WO2023281950A1 - 回折格子の製造方法および複製回折格子の製造方法 - Google Patents
回折格子の製造方法および複製回折格子の製造方法 Download PDFInfo
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- WO2023281950A1 WO2023281950A1 PCT/JP2022/022546 JP2022022546W WO2023281950A1 WO 2023281950 A1 WO2023281950 A1 WO 2023281950A1 JP 2022022546 W JP2022022546 W JP 2022022546W WO 2023281950 A1 WO2023281950 A1 WO 2023281950A1
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- Prior art keywords
- metal film
- diffraction grating
- manufacturing
- glass substrate
- opening
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- 238000004519 manufacturing process Methods 0.000 title claims description 50
- 238000000034 method Methods 0.000 title claims description 31
- 229910052751 metal Inorganic materials 0.000 claims abstract description 136
- 239000002184 metal Substances 0.000 claims abstract description 136
- 239000011521 glass Substances 0.000 claims abstract description 99
- 239000000758 substrate Substances 0.000 claims abstract description 96
- 239000000853 adhesive Substances 0.000 claims abstract description 35
- 230000001070 adhesive effect Effects 0.000 claims abstract description 35
- 230000000452 restraining effect Effects 0.000 claims description 26
- 229920005989 resin Polymers 0.000 claims description 24
- 239000011347 resin Substances 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000003825 pressing Methods 0.000 claims description 5
- 238000007747 plating Methods 0.000 claims description 3
- 230000002103 transcriptional effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 230000003287 optical effect Effects 0.000 description 6
- 230000037303 wrinkles Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000007687 exposure technique Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
Definitions
- the present invention relates to a method of manufacturing a diffraction grating and a method of manufacturing a duplicate diffraction grating using the diffraction grating as a mold.
- Diffraction gratings are optical elements that are used in spectroscopes of analyzers, etc., and separate light (white light) in which various wavelengths are mixed into narrow band wavelengths. Fine grooves are formed on the surface of the diffraction grating, and a reflective film is deposited on the surface of the fine grooves.
- a master diffraction grating is produced by marking grooves on a glass substrate on which a metal film is formed.
- Methods have been implemented to fabricate replicated diffraction gratings by transfer onto resin or metal films.
- a diffraction grating is manufactured by subjecting a photoresist coated on a silicon wafer to holographic exposure.
- Patent Literature 1 discloses a technique of manufacturing a phase shift mask for fabricating a diffraction grating using an exposure apparatus used in semiconductor manufacturing and an etching process.
- Patent Document 1 discloses a technique for forming an uneven shape on a glass substrate by etching the glass substrate by high-density plasma etching using a resist pattern as a mask and then performing wet etching on the glass substrate. .
- Patent Document 2 an anisotropic dry etching method such as low-pressure high-density plasma etching is used to transfer an uneven shape formed on a resist to a glass substrate, thereby manufacturing a sinusoidal optical grating. A method is disclosed.
- the main purpose of the present application is to provide a diffraction grating that enables high surface accuracy and a large area.
- a method of manufacturing a diffraction grating comprises the following steps: (a) preparing a wafer having a pattern in which recesses and protrusions are alternately arranged on its surface; (b) after the step (a); forming a metal film on the surface of the wafer, and forming a first transfer region in which the shape of the pattern is transferred on a part of the surface of the metal film; (c) after the step (b), the wafer (d) after the step (c), bonding the back surface of the metal film to the first glass substrate via an adhesive.
- FIG. 4A to 4C are cross-sectional views showing the outline of the method of manufacturing the diffraction grating according to the first embodiment;
- FIG. 2 is a plan view showing a restraining jig according to Embodiment 1;
- FIG. 2 is a perspective view showing a restraining jig and a metal film according to Embodiment 1;
- 4 is a perspective view showing a base plate in Embodiment 1.
- FIG. 4 is a perspective view showing a lower fixed plate in Embodiment 1.
- FIG. 4 is a perspective view showing an upper fixing plate in Embodiment 1.
- FIG. 4 is a perspective view showing a load applying plate in Embodiment 1.
