CN116161969A - 滑动构件及使用了其的轴承、发动机以及驱动装置 - Google Patents
滑动构件及使用了其的轴承、发动机以及驱动装置 Download PDFInfo
- Publication number
- CN116161969A CN116161969A CN202310221657.XA CN202310221657A CN116161969A CN 116161969 A CN116161969 A CN 116161969A CN 202310221657 A CN202310221657 A CN 202310221657A CN 116161969 A CN116161969 A CN 116161969A
- Authority
- CN
- China
- Prior art keywords
- silicon nitride
- sliding member
- crystal grains
- nitride crystal
- dislocation defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 210
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 208
- 239000013078 crystal Substances 0.000 claims abstract description 127
- 230000007547 defect Effects 0.000 claims abstract description 107
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 28
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 21
- 229910052760 oxygen Inorganic materials 0.000 claims description 21
- 239000001301 oxygen Substances 0.000 claims description 21
- 229910052757 nitrogen Inorganic materials 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 230000003746 surface roughness Effects 0.000 claims description 10
- 238000005245 sintering Methods 0.000 description 76
- 239000012071 phase Substances 0.000 description 43
- 239000000843 powder Substances 0.000 description 35
- 239000002994 raw material Substances 0.000 description 24
- 230000007797 corrosion Effects 0.000 description 22
- 238000005260 corrosion Methods 0.000 description 22
- 238000000034 method Methods 0.000 description 21
- 238000005096 rolling process Methods 0.000 description 16
- 230000008859 change Effects 0.000 description 15
- 239000012298 atmosphere Substances 0.000 description 13
- 239000002245 particle Substances 0.000 description 13
- 239000000654 additive Substances 0.000 description 12
- 230000000996 additive effect Effects 0.000 description 12
- 239000011230 binding agent Substances 0.000 description 11
- 238000013001 point bending Methods 0.000 description 11
- 238000011156 evaluation Methods 0.000 description 9
- 239000012535 impurity Substances 0.000 description 9
- 238000002156 mixing Methods 0.000 description 9
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 8
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 8
- 239000002131 composite material Substances 0.000 description 8
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 8
- 230000002950 deficient Effects 0.000 description 8
- 229910052747 lanthanoid Inorganic materials 0.000 description 8
- 150000002602 lanthanoids Chemical class 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 238000000465 moulding Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000001513 hot isostatic pressing Methods 0.000 description 7
- 229910052727 yttrium Inorganic materials 0.000 description 7
- 238000005238 degreasing Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000011812 mixed powder Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000005484 gravity Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000001590 oxidative effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 239000004519 grease Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 239000000395 magnesium oxide Substances 0.000 description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 4
- 150000001247 metal acetylides Chemical class 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 229910006360 Si—O—N Inorganic materials 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 238000005728 strengthening Methods 0.000 description 3
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 3
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 239000011362 coarse particle Substances 0.000 description 2
