JP7409519B2 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
JP7409519B2
JP7409519B2 JP2022553527A JP2022553527A JP7409519B2 JP 7409519 B2 JP7409519 B2 JP 7409519B2 JP 2022553527 A JP2022553527 A JP 2022553527A JP 2022553527 A JP2022553527 A JP 2022553527A JP 7409519 B2 JP7409519 B2 JP 7409519B2
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Japan
Prior art keywords
control device
fluid control
flat plate
wall main
plate
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JP2022553527A
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Japanese (ja)
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JPWO2022070638A5 (https=
JPWO2022070638A1 (https=
Inventor
伸拓 田中
友徳 川端
寛基 阿知波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication date
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Publication of JPWO2022070638A1 publication Critical patent/JPWO2022070638A1/ja
Publication of JPWO2022070638A5 publication Critical patent/JPWO2022070638A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2022553527A 2020-09-30 2021-08-17 流体制御装置 Active JP7409519B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020164523 2020-09-30
JP2020164523 2020-09-30
PCT/JP2021/029967 WO2022070638A1 (ja) 2020-09-30 2021-08-17 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2022070638A1 JPWO2022070638A1 (https=) 2022-04-07
JPWO2022070638A5 JPWO2022070638A5 (https=) 2023-06-01
JP7409519B2 true JP7409519B2 (ja) 2024-01-09

Family

ID=80949972

Family Applications (1)

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JP2022553527A Active JP7409519B2 (ja) 2020-09-30 2021-08-17 流体制御装置

Country Status (5)

Country Link
US (1) US12595790B2 (https=)
EP (1) EP4191062A4 (https=)
JP (1) JP7409519B2 (https=)
CN (1) CN116249834B (https=)
WO (1) WO2022070638A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114222859A (zh) * 2019-09-11 2022-03-22 京瓷株式会社 压电泵以及泵单元
CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017038565A1 (ja) 2015-08-31 2017-03-09 株式会社村田製作所 ブロア
JP2020020283A (ja) 2018-07-31 2020-02-06 セイコーエプソン株式会社 ダイヤフラム式圧縮機、冷却機、プロジェクター及び流体の圧縮方法

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US5863185A (en) * 1994-10-05 1999-01-26 Franklin Electric Co. Liquid pumping system with cooled control module
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JP2007198147A (ja) 2006-01-24 2007-08-09 Star Micronics Co Ltd ダイヤフラムポンプ
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GB2443261B (en) * 2006-10-26 2009-04-22 Starbridge Systems Ltd Wax micro actuator
EP2090781B1 (en) * 2006-12-09 2018-08-22 Murata Manufacturing Co. Ltd. Piezoelectric micro-blower
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FR2952628A1 (fr) * 2009-11-13 2011-05-20 Commissariat Energie Atomique Procede de fabrication d'au moins une micropompe a membrane deformable et micropompe a membrane deformable
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CN108138759B (zh) * 2015-10-05 2020-02-21 株式会社村田制作所 流体控制装置、减压装置以及加压装置
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TW201912248A (zh) * 2017-08-31 2019-04-01 研能科技股份有限公司 氣體輸送裝置
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WO2019138676A1 (ja) * 2018-01-10 2019-07-18 株式会社村田製作所 ポンプおよび流体制御装置
CN109723629B (zh) * 2019-03-01 2020-06-19 浙江师范大学 一种压电晶片泵
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CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置
CN116745524A (zh) * 2021-02-22 2023-09-12 株式会社村田制作所 泵装置
TWI797853B (zh) * 2021-11-29 2023-04-01 研能科技股份有限公司 氣體傳輸裝置
JP2024122621A (ja) * 2023-02-28 2024-09-09 太陽誘電株式会社 検出装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017038565A1 (ja) 2015-08-31 2017-03-09 株式会社村田製作所 ブロア
JP2020020283A (ja) 2018-07-31 2020-02-06 セイコーエプソン株式会社 ダイヤフラム式圧縮機、冷却機、プロジェクター及び流体の圧縮方法

Also Published As

Publication number Publication date
CN116249834B (zh) 2024-06-04
EP4191062A4 (en) 2024-08-14
EP4191062A1 (en) 2023-06-07
US12595790B2 (en) 2026-04-07
US20230235733A1 (en) 2023-07-27
WO2022070638A1 (ja) 2022-04-07
CN116249834A (zh) 2023-06-09
JPWO2022070638A1 (https=) 2022-04-07

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