- FIG. 4 is a perspective view showing a process of installing a metal film on the bonding jig in Embodiment 1.
- FIG. 4 is a perspective view showing a state in which a metal film is installed on the bonding jig according to Embodiment 1.
- FIG. 4 is a cross-sectional view showing a state in which a metal film is installed on the bonding jig according to Embodiment 1;
- FIG. 4 is a cross-sectional view showing a state in which a metal film is installed on the bonding jig according to Embodiment 1;
- FIG. 4 is a cross-sectional view showing an outline of a method for manufacturing a duplicate diffraction grating according to Embodiment 1; 10A to 10C are cross-sectional views showing an outline of a method for manufacturing a diffraction grating according to Embodiment 2;
- FIG. 11 is a perspective view showing a restraining jig and a metal film in Embodiment 2;
- FIG. 11 is a perspective view showing a base plate in Embodiment 2;
- FIG. 11 is a perspective view showing a lower fixed plate in Embodiment 2;
- FIG. 11 is a perspective view showing an upper fixing plate in Embodiment 2;
- FIG. 11 is a perspective view showing a load applying plate according to Embodiment 2;
- FIG. 10 is a perspective view showing a process of installing a metal film on the bonding jig in Embodiment 2;
- FIG. 11 is a perspective view showing a state in which a metal film is installed on a bonding jig according to Embodiment 2;
- FIG. 11 is a cross-sectional view showing a state in which a metal film is installed on a bonding jig according to Embodiment 2;
- FIG. 11 is a cross-sectional view showing a state in which a metal film is installed on a bonding jig according to Embodiment 2;
- the X-direction, Y-direction and Z-direction described in this application intersect each other and are orthogonal to each other.
- the Z direction will be described as the vertical direction, vertical direction, height direction, or thickness direction of a structure.
- the expression "planar view” used in the present application means that a plane formed by the X direction and the Y direction is viewed from the Z direction, and the expression “planar shape” means the shape in the above planar view. .
- Embodiment 1 ⁇ Method for manufacturing diffraction grating> A method of manufacturing the diffraction grating according to the first embodiment will be described below with reference to FIG.
- the diffraction grating manufacturing method according to Embodiment 1 includes steps S11 to S18 shown in FIG.
- a silicon diffraction grating 1 comprises a wafer 1a, for example made of silicon and having a front surface FS1 and a back surface BS1.
- the wafer 1a also has a pattern 1b on its surface FS1, which has a shape in which concave portions and convex portions are alternately arranged.
- the pattern 1b is, for example, a resist pattern produced by a photolithographic technique used in the field of semiconductor manufacturing or a holographic exposure technique using interference of laser light. More specifically, the shape of the pattern 1b is sinusoidal, rectangular, triangular, blazed, or the like. Further, the planar shape of the region (ruled line region) where the pattern 1b is formed is square, rectangular, or circular.
- a metal film 3 is formed on the surface FS1 of the wafer 1a, and a transfer area 3a is formed on a part of the surface FS2 of the metal film 3 by transferring the shape of the pattern 1b.
- a seed film 2 is deposited on the surface FS1 of the wafer 1a including the pattern 1b by, eg, sputtering.
- the seed film 2 is made of a conductive material such as chromium, titanium, platinum or gold.
- the material forming the seed film 2 is not limited to the above materials, and electrons can be transported from the electrode arranged at the edge of the wafer 1a to the center of the wafer 1a during electroplating without causing a voltage drop. It suffices if it has such a function.
- a metal film 3 is formed on the surface FS1 (on the seed film 2) of the wafer 1a by plating, for example, so as to fill the concave portions of the pattern 1b and cover the convex portions of the pattern 1b.
- Electroplating is suitable as the plating method.
- the metal film 3 is made of a conductive material such as nickel or copper.
- the material forming the metal film 3 is not limited to the above materials, and any material can be used as long as it can be electrolytically plated and can be formed into a film along the shape of the pattern 1b with high accuracy. Note that the illustration of the seed film 2 is omitted in the subsequent drawings.
- step S14 the metal film 3 is removed from the wafer 1a.
- Metal film 3 has front surface FS2 and back surface BS2.
