JP2004227009A - 回折格子 - Google Patents
回折格子 Download PDFInfo
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- JP2004227009A JP2004227009A JP2004123248A JP2004123248A JP2004227009A JP 2004227009 A JP2004227009 A JP 2004227009A JP 2004123248 A JP2004123248 A JP 2004123248A JP 2004123248 A JP2004123248 A JP 2004123248A JP 2004227009 A JP2004227009 A JP 2004227009A
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- Japan
- Prior art keywords
- grating
- groove
- diffraction grating
- diffraction
- replica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
共鳴領域において広い波長帯域に渡って高い回折効率を持ち、レプリカ作成にも好適な回折格子を提供する。
【解決手段】
溝断面形状が正弦波状のものであって、その溝底部を平坦な形状とした。近赤外から赤外にかけて溝周期と波長が同程度の領域においては、従来のホログラフィック・グレーティング及びエシェレット・グレーティングより優れた分光性能(広い波長域でバランスよく高効率)を有するグレーティングとして機能し、また、レプリカ作成時においては溝のアスペクト比が小さいので溝同士が噛み合う力が小さく、且つ溝底が大きいため剥形剤溝底まで十分にいきわたるので、パーティング時に溝欠損などの不具合が生じにくい。
【選択図】図1
Description
a)回折格子パターンが基板上に直接刻線され、
b)該溝断面形状の溝底部が平坦に形成され溝底が大きく、
c)アスペクト比(溝周期に対する溝深さ)が小さい
ことを特徴とする。
2 :ホトレジスト層
21:回折格子パターン
Claims (1)
- ホログラフィック露光法により回折格子パターンが形成され、該回折格子パターンをイオンビームエッチング法により製作された正弦波状の溝断面形状を持つ回折格子であって、
a)回折格子パターンが基板上に直接刻線され、
b)該溝断面形状の溝底部が平坦に形成され溝底が大きく、
c)アスペクト比(溝周期に対する溝深さ)が小さい
ことを特徴とする回折格子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004123248A JP4389643B2 (ja) | 2004-04-19 | 2004-04-19 | 回折格子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004123248A JP4389643B2 (ja) | 2004-04-19 | 2004-04-19 | 回折格子 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000224869A Division JP3675314B2 (ja) | 2000-07-26 | 2000-07-26 | 回折格子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004227009A true JP2004227009A (ja) | 2004-08-12 |
JP4389643B2 JP4389643B2 (ja) | 2009-12-24 |
Family
ID=32906351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004123248A Expired - Lifetime JP4389643B2 (ja) | 2004-04-19 | 2004-04-19 | 回折格子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4389643B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7672201B2 (en) | 2005-02-02 | 2010-03-02 | Tdk Corporation | Diffraction grating, light-receiving element, and optical head and optical recording/reproducing apparatus utilizing them |
-
2004
- 2004-04-19 JP JP2004123248A patent/JP4389643B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7672201B2 (en) | 2005-02-02 | 2010-03-02 | Tdk Corporation | Diffraction grating, light-receiving element, and optical head and optical recording/reproducing apparatus utilizing them |
Also Published As
Publication number | Publication date |
---|---|
JP4389643B2 (ja) | 2009-12-24 |
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