JP2018109408A - 流体制御装置 - Google Patents
流体制御装置 Download PDFInfo
- Publication number
- JP2018109408A JP2018109408A JP2018000325A JP2018000325A JP2018109408A JP 2018109408 A JP2018109408 A JP 2018109408A JP 2018000325 A JP2018000325 A JP 2018000325A JP 2018000325 A JP2018000325 A JP 2018000325A JP 2018109408 A JP2018109408 A JP 2018109408A
- Authority
- JP
- Japan
- Prior art keywords
- suspension plate
- plate
- control device
- fluid control
- piezoelectric actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 88
- 239000000725 suspension Substances 0.000 claims abstract description 101
- 239000000084 colloidal system Substances 0.000 claims abstract description 24
- 239000000463 material Substances 0.000 claims abstract description 22
- 238000006073 displacement reaction Methods 0.000 claims abstract description 16
- 229910001220 stainless steel Inorganic materials 0.000 claims description 15
- 239000010935 stainless steel Substances 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000004308 accommodation Effects 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000008859 change Effects 0.000 abstract description 5
- 238000009434 installation Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0048—Electric operating means therefor using piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0094—Micropumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Reciprocating Pumps (AREA)
Abstract
【解決手段】流体制御装置は、圧電アクチュエータ2と殼体とコロイド5を含み、該圧電アクチュエータが懸架板21と外枠23と支持部24と圧電素子22を含み、該殼体が出口板と座体12を含み、該出口板が該圧電アクチュエータの設置に用いられ、該座体が入口板121と共振片122を含み、該入口板が外部に連通された合流チャンバ1213を備え、該共振片が該入口板上に設置されて固定されかつ中空孔1223を備え、該コロイドが該圧電アクチュエータの外枠と座体の共振片の間に設置され、該圧電アクチュエータと該座体の共振片の間に間隙を維持し、そのうち該懸架板は線膨張係数が該圧電素子の線膨張係数より小さい材料で形成され、かつ受熱変形時に湾曲を保持する硬度を有し、該懸架板と該共振片の線膨張係数の違いにより、該懸架板と該共振片の間の間隙に特定の変形変位量を維持させる。
【選択図】図4
Description
11 出口板
111 側壁
112 板体
113 収容空間
114 一時貯蔵チャンバ
115 排出孔
116 圧縮チャンバ
12 座体
121 入口板
1211 進入孔
1212 合流槽
1213 合流チャンバ
122 共振片
1221 可動部
1222 固定部
1223 中空孔
2 圧電アクチュエータ
21 懸架板
22 圧電素子
23 外枠
231、41 導電ピン
24 支持部
25 空隙
26 凸部
3a、3b 絶縁片
4 導電片
5 コロイド
6 封止剤
h 間隙
δ 変形変位量
Claims (11)
- 流体制御装置であって、圧電アクチュエータと、殼体と、コロイドと、を含み、
前記圧電アクチュエータが、
懸架板と、
前記懸架板の外側に周設された外枠と、
前記懸吊板と前記外枠の間を連接して設置された少なくとも1つの支持部と、
前記懸架板の辺の長さより大きくない辺の長さを備え、前記懸架板上に貼付される圧電素子と、を含み、
前記殼体が、出口板と、座体と、を含み、
前記出口板が、周縁に側壁と底部に板体を備え、収容空間を構成する枠体構造であり、前記圧電アクチュエータが前記収容空間内に設置され、
前記座体が入口板と共振片を含んで構成され、前記出口板の前記収容空間を覆い、前記圧電アクチュエータを封鎖し、前記入口板が外部に連通された合流チャンバを備え、前記共振片が前記入口板上に固定され、かつ前記入口板の前記合流チャンバに相対する中空孔を備え、
前記コロイドが前記圧電アクチュエータの前記外枠と前記座体の前記共振片の間に設置され、前記圧電アクチュエータと前記座体の前記共振片の間に間隙を維持し、
そのうち、前記懸架板が、線膨張係数が圧電素子の線膨張係数より小さい材料で形成され、かつ受熱変形時に湾曲を保持する硬度を有し、前記懸架板と前記共振片の線膨張係数の違いにより、前記懸架板と前記共振片の間の前記間隙に最大の性能と流量が得られる変形変位量を維持させることを特徴とする、流体制御装置。 - 前記懸架板がステンレス材質であり、最も好ましくは310HV〜350HVの硬度を有することを特徴とする、請求項1に記載の流体制御装置。
- 前記懸架板が熱を受けて変形した後、前記懸架板と前記共振片の間に20〜25μmの変形変位量が保持され、流体制御装置の出力気圧が300〜400mmHg、流量が90〜160ml/minとなることを特徴とする、請求項2に記載の流体制御装置。
- 前記懸架板がステンレス材質であり、370HV〜410HVの硬度を有することを特徴とする、請求項1に記載の流体制御装置。
- 前記懸架板が熱を受けて変形した後、前記懸架板と前記共振片の間に15〜17μmの変形変位量が保持され、前記流体制御装置の出力気圧が300〜400mmHg、流量が50〜100ml/minとなることを特徴とする、請求項4に記載の流体制御装置。
- 前記懸架板が正方形の形態であることを特徴とする、請求項1に記載の流体制御装置。
- 前記懸架板の辺の長さが4mm〜10mmの間であることを特徴とする、請求項6に記載の流体制御装置。