- a transfer area 3a having the shape of the pattern 1b transferred is formed on a part of the surface FS2. That is, the transfer area 3a has a shape in which concave portions and convex portions are alternately arranged, and has a sine wave shape, a rectangular shape, a triangular shape, or a blazed shape.
- the back surface BS2 is a flat surface.
- the adhesive 4 is provided on the back surface BS2 of the metal film 3.
- the adhesive 4 is applied to the back surface BS2 by, for example, a coating method, and is made of a material capable of bonding the metal film 3 and the glass substrate 5, which will be described later, without heat treatment. Since there is a large difference in coefficient of linear expansion between metal and glass, the material forming the adhesive 4 is preferably a material that does not require heat treatment.
- step S16 the metal film 3 is fixed by sandwiching the outer periphery of the metal film 3 with two restraining jigs 10 at a position not overlapping the transfer area 3a.
- step S17 the glass substrate 5 is bonded to the metal film 3 in the bonding jig 100, which will be described later.
- a glass substrate 5 is provided on the front surface FS2 side of the metal film 3
- a glass substrate 6 is provided on the back surface BS2 side of the metal film 3 .
- the glass substrate 5 is pressed toward the back surface BS2, and the metal film 3 is adhered to the glass substrate 5 with the adhesive 4 interposed therebetween.
- step S18 the bonded glass substrate 5 and metal film 3 are removed from the bonding jig 100.
- the diffraction grating (glass diffraction grating) 7 having the glass substrate 5, the adhesive 4 and the metal film 3 is manufactured.
- the binding jig 10 is used from step S16 onward, but the bonding jig 100 having the binding jig 10 is prepared in advance, and step S16 and subsequent steps are performed using the bonding jig 100. . 2 to 11, each member of the bonding jig 100 and the method of manufacturing the diffraction grating after step S16 will be described in detail.
- the bonding jig 100 includes two restraining jigs 10, a base plate 20, a lower fixing plate 30, an upper fixing plate 40, a load applying member 50 and a plurality of screws 60. It has These structures will be described below with reference to FIGS. 2 to 7.
- FIG. 9 the bonding jig 100 according to Embodiment 1 includes two restraining jigs 10, a base plate 20, a lower fixing plate 30, an upper fixing plate 40, a load applying member 50 and a plurality of screws 60. It has These structures will be described below with reference to FIGS. 2 to 7.
- FIG. 1 the bonding jig 100 according to Embodiment 1 includes two restraining jigs 10, a base plate 20, a lower fixing plate 30, an upper fixing plate 40, a load applying member 50 and a plurality of screws 60. It has These structures will be described below with reference to FIGS. 2 to 7.
- FIG. 9 the bonding jig 100 according to Embodiment 1 includes two
- FIG. 2 and 3 show the restraint jig 10.
- FIG. The restraining jig 10 has a polygonal shape in plan view, and has a quadrangular shape here. Moreover, the restraining jig 10 is made of a material having high strength and high heat resistance, such as stainless steel.
- the restraint jig 10 has an opening 13 in its central portion, and has a plurality of holes 11 and a plurality of holes 12 around the opening 13 .
- the holes 11 are provided for fixing with screws 60 to another member, and the holes 12 are provided for alignment with the guide pins 22 of the base plate 20 .
- the plane shape of the metal film 3 is polygonal, here it is square.
- the planar shape of the opening 13 is a polygonal shape corresponding to the planar shape of the metal film 3, and is a quadrangular shape here. Further, a hole 14 integrated with the opening 13 is provided at each corner of the opening 13 .
- the restraint jig 10 has a plurality of holes 14 that enclose each corner of the opening 13 .
- step S16 is performed in a state where the metal film 3 around the transfer area 3a is sandwiched between two restraining jigs so that the transfer area 3a is located inside the opening 13 in plan view. At this time, each corner of the metal film 3 is positioned inside the hole 14 in plan view.
- step S17 the metal film 3 is pressed by the substrate 5 made of glass, and the corners of the metal film 3 are places where stress tends to concentrate. Therefore, a unique stress often occurs at each corner. Therefore, by positioning each corner of the metal film 3 inside the hole 14 , stress concentration at each corner can be alleviated, and a structure in which the load distribution on the metal film 3 is uniform can be realized.
