JP7846111B2 - 透過ｘ線検査装置、及び透過ｘ線検査方法 - Google Patents

透過ｘ線検査装置、及び透過ｘ線検査方法

Info

Publication number
JP7846111B2
JP7846111B2 JP2023531997A JP2023531997A JP7846111B2 JP 7846111 B2 JP7846111 B2 JP 7846111B2 JP 2023531997 A JP2023531997 A JP 2023531997A JP 2023531997 A JP2023531997 A JP 2023531997A JP 7846111 B2 JP7846111 B2 JP 7846111B2
Authority
JP
Japan
Prior art keywords
ray
rays
transmission
transmitted
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023531997A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023277039A5 (https=
JPWO2023277039A1 (https=
Inventor
朋樹 青山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Publication of JPWO2023277039A1 publication Critical patent/JPWO2023277039A1/ja
Publication of JPWO2023277039A5 publication Critical patent/JPWO2023277039A5/ja
Application granted granted Critical
Publication of JP7846111B2 publication Critical patent/JP7846111B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G01N23/087—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays using polyenergetic X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/426—Imaging image comparing, unknown with known substance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/652—Specific applications or type of materials impurities, foreign matter, trace amounts

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2023531997A 2021-06-30 2022-06-28 透過ｘ線検査装置、及び透過ｘ線検査方法 Active JP7846111B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021108333 2021-06-30
JP2021108333 2021-06-30
PCT/JP2022/025838 WO2023277039A1 (ja) 2021-06-30 2022-06-28 透過ｘ線検査装置、及び透過ｘ線検査方法

Publications (3)

Publication Number Publication Date
JPWO2023277039A1 JPWO2023277039A1 (https=) 2023-01-05
JPWO2023277039A5 JPWO2023277039A5 (https=) 2025-05-26
JP7846111B2 true JP7846111B2 (ja) 2026-04-14

Family

ID=84691447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023531997A Active JP7846111B2 (ja) 2021-06-30 2022-06-28 透過ｘ線検査装置、及び透過ｘ線検査方法

Country Status (4)

Country Link
JP (1) JP7846111B2 (https=)
CN (1) CN117546011A (https=)
DE (1) DE112022003317T5 (https=)
WO (1) WO2023277039A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025006215A (ja) * 2023-06-29 2025-01-17 アンリツ株式会社 Ｘ線検査装置および物品検査システムならびにｘ線画像形成装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012049134A (ja) 2010-08-30 2012-03-08 General Electric Co <Ge> 勾配付き多層光学装置を用いたファン形ｘ線ビーム・イメージング・システム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5596620A (en) * 1993-04-30 1997-01-21 The University Of Connecticut X-ray based extensometry device for radiography
JPH10318943A (ja) * 1997-05-20 1998-12-04 Shimadzu Corp 異物検査装置
JP5329103B2 (ja) * 2008-02-01 2013-10-30 ジーイー・メディカル・システムズ・グローバル・テクノロジー・カンパニー・エルエルシー 画像処理装置及びｘ線ｃｔ装置
KR101228911B1 (ko) * 2010-08-06 2013-02-15 라드텍주식회사 이중 에너지 ｘ-선 흡광분석을 이용한 ｘ-선 영상장치
JP6783456B2 (ja) * 2016-08-24 2020-11-11 株式会社日立ハイテクサイエンス Ｘ線透過検査装置
JP6878038B2 (ja) * 2017-02-15 2021-05-26 キヤノン株式会社 放射線撮影装置、放射線撮影システム、画像処理装置、画像処理装置の作動方法、及びプログラム
JP6663374B2 (ja) 2017-02-28 2020-03-11 アンリツインフィビス株式会社 Ｘ線検査装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012049134A (ja) 2010-08-30 2012-03-08 General Electric Co <Ge> 勾配付き多層光学装置を用いたファン形ｘ線ビーム・イメージング・システム

Also Published As

Publication number Publication date
DE112022003317T5 (de) 2024-04-11
JPWO2023277039A1 (https=) 2023-01-05
WO2023277039A1 (ja) 2023-01-05
CN117546011A (zh) 2024-02-09

Similar Documents

Publication Publication Date Title
JP6397690B2 (ja) Ｘ線透過検査装置及び異物検出方法
Dreier et al. Spectral correction algorithm for multispectral CdTe x-ray detectors
CN104487868B (zh) 放射线图像取得装置
US11237278B2 (en) Radiation image acquisition system and radiation image acquisition method
WO2017110508A1 (ja) 放射線検出装置、放射線検査システム、及び、放射線検出装置の調整方法
JP7846111B2 (ja) 透過ｘ線検査装置、及び透過ｘ線検査方法
CN104076053B (zh) 异物检测装置
JP2015078835A (ja) Ｘ線回折装置
JP5069540B2 (ja) 電子分光分析複合装置、及び電子分光分析方法
JP6783456B2 (ja) Ｘ線透過検査装置
CN108572184B (zh) 高分辨率x射线衍射方法和装置
Aglagul et al. A simple approach for characterizing the spatially varying sensitivity of microchannel plate detectors
CN106290433B (zh) X射线数据处理装置及其方法以及程序
JP2002189004A (ja) Ｘ線分析装置
US11119059B2 (en) Semiconductor defect inspection apparatus and semiconductor defect inspection method
JP4853964B2 (ja) Ｘ線検査装置用のｘ線センサ
An et al. Full-field X-ray fluorescence imaging with a straight polycapillary X-ray collimator
JP6506629B2 (ja) Ｘ線受光装置およびこれを備えたｘ線検査装置
CN114720497B (zh) X射线分光分析装置及元素分析方法
JPWO2023277039A5 (https=)
Hubert et al. Absolute calibration of the spectral sensitivity of an x-ray streak camera over the 0.1–10 keV spectral range equipped with CsI photocathode
Enoto et al. Performance verification of the Gravity and Extreme Magnetism Small explorer (GEMS) x-ray polarimeter
Dutra et al. Characterization of Agfa Structurix series D4 and D3sc x-ray films in the 0.7–4.6 keV energy range
US20200116877A1 (en) X-ray inspection apparatus
US20250231124A1 (en) Inspection device, inspection element, and inspection method

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250516

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250516

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20260115

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260313

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20260326

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20260402

R150 Certificate of patent or registration of utility model

Ref document number: 7846111

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150