CN117501156A - 衍射光栅的制造方法和复制衍射光栅的制造方法 - Google Patents

衍射光栅的制造方法和复制衍射光栅的制造方法 Download PDF

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Publication number
CN117501156A
CN117501156A CN202280042297.0A CN202280042297A CN117501156A CN 117501156 A CN117501156 A CN 117501156A CN 202280042297 A CN202280042297 A CN 202280042297A CN 117501156 A CN117501156 A CN 117501156A
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CN
China
Prior art keywords
metal film
glass substrate
diffraction grating
manufacturing
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280042297.0A
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English (en)
Chinese (zh)
Inventor
八重㭴健太
江畠佳定
青野宇纪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Publication of CN117501156A publication Critical patent/CN117501156A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/0048—Moulds for lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/00769—Producing diffraction gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/061—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/38—Layered products comprising a layer of synthetic resin comprising epoxy resins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B32B3/30—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer formed with recesses or projections, e.g. hollows, grooves, protuberances, ribs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2063/00—Use of EP, i.e. epoxy resins or derivatives thereof, as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00—Coating on the layer surface
    • B32B2255/06—Coating on the layer surface on metal layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00—Coating on the layer surface
    • B32B2255/20—Inorganic coating
    • B32B2255/205—Metallic coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/40—Properties of the layers or laminate having particular optical properties
    • B32B2307/416—Reflective
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/40—Properties of the layers or laminate having particular optical properties
    • B32B2307/418—Refractive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2551/00—Optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Micromachines (AREA)
CN202280042297.0A 2021-07-05 2022-06-02 衍射光栅的制造方法和复制衍射光栅的制造方法 Pending CN117501156A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021111419 2021-07-05
JP2021-111419 2021-07-05
PCT/JP2022/022546 WO2023281950A1 (ja) 2021-07-05 2022-06-02 回折格子の製造方法および複製回折格子の製造方法

Publications (1)

Publication Number Publication Date
CN117501156A true CN117501156A (zh) 2024-02-02

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Family Applications (1)

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CN202280042297.0A Pending CN117501156A (zh) 2021-07-05 2022-06-02 衍射光栅的制造方法和复制衍射光栅的制造方法

Country Status (5)

Country Link
US (1) US12591083B2 (https=)
EP (1) EP4369063A4 (https=)
JP (1) JP7547637B2 (https=)
CN (1) CN117501156A (https=)
WO (1) WO2023281950A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025013135A1 (ja) * 2023-07-07 2025-01-16 日本電信電話株式会社 反射型回折光学素子及びその製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201125832A (en) * 2009-12-04 2011-08-01 Asahi Glass Co Ltd Method for producing silica-based glass substrate for imprint mold, and method for producing imprint mold
JP2012185522A (ja) * 2012-06-21 2012-09-27 Sumitomo Electric Ind Ltd モールドの形成方法、回折格子の形成方法、および分布帰還型半導体レーザの製造方法
CN103328176A (zh) * 2011-01-14 2013-09-25 吉坤日矿日石能源株式会社 微细图案转印用模具的制造方法及使用该模具的衍射光栅的制造方法、以及具有该衍射光栅的有机el元件的制造方法
WO2014148118A1 (ja) * 2013-03-19 2014-09-25 株式会社日立ハイテクノロジーズ 曲面回折格子及びその製造方法、並びに光学装置
WO2019130835A1 (ja) * 2017-12-27 2019-07-04 株式会社日立ハイテクノロジーズ 凹面回折格子の製造方法、凹面回折格子及びそれを用いた分析装置
WO2020021989A1 (ja) * 2018-07-23 2020-01-30 株式会社日立ハイテクノロジーズ 凹面回折格子の製造方法、製造装置及び凹面回折格子

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965810A (ja) 1982-10-08 1984-04-14 Hitachi Ltd 回折格子の製作方法
JP3487492B2 (ja) 1998-02-05 2004-01-19 大日本印刷株式会社 回折格子作製用位相マスクの製造方法
WO1999038040A1 (en) 1998-01-22 1999-07-29 Dai Nippon Printing Co., Ltd. Phase mask for manufacturing diffraction grating, and method of manufacture
JP2003172639A (ja) 2001-12-05 2003-06-20 Mitsutoyo Corp 正弦波形状光学格子の製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201125832A (en) * 2009-12-04 2011-08-01 Asahi Glass Co Ltd Method for producing silica-based glass substrate for imprint mold, and method for producing imprint mold
CN103328176A (zh) * 2011-01-14 2013-09-25 吉坤日矿日石能源株式会社 微细图案转印用模具的制造方法及使用该模具的衍射光栅的制造方法、以及具有该衍射光栅的有机el元件的制造方法
JP2012185522A (ja) * 2012-06-21 2012-09-27 Sumitomo Electric Ind Ltd モールドの形成方法、回折格子の形成方法、および分布帰還型半導体レーザの製造方法
WO2014148118A1 (ja) * 2013-03-19 2014-09-25 株式会社日立ハイテクノロジーズ 曲面回折格子及びその製造方法、並びに光学装置
WO2019130835A1 (ja) * 2017-12-27 2019-07-04 株式会社日立ハイテクノロジーズ 凹面回折格子の製造方法、凹面回折格子及びそれを用いた分析装置
WO2020021989A1 (ja) * 2018-07-23 2020-01-30 株式会社日立ハイテクノロジーズ 凹面回折格子の製造方法、製造装置及び凹面回折格子

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JPWO2023281950A1 (https=) 2023-01-12
EP4369063A4 (en) 2025-07-02
US20240411068A1 (en) 2024-12-12
JP7547637B2 (ja) 2024-09-09
US12591083B2 (en) 2026-03-31
EP4369063A1 (en) 2024-05-15
WO2023281950A1 (ja) 2023-01-12

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