- FIG. 4 shows the base plate 20.
- the base plate 20 has a planar shape similar to that of the restraint jig 10 .
- a plurality of holes 21 and guide pins 22 are provided in the outer peripheral portion of the base plate 20 .
- the holes 21 are provided for fixing to other members with screws 60, and the guide pins 22 are provided for alignment with other members.
- FIG. 5 shows the lower fixing plate 30.
- the lower fixing plate 30 has a planar shape similar to that of the restraint jig 10 .
- the lower fixing plate 30 has an opening 33 in its central portion, and has a plurality of holes 31 and a plurality of holes 32 around the opening 33 .
- the holes 31 are provided for fixing with screws 60 to another member, and the holes 32 are provided for alignment with the guide pins 22 of the base plate 20 .
- the lower fixing plate 30 is a member for fixing the position of the glass substrate 6 and has an opening 33 .
- the planar shape of each of the opening 33 and the glass substrate 6 is a polygonal shape, here a square shape. Thereby, the glass substrate 6 is fitted inside the opening 33 .
- FIG. 6 shows the upper fixing plate 40.
- the upper fixed plate 40 has a planar shape similar to that of the restraint jig 10 .
- the upper fixing plate 40 has an opening 43 in its central portion, and has a plurality of holes 41 and a plurality of holes 42 around the opening 43 .
- the holes 41 are provided for fixing with screws 60 to another member, and the holes 42 are provided for alignment with the guide pins 22 of the base plate 20 .
- the upper fixing plate 40 is a member for fixing the position of the glass substrate 5 and has an opening 43 .
- the planar shape of each of the opening 43 and the glass substrate 5 is a polygonal shape, here a square shape. As a result, the glass substrate 5 is fitted inside the opening 43 .
- FIG. 7 shows the load applying member 50.
- the load applying member 50 is used when applying a load to the glass substrate 5 .
- the planar shape of the load applying member 50 is polygonal, here it is square.
- the load applying member 50 is designed to fit inside the opening 43 of the upper fixing plate 40 .
- the base plate 20, the lower fixing plate 30, the upper fixing plate 40, and the load applying member 50 are made of a material with high strength and high heat resistance, such as stainless steel.
- FIG. 8 shows the process of setting the metal film 3 on the bonding jig 100
- FIG. 9 shows the state in which the metal film 3 is set on the bonding jig 100.
- a base plate 20, a lower fixing plate 30, a glass substrate 6, a metal film 3 and two restraining jigs 10 are prepared.
- the lower fixing plate 30 is provided on the base plate 20 while fitting the guide pins 22 of the base plate 20 into the holes 32 .
- the glass substrate 6 is provided inside the opening 33 of the lower fixing plate 30 .
- the first restraining jig 10 is provided on the lower fixed plate 30 .
- the metal film 3 is placed on the substrate 6 made of glass, and the metal film 3 around the transfer area 3a is placed on the first restraint jig 10 .
- An adhesive 4 is provided on the rear surface BS2 of the metal film 3.
- the second restraining jig 10 is provided on the back surface BS2 of the metal film 3 around the transfer region 3a.
- the upper fixing plate 40, glass substrate 5, load applying member 50 and screw 60 are prepared.
- the upper fixing plate 40 is placed on the second restraint jig 10 while fitting the guide pins 22 of the base plate 20 into the holes 42 .
- the glass substrate 5 is placed inside the opening 43 of the upper fixing plate 40 .
- the load applying member 50 is installed on the substrate 5 made of glass.
- FIG. 10 and 11 are cross-sectional views along line AA shown in FIG.
- the metal film 3 is placed on the glass substrate 6 so that the surface FS2 of the metal film 3 faces the glass substrate 6 .
- an adhesive 4 is provided on the back surface BS2 of the metal film 3 .
- a glass substrate 5 is provided at a position physically separated from the back surface of the metal film 3 . That is, a gap 70 is formed between the glass substrate 5 and the metal film 3 (adhesive 4).
