KR20230152676A - 근청석질 소결체 및 그 제조 방법 - Google Patents

근청석질 소결체 및 그 제조 방법 Download PDF

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Publication number
KR20230152676A
KR20230152676A KR1020237029179A KR20237029179A KR20230152676A KR 20230152676 A KR20230152676 A KR 20230152676A KR 1020237029179 A KR1020237029179 A KR 1020237029179A KR 20237029179 A KR20237029179 A KR 20237029179A KR 20230152676 A KR20230152676 A KR 20230152676A
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South Korea
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sintered body
mass
less
content
oxide
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KR1020237029179A
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English (en)
Korean (ko)
Inventor
슈헤이 오가와
나오미치 미야카와
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에이지씨 가부시키가이샤
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
    • C04B35/18—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Compositions Of Oxide Ceramics (AREA)
KR1020237029179A 2021-03-05 2022-02-25 근청석질 소결체 및 그 제조 방법 Pending KR20230152676A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2021-035458 2021-03-05
JP2021035458 2021-03-05
PCT/JP2022/007888 WO2022186072A1 (ja) 2021-03-05 2022-02-25 コーディエライト質焼結体およびその製造方法

Publications (1)

Publication Number Publication Date
KR20230152676A true KR20230152676A (ko) 2023-11-03

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Country Status (6)

Country Link
US (1) US20230373863A1 (https=)
JP (1) JPWO2022186072A1 (https=)
KR (1) KR20230152676A (https=)
CN (1) CN116848074A (https=)
TW (1) TW202235400A (https=)
WO (1) WO2022186072A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2025018298A1 (https=) * 2023-07-19 2025-01-23

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09295863A (ja) 1996-02-29 1997-11-18 Kyocera Corp 耐食性部材

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Publication number Priority date Publication date Assignee Title
US4745092A (en) * 1987-04-27 1988-05-17 The Dow Chemical Company Strengthened cordierite having minor amounts of calcia
JP2002167268A (ja) * 2000-11-29 2002-06-11 Kyocera Corp コージェライト質焼結体とその製造方法
JP2002316877A (ja) * 2001-04-13 2002-10-31 Ngk Insulators Ltd 電子部品用焼成治具
JP4361449B2 (ja) * 2004-09-24 2009-11-11 日本碍子株式会社 コーディエライト質ハニカム構造体の製造方法
CN101381240B (zh) * 2008-10-09 2012-06-27 武汉理工大学 一种堇青石耐热/耐火材料的制备方法
JP5657210B2 (ja) * 2009-01-28 2015-01-21 京セラ株式会社 コージェライト質焼結体からなる半導体製造装置用部材
CN102603277B (zh) * 2011-01-19 2014-09-03 比亚迪股份有限公司 一种堇青石的制备方法
JP5762522B2 (ja) * 2011-02-24 2015-08-12 京セラ株式会社 コージェライト質焼結体およびこのコージェライト質焼結体からなる半導体製造装置用部材
JP2013100216A (ja) * 2011-10-14 2013-05-23 Asahi Glass Co Ltd 酸化物セラミックス焼結体およびその製造方法
JP5773899B2 (ja) * 2012-01-30 2015-09-02 京セラ株式会社 コージェライト質焼結体およびこのコージェライト質焼結体からなる露光装置用部材
JP6382579B2 (ja) * 2014-05-29 2018-08-29 京セラ株式会社 コージェライト接合体
CN112851320A (zh) * 2014-06-06 2021-05-28 日本碍子株式会社 堇青石烧结体、其制法、复合基板以及电子器件

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09295863A (ja) 1996-02-29 1997-11-18 Kyocera Corp 耐食性部材

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US20230373863A1 (en) 2023-11-23
TW202235400A (zh) 2022-09-16
JPWO2022186072A1 (https=) 2022-09-09
CN116848074A (zh) 2023-10-03

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