CN116848074A - 堇青石质烧结体及其制造方法 - Google Patents

堇青石质烧结体及其制造方法 Download PDF

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Publication number
CN116848074A
CN116848074A CN202280014662.7A CN202280014662A CN116848074A CN 116848074 A CN116848074 A CN 116848074A CN 202280014662 A CN202280014662 A CN 202280014662A CN 116848074 A CN116848074 A CN 116848074A
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sintered body
mass
content
cordierite
less
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CN202280014662.7A
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Chinese (zh)
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小川修平
宫川直通
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AGC Inc
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Asahi Glass Co Ltd
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    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Compositions Of Oxide Ceramics (AREA)
CN202280014662.7A 2021-03-05 2022-02-25 堇青石质烧结体及其制造方法 Pending CN116848074A (zh)

Applications Claiming Priority (3)

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JP2021-035458 2021-03-05
JP2021035458 2021-03-05
PCT/JP2022/007888 WO2022186072A1 (ja) 2021-03-05 2022-02-25 コーディエライト質焼結体およびその製造方法

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CN116848074A true CN116848074A (zh) 2023-10-03

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US (1) US20230373863A1 (https=)
JP (1) JPWO2022186072A1 (https=)
KR (1) KR20230152676A (https=)
CN (1) CN116848074A (https=)
TW (1) TW202235400A (https=)
WO (1) WO2022186072A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2025018298A1 (https=) * 2023-07-19 2025-01-23

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JP2002167268A (ja) * 2000-11-29 2002-06-11 Kyocera Corp コージェライト質焼結体とその製造方法
CN1381424A (zh) * 2001-04-13 2002-11-27 日本碍子株式会社 用于电子元件的烧成夹具
CN101381240A (zh) * 2008-10-09 2009-03-11 武汉理工大学 一种堇青石耐热/耐火材料的制备方法
CN102603277A (zh) * 2011-01-19 2012-07-25 比亚迪股份有限公司 一种堇青石的制备方法
WO2012115136A1 (ja) * 2011-02-24 2012-08-30 京セラ株式会社 コージェライト質焼結体およびこのコージェライト質焼結体からなる半導体製造装置用部材
JP2013155078A (ja) * 2012-01-30 2013-08-15 Kyocera Corp コージェライト質焼結体およびこのコージェライト質焼結体からなる露光装置用部材
CN103693948A (zh) * 2004-09-24 2014-04-02 日本碍子株式会社 堇青石质蜂窝结构体的制造方法
CN105764871A (zh) * 2014-06-06 2016-07-13 日本碍子株式会社 堇青石烧结体、其制法、复合基板以及电子器件

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US4745092A (en) * 1987-04-27 1988-05-17 The Dow Chemical Company Strengthened cordierite having minor amounts of calcia
JP3659435B2 (ja) 1996-02-29 2005-06-15 京セラ株式会社 耐食性部材、プラズマ処理装置、半導体製造装置、液晶製造装置及び放電容器。
JP5657210B2 (ja) * 2009-01-28 2015-01-21 京セラ株式会社 コージェライト質焼結体からなる半導体製造装置用部材
JP2013100216A (ja) * 2011-10-14 2013-05-23 Asahi Glass Co Ltd 酸化物セラミックス焼結体およびその製造方法
JP6382579B2 (ja) * 2014-05-29 2018-08-29 京セラ株式会社 コージェライト接合体

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002167268A (ja) * 2000-11-29 2002-06-11 Kyocera Corp コージェライト質焼結体とその製造方法
CN1381424A (zh) * 2001-04-13 2002-11-27 日本碍子株式会社 用于电子元件的烧成夹具
CN103693948A (zh) * 2004-09-24 2014-04-02 日本碍子株式会社 堇青石质蜂窝结构体的制造方法
CN101381240A (zh) * 2008-10-09 2009-03-11 武汉理工大学 一种堇青石耐热/耐火材料的制备方法
CN102603277A (zh) * 2011-01-19 2012-07-25 比亚迪股份有限公司 一种堇青石的制备方法
WO2012115136A1 (ja) * 2011-02-24 2012-08-30 京セラ株式会社 コージェライト質焼結体およびこのコージェライト質焼結体からなる半導体製造装置用部材
JP2013155078A (ja) * 2012-01-30 2013-08-15 Kyocera Corp コージェライト質焼結体およびこのコージェライト質焼結体からなる露光装置用部材
CN105764871A (zh) * 2014-06-06 2016-07-13 日本碍子株式会社 堇青石烧结体、其制法、复合基板以及电子器件

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US20230373863A1 (en) 2023-11-23
TW202235400A (zh) 2022-09-16
JPWO2022186072A1 (https=) 2022-09-09
KR20230152676A (ko) 2023-11-03

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