- the shape of the pattern 1b provided on the wafer 1a is transferred to the metal film 3, and this metal film 3 is used for the diffraction grating 7.
- FIG. Therefore, since it is possible to prevent the transfer of the warp of the silicon wafer, which has been a problem in the prior art, it is possible to provide the diffraction grating 7 capable of achieving high surface precision and a large area.
- Embodiment 1 the glass substrate 5 is pressed while the outer periphery of the metal film 3 is fixed by the restraint jig 10 .
- the occurrence of wrinkles due to the shrinkage of the adhesive 4 can be suppressed.
- the adhesive 4 is made of a material that does not require heat treatment, the influence of shrinkage of the adhesive 4 can be suppressed.
- the back surface BS2 of the metal film 3 and the bonding surface of the glass substrate 5, which are bonded via the adhesive 4, are flat surfaces.
- a gap 70 is provided between the glass substrate 5 and the metal film 3 (adhesive 4).
- Diffraction grating 7 manufactured in Embodiment 1 can be applied as an optical element used in a spectrometer or the like.
- a reflective film made of a material having a higher light reflectance than the material forming the metal film 3 is formed on the surface FS2 of the metal film 3 including the transfer region 3a.
- Add a step of forming is, for example, an aluminum film, and can be formed, for example, by a vapor deposition method. Thereby, the diffraction grating 7 can be used as a reflective optical element.
- FIG. 12 shows another application example of the diffraction grating 7, showing a method of manufacturing a duplicate diffraction grating by using the diffraction grating 7 as a mold. That is, FIG. 12 shows a method for manufacturing a plurality of duplicate diffraction gratings using the diffraction grating 7 as a master diffraction grating.
- a resin film 91 having a front surface FS3 and a back surface BS3, and a glass substrate 92 bonded to the back surface BS3 of the resin film 91 are prepared.
- the resin film 91 is a thermosetting resin such as epoxy resin.
- step S32 the diffraction grating 7 is prepared, and the peripheral portion of the metal film 3 is cut according to the size of the glass substrate 5. Next, as shown in FIG.
- step S33 the resin film 91 is pressed onto the surface FS2 of the metal film 3 including the transfer area 3a.
- a transfer area 91a having the shape of the transfer area 3a transferred is formed on a portion of the surface FS3 of the resin film 91.
- the transfer area 91a has a shape in which concave portions and convex portions are alternately arranged, and has a sine wave shape, a rectangular shape, a triangular shape, or a blaze shape.
- the resin film 91 is cured while maintaining the shape of the transfer region 91a.
- step S34 the resin film 91 and the glass substrate 92 are removed from the metal film 3.
- the duplicate diffraction grating 93 having the resin film 91 and the glass substrate 92 including the transfer region 91a is manufactured.
- the diffraction grating 7 including the metal film 3 prevents the warp of the wafer 1a from being transferred, and achieves high surface accuracy. Therefore, even in the duplicate diffraction grating 93 having the glass substrate 92 and the resin film 91 including the transfer region 91a to which the shape of the transfer region 3a is transferred, the warp of the wafer 1a is prevented from being transferred, and a high surface is obtained. Accuracy is achieved.
- a reflective film is formed on the surface FS3 of the resin film 91 including the transfer region 91a.
- a reflective film is, for example, an aluminum film, and can be formed, for example, by a vapor deposition method.
- the diffraction grating manufacturing method according to the second embodiment includes steps S21 to S28 shown in FIG. In the following description, differences from the first embodiment will be mainly described, and descriptions of points that overlap with the first embodiment will be omitted.
- Steps S21 to S25 are the same as steps S11 to S15 in the first embodiment.
- step S26 the outer periphery of the metal film 3 is fixed using the restraint jig 80 at a position not overlapping the transfer area 3a.
- step S27 the glass substrate 5 is adhered to the metal film 3 in a bonding jig 200 which will be described later.
- a glass substrate 5 is provided on the front surface FS2 side of the metal film 3
- a glass substrate 6 is provided on the back surface BS2 side of the metal film 3 .
- the glass substrate 5 is pressed toward the back surface BS2, and the metal film 3 is adhered to the glass substrate 5 with the adhesive 4 interposed therebetween.
