CN117280433A - 半导体装置 - Google Patents

半导体装置 Download PDF

Info

Publication number
CN117280433A
CN117280433A CN202280033507.XA CN202280033507A CN117280433A CN 117280433 A CN117280433 A CN 117280433A CN 202280033507 A CN202280033507 A CN 202280033507A CN 117280433 A CN117280433 A CN 117280433A
Authority
CN
China
Prior art keywords
electrode layer
main surface
electrode
layer
external electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280033507.XA
Other languages
English (en)
Chinese (zh)
Inventor
原田真臣
伊藤是清
香川武史
今村勇太
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN117280433A publication Critical patent/CN117280433A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/005—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/224—Housing; Encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/33—Thin- or thick-film capacitors (thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Integrated Circuits (AREA)
CN202280033507.XA 2021-05-10 2022-05-09 半导体装置 Pending CN117280433A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-079848 2021-05-10
JP2021079848 2021-05-10
PCT/JP2022/019619 WO2022239717A1 (ja) 2021-05-10 2022-05-09 半導体装置

Publications (1)

Publication Number Publication Date
CN117280433A true CN117280433A (zh) 2023-12-22

Family

ID=84029613

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280033507.XA Pending CN117280433A (zh) 2021-05-10 2022-05-09 半导体装置

Country Status (4)

Country Link
US (1) US12424383B2 (https=)
JP (1) JP7647880B2 (https=)
CN (1) CN117280433A (https=)
WO (1) WO2022239717A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121693790A (zh) * 2023-09-08 2026-03-17 株式会社村田制作所 无源电子部件

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0547586A (ja) 1991-08-16 1993-02-26 Toshiba Corp コンデンサ部品
TW563142B (en) * 2001-07-12 2003-11-21 Hitachi Ltd Thin film capacitor, and electronic circuit component
US6635498B2 (en) * 2001-12-20 2003-10-21 Texas Instruments Incorporated Method of patterning a FeRAM capacitor with a sidewall during bottom electrode etch
JP4166013B2 (ja) 2001-12-26 2008-10-15 富士通株式会社 薄膜キャパシタ製造方法
JP2006196871A (ja) * 2004-12-15 2006-07-27 Kyocera Corp 薄膜コンデンサおよび可変容量コンデンサならびに電子部品
WO2006117912A1 (ja) * 2005-04-27 2006-11-09 Murata Manufacturing Co., Ltd 薄膜キャパシタおよびその製造方法
US7304339B2 (en) * 2005-09-22 2007-12-04 Agile Rf, Inc. Passivation structure for ferroelectric thin-film devices
JP4596167B2 (ja) * 2006-02-24 2010-12-08 セイコーエプソン株式会社 キャパシタの製造方法
JP2008153497A (ja) 2006-12-19 2008-07-03 Murata Mfg Co Ltd 誘電体薄膜キャパシタの製造方法
JP2008252011A (ja) 2007-03-30 2008-10-16 Taiyo Yuden Co Ltd 誘電体キャパシタ
JP5098422B2 (ja) * 2007-04-27 2012-12-12 株式会社村田製作所 薄膜電子部品
EP2166549B1 (en) 2007-05-30 2017-07-05 Kyocera Corporation Capacitor, resonator, filter device, communication device and electric circuit
JP6489202B2 (ja) * 2015-02-27 2019-03-27 株式会社村田製作所 キャパシタ
WO2018003445A1 (ja) 2016-06-28 2018-01-04 株式会社村田製作所 キャパシタ
JP6372640B2 (ja) 2016-07-07 2018-08-15 株式会社村田製作所 キャパシタ
JP6737118B2 (ja) * 2016-10-11 2020-08-05 Tdk株式会社 薄膜コンデンサ
WO2019026771A1 (ja) * 2017-07-31 2019-02-07 株式会社村田製作所 キャパシタ
JP2020202307A (ja) 2019-06-11 2020-12-17 株式会社村田製作所 キャパシタ
JP2022144464A (ja) * 2021-03-19 2022-10-03 住友電工デバイス・イノベーション株式会社 キャパシタ

Also Published As

Publication number Publication date
JP7647880B2 (ja) 2025-03-18
JPWO2022239717A1 (https=) 2022-11-17
WO2022239717A1 (ja) 2022-11-17
US12424383B2 (en) 2025-09-23
US20240062958A1 (en) 2024-02-22

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