WO2022070638A1 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
WO2022070638A1
WO2022070638A1 PCT/JP2021/029967 JP2021029967W WO2022070638A1 WO 2022070638 A1 WO2022070638 A1 WO 2022070638A1 JP 2021029967 W JP2021029967 W JP 2021029967W WO 2022070638 A1 WO2022070638 A1 WO 2022070638A1
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WO
WIPO (PCT)
Prior art keywords
control device
fluid control
wall main
flat plate
main plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/029967
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
伸拓 田中
友徳 川端
寛基 阿知波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to CN202180066367.1A priority Critical patent/CN116249834B/zh
Priority to EP21874941.4A priority patent/EP4191062A4/en
Priority to JP2022553527A priority patent/JP7409519B2/ja
Publication of WO2022070638A1 publication Critical patent/WO2022070638A1/ja
Priority to US18/191,119 priority patent/US12595790B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type

Definitions

  • the present invention relates to a fluid control device including a pump and a housing containing the pump.
  • Patent Document 1 describes a piezoelectric blower including a pump portion, a valve portion, and an outer housing.
  • the pump part and the valve part communicate with each other.
  • the portion composed of the pump portion and the valve portion is arranged in the outer housing.
  • the structure composed of the pump portion and the valve portion is fixed to the outer housing.
  • the structure consisting of the pump part and the valve part divides the internal space of the outer housing into the space on the pump side and the space on the valve side.
  • the outer housing is formed with a through hole that communicates the space on the pump side and the external space, and a through hole that communicates the space on the valve side and the external space.
  • the pump unit is equipped with a piezoelectric element. By applying a drive voltage signal to the piezoelectric element, it functions as a pump. The piezoelectric element is exposed in the space on the pump side.
  • an object of the present invention is to provide a fluid control device capable of suppressing deterioration of characteristics due to heat generation of the piezoelectric element.
  • the fluid control device of the present invention includes a pump and an outer housing containing the pump.
  • the pumps are arranged on the first plate and the second plate which is arranged so as to face the first plate at a distance and forms a pump chamber together with the first plate, and on the surface of the first plate opposite to the pump chamber. It comprises an arranged piezoelectric element.
  • the outer housing forms a first internal space on the first flat plate side, and has a first outer wall having a first through hole for communicating the first internal space and the external space, and a second internal space on the second flat plate side. It is provided with a second outer wall which is formed and has a second through hole for communicating the second inner space and the outer space.
  • the first outer wall includes a first outer wall main plate facing the piezoelectric element, and a first side plate connected to the first outer wall main plate and having a first through hole.
  • the first outer wall main plate has higher thermal conductivity than the second outer wall.
  • the heat generated by driving the piezoelectric element is radiated to the external space with high efficiency via the first outer wall main plate.
  • FIG. 1 is an exploded perspective view showing an example of the configuration of the fluid control device 10 according to the first embodiment.
  • FIG. 2A is a side sectional view showing an example of the configuration of the fluid control device 10 according to the first embodiment
  • FIG. 2B is a heat dissipation of the fluid control device 10 according to the first embodiment. It is a figure which shows the state schematicly.
  • FIG. 3 is a diagram showing the temperature of the internal space on the piezoelectric element side in the fluid control device having a comparative configuration and the fluid control device 10 having the configuration according to the first embodiment of the present invention.
  • FIG. 4 is a side sectional view showing an example of the configuration of the fluid control device 10A according to the second embodiment.
  • FIG. 5 is a diagram showing the temperature of the internal space on the piezoelectric element side in the fluid control device having a comparative configuration and the fluid control device 10A having the configuration according to the second embodiment of the present invention.
  • 6 (A) and 6 (B) are side sectional views showing an example of the configuration of the fluid control devices 10B1 and 10B2 according to the third embodiment.
  • FIG. 7A is a side sectional view showing an example of the configuration of the fluid control device 10C according to the fourth embodiment
  • FIG. 7B is a configuration of the fluid control device 10C according to the fourth embodiment. It is an exploded perspective view which shows a part of.