- step S28 the bonded glass substrate 5 and metal film 3 are removed from the bonding jig 100.
- diffraction grating 7 having glass substrate 5, adhesive 4 and metal film 3 is manufactured as the diffraction grating in the first embodiment.
- the glass substrate 5 and the glass substrate 6 in Embodiment 2 differ from Embodiment 1 in that their planar shapes are circular.
- the circular glass substrates 5 and 6 it is possible to suppress the occurrence of specific stress when a load is applied. Therefore, in Embodiment 2, a structure in which the load distribution on the metal film 3 is uniform can be realized, and high surface precision can be realized.
- bonding jig 200 in Embodiment 1 includes restraining jig 80 , base plate 20 , lower fixing plate 30 , upper fixing plate 40 , load applying member 50 and a plurality of screws 60 . ing. These structures will be described below with reference to FIGS. 14 to 20.
- FIG. 20 bonding jig 200 in Embodiment 1 includes restraining jig 80 , base plate 20 , lower fixing plate 30 , upper fixing plate 40 , load applying member 50 and a plurality of screws 60 . ing.
- FIG. 14 shows a restraining jig 80.
- the restraint jig 80 has a circular shape in plan view.
- the restraining jig 80 is made of copper, for example.
- the restraining jig 80 has an opening 83 in its central portion. The planar shape of the opening 83 is circular.
- step S26 described above the binding jig 80 is placed on the back surface BS2 of the metal film 3 around the transfer region 3a so that the transfer region 3a is positioned inside the opening 83 in plan view. done.
- the base plate 20, the lower fixing plate 30, the upper fixing plate 40, and the load applying member 50 are substantially the same except that their planar shapes are circular. It has the same structure as that of the first embodiment and plays the same role as that of the first embodiment.
- the base plate 20 is not provided with the guide pin 22, and the lower fixing plate 30 and the upper fixing plate 40 are not provided with the holes 32 and 42. good.
- the planar shape of the opening 33 of the lower fixing plate 30 is circular. Thereby, the circular glass substrate 6 can be fitted inside the opening 33 .
- the planar shape of the opening 43 of the upper fixing plate 40 is circular. As a result, the circular glass substrate 5 can be fitted inside the opening 43 .
- FIG. 19 shows the process of setting the metal film 3 on the bonding jig 200
- FIG. 20 shows the state where the metal film 3 is set on the bonding jig 200.
- a base plate 20, a lower fixing plate 30, a glass substrate 6, a metal film 3 and two restraining jigs 80 are prepared.
- the lower fixing plate 30 is provided on the base plate 20 .
- the glass substrate 6 is provided inside the opening 33 of the lower fixing plate 30 .
- the metal film 3 is provided on the glass substrate 6, and the metal film 3 around the transfer area 3a is provided on the lower fixing plate 30.
- An adhesive 4 is provided on the rear surface BS2 of the metal film 3.
- a restraining jig 80 is provided on the back surface BS2 of the metal film 3 around the transfer region 3a.
- the upper fixing plate 40, glass substrate 5, load applying member 50 and screw 60 are prepared.
- the upper fixed plate 40 is installed on the restraint jig 80 .
- the glass substrate 5 is placed inside the opening 43 of the upper fixing plate 40 .
- the load applying member 50 is installed on the substrate 5 made of glass.
- FIG. 21 and 22 are cross-sectional views taken along line BB shown in FIG.
- a step of adhering is performed. Note that this step is performed in a vacuum atmosphere as in the first embodiment.
- the metal film 3 is placed on the glass substrate 6 so that the surface FS2 of the metal film 3 faces the glass substrate 6 .
- an adhesive 4 is provided on the back surface BS2 of the metal film 3 .
- a glass substrate 5 is provided at a position physically separated from the back surface of the metal film 3 . That is, a gap 70 is formed between the glass substrate 5 and the metal film 3 (adhesive 4).
- the installation surface of the glass substrate 6 on which the metal film 3 is installed and the bonding surface of the glass substrate 5 bonded to the metal film 3 via the adhesive 4 are flat surfaces. ing.
