JPWO2022070638A1 - - Google Patents

Info

Publication number
JPWO2022070638A1
JPWO2022070638A1 JP2022553527A JP2022553527A JPWO2022070638A1 JP WO2022070638 A1 JPWO2022070638 A1 JP WO2022070638A1 JP 2022553527 A JP2022553527 A JP 2022553527A JP 2022553527 A JP2022553527 A JP 2022553527A JP WO2022070638 A1 JPWO2022070638 A1 JP WO2022070638A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022553527A
Other languages
Japanese (ja)
Other versions
JPWO2022070638A5 (https=
JP7409519B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of JPWO2022070638A1 publication Critical patent/JPWO2022070638A1/ja
Publication of JPWO2022070638A5 publication Critical patent/JPWO2022070638A5/ja
Application granted granted Critical
Publication of JP7409519B2 publication Critical patent/JP7409519B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2022553527A 2020-09-30 2021-08-17 流体制御装置 Active JP7409519B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020164523 2020-09-30
JP2020164523 2020-09-30
PCT/JP2021/029967 WO2022070638A1 (ja) 2020-09-30 2021-08-17 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2022070638A1 true JPWO2022070638A1 (https=) 2022-04-07
JPWO2022070638A5 JPWO2022070638A5 (https=) 2023-06-01
JP7409519B2 JP7409519B2 (ja) 2024-01-09

Family

ID=80949972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022553527A Active JP7409519B2 (ja) 2020-09-30 2021-08-17 流体制御装置

Country Status (5)

Country Link
US (1) US12595790B2 (https=)
EP (1) EP4191062A4 (https=)
JP (1) JP7409519B2 (https=)
CN (1) CN116249834B (https=)
WO (1) WO2022070638A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114222859A (zh) * 2019-09-11 2022-03-22 京瓷株式会社 压电泵以及泵单元
CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置

Citations (2)

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WO2017038565A1 (ja) * 2015-08-31 2017-03-09 株式会社村田製作所 ブロア
JP2020020283A (ja) * 2018-07-31 2020-02-06 セイコーエプソン株式会社 ダイヤフラム式圧縮機、冷却機、プロジェクター及び流体の圧縮方法

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US5863185A (en) * 1994-10-05 1999-01-26 Franklin Electric Co. Liquid pumping system with cooled control module
JPH0939244A (ja) * 1995-05-23 1997-02-10 Fujitsu Ltd 圧電ポンプ
JP3294785B2 (ja) * 1997-09-01 2002-06-24 シャープ株式会社 回路素子の放熱構造
US6070851A (en) * 1998-06-08 2000-06-06 Industrial Technology Research Institute Thermally buckling linear micro structure
JP2000265964A (ja) 1999-03-17 2000-09-26 Kasei Optonix Co Ltd 小型ポンプ
JP2001182661A (ja) 1999-12-22 2001-07-06 Matsushita Electric Works Ltd 圧電ダイヤフラムポンプ及びその製造方法
JP2004172313A (ja) * 2002-11-19 2004-06-17 Nitto Denko Corp 熱伝導性放熱シートおよびこれを用いた半導体装置
WO2005050013A2 (en) * 2003-11-18 2005-06-02 Amos Stuart R Method and apparatus for unclogging flow systems
JP2005229038A (ja) 2004-02-16 2005-08-25 Hitachi Ltd 液冷システム及びそれを備えた電子機器
US20050258533A1 (en) * 2004-05-21 2005-11-24 Matsushita Electric Industrial Co., Ltd. Semiconductor device mounting structure
EP1722412B1 (en) * 2005-05-02 2012-08-29 Sony Corporation Jet generator and electronic device
JP2007198147A (ja) 2006-01-24 2007-08-09 Star Micronics Co Ltd ダイヤフラムポンプ
DE112007000722B4 (de) * 2006-03-29 2013-07-04 Murata Manufacturing Co., Ltd. Mikropumpe
GB2443261B (en) * 2006-10-26 2009-04-22 Starbridge Systems Ltd Wax micro actuator
EP2090781B1 (en) * 2006-12-09 2018-08-22 Murata Manufacturing Co. Ltd. Piezoelectric micro-blower
CN102037104B (zh) * 2007-09-27 2014-12-31 因诺斯佩克有限公司 燃料组合物
CN101568728A (zh) * 2007-10-16 2009-10-28 株式会社村田制作所 压电微型鼓风器
FR2952628A1 (fr) * 2009-11-13 2011-05-20 Commissariat Energie Atomique Procede de fabrication d'au moins une micropompe a membrane deformable et micropompe a membrane deformable
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WO2013157346A1 (ja) * 2012-04-17 2013-10-24 株式会社村田製作所 圧電ファン
JP6125528B2 (ja) * 2012-11-06 2017-05-10 日本碍子株式会社 発光ダイオード用基板および発光ダイオード用基板の製造方法
WO2015013746A1 (en) * 2013-07-31 2015-02-05 The Silanna Group Pty Ltd Cmos fabrication of piezoelectric devices
JP6183574B2 (ja) * 2015-04-27 2017-08-23 株式会社村田製作所 ポンプ
CN108138759B (zh) * 2015-10-05 2020-02-21 株式会社村田制作所 流体控制装置、减压装置以及加压装置
JP2018012154A (ja) * 2016-07-20 2018-01-25 株式会社マキタ 電動作業機
WO2018020882A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
TW201912248A (zh) * 2017-08-31 2019-04-01 研能科技股份有限公司 氣體輸送裝置
JP6687170B2 (ja) * 2017-12-22 2020-04-22 株式会社村田製作所 ポンプ
JP6769568B2 (ja) * 2017-12-26 2020-10-14 株式会社村田製作所 ポンプおよび流体制御装置
WO2019138676A1 (ja) * 2018-01-10 2019-07-18 株式会社村田製作所 ポンプおよび流体制御装置
CN109723629B (zh) * 2019-03-01 2020-06-19 浙江师范大学 一种压电晶片泵
DE102019215036A1 (de) * 2019-09-30 2021-04-01 Mahle International Gmbh System mit einer Getriebeeinrichtung und einer Platine
JP7327514B2 (ja) * 2019-12-26 2023-08-16 株式会社村田製作所 ポンプ装置
CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置
CN116745524A (zh) * 2021-02-22 2023-09-12 株式会社村田制作所 泵装置
TWI797853B (zh) * 2021-11-29 2023-04-01 研能科技股份有限公司 氣體傳輸裝置
JP2024122621A (ja) * 2023-02-28 2024-09-09 太陽誘電株式会社 検出装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017038565A1 (ja) * 2015-08-31 2017-03-09 株式会社村田製作所 ブロア
JP2020020283A (ja) * 2018-07-31 2020-02-06 セイコーエプソン株式会社 ダイヤフラム式圧縮機、冷却機、プロジェクター及び流体の圧縮方法

Also Published As

Publication number Publication date
CN116249834B (zh) 2024-06-04
EP4191062A4 (en) 2024-08-14
EP4191062A1 (en) 2023-06-07
US12595790B2 (en) 2026-04-07
US20230235733A1 (en) 2023-07-27
WO2022070638A1 (ja) 2022-04-07
CN116249834A (zh) 2023-06-09
JP7409519B2 (ja) 2024-01-09

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