  • FIG. 8 (A) and 8 (B) are side sectional views showing an example of the configuration of the fluid control devices 10D1 and 10D2 according to the fifth embodiment.
  • 9 (A) and 9 (B) are side sectional views showing an example of the configuration of the fluid control devices 10E1 and 10E2 according to the sixth embodiment.
  • FIG. 10 is a side sectional view showing an example of the configuration of the fluid control device 10F according to the seventh embodiment.
  • FIG. 11 is a side sectional view showing an example of the configuration of the fluid control device 10G according to the eighth embodiment.
  • FIG. 1 is an exploded perspective view showing an example of the configuration of the fluid control device 10 according to the first embodiment.
  • FIG. 2A is a side sectional view showing an example of the configuration of the fluid control device 10 according to the first embodiment
  • FIG. 2B is a heat dissipation of the fluid control device 10 according to the first embodiment. It is a figure which shows the state schematicly. In each figure of each embodiment including the present embodiment, the shape of each component is partially or wholly exaggerated in order to make the configuration of the fluid control device 10 easy to understand.
  • the fluid control device 10 includes a pump 20 and an outer housing 40.
  • the pump 20 is contained in the outer housing 40.
  • the pump 20 includes a flat plate 21, a flat plate 22, a pump frame 23, and a piezoelectric element 30.
  • the flat plate 21 is a disk.
  • the flat plate 21 is made of a metal plate or the like.
  • a through hole TH21 is formed in the flat plate 21.
  • the through hole TH21 penetrates the flat plate 21 in the thickness direction.
  • the through hole TH21 is formed near the outer peripheral end of the flat plate 21. More specifically, in a plan view, the flat plate 21 is formed on the outer peripheral side of the portion overlapping the piezoelectric element 30 and on the center side of the portion overlapping the pump frame 23 described later.
  • the through hole TH21 penetrates the flat plate 21 in the thickness direction.
  • the through hole TH21 is formed along the outer circumference of the flat plate 21 and is a groove having a discrete shape. As a result, bending vibration is possible in the portion of the flat plate 21 inside the formed portion of the through hole TH21.
  • the piezoelectric element 30 is arranged on one main surface of the flat plate 21.
  • the piezoelectric element 30 is a disk, and its shape in a plan view is smaller than that of the flat plate 21. In a plan view, the center of the piezoelectric element 30 and the center of the flat plate 21 substantially coincide with each other.
  • the piezoelectric element 30 is realized, for example, by a flat plate piezoelectric body and electrode patterns formed on both main surfaces of the piezoelectric body.
  • the flat plate 22 has a predetermined shape (rectangular in the fluid control device 10) in a plan view, is made of a material that is harder to bend than the flat plate 21, and has a thickness.
  • the flat plate 22 is arranged on the other main surface side of the flat plate 21 (the side opposite to the side on which the piezoelectric element 30 is arranged).
  • the flat plate 22 is arranged apart from the flat plate 21 in a direction orthogonal to the main surface (flat plate surface).
  • the main surface of the flat plate 22 and the main surface of the flat plate 21 are parallel.
  • the area of the flat plate 22 in a plan view is larger than the area of the flat plate 21 in a plan view.
  • the center of the flat plate 22 and the center of the flat plate 21 substantially coincide with each other.
  • a through hole TH22 is formed in the flat plate 22.
  • the through hole TH 22 penetrates the flat plate 22 in the thickness direction.
  • the through hole TH 22 is arranged at the center of the flat plate 22 in a plan view.
  • the pump frame 23 has an annular shape.
  • the pump frame 23 is arranged between the flat plate 21 and the flat plate 22, and is joined or adhered to the flat plate 21 and the flat plate 22.
  • the pump 20 has a pump chamber 100 surrounded by a flat plate 21, a flat plate 22, and a pump frame 23.
  • the flat plate 21 corresponds to the "first flat plate” of the present invention
  • the flat plate 22 corresponds to the "second flat plate” of the present invention.