- 前記懸架板が、線膨張係数が圧電素子の線膨張係数より小さい材料で形成され、前記コロイドの加熱・加圧と接合後、常温下で、前記圧電素子と前記懸架板の線膨張係数の違いにより、前記懸架板を前記圧電素子側に向かって凸状にそらせることを特徴とする、請求項1に記載の流体制御装置。
- 前記懸架板と前記共振片の線膨張係数の違いにより、前記コロイドの加熱・加圧と接合後、常温下で、前記共振片を前記懸架板側から離れる方向へ凸状にそらせることを特徴とする、請求項8に記載の流体制御装置。
- 前記入口板が、前記入口板の上下表面に貫通した少なくとも1つの進入孔を備え、前記入口板上に、前記少なくとも1つの進入孔に対応して連通された少なくとも1つの合流槽が設置され、前記合流槽の中心の合流箇所に合流チャンバが形成され、かつ前記合流チャンバと前記少なくとも1つの合流槽が連通され、これにより前記少なくとも1つの進入孔から前記少なくとも1つの合流槽に進入した流体がガイドされ、前記合流チャンバに集められることを特徴とする、請求項1に記載の流体制御装置。
- 前記懸架板上に、前記共振片の前記中空孔に対応する凸部が設けられたことを特徴とする、請求項1に記載の流体制御装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW106100263 | 2017-01-05 | ||
TW106100263A TWI621794B (zh) | 2017-01-05 | 2017-01-05 | 流體控制裝置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018109408A true JP2018109408A (ja) | 2018-07-12 |
JP6585741B2 JP6585741B2 (ja) | 2019-10-02 |
Family
ID=60888346
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018000325A Active JP6585741B2 (ja) | 2017-01-05 | 2018-01-04 | 流体制御装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10180199B2 (ja) |
EP (1) | EP3346129B1 (ja) |
JP (1) | JP6585741B2 (ja) |
TW (1) | TWI621794B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6551636B1 (ja) * | 2017-12-22 | 2019-07-31 | 株式会社村田製作所 | バルブ、アプリケーション機器 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8715350B2 (en) | 2006-09-15 | 2014-05-06 | Pioneer Surgical Technology, Inc. | Systems and methods for securing an implant in intervertebral space |
US10584695B2 (en) | 2016-01-29 | 2020-03-10 | Microjet Technology Co., Ltd. | Miniature fluid control device |
US10487821B2 (en) * | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature fluid control device |
US10487820B2 (en) * | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10655620B2 (en) | 2016-11-10 | 2020-05-19 | Microjet Technology Co., Ltd. | Miniature fluid control device |
US10683861B2 (en) | 2016-11-10 | 2020-06-16 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10746169B2 (en) | 2016-11-10 | 2020-08-18 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
CN112204255B (zh) * | 2018-05-29 | 2022-08-30 | 株式会社村田制作所 | 流体控制装置 |
TWI695934B (zh) * | 2019-03-29 | 2020-06-11 | 研能科技股份有限公司 | 微機電泵浦 |
TWI712739B (zh) * | 2019-11-04 | 2020-12-11 | 科際精密股份有限公司 | 致動系統 |
TW202217146A (zh) * | 2020-10-20 | 2022-05-01 | 研能科技股份有限公司 | 薄型氣體傳輸裝置 |
CN114228966B (zh) * | 2021-12-15 | 2022-10-28 | 杭州电子科技大学 | 一种高质量流量的压电脉冲推动器及水下机器人 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013057247A (ja) * | 2011-09-06 | 2013-03-28 | Murata Mfg Co Ltd | 流体制御装置 |
JP2013057246A (ja) * | 2011-09-06 | 2013-03-28 | Murata Mfg Co Ltd | 流体制御装置 |
CN205383064U (zh) * | 2016-01-29 | 2016-07-13 | 研能科技股份有限公司 | 微型气压动力装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5065978A (en) * | 1988-04-27 | 1991-11-19 | Dragerwerk Aktiengesellschaft | Valve arrangement of microstructured components |
DE19648730C2 (de) * | 1996-11-25 | 1998-11-19 | Fraunhofer Ges Forschung | Piezoelektrisch betätigtes Mikroventil |
AU779988B2 (en) * | 1999-06-28 | 2005-02-24 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
US7025324B1 (en) * | 2002-01-04 | 2006-04-11 | Massachusetts Institute Of Technology | Gating apparatus and method of manufacture |