- the diffraction grating 7 manufactured in the second embodiment can also be applied as an optical element used in a spectroscope or the like, similarly to the first embodiment, and as shown in FIG. can be applied to the manufacture of the replica diffraction grating of
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Abstract
Description
<回折格子の製造方法>
以下に図1を用いて、実施の形態1における回折格子の製造方法について説明する。実施の形態1における回折格子の製造方法は、図1に示されるステップS11~S18を備えている。
以上のように、実施の形態1における回折格子の製造方法によれば、ウェハ1aに設けられたパターン1bの形状を金属膜3に転写し、この金属膜3を回折格子7に用いている。従って、従来技術において課題であったシリコンウェハの反りが転写されることを防止できるので、高い面精度および大面積化が可能となる回折格子7を提供できる。
実施の形態1で製造された回折格子7は、分光器などに使用される光学素子として適用できる。例えば、図1のステップS14とステップS15との間で、転写領域3aを含む金属膜3の表面FS2上に、金属膜3を構成する材料よりも光の反射率が高い材料からなる反射膜を形成する工程を追加する。そのような反射膜は、例えばアルミニウム膜であり、例えば蒸着法によって形成できる。これにより、回折格子7を反射型の光学素子として利用することができる。
図12は、回折格子7の他の適用例であり、回折格子7を型として用いることで行われる複製回折格子の製造方法を示している。すなわち、図12は、回折格子7をマスタ回折格子として、複数の複製回折格子を製造するための方法である。
以下に図13を用いて、実施の形態2における回折格子の製造方法について説明する。実施の形態2における回折格子の製造方法は、図13に示されるステップS21~S28を備えている。なお、以下の説明では、実施の形態1との相違点について主に説明し、実施の形態1と重複する点については説明を省略する。
1a ウェハ
1b パターン
2 シード膜
3 金属膜
3a 転写領域
4 接着剤
5、6 ガラス製基板
7 回折格子(ガラス製回折格子)
10 拘束治具
11 固定用の孔
12 位置合わせ用の孔
13 開口部
14 穴
20 ベース板
21 固定用の孔
22 ガイドピン
30 ガラス製基板用の下側固定板
31 固定用の孔
32 位置合わせ用の孔
33 開口部
40 ガラス製基板用の上側固定板
41 固定用の孔
42 位置合わせ用の孔
43 開口部
50 荷重印加部材
60 ネジ
70 ギャップ
80 拘束治具
83 開口部
91 樹脂膜
91a 転写領域
92 ガラス製基板
93 複製回折格子
100、200 接着治具
FS1 ウェハの表面
FS2 金属膜の表面
FS3 樹脂膜の表面
BS1 ウェハの裏面
BS2 金属膜の裏面
BS3 樹脂膜の裏面
Claims (12)
- (a)凹部および凸部が交互配置された形状を成すパターンを、その表面に有するウェハを準備する工程、
(b)前記(a)工程後、前記ウェハの表面上に金属膜を形成し、前記金属膜の表面の一部に前記パターンの形状が転写された第1転写領域を形成する工程、
(c)前記(b)工程後、前記ウェハから前記金属膜を取り外す工程、
(d)前記(c)工程後、接着剤を介して第1ガラス製基板に前記金属膜の裏面を接着する工程、
を備える、回折格子の製造方法。 - 請求項1に記載の回折格子の製造方法において、
(e)その中央部に第1開口部を有する第1拘束治具と、その中央部に第2開口部を有する第2拘束治具とを準備する工程、
を更に備え、
前記(d)工程は、前記第1転写領域が、平面視において前記第1開口部および前記第2開口部の各々の内部に位置するように、前記第1転写領域の周囲の前記金属膜が、前記第1拘束治具および前記第2拘束治具によって挟み込まれた状態で行われる、回折格子の製造方法。 - 請求項2に記載の回折格子の製造方法において、