  • the outer housing 40 includes an outer wall main plate 41, an outer wall main plate 42, a side plate 431, and a side plate 432.
  • the outer peripheral end portion of the flat plate 22 also constitutes a part of the outer housing 40.
  • the first outer wall is composed of an outer wall main plate 41 and a side plate 431.
  • the outer wall main plate 41 is a flat plate having a predetermined shape.
  • the outer wall main plate 41 is a rectangular flat plate in a plan view.
  • the shape of the outer wall main plate 41 in a plan view is larger than that of the flat plate 21, is substantially the same size as that of the flat plate 22, and is substantially the same shape.
  • the outer wall main plate 41 is arranged on one main surface side (the surface side on which the piezoelectric element 30 is arranged) of the flat plate 21.
  • the flat plate surface (main surface) of the outer wall main plate 41 and the flat plate surface (main surface) of the flat plate 21 are parallel to each other and face each other.
  • the outer wall main plate 41 is arranged away from the flat plate 21 in a direction orthogonal to the flat plate surface (main surface) of the flat plate 21. This separation distance is a distance at which the piezoelectric element 30 and the outer wall main plate 41 do not come into contact with each other due to the bending vibration of the flat plate 21 under normal usage conditions of the fluid control device 10.
  • the outer wall main plate 41 is a metal (metal plate). At this time, it is preferable to use a metal having high thermal conductivity as a material for the outer wall main plate 41.
  • the material of the outer wall main plate 41 may be selected in consideration of thermal conductivity and rigidity. That is, as the material of the outer wall main plate 41, a material that can obtain desired thermal conductivity while having the rigidity required for the fluid control device 10 may be selected.
  • the outer wall main plate 41 may be SUS or the like, and the main material of the outer wall main plate 41 may be, for example, SUS.
  • Cu or the like can be used, and in this case, it is better to provide an insulating thin film described later for reliability and the like.
  • a material with high thermal conductivity means, for example, that the heat transfer rate and diffusion rate of the substance made of the material are high.
  • the side plate 431 is an annular shape having a predetermined height. One end of the side plate 431 in the height direction is connected to the outer peripheral end portion of the flat plate 22. The other end of the side plate 431 in the height direction is connected to the outer peripheral end portion of the outer wall main plate 41.
  • a through hole 51 is formed in the side plate 431. Further, the nozzle 501 is arranged on the outer surface side of the portion of the side plate 431 where the through hole 51 is formed. The opening of the nozzle 501 communicates with the through hole 51.
  • the nozzle 501 may be integrally formed with the side plate 431 or may be formed separately.
  • the internal space 101 communicates with the external space through the through hole 51.
  • the outer wall main plate 41 corresponds to the "first outer wall main plate” of the present invention
  • the side plate 431 corresponds to the "first side plate” of the present invention
  • the internal space 101 corresponds to the "first internal space” of the present invention
  • the through hole 51 corresponds to the "first through hole” of the present invention.
  • the second outer wall is composed of an outer wall main plate 42 and a side plate 432.
  • the outer wall main plate 42 is a flat plate having a predetermined shape.
  • the outer wall main plate 42 is a rectangular flat plate in a plan view.
  • the shape of the outer wall main plate 42 in a plan view is substantially the same size as that of the flat plate 22 and is substantially the same shape.
  • the outer wall main plate 42 is arranged on the side opposite to the side of the flat plate 22 facing the flat plate 21.
  • the flat plate surface (main surface) of the outer wall main plate 42 and the flat plate surface (main surface) of the flat plate 22 are parallel to each other and face each other.
  • the outer wall main plate 42 is arranged away from the flat plate 22 in a direction orthogonal to the flat plate surface (main surface) of the flat plate 22.
  • the outer wall main plate 42 is a metal (metal plate).
  • the outer wall main plate 42 does not have to be made of metal.
  • the side plate 432 is an annular shape having a predetermined height. One end of the side plate 432 in the height direction is connected to the outer peripheral end portion of the flat plate 22. The other end of the side plate 432 in the height direction is connected to the outer peripheral end portion of the outer wall main plate 42. With this configuration, an outer wall main plate 42, a side plate 432, and an internal space 102 surrounded by the flat plate 22 of the pump 20 are formed on the flat plate 22 side of the pump 20.
  • a through hole 52 is formed in the side plate 432. Further, the nozzle 502 is arranged on the outer surface side of the portion of the side plate 432 where the through hole 52 is formed. The opening of the nozzle 502 communicates with the through hole 52.
  • the nozzle 502 may be integrally formed with the side plate 432 or may be formed separately.
  • the internal space 102 communicates with the external space through the through hole 52.
  • the outer wall main plate 42 corresponds to the "second outer wall main plate” of the present invention
  • the side plate 432 corresponds to the "second side plate” of the present invention
  • the internal space 102 corresponds to the "second internal space” of the present invention
  • the through hole 52 corresponds to the "second through hole” of the present invention.
  • the fluid is sequentially sucked from the internal space 101 through the through hole TH21.
  • the fluid in the internal space 101 is supplied from the external space through the through hole 51 and the nozzle 501.
  • the fluid sucked into the pump chamber 100 is discharged to the internal space 102 through the through hole TH22, and the fluid in the internal space 102 is discharged to the external space through the through hole 52 and the nozzle 502.
  • the fluid is sequentially sucked from the internal space 102, for example, through the through hole TH22.
  • the fluid in the internal space 102 is supplied from the external space through the through hole 52 and the nozzle 502.
  • the fluid sucked into the pump chamber 100 is discharged to the internal space 101 through the through hole TH21, and the fluid in the internal space 101 is discharged to the external space through the through hole 51 and the nozzle 501.
  • the fluid control device 10 can convey the fluid in one direction.
  • a drive signal is continuously applied to the piezoelectric element 30, and distortion is continuously generated. As a result, the piezoelectric element 30 generates heat.
  • the outer wall main plate 41 faces the piezoelectric element 30. Therefore, as shown in FIG. 2B, the heat generated from the piezoelectric element 30 is transferred to the outer wall main plate 41 through the internal space 101, and is dissipated from the outer wall main plate 41 to the external space.
  • the outer wall main plate 41 is made of metal. That is, the outer wall main plate 41 has high thermal conductivity. As a result, the heat generated from the piezoelectric element 30 and transmitted to the outer wall main plate 41 through the inner space 101 is transmitted and diffused in the outer wall main plate 41, and is transferred to the surface of the outer wall main plate 41 on the outer space side. Then, the heat transferred to the surface of the outer wall main plate 41 on the outer space side is radiated to the outer space.
  • the fluid control device 10 can effectively dissipate the heat of the internal space 101 and the piezoelectric element 30. As a result, the fluid control device 10 can effectively suppress the temperature rise of the internal space 101 and the piezoelectric element 30.
  • FIG. 3 is a diagram showing the temperature of the internal space on the piezoelectric element side in the fluid control device having a comparative configuration and the fluid control device 10 having the configuration according to the first embodiment of the present invention.
  • FIG. 3 shows the temperature after 20 minutes of continuously driving the piezoelectric element 30 at 1 W in an environment of 25 ° C.
  • the outer housing is made of an insulating resin.
  • the temperature of the internal space can be lowered by using the configuration of the present application.
  • the fluid control device 10 can suppress deterioration of the fluid transport characteristics due to an increase in temperature. Further, the fluid control device 10 can reduce thermal stress on each component constituting the fluid control device 10, and can improve reliability. For example, the fluid control device 10 can extend the product life.
  • the thickness of the outer wall main plate 41 is not shown in detail in the above description, the thickness of the outer wall main plate 41 is preferably as thin as possible in consideration of the above-mentioned rigidity. As a result, the fluid control device 10 can realize more effective heat dissipation.
  • FIG. 4 is a side sectional view showing an example of the configuration of the fluid control device 10A according to the second embodiment.
  • the fluid control device 10A according to the second embodiment is different from the fluid control device 10 according to the first embodiment in the configuration of the outer wall main plate 42A of the outer housing 40A.
  • Other configurations of the fluid control device 10A are the same as those of the fluid control device 10, and the description of the same parts will be omitted.
  • the fluid control device 10A includes an outer housing 40A, and the outer housing 40A includes an outer wall main plate 42A.
  • the outer wall main plate 42A is formed of an insulating resin. With such a configuration, the fluid control device 10A can exert the same operation and effect as the fluid control device 10.
  • FIG. 5 is a diagram showing the temperature of the internal space on the piezoelectric element side in the fluid control device having a comparative configuration and the fluid control device 10A having the configuration according to the second embodiment of the present invention.
  • FIG. 5 shows the temperature after 20 minutes of continuously driving the piezoelectric element 30 at 1 W in an environment of 25 ° C.
  • the outer housing is made of an insulating resin.
  • the temperature of the internal space can be lowered by using the configuration of the present embodiment.
  • the fluid control device 10A can realize weight reduction.
  • the outer wall main plate 42A is made thicker than the outer wall main plate 41. As a result, the fluid control device 10A can increase the rigidity of the outer housing 40A even if the outer wall main plate 42A is made of an insulating resin.
  • the outer wall main plate 41 is made thinner than the outer wall main plate 42A.
  • the fluid control device 10A can realize further weight reduction while maintaining a predetermined rigidity in the outer housing 40A.
  • the fluid control device 10A can further improve the heat dissipation property (heat exhaust property to the external space).
  • the fluid control device 10A can improve the heat dissipation by thinning at least the portion of the outer wall main plate 41 facing the piezoelectric element 30 (the portion overlapping the piezoelectric element 30 in a plan view). Further, the fluid control device 10A can improve heat dissipation and secure higher rigidity by thinning only the portion of the outer wall main plate 41 facing the piezoelectric element 30 (the portion overlapping the piezoelectric element 30 in a plan view). ..
  • outer wall main plate 42A and the side plate 432 are formed separately.
  • the outer wall main plate 42A and the side plate 432 may be integrally formed.
  • FIG. 6A is a side sectional view showing an example of the configuration of the fluid control device 10B1 according to the third embodiment
  • FIG. 6B is a configuration of the fluid control device 10B2 according to the third embodiment. It is a side sectional view which shows an example.
  • the fluid control device 10B1 according to the third embodiment is different from the fluid control device 10A according to the second embodiment in that it includes an insulating thin film 401.
  • the outer housing 40B and the outer wall main plate 42B are the same as the outer housing 40A and the outer wall main plate 42A of the fluid control device 10A.
  • Other configurations of the fluid control device 10B1 are the same as those of the fluid control device 10A, and the description of the same parts will be omitted.
  • the fluid control device 10B1 includes an insulating thin film 401.
  • the insulating thin film 401 is arranged on the surface of the outer wall main plate 41 on the piezoelectric element 30 side.
  • the insulating thin film 401 is thinner than the outer wall main plate 41 and has a predetermined thermal conductivity. At this time, by using the insulating thin film 401 having high thermal conductivity, the heat emissivity of the surface of the outer wall main plate 41 on the inner space 101 side can be increased, and the thermal resistance from the inner space 101 to the outer wall main plate 41 increases. Can be suppressed.
  • the fluid control device 10B1 has the same function and effect as the fluid control device 10A, and can suppress a short circuit between the metal outer wall main plate 41 and the piezoelectric element 30.
  • FIG. 6A shows an embodiment in which the insulating thin film 401 is arranged on the entire surface of the outer wall main plate 41 on the piezoelectric element 30 side.
  • the insulating thin film 401 may be arranged at least in a portion of the outer wall main plate 41 facing the piezoelectric element 30 (a portion overlapping the piezoelectric element 30 in a plan view).
  • the fluid control device 10B1 secures heat dissipation and suppresses a short circuit by arranging the insulating thin film 401 only on the portion of the outer wall main plate 41 facing the piezoelectric element 30 (the portion overlapping the piezoelectric element 30 in a plan view). Can be realized.
  • the fluid control device 10B2 according to the third embodiment is different from the fluid control device 10A according to the second embodiment in that it includes an insulating thin film 402.
  • the outer housing 40B and the outer wall main plate 42B are the same as the outer housing 40A and the outer wall main plate 42A of the fluid control device 10A.
  • Other configurations of the fluid control device 10B2 are the same as those of the fluid control device 10A, and the description of the same parts will be omitted.
  • the fluid control device 10B2 includes an insulating thin film 402.
  • the insulating thin film 402 is arranged on the surface of the outer wall main plate 41 on the outer space side.
  • the insulating thin film 402 is thinner than the outer wall main plate 41 and has a predetermined thermal conductivity. At this time, by using the insulating thin film 402 having high thermal conductivity, the heat radiation coefficient of the surface of the outer wall main plate 41 on the outer space side can be increased, and the heat radiation resistance from the outer wall main plate 41 to the outer space increases. Can be suppressed.
  • the fluid control device 10B1 has the same function and effect as the fluid control device 10A, and can suppress a short circuit between the metal outer wall main plate 41 and the external conductor or the like.
  • FIG. 6A shows an embodiment in which the insulating thin film 401 is arranged on the entire surface of the outer wall main plate 41 on the piezoelectric element 30 side.
  • the insulating thin film 402 may be arranged at least at a necessary position on the outer wall main plate 41.
  • the insulating thin film 402 may be arranged at a portion facing the conductor close to the fluid control device 10B2.
  • the fluid control device 10B2 can secure heat dissipation and suppress a short circuit by arranging the insulating thin film 402 only at a necessary position on the outer wall main plate 41.
  • both the insulating thin film 401 shown in FIG. 6 (A) and the insulating thin film 402 shown in FIG. 6 (B) can be arranged. Further, in FIGS. 6A and 6B, the insulating thin film 401 and the insulating thin film 402 may be arranged in a predetermined pattern.
  • the insulating thin film 401 may have a mesh shape, a polka dot shape, or the like.
  • FIG. 7A is a side sectional view showing an example of the configuration of the fluid control device 10C according to the fourth embodiment
  • FIG. 7B is a configuration of the fluid control device 10C according to the fourth embodiment. It is an exploded perspective view which shows a part of.
  • the fluid control device 10C according to the fourth embodiment has an outer wall of the outer housing 40C with respect to the fluid control device 10A according to the second embodiment. It differs in the configuration of the main plate 41C.
  • the outer wall main plate 42C is the same as the outer wall main plate 42A of the fluid control device 10A.
  • Other configurations of the fluid control device 10C are the same as those of the fluid control device 10A, and the description of the same parts will be omitted.
  • the outer wall main plate 41C includes a metal portion 411 and a resin portion 412.
  • the resin portion 412 is arranged so as to surround the outer periphery of the metal portion 411.
  • the metal part 411 has, for example, a disk shape.
  • the planar shape of the metal portion 411 is substantially the same as the planar shape of the piezoelectric element 30.
  • the metal portion 411 faces the piezoelectric element 30.
  • the area of the metal portion 411 does not have to be substantially the same as the area of the piezoelectric element 30, and is preferably equal to or larger than the area of the piezoelectric element 30.
  • the fluid control device 10C can effectively dissipate the heat of the internal space 101 and the piezoelectric element 30. Further, the fluid control device 10C can realize weight reduction.
  • the fluid control device 10C can dissipate heat more effectively.
  • FIG. 8A is a side sectional view showing an example of the configuration of the fluid control device 10D1 according to the fifth embodiment
  • FIG. 8B is a configuration of the fluid control device 10D2 according to the fifth embodiment. It is a side sectional view which shows an example.
  • the fluid control devices 10D1 and 10D2 according to the fifth embodiment have an outer housing 40D with respect to the fluid control device 10A according to the second embodiment.
  • the outer wall main plates 41D1 and 41D2 are different.
  • the outer wall main plate 42D is the same as the outer wall main plate 42A of the fluid control device 10A.
