CN116249834B - 流体控制装置 - Google Patents

流体控制装置 Download PDF

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Publication number
CN116249834B
CN116249834B CN202180066367.1A CN202180066367A CN116249834B CN 116249834 B CN116249834 B CN 116249834B CN 202180066367 A CN202180066367 A CN 202180066367A CN 116249834 B CN116249834 B CN 116249834B
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CN
China
Prior art keywords
control device
fluid control
plate
wall main
main plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202180066367.1A
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English (en)
Chinese (zh)
Other versions
CN116249834A (zh
Inventor
田中伸拓
川端友德
阿知波宽基
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN116249834A publication Critical patent/CN116249834A/zh
Application granted granted Critical
Publication of CN116249834B publication Critical patent/CN116249834B/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
CN202180066367.1A 2020-09-30 2021-08-17 流体控制装置 Active CN116249834B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020164523 2020-09-30
JP2020-164523 2020-09-30
PCT/JP2021/029967 WO2022070638A1 (ja) 2020-09-30 2021-08-17 流体制御装置

Publications (2)

Publication Number Publication Date
CN116249834A CN116249834A (zh) 2023-06-09
CN116249834B true CN116249834B (zh) 2024-06-04

Family

ID=80949972

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180066367.1A Active CN116249834B (zh) 2020-09-30 2021-08-17 流体控制装置

Country Status (5)

Country Link
US (1) US12595790B2 (https=)
EP (1) EP4191062A4 (https=)
JP (1) JP7409519B2 (https=)
CN (1) CN116249834B (https=)
WO (1) WO2022070638A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114222859A (zh) * 2019-09-11 2022-03-22 京瓷株式会社 压电泵以及泵单元
CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置

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WO2017038565A1 (ja) * 2015-08-31 2017-03-09 株式会社村田製作所 ブロア
CN109723629A (zh) * 2019-03-01 2019-05-07 浙江师范大学 一种压电晶片泵

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JP6687170B2 (ja) * 2017-12-22 2020-04-22 株式会社村田製作所 ポンプ
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WO2019138676A1 (ja) * 2018-01-10 2019-07-18 株式会社村田製作所 ポンプおよび流体制御装置
JP2020020283A (ja) * 2018-07-31 2020-02-06 セイコーエプソン株式会社 ダイヤフラム式圧縮機、冷却機、プロジェクター及び流体の圧縮方法
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CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置
CN116745524A (zh) * 2021-02-22 2023-09-12 株式会社村田制作所 泵装置
TWI797853B (zh) * 2021-11-29 2023-04-01 研能科技股份有限公司 氣體傳輸裝置
JP2024122621A (ja) * 2023-02-28 2024-09-09 太陽誘電株式会社 検出装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102037104A (zh) * 2007-09-27 2011-04-27 因诺斯佩克有限公司 燃料组合物
CN102782324A (zh) * 2009-11-13 2012-11-14 法国原子能与替代能委员会 制造至少一变形膜微泵的方法及变形膜微泵
WO2017038565A1 (ja) * 2015-08-31 2017-03-09 株式会社村田製作所 ブロア
CN109723629A (zh) * 2019-03-01 2019-05-07 浙江师范大学 一种压电晶片泵

Also Published As

Publication number Publication date
EP4191062A4 (en) 2024-08-14
EP4191062A1 (en) 2023-06-07
US12595790B2 (en) 2026-04-07
US20230235733A1 (en) 2023-07-27
WO2022070638A1 (ja) 2022-04-07
CN116249834A (zh) 2023-06-09
JP7409519B2 (ja) 2024-01-09
JPWO2022070638A1 (https=) 2022-04-07

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