DE
Germany
Prior art keywords
transmission
ray
rays
sample
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112022003317.7T
Other languages
German (de)
English (en)
Inventor
Tomoki Aoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Publication of DE112022003317T5 publication Critical patent/DE112022003317T5/de
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G01N23/087—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays using polyenergetic X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/426—Imaging image comparing, unknown with known substance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/652—Specific applications or type of materials impurities, foreign matter, trace amounts

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE112022003317.7T 2021-06-30 2022-06-28 Transmissions-röntgenprüfvorrichtung und transmissions-röntgenprüfverfahren Pending DE112022003317T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021108333 2021-06-30
JP2021-108333 2021-06-30
PCT/JP2022/025838 WO2023277039A1 (ja) 2021-06-30 2022-06-28 透過ｘ線検査装置、及び透過ｘ線検査方法

Publications (1)

Publication Number Publication Date
DE112022003317T5 true DE112022003317T5 (de) 2024-04-11

Family

ID=84691447

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112022003317.7T Pending DE112022003317T5 (de) 2021-06-30 2022-06-28 Transmissions-röntgenprüfvorrichtung und transmissions-röntgenprüfverfahren

Country Status (4)

Country Link
JP (1) JP7846111B2 (https=)
CN (1) CN117546011A (https=)
DE (1) DE112022003317T5 (https=)
WO (1) WO2023277039A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025006215A (ja) * 2023-06-29 2025-01-17 アンリツ株式会社 Ｘ線検査装置および物品検査システムならびにｘ線画像形成装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018141736A (ja) 2017-02-28 2018-09-13 アンリツインフィビス株式会社 Ｘ線検査装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5596620A (en) * 1993-04-30 1997-01-21 The University Of Connecticut X-ray based extensometry device for radiography
JPH10318943A (ja) * 1997-05-20 1998-12-04 Shimadzu Corp 異物検査装置
JP5329103B2 (ja) * 2008-02-01 2013-10-30 ジーイー・メディカル・システムズ・グローバル・テクノロジー・カンパニー・エルエルシー 画像処理装置及びｘ線ｃｔ装置
KR101228911B1 (ko) * 2010-08-06 2013-02-15 라드텍주식회사 이중 에너지 ｘ-선 흡광분석을 이용한 ｘ-선 영상장치
US8311184B2 (en) 2010-08-30 2012-11-13 General Electric Company Fan-shaped X-ray beam imaging systems employing graded multilayer optic devices
JP6783456B2 (ja) * 2016-08-24 2020-11-11 株式会社日立ハイテクサイエンス Ｘ線透過検査装置
JP6878038B2 (ja) * 2017-02-15 2021-05-26 キヤノン株式会社 放射線撮影装置、放射線撮影システム、画像処理装置、画像処理装置の作動方法、及びプログラム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018141736A (ja) 2017-02-28 2018-09-13 アンリツインフィビス株式会社 Ｘ線検査装置

Also Published As

Publication number Publication date
JP7846111B2 (ja) 2026-04-14
JPWO2023277039A1 (https=) 2023-01-05
WO2023277039A1 (ja) 2023-01-05
CN117546011A (zh) 2024-02-09

Similar Documents

Publication Publication Date Title
EP3857588B1 (de) Verfahren zum betreiben eines vielstrahl-teilchenstrahlmikroskops
DE69030047T2 (de) Röntgenstrahlen-Fluoreszenzgerät unter Verwendung der Totalreflexion
DE19801770B4 (de) Probenanalyseverfahren
DE102016218920B4 (de) Dual-Energy-Detektionsvorrichtung, Dual-Energy-Detektionssystem und Dual-Energy-Detektionsverfahren
DE102011078357B4 (de) Vorrichtung für eine Röntgenstrahlanalyse mit klassifizierten Wellenlängen
DE2451301A1 (de) Radiographieapparat
DE4033051A1 (de) Optisches bestimmen der brennfleckgroesse einer roentgenroehrenanode sowie roentgenroehre
DE3013244A1 (de) Automatische fehlstellen-detektorvorrichtung
DE3633738A1 (de) Radiologische untersuchungsgeraet
DE102007020545A1 (de) Detektormatrix und Vorrichtung zu deren Verwendung
DE202013011333U1 (de) Gerüstlose CT-Vorrichtung
EP3577626B1 (de) Verfahren zum dimensionellen röntgenographischen messen, insbesondere mittels computertomographie, und röntgen-computertomograph
DE102014226985A1 (de) Verfahren zum Analysieren eines Objekts sowie Teilchenstrahlgerät zur Durchführung des Verfahrens
DE112016001147T5 (de) Ladungsträgerstrahlvorrichtung und Bilderzeugungsverfahren damit
DE3412715C2 (de) Feldemissions-Abtastelektronenmikroskop
DE112018007534B4 (de) Einrichtung für strahl geladener teilchen
DE102019135722A1 (de) Röntgenprüfgerät und röntgenprüfverfahren
DE102012204350A1 (de) Verfahren zur Energie-Kalibrierung quantenzählender Röntgendetektoren in einem Dual-Source Computertomographen
DE3045013C2 (https=)
EP1850119A1 (de) Optischer Sensor und Verfahren zur optischen Inspektion von Oberflächen
EP1265198B1 (de) Vorrichtung und Verfahren zur Untersuchung von Dokumenten
DE112022003317T5 (de) Transmissions-röntgenprüfvorrichtung und transmissions-röntgenprüfverfahren
EP1647840B1 (de) Röntgen- oder neutronenoptisches Analysegerät mit variabel ausgeleuchtetem Streifendetektor
EP3108461B1 (de) Verfahren zum untersuchen eines wertdokuments und mittel zur durchführung des verfahrens
DE60033374T2 (de) Röntgenmikroskop mit einer röntgenstrahlungsquelle für weiche röntgenstrahlungen