  • Other configurations of the fluid control devices 10D1 and 10D2 are the same as those of the fluid control device 10A, and the description of the same parts will be omitted.
  • the outer wall main plate 41D1 includes a metal portion 411D1 and a resin portion 412.
  • the metal portion 411D1 has two regions having different thicknesses. More specifically, it has a thick central region and a thin peripheral region.
  • the planar shape of the central region is substantially the same as the planar shape of the piezoelectric element 30.
  • the peripheral region has a shape surrounding the outer periphery of the central region, and the outer shape of the peripheral region is substantially the same as the planar shape of the flat plate 22.
  • One main surface of the metal portion 411D1 is flush with the central region and the peripheral region.
  • the other main surface of the metal portion 411D1 has a shape in which the peripheral region is recessed from the central region.
  • the resin portion 412 is a flat plate having an opening in the center.
  • the resin portion 412 is arranged in a peripheral region portion on the other main surface side of the metal portion 411D1.
  • the resin portion 412 is arranged so as to fill the recess on the other main surface side of the metal portion 411D1.
  • both main surfaces of the outer wall main plate 41D1 become flat.
  • the outer wall main plate 41D1 is arranged so that the other main surface of the metal portion 411D1 faces the piezoelectric element 30.
  • the fluid control device 10D1 can effectively dissipate the heat of the internal space 101 and the piezoelectric element 30. Further, the outer wall main plate 41D1 can be made lighter than the outer wall main plate 41 made entirely of metal.
  • the outer wall main plate 41D2 includes a metal portion 411D2 and a resin portion 412.
  • the metal part 411D2 has the same shape as the metal part 411D1.
  • the outer wall main plate 41D2 is arranged so that the other main surface of the metal portion 411D1 is exposed to the external space.
  • the fluid control device 10D2 can effectively dissipate the heat of the internal space 101 and the piezoelectric element 30. Further, the outer wall main plate 41D2 can be made lighter than the outer wall main plate 41 made entirely of metal.
  • FIG. 9A is a side sectional view showing an example of the configuration of the fluid control device 10E1 according to the sixth embodiment
  • FIG. 9B is a configuration of the fluid control device 10E2 according to the sixth embodiment. It is a side sectional view which shows an example.
  • the fluid control devices 10E1 and 10E2 according to the sixth embodiment have valves 60E1 and 60E2 with respect to the fluid control device 10 according to the first embodiment. It differs in that it is provided with.
  • Other configurations of the fluid control devices 10E1 and 10E2 are the same as those of the fluid control device 10, and the description of the same parts will be omitted.
  • the fluid control device 10E1 includes a valve 60E1.
  • the valve 60E1 includes a flat plate 22E, a flat plate 61, a bulb frame 62, and a valve membrane 63.
  • the flat plate 22E faces the flat plate 21 and forms a pump chamber 100 together with the flat plate 21 and the pump frame 23, similarly to the flat plate 22 described above.
  • the flat plate 61 is arranged apart from the flat plate 22E on the side opposite to the flat plate 21 side.
  • the flat plate 61 faces the flat plate 22E.
  • the valve frame 62 has a ring shape.
  • the valve frame 62 is arranged between the flat plate 22E and the flat plate 61, and is joined or adhered to the flat plate 22E and the flat plate 61.
  • the valve 60E1 has a flat plate 22E, a flat plate 61, and a valve chamber 110 surrounded by the valve frame 62.
  • the valve membrane 63 is arranged so as to be movable in the thickness direction in the valve chamber 110.
  • a through hole TH22E is formed in the flat plate 22E.
  • a through hole TH61 is formed in the flat plate 61. In a plan view (viewed in a direction orthogonal to the flat plate surface (main surface) of the flat plate 61 and the flat plate 22E), the through hole TH61 and the through hole TH22E do not overlap.
  • a through hole TH63 is formed in the valve membrane 63, and the through hole TH63 of the valve membrane 63 overlaps the through hole TH61 and does not overlap the through hole TH22E.
  • the structure including the valve 60E1 and the pump 20E is fixed to the outer housing 40 by the support member 71 that separates the internal space 101 and the internal space 102.
  • the fluid control device 10E1 can transfer the fluid in the direction of flowing from the pump 20E to the valve 60E1 and suppress the transfer in the reverse direction.
  • the fluid control device 10E2 includes a valve 60E2.
  • the valve 60E2 includes a flat plate 22E, a flat plate 61, a bulb frame 62, and a valve membrane 63.
  • the valve 60E2 has a different formation position of the through hole TH22E for the flat plate 22E and the through hole TH61 for the flat plate 61 with respect to the valve 60E1.
  • Other configurations of the valve 60E2 are the same as those of the valve 60E1, and the description of the same parts will be omitted.
  • a through hole TH22E is formed in the flat plate 22E.
  • a through hole TH61 is formed in the flat plate 61. In a plan view (viewed in a direction orthogonal to the flat plate surface (main surface) of the flat plate 61 and the flat plate 22E), the through hole TH61 and the through hole TH22E do not overlap.
  • a through hole TH63 is formed in the valve membrane 63, and the through hole TH63 of the valve membrane 63 overlaps the through hole TH22E and does not overlap the through hole TH61.
  • the fluid control device 10E2 can convey the fluid in the direction of flowing from the valve 60E2 to the pump 20E, and can suppress the transfer in the reverse direction.
  • the fluid control devices 10E1 and 10E2 can effectively dissipate the heat of the internal space 101 and the piezoelectric element 30.
  • FIG. 10 is a side sectional view showing an example of the configuration of the fluid control device 10F according to the seventh embodiment.
  • the fluid control device 10F according to the seventh embodiment is different from the fluid control device 10 according to the first embodiment in that nozzles 501 and 502 are omitted.
  • Other configurations of the fluid control device 10F are the same as those of the fluid control device 10, and the description of the same parts will be omitted.
  • the fluid control device 10F does not have nozzles 501 and 502. Even with such a configuration, the fluid control device 10F can effectively dissipate the heat of the internal space 101 and the piezoelectric element 30.
  • FIG. 11 is a side sectional view showing an example of the configuration of the fluid control device 10G according to the eighth embodiment.
  • the fluid control device 10G forms a through hole 420G that communicates the internal space 102 with the external space with respect to the fluid control device 10A according to the second embodiment. Is different. Other configurations of the fluid control device 10G are the same as those of the fluid control device 10A, and the description of the same parts will be omitted.
  • the fluid control device 10G includes an outer housing 40G including an outer wall main plate 42G.
  • a through hole 420G is formed in the outer wall main plate 42G.
  • the fluid control device 10G can effectively dissipate the heat of the internal space 101 and the piezoelectric element 30.
  • the metal portion is formed of one metal in each of the above-described embodiments, a plurality of metals may be laminated. Alternatively, it may be formed by laminating a metal thicker than the core material on a thin insulating core material.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
PCT/JP2021/029967 2020-09-30 2021-08-17 流体制御装置 Ceased WO2022070638A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN202180066367.1A CN116249834B (zh) 2020-09-30 2021-08-17 流体控制装置
EP21874941.4A EP4191062A4 (en) 2020-09-30 2021-08-17 FLUID CONTROL DEVICE
JP2022553527A JP7409519B2 (ja) 2020-09-30 2021-08-17 流体制御装置
US18/191,119 US12595790B2 (en) 2020-09-30 2023-03-28 Fluid control device

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JP2020164523 2020-09-30
JP2020-164523 2020-09-30

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US18/191,119 Continuation US12595790B2 (en) 2020-09-30 2023-03-28 Fluid control device

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CN116249834B (zh) 2024-06-04
EP4191062A4 (en) 2024-08-14
EP4191062A1 (en) 2023-06-07
US12595790B2 (en) 2026-04-07
US20230235733A1 (en) 2023-07-27
CN116249834A (zh) 2023-06-09
JP7409519B2 (ja) 2024-01-09
JPWO2022070638A1 (https=) 2022-04-07

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