(f)前記第1ガラス製基板に荷重を印加するための荷重印加部材を準備する工程、
を更に備え、
前記(d)工程は、前記金属膜の裏面に前記接着剤が設けられ、且つ、前記第1ガラス製基板が前記金属膜の裏面から物理的に離れた位置に設けられた状態から、前記荷重印加部材によって、前記第1ガラス製基板を前記金属膜の裏面へ向かって押し付けることで行われる、回折格子の製造方法。 - 請求項2に記載の回折格子の製造方法において、
前記第1開口部および前記第2開口部の各々の平面形状は、多角形状を成し、
前記第1開口部の各角部および前記第2開口部の各角部には、前記第1開口部および前記第2開口部と一体化した穴が設けられ、
前記金属膜の平面形状は、多角形状を成し、
前記(d)工程では、前記金属膜の各角部は、平面視において、前記第1開口部および前記第2開口部の各々の前記穴の内部に位置している、回折格子の製造方法。 - 請求項1に記載の回折格子の製造方法において、
(g)その中央部に平面視において円形状の第3開口部を有し、且つ、平面視において円形状を成す第3拘束治具を準備する工程、
を更に備え、
前記(d)工程は、前記第1転写領域が、平面視において前記第3開口部の内部に位置するように、前記第3拘束治具が、前記第1転写領域の周囲の前記金属膜の裏面上に設置された状態で行われる、回折格子の製造方法。 - 請求項5に記載の回折格子の製造方法において、
(h)その中央部に平面視において円形状の第4開口部を有する第1固定板と、平面視において円形状の第2ガラス製基板と、前記第1ガラス製基板に荷重を印加するための荷重印加部材と、を準備する工程、
前記第2ガラス製基板は、前記第4開口部の内部に設けられ、
前記第1転写領域の周囲の前記金属膜は、前記第3拘束治具と前記第1固定板との間で固定され、
前記(d)工程は、前記金属膜の表面が前記第2ガラス製基板に対向するように、前記金属膜が第2ガラス製基板上に設置され、前記金属膜の裏面に前記接着剤が設けられ、且つ、前記第1ガラス製基板が前記金属膜の裏面から物理的に離れた位置に設けられた状態から、前記荷重印加部材によって、前記第1ガラス製基板を前記金属膜の裏面へ向かって押し付けることで行われる、回折格子の製造方法。 - 請求項1に記載の回折格子の製造方法において、
前記(d)工程は、真空雰囲気内で行われ、
前記接着剤を介して接着する前記金属膜の裏面および前記第1ガラス製基板の接着面は、互いに平坦面である、回折格子の製造方法。 - 請求項1に記載の回折格子の製造方法において、
前記(b)工程では、前記金属膜は、前記パターンの前記凹部を埋め込み、且つ、前記パターンの前記凸部を覆うように、メッキ法によって前記ウェハの表面上に形成される、回折格子の製造方法。 - 請求項1に記載の回折格子の製造方法において、
前記接着剤は、前記金属膜と前記第1ガラス製基板とを熱処理不要で接着可能な材料からなる、回折格子の製造方法。 - 請求項1に記載の回折格子の製造方法において、
前記パターンの形状は、正弦波形状、矩形形状、三角形状またはブレーズ形状である、回折格子の製造方法。 - 請求項1に記載の回折格子の製造方法において、
(h)前記(b)工程と前記(c)工程との間に、前記第1転写領域を含む前記金属膜の表面上に、前記金属膜を構成する材料よりも光の反射率が高い材料からなる第1反射膜を形成する工程、
を更に備えた、回折格子の製造方法。 - 請求項1に記載の回折格子の製造方法によって製造され、且つ、前記接着剤を介して接着された前記第1ガラス製基板および前記金属膜を有する回折格子を型として用いることで行われる複製回折格子の製造方法であって、
(i)樹脂膜と、前記樹脂膜の裏面に接着された第3ガラス製基板とを準備する工程、
(j)前記(i)工程後、前記第1転写領域を含む前記金属膜の表面上に前記樹脂膜を押し付けることで、前記樹脂膜の表面の一部に前記第1転写領域の形状が転写された第2転写領域を形成する工程、
(k)前記(j)工程後、前記金属膜から前記樹脂膜および前記第3ガラス製基板を取り外す工程、
を備えた、複製回折格子の製造方法。
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