EP1552163A1 (en) * | 2002-10-16 | 2005-07-13 | Matsushita Electric Industrial Co., Ltd. | Valve unit and fluid control chip |
US7258533B2 (en) * | 2004-12-30 | 2007-08-21 | Adaptivenergy, Llc | Method and apparatus for scavenging energy during pump operation |
WO2009051166A1 (ja) * | 2007-10-16 | 2009-04-23 | Murata Manufacturing Co., Ltd. | 振動装置および圧電ポンプ |
JP2015083952A (ja) * | 2013-10-25 | 2015-04-30 | キヤノン株式会社 | マイクロ流体デバイスおよび液体中の気泡の分離方法 |
CN108050051B (zh) * | 2014-02-21 | 2019-12-31 | 株式会社村田制作所 | 流体控制装置以及泵 |
TWM528306U (zh) * | 2016-01-29 | 2016-09-11 | Microjet Technology Co Ltd | 微型閥門裝置 |
-
2017
- 2017-01-05 TW TW106100263A patent/TWI621794B/zh active
-
2018
- 2018-01-02 US US15/859,974 patent/US10180199B2/en active Active
- 2018-01-02 EP EP18150089.3A patent/EP3346129B1/en active Active
- 2018-01-04 JP JP2018000325A patent/JP6585741B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013057247A (ja) * | 2011-09-06 | 2013-03-28 | Murata Mfg Co Ltd | 流体制御装置 |
JP2013057246A (ja) * | 2011-09-06 | 2013-03-28 | Murata Mfg Co Ltd | 流体制御装置 |
CN205383064U (zh) * | 2016-01-29 | 2016-07-13 | 研能科技股份有限公司 | 微型气压动力装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6551636B1 (ja) * | 2017-12-22 | 2019-07-31 | 株式会社村田製作所 | バルブ、アプリケーション機器 |
Also Published As
Publication number | Publication date |
---|---|
US10180199B2 (en) | 2019-01-15 |
US20180187797A1 (en) | 2018-07-05 |
TWI621794B (zh) | 2018-04-21 |
EP3346129B1 (en) | 2020-06-10 |
JP6585741B2 (ja) | 2019-10-02 |
TW201825821A (zh) | 2018-07-16 |
EP3346129A1 (en) | 2018-07-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6585741B2 (ja) | 流体制御装置 | |
JP6693923B2 (ja) | 圧電アクチュエータ及びこれを使用した小型流体制御装置 | |
JP5012889B2 (ja) | 圧電マイクロブロア | |
TWI619276B (zh) | 壓電致動器 | |
JP5168426B2 (ja) | 圧電マイクロブロア | |
KR101333542B1 (ko) | 유체 펌프 | |
EP2090781A1 (en) | Piezoelectric micro-blower | |
TWI689664B (zh) | 致動氣體導流裝置 | |
JP2018109407A (ja) | 小型流体制御装置 | |
TWM538094U (zh) | 微型流體控制裝置 | |
JP2016200067A (ja) | 流体制御装置 | |
JP7044663B2 (ja) | アクチュエータ | |
TWM540932U (zh) | 微型流體控制裝置 | |
TWM542099U (zh) | 流體控制裝置 | |
JP4957501B2 (ja) | 圧電マイクロブロア | |
JP6574464B2 (ja) | 小型流体制御装置 | |
JP2018196319A (ja) | 圧電アクチュエータ | |
CN211500945U (zh) | 流体控制装置 | |
CN108278196B (zh) | 流体控制装置 | |
WO2015042192A1 (en) | Zipping actuator fluid motivation | |
JP2018076865A (ja) | 小型空気圧動力装置 | |
TWM553498U (zh) | 致動器 | |
TW201932712A (zh) | 壓電致動器及其所適用之微型流體控制裝置 | |
TWI647387B (zh) | 微型流體控制裝置與壓電致動器 | |
TWM538938U (zh) | 壓電致動器及其所適用之微型流體控制裝置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180515 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180622 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20180622 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20180815 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20180905 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190507 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190805 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190820 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190905 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6585741 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |