JPWO2022070638A1 - - Google Patents

Info

Publication number
JPWO2022070638A1
JPWO2022070638A1 JP2022553527A JP2022553527A JPWO2022070638A1 JP WO2022070638 A1 JPWO2022070638 A1 JP WO2022070638A1 JP 2022553527 A JP2022553527 A JP 2022553527A JP 2022553527 A JP2022553527 A JP 2022553527A JP WO2022070638 A1 JPWO2022070638 A1 JP WO2022070638A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022553527A
Other versions
JPWO2022070638A5 (ja
JP7409519B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022070638A1 publication Critical patent/JPWO2022070638A1/ja
Publication of JPWO2022070638A5 publication Critical patent/JPWO2022070638A5/ja
Application granted granted Critical
Publication of JP7409519B2 publication Critical patent/JP7409519B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2022553527A 2020-09-30 2021-08-17 流体制御装置 Active JP7409519B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020164523 2020-09-30
JP2020164523 2020-09-30
PCT/JP2021/029967 WO2022070638A1 (ja) 2020-09-30 2021-08-17 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2022070638A1 true JPWO2022070638A1 (ja) 2022-04-07
JPWO2022070638A5 JPWO2022070638A5 (ja) 2023-06-01
JP7409519B2 JP7409519B2 (ja) 2024-01-09

Family

ID=80949972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022553527A Active JP7409519B2 (ja) 2020-09-30 2021-08-17 流体制御装置

Country Status (5)

Country Link
US (1) US20230235733A1 (ja)
EP (1) EP4191062A4 (ja)
JP (1) JP7409519B2 (ja)
CN (1) CN116249834B (ja)
WO (1) WO2022070638A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114222859A (zh) * 2019-09-11 2022-03-22 京瓷株式会社 压电泵以及泵单元

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017038565A1 (ja) * 2015-08-31 2017-03-09 株式会社村田製作所 ブロア
JP2020020283A (ja) * 2018-07-31 2020-02-06 セイコーエプソン株式会社 ダイヤフラム式圧縮機、冷却機、プロジェクター及び流体の圧縮方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005050013A2 (en) * 2003-11-18 2005-06-02 Amos Stuart R Method and apparatus for unclogging flow systems
CA2700349C (en) * 2007-09-27 2016-08-23 Innospec Limited Diesel fuel compositions comprising mannich product and quaternary ammonium salt
FR2952628A1 (fr) * 2009-11-13 2011-05-20 Commissariat Energie Atomique Procede de fabrication d'au moins une micropompe a membrane deformable et micropompe a membrane deformable
JP6481769B2 (ja) * 2015-10-05 2019-03-13 株式会社村田製作所 流体制御装置、減圧装置、および、加圧装置
WO2019124060A1 (ja) * 2017-12-22 2019-06-27 株式会社村田製作所 ポンプ
WO2019138676A1 (ja) * 2018-01-10 2019-07-18 株式会社村田製作所 ポンプおよび流体制御装置
CN109723629B (zh) * 2019-03-01 2020-06-19 浙江师范大学 一种压电晶片泵

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017038565A1 (ja) * 2015-08-31 2017-03-09 株式会社村田製作所 ブロア
JP2020020283A (ja) * 2018-07-31 2020-02-06 セイコーエプソン株式会社 ダイヤフラム式圧縮機、冷却機、プロジェクター及び流体の圧縮方法

Also Published As

Publication number Publication date
EP4191062A1 (en) 2023-06-07
CN116249834B (zh) 2024-06-04
WO2022070638A1 (ja) 2022-04-07
CN116249834A (zh) 2023-06-09
US20230235733A1 (en) 2023-07-27
JP7409519B2 (ja) 2024-01-09
EP4191062A4 (en) 2024-08-14

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