- -1 composite nitrides) Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- VQCBHWLJZDBHOS-UHFFFAOYSA-N erbium(iii) oxide Chemical compound O=[Er]O[Er]=O VQCBHWLJZDBHOS-UHFFFAOYSA-N 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 229910052596 spinel Inorganic materials 0.000 description 2
- 239000011029 spinel Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910039444 MoC Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000009694 cold isostatic pressing Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007723 die pressing method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- QXYJCZRRLLQGCR-UHFFFAOYSA-N dioxomolybdenum Chemical compound O=[Mo]=O QXYJCZRRLLQGCR-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000011151 fibre-reinforced plastic Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- UZLYXNNZYFBAQO-UHFFFAOYSA-N oxygen(2-);ytterbium(3+) Chemical compound [O-2].[O-2].[O-2].[Yb+3].[Yb+3] UZLYXNNZYFBAQO-UHFFFAOYSA-N 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910052566 spinel group Inorganic materials 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 235000012222 talc Nutrition 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/587—Fine ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
- C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/6261—Milling
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/632—Organic additives
- C04B35/636—Polysaccharides or derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
- C04B35/6455—Hot isostatic pressing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/52—Bearings with rolling contact, for exclusively rotary movement with devices affected by abnormal or undesired conditions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/52—Bearings with rolling contact, for exclusively rotary movement with devices affected by abnormal or undesired conditions
- F16C19/527—Bearings with rolling contact, for exclusively rotary movement with devices affected by abnormal or undesired conditions related to vibration and noise
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/24—Brasses; Bushes; Linings with different areas of the sliding surface consisting of different materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/303—Parts of ball or roller bearings of hybrid bearings, e.g. rolling bearings with steel races and ceramic rolling elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/32—Balls
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/16—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
- H02K5/173—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields using bearings with rolling contact, e.g. ball bearings
- H02K5/1732—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields using bearings with rolling contact, e.g. ball bearings radially supporting the rotary shaft at both ends of the rotor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/083—Structural association with bearings radially supporting the rotary shaft at both ends of the rotor
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
- C04B2235/3222—Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3232—Titanium oxides or titanates, e.g. rutile or anatase
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3244—Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3817—Carbides
- C04B2235/3826—Silicon carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3817—Carbides
- C04B2235/3839—Refractory metal carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3865—Aluminium nitrides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3873—Silicon nitrides, e.g. silicon carbonitride, silicon oxynitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6562—Heating rate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6567—Treatment time
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
- C04B2235/661—Multi-step sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/782—Grain size distributions
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/785—Submicron sized grains, i.e. from 0,1 to 1 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
- C04B2235/85—Intergranular or grain boundary phases
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/963—Surface properties, e.g. surface roughness
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
- F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
- F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2202/00—Solid materials defined by their properties
- F16C2202/02—Mechanical properties
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2202/00—Solid materials defined by their properties
- F16C2202/02—Mechanical properties
- F16C2202/04—Hardness
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/40—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal
- F16C2206/58—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal based on ceramic nitrides
- F16C2206/60—Silicon nitride (Si3N4)l
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
- F16C2240/90—Surface areas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2326/00—Articles relating to transporting
- F16C2326/01—Parts of vehicles in general
- F16C2326/06—Drive shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2380/00—Electrical apparatus
- F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/30—Structural association with control circuits or drive circuits
- H02K11/33—Drive circuits, e.g. power electronics
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
- H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
Abstract
本发明提供一种滑动构件,其特征在于,其是具备具有氮化硅晶粒及晶界相的氮化硅烧结体的滑动构件,在氮化硅烧结体的任意的截面或表面的观察区域50μm×50μm中,可见到全部轮廓的任意的50个氮化硅晶粒中的在内部具有位错缺陷部的氮化硅晶粒的数目的比例为0%~10%。更优选上述比例为0%~3%。
Description
本申请是申请日为2019年11月19日、发明名称为“滑动构件及使用了其的轴承、发动机以及驱动装置”的中国申请号为201980073611.X的分案申请。
技术领域
实施方式涉及滑动构件及使用了其的轴承、发动机以及驱动装置。
背景技术
由氮化硅烧结体构成的具有耐磨性的滑动构件在轧制用那样的各种辊材、凸轮滚子那样的引擎部件、轴承构件、压缩机用导流片、燃气轮机叶片、摩擦搅拌接合用工具构件等各种领域被使用。它们作为相对于对象构件滑动的构件来使用。对于氮化硅烧结体,要求强度和耐磨性。
例如,在日本专利第5380277号公报(专利文献1)中,公开了控制了氮化硅晶粒尺寸和孔隙尺寸的氮化硅烧结体。专利文献1的氮化硅烧结体能够提高强度和耐磨性这两者。由此,在专利文献1中,得到了600小时以上的滚动寿命。
近年来,电动汽车正在普及。关于电动汽车中搭载的发动机,逆变器驱动成为主流。在逆变器驱动的方式中,通过改变驱动发动机的电源的频率,能够改变发动机的旋转速度。即,在逆变器驱动的方式中,能够改变发动机的旋转速度。逆变器驱动的发动机在电动汽车、产业设备等各种领域见到扩展。
通过采用逆变器驱动,发动机的旋转速度变得能够从1000rpm变化至最快15000rpm左右为止。
现有技术文献
专利文献
专利文献1:日本专利第5380277号公报
发明内容
发明所要解决的课题
如上所述逆变器驱动是能够改变发动机的旋转速度的驱动方法。在专利文献1中,轴承滚珠的耐久性试验以最大接触压力为5.9MPa、转速为1200rpm的条件进行。通常的耐久性试验将旋转速度恒定而进行。伴随着逆变器驱动的普及,在改变旋转速度的同时驱动发动机的情况增加。若旋转速度改变,则轴承滚珠及轴承所受到的负荷变得不恒定。就以往的氮化硅烧结体制轴承滚珠而言,在负荷发生变化的使用环境下耐久性产生不均。另外,还产生发生电蚀那样的问题。
本发明是用于应对这样的问题的发明,目的是提供即使负荷发生变化也显示出稳定的耐久性的滑动构件。
用于解决课题的手段
实施方式的滑动构件的特征在于,其具备具有氮化硅晶粒及晶界相的氮化硅烧结体,在上述氮化硅烧结体的任意的截面或表面的观察区域50μm×50μm中,可见到全部轮廓的任意的50个上述氮化硅晶粒中的在内部具有位错缺陷部的上述氮化硅晶粒的数目的比例为0%~10%。
发明效果
实施方式的滑动构件降低了具有位错缺陷部的氮化硅晶粒的比例。由此,即使如转速的变化等那样滑动条件发生变化,也能够获得优异的耐久性。另外,还能够抑制电蚀的产生。
附图说明
图1是例示出具有位错缺陷部的氮化硅晶粒的概念图。
图2是例示出氮化硅晶粒的长径的概念图。
图3是表示轴承的一个例子的概念图。
图4是表示发动机及具备其的驱动装置的一个例子的概念图。
具体实施方式
实施方式的滑动构件降低了具有位错缺陷部的氮化硅晶粒的比例。由此,即使如转速的变化等那样滑动条件发生变化,也能够获得优异的耐久性。另外,还能够抑制电蚀的产生。
氮化硅烧结体具有氮化硅晶粒和晶界相。晶界相主要由烧结助剂的成分构成。晶界相是在烧结工序中烧结助剂反应而形成的。反应在烧结助剂彼此之间、烧结助剂与氮化硅之间、或烧结助剂与杂质氧之间引起。
实施方式的滑动构件的特征在于,在任意的截面或表面的观察区域50μm×50μm中,可见到全部轮廓的任意的50个上述氮化硅晶粒中的在内部具有位错缺陷部的上述氮化硅晶粒的数目的比例为0%~10%。
对于位错缺陷的观察,使用氮化硅烧结体的任意的截面或表面。
首先,通过离子铣削加工或FIB(聚焦离子束)加工,按照表面粗糙度Ra成为1μm以下的方式,对氮化硅烧结体的任意的截面或表面进行加工。将加工后的截面或表面设定为评价面。
接着,用透射型电子显微镜(TEM)对评价面进行观察。利用TEM的评价时的倍率设定为10000倍以上。评价面的面积设定为50μm×50μm。在一个视野中无法观察50μm×50μm的区域时,也可以将评价面分成多个来进行观察。例如,也可以以10μm×10μm或其以下的视野进行观察。在评价中,对一个观察区域(50μm×50μm)进行观察后,对与该区域相距1000μm以上的另一区域进行观察。即,在两个部位以上对50μm×50μm的区域进行观察,算出具有位错缺陷部的氮化硅晶粒(缺陷粒子)的数目的比例。
位错缺陷部的有无通过TEM的观察图像的暗视野和明视野的观察来判别。位错缺陷部在暗视野中看起来发白,在明视野中反转看起来发黑。将像这样在将暗视野和明视野切换时像素的颜色反转的部位设定为位错缺陷部。
图1是例示具有位错缺陷部的氮化硅晶粒的概念图。在图1中,1为氮化硅晶粒。2为位错缺陷部。如图1中所示的那样,在实施方式的滑动构件的氮化硅烧结体中,在氮化硅晶粒1的内部可能存在位错缺陷部2。
若在氮化硅晶粒内存在位错缺陷部,则滑动条件变化时的耐久性降低。位错缺陷部是晶体中所含的晶体缺陷。晶体缺陷也被称为晶格缺陷(Lattice Defect)。晶体缺陷通过原子排列的紊乱或杂质而引起。位错缺陷部在稳定的晶体结构中产生缺陷。
例如,使用了逆变器驱动的发动机的旋转速度在0rpm~15000rpm左右的范围内变化。所谓旋转速度为0rpm是发动机停止的状态。逆变器驱动的发动机可以一边使旋转速度在50~15000rpm左右变化一边驱动。伴随于此,对发动机的轴承中使用的轴承滚珠的负荷也发生变化。获知:若如轴承滚珠那样对氮化硅烧结体施加强的负荷,则位错缺陷部会影响耐久性的降低。
氮化硅烧结体是高强度且耐磨性高的材料。如专利文献1那样,在滑动构件的表面以一定的旋转速度相对于对象构件滑动时没有问题。然而获知:若在负荷的施加方式发生变化的同时滑动构件滑动,则对滑动构件的长期寿命存在影响。
发动机的振动频率依赖于旋转速度而变化。即,若旋转速度发生变化,则振动频率也发生变化。发动机的振动与轴承的振动有关。轴承以特定的振动频率引起共振。所谓共振是若从外部对振动体施加与固有振动频率相等的振动则振动的幅度变大的现象。若轴承的振动频率与轴承的固有振动频率接近则引起共振。在共振下,对滚动体(轴承滚珠)的负荷变大。在逆变器驱动的发动机中,振动频率发生变化。若在振动频率变化的过程中通过引起轴承的共振的振动频率带,则滚动体的负荷变大。像这样,若旋转速度发生变化,则滑动条件发生变化。
如上所述位错缺陷部为晶体缺陷。若对氮化硅烧结体施加的负荷小则不会产生问题,但若对氮化硅烧结体施加的负荷大则出现影响。这是由于:在具有位错缺陷部的氮化硅烧结体和不具有位错缺陷部的氮化硅烧结体中,应力的接受方式不同。
在实施方式的滑动构件的氮化硅烧结体中,在任意的50μm×50μm这样的微小区域中,具有位错缺陷部的氮化硅晶粒的数目的比例为0%~10%。任意的观察区域50μm×50μm中的上述比例为0%~10%表示无论对何处的50μm×50μm的区域进行观察,其数目的比例均为0%~10%。
若具有位错缺陷部的氮化硅晶粒的数目的比例超过10%,则变得容易产生电蚀。若在逆变器驱动的设备或产生高频的设备的附近配置轴承,则因电磁噪声的影响而在轴承内产生电流。将轴承的轨道面因该电流而受到损伤的现象称为电蚀。轴承内通过润滑脂等而被绝缘,但若电流超过一定量则引起放电现象。
氮化硅晶粒的位错缺陷部为晶体缺陷。认为:电位差由于容易在晶体缺陷部产生,因此容易成为放电的流路。若具有位错缺陷部的氮化硅晶粒的数目的比例超过10%,则在氮化硅烧结体中位错缺陷部成为放电的流路,其结果是,在轴承的轨道面变得容易产生电蚀。
一般而言,在轴承内部(内轮与外轮之间)填充有润滑脂。润滑脂能够提高轴承的润滑性、耐热性、耐水性等。若将发动机进行逆变器驱动,则在旋转轴上产生电压。通过轴承内部的润滑脂因该电压引起介质击穿而产生电蚀。氮化硅烧结体为绝缘体,其体积电阻值在常温下为1×1014Ω·cm以上。绝缘体若施加电场则发生极化。在逆变器驱动中,通过改变频率,能够改变旋转速度。因此,在逆变器中,产生交流电场。位错缺陷部具有缺陷。因此,容易因极化现象而产生电场差。在实施方式的滑动构件中,由于位错缺陷部少,因此能够抑制电场差的发生。
因此,在观察区域50μm×50μm中存在的氮化硅晶粒中,在内部具有位错缺陷部的氮化硅晶粒的数目的比例优选为0%~10%、进而0%~3%。最优选上述比例为0%。即,通过没有具有位错缺陷部的氮化硅晶粒,能够提高耐久性提高及电蚀抑制的效果。需要说明的是,将彼此相距1000μm以上的两个部位以上的区域设定为观察对象。另外,在对观察区域50μm×50μm的至少一部分拍摄而得到的TEM照片中,轮廓未全部拍摄到的氮化硅晶粒不用于数目的比例的计算。例如,轮廓被照片的端切断的氮化硅晶粒不用于数目的比例的计算。另外,在可确认50个拍摄到全部轮廓的氮化硅晶粒时,求出该50个氮化硅晶粒中的具有位错缺陷部的氮化硅晶粒的数目的比例。即,进行观察直至可确认50个全部轮廓拍摄到的氮化硅晶粒。在1个观察区域50μm×50μm中,无法观察拍摄到全部轮廓的50个氮化硅晶粒时,在另一观察区域50μm×50μm中,对拍摄到全部轮廓的50个氮化硅晶粒进行观察。在观察区域50μm×50μm中拍摄到超过50个的氮化硅晶粒时,选择任意的50个氮化硅晶粒。另外,对各个氮化硅晶粒进行TEM观察的倍率设定为10000倍。在一个氮化硅晶粒不被收纳入一个图像时也可以分成多个进行拍摄。在实施方式的滑动构件的氮化硅烧结体中,任意的50个氮化硅晶粒中的具有位错缺陷部的氮化硅晶粒的数目的比例为0%~10%。这表示在观察区域50μm×50μm中拍摄到超过50个的氮化硅晶粒时,无论选择哪50个氮化硅晶粒,具有位错缺陷部的氮化硅晶粒的数目的比例均为0%~10%。
另外,在位错缺陷部中,除硅、氧及氮以外的成分优选未成为1μm2以上的块。另外,在位错缺陷部中,优选未检测到10摩尔%以上的除硅、氧及氮以外的成分。
所谓除硅、氧及氮以外的成分是构成晶界相的成分。晶界相主要由烧结助剂构成。因此,除硅、氧及氮以外的成分对应于烧结助剂的金属成分。例如,在使用氧化钇(Y2O3)作为烧结助剂的情况下,除硅、氧及氮以外的成分为钇(Y)。
另外,所谓除硅、氧及氮以外的成分未成为1μm2以上的块表示在位错缺陷部中,构成晶界相的金属成分变得低于1μm2(包含0μm2)。另外,即使是使用多个烧结助剂的情况下,也优选除硅、氧及氮以外的成分未成为1μm2以上的块。这表示烧结助剂成分未成为位错缺陷部的核。
另外,所谓未检测到10摩尔%以上的除硅、氧及氮以外的成分表示在位错缺陷部中,烧结助剂的金属成分低于10摩尔%(包含0摩尔%)。例如,在使用氧化钇(Y2O3)作为烧结助剂的情况下,表示位错缺陷部中钇(Y)低于10摩尔%(包含0摩尔%)。另外,在使用多个烧结助剂的情况下,烧结助剂的金属成分的合计优选变成低于10摩尔%。这表示烧结助剂成分未成为位错缺陷部的核。
另外,在位错缺陷部中,构成晶界相的金属成分优选变成低于1μm2(包含0μm2)并且低于10摩尔%(包含0摩尔%)。
通过烧结助剂成分未成为位错缺陷部的核,对电蚀的耐久性提高。另外,若产生与电蚀有关的放电现象,则产生热。烧结助剂成分由于形成低熔点的化合物,因此变得容易引起氮化硅晶粒的内部断裂。因此,烧结助剂成分优选未成为位错缺陷部的核。
位错缺陷部的除硅、氧及氮以外的成分的尺寸及浓度的分析通过EDX(能量色散型X射线分析)或WDS(波长分散型X射线分析)来进行。也可以将EPMA(电子探针显微分析仪)组合来进行分析。
另外,位错缺陷部的占有面积率为5%以下的氮化硅晶粒的数目相对于具有位错缺陷部的氮化硅晶粒的数目的比例优选为70%以上。如上所述,如果具有位错缺陷部的氮化硅晶粒的数目少,则不会成为电蚀的原因。其另一方面,若在一个氮化硅晶粒内存在大的位错缺陷部,则有可能机械耐久性降低。因此,一个氮化硅晶粒内的位错缺陷部的占有面积率优选为5%以下。另外,若位错缺陷部的占有面积率为5%以下的氮化硅晶粒的数目相对于具有位错缺陷部的氮化硅晶粒的数目的比例为70%以上,则能够提高耐久性提高及电蚀抑制的效果。该比例也在观察区域50μm×50μm中求出。
即,首先,在1个观察区域50μm×50μm中,对拍摄到全部的轮廓的任意的50个氮化硅晶粒进行观察。接着,确认在所观察的50个氮化硅晶粒中分别是否存在位错缺陷部。计算出所观察到的50个氮化硅晶粒中的具有位错缺陷部的氮化硅晶粒的数目的比例。该比例优选为0%~10%。接着,在存在具有位错缺陷部的氮化硅晶粒的情况下,对于这些氮化硅晶粒,分别计算出位错缺陷部的占有面积率。计算出位错缺陷部的占有面积率为5%以下的氮化硅晶粒的数目相对于具有位错缺陷部的氮化硅晶粒的数目的比例。该比例优选为70%以上。在1个观察区域50μm×50μm中,没有可见到全部轮廓的50个氮化硅晶粒时,在另一观察区域50μm×50μm中,查找可见到全部轮廓的50个氮化硅晶粒。在某一观察区域50μm×50μm中,测定具有位错缺陷部的氮化硅晶粒的数目的比例、位错缺陷部的占有面积率等之后,对与该观察区域相距1000μm以上的另一观察区域50μm×50μm进行观察。在实施方式的滑动构件的氮化硅烧结体中,在任意的截面的任一观察区域50μm×50μm中,具有位错缺陷部的氮化硅晶粒的数目的上述比例均为0%~10%。另外,位错缺陷部的占有面积率为5%以下的氮化硅晶粒的数的上述比例为70%以上。若换而言之,则在50μm×50μm的微小的区域中,也控制了氮化硅晶粒的位错缺陷部的尺寸。
另外,对于一个氮化硅晶粒内的位错缺陷部的占有面积率的测定,使用上述的TEM照片的暗视野图像。在暗视野图像中,位错缺陷部被观察到发白。在暗视野图像中观察到的一个氮化硅晶粒中,将看起来发白的区域的面积与看起来发黑的区域的面积的合计设定为该氮化硅晶粒的面积。将在暗视野图像中看起来发白的区域的面积设定为位错缺陷部的面积。将(位错缺陷部的面积/氮化硅晶粒的面积)×100(%)设定为位错缺陷部的占有面积率。另外,在该占有面积率的测定中,使用图像处理软件。作为图像解析软件,使用Image-j或具有与其同等以上的析像度的软件。
另外,位错缺陷部的占有面积率为5%以下的氮化硅晶粒的数目的比例通过在某个观察区域50μm×50μm中对轮廓全部拍摄到的50个氮化硅晶粒进行拍摄而算出。
另外,在氮化硅烧结体的任意的截面的观察区域300μm×300μm中,氮化硅晶粒的长径优选为25μm以下。另外,在氮化硅烧结体的任意的截面的观察区域300μm×300μm中,氮化硅晶粒的长径的平均优选为1μm~10μm的范围内。另外,在氮化硅烧结体的任意的截面的单位面积300μm×300μm中,各个晶界相的面积优选为9μm2以下。所谓晶界相的面积是由多个氮化硅晶粒所围成的区域的面积。
所谓氮化硅晶粒的长径为25μm以下表示没有长径超过25μm以上的氮化硅晶粒。即,表示没有超过25μm的粗大粒的状态。如上述那样,通过减少位错缺陷部,能够提高耐久性和耐电蚀特性。通过不存在大的粗大粒,能够抑制部分的机械强度的不均。因此,氮化硅晶粒的长径优选为25μm以下、进而15μm以下。
另外,氮化硅晶粒的长径的平均优选为1μm~10μm的范围内。长径的平均低于1μm时,有可能氮化硅晶粒过小,耐久性降低。另外,若长径的平均超过10μm,则有可能氮化硅晶粒彼此的间隙变大,强度降低。
另外,在氮化硅烧结体的任意的截面的观察区域300μm×300μm中,各个晶界相的面积优选为9μm2以下。若晶界相的面积超过9μm2,则有可能成为绝缘性的不均的原因。晶界相和氮化硅晶粒的绝缘性不同。因此,若晶界相过大,则抑制氮化硅晶粒的位错缺陷部的效果变小。因此,各个晶界相的面积优选为9μm2以下、进而5μm2以下。最优选各个晶界相的面积为1μm2以下。
氮化硅晶粒的长径和晶界相的面积使用SEM照片来进行测定。拍摄氮化硅基板的任意的截面的SEM照片。截面设定为表面粗糙度Ra为1μm以下的研磨面。SEM照片的倍率设定为1000倍以上。推荐的SEM照片的倍率为4000倍。在一个视野中无法拍摄300μm×300μm的区域时,也可以将300μm×300μm的区域分成多个来拍摄。在截面的一方向上的长度低于300μm时,尽可能延长该一方向上的观察区域的长度,然后对90000μm2的观察区域进行观察。氮化硅晶粒的长径基于90000μm2的观察区域中的观察结果来测定。
如图2中所示的那样,长径为将一个氮化硅晶粒的外缘上的任意的2点连结而得到的线段中最长的线段的长度。图2中,3表示氮化硅晶粒1的长径。另外,测定在观察区域300μm×300μm的SEM照片中拍摄的各个氮化硅晶粒的长径的平均。轮廓被SEM照片的端切断而未拍摄到整体的氮化硅晶粒从计数除外。在SEM照片中,仅使用能够观察最长的线段的氮化硅晶粒来求出长径。
在SEM照片中,氮化硅晶粒与晶界相可以通过对比度的不同来判别。氮化硅晶粒拍摄成浓的灰色,晶界相拍摄成淡的灰色。通过对SEM照片进行图像解析,可以求出晶界相的面积。具体而言,通过图像解析软件对2值化的图像进行解析。在二值图像中,氮化硅晶粒以黑色表示,晶界相以白色表示。将由3个以上的氮化硅晶粒围成的区域作为晶界相,求出其面积。即,存在于氮化硅晶粒的2粒子间的晶界相除外而求出面积。另外,作为图像解析软件,使用Image-j或具有与其同等以上的析像度的软件。
通过具有以上的构成,能够提供耐久性及耐电蚀特性优异的滑动构件。另外,作为氮化硅烧结体,也可以将三点弯曲强度设定为900MPa以上、断裂韧性设定为5.5MPa·m1/2以上。即,能够在维持作为材料的强度的状态下进一步提高耐久性及耐电蚀特性。需要说明的是,三点弯曲强度的测定依据JIS-R-1601而进行。断裂韧性的测定依据JIS-R-1607的IF法通过新原的式子而求出。关于JIS-R-1601,可以参考ISO 14704。关于JIS-R-1607,可以参考ISO 15732。
另外,烧结助剂的含量以氧化物换算计优选为20质量%以下。若烧结助剂的含量超过20质量%,则晶界相的比例增加。若晶界相增加,则有可能三点弯曲强度或断裂韧性值降低。另外,降低具有位错缺陷部的氮化硅晶粒的比例的效果降低。
即,氮化硅烧结体优选含有20质量%以下的氮化硅以外的添加成分,并且添加成分含有选自Y、镧系元素、Al、Mg、Si、Ti、Hf、Mo、C中的3种以上的元素。
即,氮化硅烧结体含有20质量%以下的添加成分。所谓添加成分是指氮化硅以外的成分。在氮化硅烧结体中,所谓氮化硅以外的添加成分是指烧结助剂成分。烧结助剂成分构成晶界相。若添加成分超过20质量%而过多,则晶界相变得过多。氮化硅烧结体具有细长的β-氮化硅晶粒复杂地互相缠绕的结构。若烧结助剂成分变多,则氮化硅晶粒形成不采取复杂地互相缠绕的结构的部分,因此不优选。通过更多地具有复杂地互相缠绕的结构,能够提高三点弯曲强度及断裂韧性值。
另外,添加成分量优选为3质量%~15质量%。添加成分低于3质量%时,有可能晶界相变得过少而氮化硅烧结体的密度降低。晶界相是填埋氮化硅晶粒彼此的间隙的成分。因此,通过将添加成分规定为3质量%以上,变得容易以95%以上形成烧结体的相对密度。另外,通过将添加成分规定为5质量%以上,变得容易以98%以上形成烧结体的相对密度。
另外,氮化硅烧结体优选具备3种以上选自Y、镧系元素、Al、Mg、Si、Ti、Hf、Mo、C中的元素作为添加成分。只要氮化硅烧结体含有作为添加成分的Y(钇)、镧系元素、Al(铝)、Mg(镁)、Si(硅)、Ti(钛)、Hf(铪)、Mo(钼)、C(碳)作为构成元素,则其存在形态没有限定。例如可列举出氧化物(包含复合氧化物)、氮化物(包含复合氮化物)、氧氮化物(包含复合氧氮化物)、碳化物(包含复合碳化物)等形态。另外,作为镧系元素,优选选自Yb(镱)、Er(铒)、Lu(钌)、及Ce(铈)中的1种。
如下文所述的那样,在制造工序中作为烧结助剂而添加的情况下,优选氧化物(包含复合氧化物)、氮化物(包含复合氮化物)、碳化物(复合碳化物)。在使用Y元素的情况下,优选氧化钇(Y2O3)。另外,作为镧系元素,优选选自氧化镱(Yb2O3)、氧化铒(Er2O3)、氧化钌(Lu2O3)及氧化铈(CeO2)中的1种。
Y元素及镧系元素可以促进细长的柱状的β-氮化硅晶粒的形成。
在使用Al元素的情况下,优选氧化铝(Al2O3)、氮化铝(AlN)、MgO·Al2O3尖晶石或莫来石(Al2O3-SiO2)。在使用Mg元素的情况下,优选氧化镁(MgO)、MgO·Al2O3尖晶石或滑石(MgO-SiO2)。在使用Si元素的情况下,优选氧化硅(SiO2)或碳化硅(SiC)。
另外,Al元素、Mg元素及Si元素具有降低烧结温度、提高烧成性的效果。
在使用Ti元素的情况下,优选氧化钛(TiO2)或氮化钛(TiN)。在使用Hf元素的情况下,优选氧化铪(HfO2)。在使用Mo元素的情况下,优选氧化钼(MoO2)或碳化钼(Mo2C)。关于C元素,优选作为碳化硅(SiC)、碳化钛(TiC)、或碳氮化钛(TiCN)而添加。
Ti元素、Hf元素、Mo元素、C元素作为强化晶界相的成分发挥功能。由此,能够将氮化硅烧结体高强度化或高韧性化。
通过将这些添加成分的2种以上组合而添加,能够构成具备3种以上选自Y、镧系元素、Al、Mg、Si、Ti、Hf、Mo、C中的元素的晶界相。
另外,作为在制造工序中添加的烧结助剂的组合,优选下述所示的组合。
第一组合包含2~8质量%的Y2O3、1~6质量%的Al2O3、1~6质量%的AlN、0.5~4质量%的TiO2。虽然添加了Al2O3和AlN,但作为氮化硅烧结体中添加的成分以Al元素1种进行计数。因此,根据第一组合,添加Y、Al、Ti这3种。
第二组合包含2~8质量%的Y2O3、0.1~3质量%的Al2O3、1~6质量%的AlN、0.5~3质量%的HfO2、0.1~3质量%的Mo2C。根据第二组合,添加Y、Al、Hf、Mo、C这5种。
第三组合包含2~8质量%的Y2O3、1~5质量%的Al2O3、1~6质量%的AlN、0.5~3质量%的HfO2、0.1~3质量%的Mo2C、1~6质量%的SiC。根据第三组合,添加Y、Al、Hf、Mo、C、Si这6种。
第四组合包含0.2~3质量%的Y2O3、0.5~5质量%的MgO·Al2O3尖晶石、2~6质量%的AlN、0.5~3质量%的HfO2、0.1~3质量%的Mo2C。根据第四组合,添加Y、Mg、Al、Hf、Mo、C这6种。
在第一~第四组合中,也可以使用镧系元素的氧化物来代替Y2O3。在第一~第四组合中,烧结助剂成分的含量合计设定为15质量%以下。
在上述第一~第四组合中,优选第一组合。
第一组合将Al2O3与AlN并用作为Al元素。由此,变得容易在晶界相中形成Y-Al-Si-O-N化合物。Y-Al-Si-O-N化合物为Y2O3、Al2O3、AlN及氮化硅(Si3N4)的反应物。即,通过烧结工序,可以促进烧结助剂粉末与氮化硅粉末的反应。另外,通过添加AlN,可以将氮化硅粉末中的杂质氧有效利用于Y-Al-Si-O-N化合物的形成。由此,能够抑制在氮化硅晶粒中形成位错缺陷部。
另外,TiO2通过烧结工序而成为TiN(氮化钛)。TiN粒子作为强化晶界相的成分发挥功能。另外,能够抑制氮化硅晶粒的长径异常晶粒生长。由此,能够获得致密的烧结体。
因此,根据第一组合,能够将三点弯曲强度设定为1000MPa以上,将断裂韧性值设定为6.5MPa·m1/2以上。
在第二~第四组合中,添加了HfO2。HfO2与Y2O3反应,可以形成Hf-Al-Y-O系化合物。其作为低熔点的液相起作用,带来烧结性的提高。因此,能够抑制在氮化硅晶粒中形成位错缺陷部。另外,Mo2C或SiC作为强化晶界相的成分发挥功能。
由此,根据第二~第四组合,能够获得三点弯曲强度为900MPa以上、断裂韧性值为5.5MPa·m1/2以上的氮化硅烧结体。
需要说明的是,第一组合与第二~第四组合相比,三点弯曲强度的平均值变高约100MPa以上。根据第一组合,TiO2变化为TiN(氮化钛)粒子。因此,还能够实现1μm以下的微细分散。
TiO2、Mo2C、SiC在晶界相中以粒子状分散。TiO2由于伴随向TiN(氮化钛)粒子的变化,因此容易在氮化硅烧结体中的晶界相中作为微细粒子而分散。由此,能够在减小晶界相的尺寸的基础上强化晶界相。根据第一组合,能够将晶界相的面积设定为5μm2以下、进而1μm2以下。
根据滑动构件的使用环境,可以使用具有目标强度、断裂韧性值的氮化硅烧结体。另外,氮化硅烧结体的滑动面优选表面粗糙度Ra为1μm以下。
具备以上那样的氮化硅烧结体的滑动构件显示出优异的耐久性。另外,滑动构件还具有耐电蚀性。作为滑动构件,可列举出轴承构件、辊构件、压缩机构件、泵构件、引擎构件、摩擦搅拌接合装置用构件等。
轴承包含滚动体及轨道轮的组合。滚动体为球体形状或滚柱形状。这里,将滚动体称为轴承滚珠。球体形状为球,滚柱形状为圆柱。另外,使用了球体形状的滚动体的轴承称为球轴承。使用了滚柱形状的滚动体的轴承称为滚柱轴承。在滚柱轴承中,也包含针轴承、圆锥滚柱轴承、球面滚柱轴承。另外,轨道轮包含外轮及内轮。
另外,作为辊构件,可列举出轧制用辊、电子设备的进给部件用辊等。作为压缩机构件或泵构件,可列举出导流片等。这里,压缩机作为使压力上升的构件、泵作为使压力降低的构件进行区别。另外,作为引擎构件,可列举出凸轮滚子、汽缸、活塞、止回球等。另外,作为摩擦搅拌接合装置用构件,可列举出摩擦搅拌接合装置用工具构件等。
实施方式的滑动构件由于具有优异的耐久性,因此可以应用于上述那样的各种领域。关于上述领域的滑动构件,滑动构件和对象构件中的至少一者相对于另一者进行滑动。例如,在轴承中,滚动体在轴承中的位置没有变化。但是,滚动体的表面的一部分与对象构件的表面的一部分相接,滚动体的表面的一部分相对于对象构件进行滑动。实施方式的滑动构件通过少的位错缺陷部具有优异的耐久性。特别是实施方式的滑动构件适于进行面滑动的滑动构件。另外,适宜在滑动条件发生变化的使用环境中使用。作为这样的滑动构件,可列举出搭载于进行逆变器驱动的发动机中的轴承。
在JIS-B-1518中,规定了滚动轴承的动态额定载荷及额定寿命的测定方法。在JIS-B-1518的额定寿命的计算式中,使用了额定载荷。像这样,一般的轴承的寿命以载荷及旋转速度进行测定。因此,对于旋转速度发生变化的使用环境的研究未必可以说是充分的。关于JIS-B-1518,可以参考ISO 281。
这里,对进行逆变器驱动的发动机的转矩进行说明。将发动机的同步速度设定为Ns(r/分钟),将发动机的额定转速(r/分钟)设定为N,将滑动(%)设定为s,将电源的频率(Hz)设定为f,将发动机的极数设定为p。发动机的同步速度Ns以Ns=(2f/p)×60表示。转子(Rotor)以比同步速度Ns稍微降低的旋转速度产生转矩。轴承受到与该转矩相应的负荷。
发动机的额定转速N(r/分钟)以N=Ns(1-s)=(120f/p)(1-s)表示。滑动s(%)以s=((Ns-N)/Ns)×100表示。如由这些式获知的那样,对于改变进行逆变器驱动的发动机的转速而言,使电源的频率发生变化是有效的。需要说明的是,单位r/分钟为rpm。
对于滑动条件发生变化的使用环境中的轴承的耐久性的测定,测定滑动音的方法是有效的。在JIS-B-1548中,规定了滚动轴承的噪音水平的测定方法。如上所述,在进行逆变器驱动的发动机中,转矩发生变化。转矩的变化带来对轴承滚珠表面的应力的变化。若在轴承滚珠表面存在损伤,则滑动音产生变化。因此,滑动音的变化作为测定轴承滚珠的耐久性的方法是有效的。
实施方式的滑动构件具有少的位错缺陷部。因此,即使是将实施方式的滑动构件用于滑动条件发生变化的用途的情况下,也能够抑制滑动构件的损伤或电蚀的发生,滑动特性优异。例如,能够一边使发动机的旋转速度在50~15000rpm左右的范围内变化,一边使发动机进行逆变器驱动。即使是旋转速度变化1000rpm以上的使用条件,实施方式的滑动构件也显示出优异的耐久性。
接着,对实施方式的滑动构件的制造方法进行说明。滑动构件只要具有上述构成,则其制造方法没有特别限定。这里,作为用于成品率良好地获得实施方式的滑动构件的方法,可列举出以下的例子。
首先,准备原料粉末。原料粉末包含氮化硅粉末及烧结助剂粉末。适宜使用上述所示的烧结助剂。烧结助剂优选满足第一组合~第四组合中的任一者。
另外,关于烧结助剂,分别将金属单质换算成氧化物,合计量设定为20质量%以下。烧结助剂的添加量的下限值优选为2质量%以上。
关于氮化硅粉末,优选α化率为80质量%以上、平均粒径为0.4~2.5μm、杂质氧含量为2质量%以下。杂质氧含量优选为2质量%以下、进而1.0质量%以下。进一步优选杂质氧含量为0.1~0.8质量%。若杂质氧含量超过2质量%而多,则有可能引起杂质氧与烧结助剂的反应,必要程度以上地形成晶界相。另外,烧结助剂粉末的平均粒径D50优选为1.0μm以下、进而0.4μm以下。在氮化硅晶粒进行晶粒生长的过程中,在氮化硅晶粒的表面形成烧结助剂成分容易配位的状态是有效的。因此,作为烧结助剂粉末,优选微粉形态。
将上述原料粉末混合,进一步添加粘合剂而制备原料混合体。原料粉末是氮化硅粉末与烧结助剂粉末的混合粉末。在混合粉末中添加粘合剂而得到的原料混合体成为浆料。在烧结工序中,为了控制氮化硅晶粒的晶粒生长,优选将混合粉末均匀地混合。在混合工序中,使用球磨机等粉碎机进行解碎混合。此时,若解碎应力过大,则变得容易在氮化硅粉末中形成位错缺陷部,在烧结后的氮化硅粒子中残存位错缺陷部。因此,在混合工序中,优选在使氮化硅粉末中不形成位错缺陷部那样的温和的应力下,按照平均粒径D50成为1μm以下的方式进行解碎。作为温和的应力下的混合工序,可列举出用20小时以上使平均粒径D50成为1μm以下那样的方法。另外,为了执行温和的应力下的混合工序,可列举出减慢球磨机等粉碎机的旋转速度、减少介质量、使用轻的介质等。介质与混合粉末一起被投入粉碎机中。通过使用介质,能够将混合粉末有效地解碎。因此,介质也被称为粉碎介质。通过在温和的应力下进行解碎,能够兼顾解碎效率和缺陷抑制。
粉碎机的旋转速度优选为临界旋转速度的20%~40%。例如,球磨机粉碎机的临界旋转速度以Nc=42.3·D-1/2的理论式表示。Nc为临界旋转速度(rpm),D为罐内径(m)。该理论式是将在磨机圆筒的顶点相对于球的重力和离心力平衡的状态定义为临界状态的式子。据称一般的球磨机的旋转速度为临界旋转速度的55~85%左右最佳。通过将旋转速度设定为临界旋转速度的40%以下,能够在温和的应力下执行混合工序。另外,即使旋转速度低于临界旋转速度的20%也成为温和的应力,但混合时间变得过长而量产性降低。因此,粉碎机的旋转速度优选为临界旋转速度的40%以下、特别是20%~40%。
另外,介质量相对于100质量%氮化硅粉末和烧结助剂粉末的混合粉末的质量优选为10质量%以下。在使用轻的介质时,优选为相对于浆料的比重具有4倍以下的比重的介质。通过减少介质量、减小比重,能够实现温和的应力。
上述的“用20小时以上”、“设定为临界旋转速度的40%以下”、“减少介质量”、“使用比重小的介质”也可以分别组合执行。
接着,进行将原料混合体成型的成型工序。作为原料混合体的成型法,可以应用模具压制法、冷等静压(CIP)法或片材成型法等。作为片材成型法,可列举出刮刀法或辊成型法。也可以将这些成型方法组合。根据需要,也可以将原料混合体与甲苯、乙醇、丁醇等溶剂混合。根据需要,也可以将原料混合体与有机粘合剂混合。作为有机粘合剂,可列举出甲基丙烯酸丁酯、聚乙烯醇缩丁醛、聚甲基丙烯酸甲酯等。另外,在将原料混合体(氮化硅粉末与烧结助剂粉末的合计量)设定为100质量%时,有机粘合剂的添加量优选为3~17质量%。
有机粘合剂的添加量低于3质量%时,粘合剂量过少而变得难以维持成型体的形状。另外,若有机粘合剂的添加量超过17质量%,则在脱脂工序后成型体(脱脂处理后的成型体)中的空隙变大,变得得不到致密的烧结体。
接着,进行成型体的脱脂工序。在脱脂工序中,在非氧化性气氛中、温度500~800℃下进行1~4小时加热,进行预先添加的大部分的有机粘合剂的脱脂。作为非氧化性气氛,可列举出氮气气氛中、氩气气氛中等。如果必要则也可以在大气气氛等氧化气氛中进行处理,来控制残存于脱脂体中的有机物量。
接着,脱脂体(经脱脂处理的成型体)被容纳于烧成容器内在烧成炉内在非氧化性气氛中进行烧结工序。烧结工序中的温度优选为1650℃~2000℃的范围内。作为非氧化性气氛,优选氮气气氛或包含氮气的还原性气氛。另外,烧成炉内压力优选为加压气氛。
若以烧结温度低于1650℃的低温状态将脱脂体进行烧结,则氮化硅晶粒的晶粒生长不充分,难以获得致密的烧结体。另一方面,若在烧结温度比2000℃高的温度下将脱脂体进行烧结,则在炉内气氛压力低的情况下,有可能分解成Si和N2。因此,烧结温度优选控制在上述范围内。另外,烧结时间优选为3小时~12小时的范围内。
在烧结工序中,优选将1300℃~1500℃的范围内的升温速度设定为50℃/小时以下。在该温度区域中生成以烧结助剂为主的液相。通过升温速度的控制,能够促进向氮化硅晶粒表面的扩散。
优选将从1500℃至烧结温度的升温速度设定为50℃/小时以下。通过将升温速度设定为50℃/小时以下,能够促进均匀的晶粒生长,抑制粗大粒的生成,并且能够抑制在氮化硅晶粒中形成位错缺陷部。
进而压力的变化量优选为0.3MPa以下。通过抑制压力的变化量,也能够抑制在氮化硅晶粒中形成位错缺陷部。压力的变化对氮化硅晶粒的晶粒生长造成影响。烧结工序不管是在常压下进行的情况还是在加压下进行的情况,均优选将压力的变化量设定为0.3MPa以下、进而0.1MPa以下。
为了控制压力的变化量,控制烧结气氛中的气压是有效的。在氮化硅烧结体的烧结工序中,容易产生气体。在烧结工序中,成型体中的粘合剂、烧结助剂、氮化硅粉末中的杂质氧等成为气体成分。通过所产生的气体成分,烧结气氛的压力发生变化。即,即使是不特别负荷压力的常压烧结,烧结气氛的压力也会因所产生的气体成分而发生变化。因此,按照烧结工序中的气氛压力不发生变化的方式除去所产生的气体成分等控制是有效的。
像这样,通过控制升温速度或抑制压力变化,能够抑制氮化硅晶粒的异常晶粒生长。
由此,在氮化硅烧结体的任意的截面的观察区域300μm×300μm中,可以将氮化硅晶粒的长径的最大值控制为25μm以下。另外,在氮化硅烧结体的任意的截面的观察区域300μm×300μm中,可以将氮化硅晶粒的长径的平均控制为1μm~10μm的范围内。另外,由于能够抑制异常晶粒生长,因此在氮化硅烧结体的任意的截面的观察区域300μm×300μm中,可以将各个晶界相的面积控制为9μm2以下、进而5μm2以下。
另外,在上述烧结工序之后,优选对烧结体进行HIP(热等静压)处理。这里,将对上述的脱脂体进行烧结的工序称为第一烧结工序,将对烧结体进行HIP处理的工序称为第二烧结工序。HIP处理优选在温度为1600℃~1900℃、压力为80MPa~200MPa的范围内执行。通过进行HIP处理,能够减少烧结体内的气孔。由此,能够获得致密的烧结体。若压力低于80MPa,则负荷压力的效果不充分。另外,若压力超过200MPa地高,则有可能制造装置的负荷变高。
第二烧结工序的热处理温度优选比第一烧结工序的热处理温度低。通过降低第二烧结工序的热处理温度,能够抑制氮化硅晶粒进行晶粒生长。
另外,根据上述制造方法,可在第一烧结工序中抑制位错缺陷部的形成。因此,即使进行负荷压力的HIP处理,也能够抑制位错缺陷部的增加。若换而言之,则使第一烧结工序中不在氮化硅晶粒中形成位错缺陷部是重要的。
另外,将所得到的氮化硅烧结体加工成滑动构件。加工可列举出表面研磨加工、切断加工、切削加工、放电加工等。在表面研磨加工中,将氮化硅烧结体的成为滑动面的部位按照表面粗糙度Ra成为1μm以下的方式进行加工。通过将滑动面的表面粗糙度Ra设定为1μm以下、进而0.2μm以下,滑动构件的耐久性提高。另外,由于还能够降低对对象构件的攻击性,因此从这点出发耐久性也提高。
图3中示出轴承的一个例子。在图3中,10为轴承,11为轴承滚珠,12为内轮,13为外轮。轴承10成为在内轮12与外轮13之间配置有轴承滚珠11的结构。
例如,对轴承滚珠(滚动体)11使用实施方式的滑动构件。对轨道轮(内轮12及外轮13)使用轴承钢SUJ2。由这些构件构成轴承10。轴承滚珠的球体整面成为滑动面。因此,对球体整面进行研磨加工。通过减小轴承滚珠的表面粗糙度Ra,能够降低对轨道轮的攻击性。即,能够抑制伴随着轴承滚珠的滑动而轨道轮的滑动面被逐渐削去。因此,能够提高轴承整体的耐久性。
图4中示出使用了轴承的发动机及使用了该发动机的驱动装置。图4中,20为发动机,10为轴承,14为旋转轴,15为转子,16为定子,17为壳体。另外,30为驱动装置,25为控制部。实施方式的发动机20具有实施方式的轴承10。实施方式的驱动装置30具有实施方式的发动机20及控制部25。
轴承被设置于旋转轴的一端的周围及另一端的周围。伴随着旋转轴的旋转,轴承的内轮进行旋转,内轮相对于轴承滚珠的表面进行滑动。另外,轴承滚珠进行旋转,轴承滚珠的表面相对于外轮进行滑动。在旋转轴的周围,进一步设置有转子。转子位于轴承彼此之间。在转子的周围,设置有定子。轴承、旋转轴的一部分、转子、定子被收纳于壳体的内部。定子相对于壳体被固定。转子相对于旋转轴被固定,旋转轴及转子在定子的内侧进行旋转。
控制部与定子电连接。控制部对定子供给交流电流。由此,发动机的旋转轴被逆变器驱动。另外,通过使交流的频率变化,能够使发动机的旋转速度发生变化。
实施方式的发动机及驱动装置具有耐久性提高的轴承。由此,能够延长发动机及驱动装置的寿命,提高可靠性。
另外,发动机的旋转速度与轴承、旋转轴及转子的旋转速度相对应。通过将实施方式的滑动构件应用于轴承滚珠,能够提高轴承的旋转速度为50rpm以上的发动机及驱动装置的可靠性。即使是按照轴承的旋转速度变化1000rpm以上的方式构成发动机及驱动装置的情况下,也能够提高发动机及驱动装置的可靠性。
(实施例)
(实施例1~7、比较例1)
准备将氮化硅粉末与烧结助剂粉末混合而成的混合原料粉末。接着将混合原料粉末解碎混合,制备了混合原料粉末1~6。需要说明的是,解碎混合通过球磨机来进行。
对于混合原料粉末1~5,用20小时以上进行了直至平均粒径D50成为1μm以下为止的解碎工序。另外,对于混合原料粉末6,以10小时的短时间进行了解碎工序。
另外,对于混合原料粉末1~2及混合原料粉末6,使用了第一组合。对于混合原料粉末3使用了第二组合。对于混合原料粉末4使用了第三组合。对于混合原料粉末5使用了第四组合。将其结果示于表1中。
表1
接着在混合原料粉末中添加5~10wt%的粘合剂,制备了混合原料糊剂。使用混合原料糊剂,进行了模具成型。将成型体进行500~800℃、1~4小时的脱脂工序,制备了脱脂体。
接着,在氮气氛中实施了表2中所示的第一烧结工序。压力的0.1MPa表示常压。
表2
另外,在第一烧结工序结束后,将所得到的烧结体冷却至常温。之后,实施了第二烧结工序。第二烧结工序设定为HIP处理。HIP处理条件如表3中所示的那样。
表3
对所得到的氮化硅烧结体按照表面粗糙度Ra成为0.01μm以下的方式实施表面研磨加工。另外,制作JIS中规定的试样尺寸的氮化硅烧结体,测定三点弯曲强度及断裂韧性值。另外,制作直径为9.525mm(3/8英寸)的氮化硅烧结体制轴承滚珠,对耐磨性进行了试验。
接着,关于实施例及比较例,测定了位错缺陷部、氮化硅晶粒的长径、晶界相的面积、三点弯曲强度、断裂韧性值。
在位错缺陷部的测定中,以将任意的截面通过离子铣削加工将表面粗糙度Ra加工成1μm以下的面作为评价面。对评价面进行了TEM观察。在TEM中,对评价面中的50μm×50μm的区域进行了观察及拍摄。另外,与一个观察区域相距1000μm的另一区域也进行了观察及拍摄。即,对于合计2个部位的区域,测定了位错缺陷部。TEM照片的倍率设定为10000倍,拍摄明视野图像及暗视野图像。将暗视野图像中看起来发白的区域设定为位错缺陷部。通过将明视野图像与暗视野图像进行对比,求出一个氮化硅晶粒内的位错缺陷部的有无、占有面积率。需要说明的是,被TEM照片的端部切断的氮化硅晶粒(未拍摄到全部轮廓的氮化硅晶粒)从计数中除外。另外,位错缺陷部的占有面积率通过将暗视野图像利用图像处理软件进行2值化,求出白色区域与黑色区域的面积比来进行测定。
另外,对成为位错缺陷部的核的元素进行分析。位错缺陷部使用EDX进行了分析。由此,测定在位错缺陷部中除硅、氧及氮以外的元素是否成为1μm2以上的块、是否检测到10摩尔%以上。
另外,在氮化硅晶粒的长径的测定中,对任意的截面进行了SEM观察。SEM照片的倍率设定为3000倍,对300μm×300μm的区域进行了观察及拍摄。对于SEM照片中拍摄的一个氮化硅晶粒,将最长的外缘上的两点的距离设定为长径。在SEM照片中,求出300μm×300μm的观察区域中拍摄的氮化硅晶粒的长径的平均。求出最长的长径作为长径的最大值。另外,求出SEM照片中拍摄到的晶界相中最大的面积。
三点弯曲强度依据JIS-R-1601进行。断裂韧性依据JIS-R-1607的IF法进行,使用新原的式子求出。
将其结果示于表4、表5中。
表4
表5
如由表获知的那样,在实施例中,位错缺陷部的比例小。另外,三点弯曲强度及断裂韧性值也获得优异的值。
接着,实施了作为轴承滚珠的耐久性试验。将16个轴承滚珠设定为一组,组装入轨道轮(内轮及外轮)中,制作了轴承。调查了各轴承的耐久性及耐电蚀特性。
耐久性试验使轴承以将“50rpm下1小时”→“用1小时从50rpm提高至1000rpm”→“1000rpm下1小时”→“用1小时将1000rpm提高至10000rpm”→“10000rpm下1小时”→“用1小时将10000rpm降低至50rpm”设定为1组的条件进行连续驱动。求出连续驱动为400小时或800小时的滑动音相对于连续驱动为100小时的滑动音的变化率。
将滑动音的增加为10%以下设定为最佳(◎),将超过10%且低于20%设定为良好(○),如果超过20%则设定为不良(×)。该试验调查了因轴承滚珠的破损或轨道轮的灼伤而引起的滑动状态的变化。需要说明的是,滑动音的测定依据JIS-B-1548进行。
另外,耐电蚀特性通过经过800小时后的电蚀的有无来调查。将其结果示于表6中。
表6
如上所述,实施例的轴承滚珠的耐久性及耐电蚀特性优异。特别是烧结助剂为第一组合的实施例1~4的耐久性及耐电蚀特性均优异。
与此相对,比较例1的耐久性试验在400小时左右时同等,但若经过800小时则降低。另外,还产生了电蚀。获知通过存在规定量的位错缺陷部,在旋转速度发生变化的使用环境下对滑动特性产生影响。
以上,对本发明的几个实施方式进行了例示,但这些实施方式是作为例子提出的,并不意图限定发明的范围。这些新颖的实施方式可以以其它各种方式实施,在不脱离发明的主旨的范围内,可以进行各种省略、置换、变更等。这些实施方式和其变形例包含于发明的范围、主旨中,并且包含于权利要求书中记载的发明和其等同的范围内。另外,上述的各实施方式可以相互组合来实施。
符号的说明
1 氮化硅晶粒
2 位错缺陷部
3 氮化硅晶粒的长径
10 轴承
11 轴承滚珠
12 内轮
13 外轮
14 旋转轴
15 转子
16 定子
17 壳体
20 发动机
25 控制部
30 驱动装置
Claims (17)
1.一种滑动构件,其特征在于,其是具备具有氮化硅晶粒及晶界相的氮化硅烧结体的滑动构件,
其中,滑动面的表面粗糙度Ra为1μm以下,
在所述氮化硅烧结体的任意的截面或表面的观察区域50μm×50μm中,可见到全部轮廓的任意的50个所述氮化硅晶粒中的在内部具有位错缺陷部的所述氮化硅晶粒的数目的比例为0%~10%。
2.根据权利要求1所述的滑动构件,其特征在于,所述比例为0%~3%。
3.根据权利要求1或2所述的滑动构件,其特征在于,在所述位错缺陷部中,除硅、氧及氮以外的成分未成为1μm2以上的块。
4.根据权利要求1或2所述的滑动构件,其特征在于,在所述位错缺陷部中,未检测到10摩尔%以上的除硅、氧及氮以外的成分。
5.根据权利要求1或2所述的滑动构件,其特征在于,所述位错缺陷部的占有面积率为5%以下的所述氮化硅晶粒的数目相对于具有所述位错缺陷部的所述氮化硅晶粒的所述数目的比例为70%以上。
6.根据权利要求1或2所述的滑动构件,其特征在于,在所述氮化硅烧结体的任意的截面的观察区域300μm×300μm中,所述氮化硅晶粒的长径的最大值为25μm以下。
7.根据权利要求1或2所述的滑动构件,其特征在于,滑动面的表面粗糙度Ra为0.01μm以下。
8.根据权利要求1或2所述的滑动构件,其特征在于,在所述氮化硅烧结体的任意的截面的观察区域300μm×300μm中,各个所述晶界相的面积为9μm2以下。
9.根据权利要求1或2所述的滑动构件,其特征在于,所述滑动构件为轴承滚珠。
10.根据权利要求1或2所述的滑动构件,其特征在于,在所述位错缺陷部中,未检测到10摩尔%以上的除硅、氧及氮以外的成分;所述位错缺陷部的占有面积率为5%以下的所述氮化硅晶粒的数目相对于具有所述位错缺陷部的所述氮化硅晶粒的所述数目的比例为70%以上。
11.根据权利要求10所述的滑动构件,其特征在于,在所述氮化硅烧结体的任意的截面的观察区域300μm×300μm中,所述氮化硅晶粒的长径的最大值为25μm以下。
12.根据权利要求11所述的滑动构件,其特征在于,在所述氮化硅烧结体的任意的截面的观察区域300μm×300μm中,各个所述晶界相的面积为9μm2以下。
13.一种轴承,其特征在于,其具备权利要求1~12中任一项所述的滑动构件。
14.一种发动机,其特征在于,其具备权利要求13所述的轴承。
15.根据权利要求14所述的发动机,其特征在于,其被构成为轴承的旋转速度成为50rpm以上。
16.根据权利要求14或15所述的发动机,其特征在于,其被构成为轴承的旋转速度变化1000rpm以上。
17.一种驱动装置,其具备:权利要求14~16中任一项所述的发动机和逆变器驱动所述发动机的控制部。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018231856 | 2018-12-11 | ||
JP2018-231856 | 2018-12-11 | ||
PCT/JP2019/045268 WO2020121752A1 (ja) | 2018-12-11 | 2019-11-19 | 摺動部材、およびそれを用いた軸受、モータ、並びに駆動装置 |
CN201980073611.XA CN112997017B (zh) | 2018-12-11 | 2019-11-19 | 滑动构件及使用了其的轴承、发动机以及驱动装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201980073611.XA Division CN112997017B (zh) | 2018-12-11 | 2019-11-19 | 滑动构件及使用了其的轴承、发动机以及驱动装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN116161969A true CN116161969A (zh) | 2023-05-26 |
Family
ID=71075628
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202310221657.XA Pending CN116161969A (zh) | 2018-12-11 | 2019-11-19 | 滑动构件及使用了其的轴承、发动机以及驱动装置 |
CN201980073611.XA Active CN112997017B (zh) | 2018-12-11 | 2019-11-19 | 滑动构件及使用了其的轴承、发动机以及驱动装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201980073611.XA Active CN112997017B (zh) | 2018-12-11 | 2019-11-19 | 滑动构件及使用了其的轴承、发动机以及驱动装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20210261467A1 (zh) |
EP (1) | EP3896300A4 (zh) |
JP (2) | JP7402177B2 (zh) |
CN (2) | CN116161969A (zh) |
WO (1) | WO2020121752A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112292912B (zh) | 2018-08-29 | 2024-03-08 | 株式会社东芝 | 氮化硅基板及氮化硅电路基板 |
WO2022210539A1 (ja) * | 2021-03-30 | 2022-10-06 | 株式会社 東芝 | 窒化珪素焼結体、耐摩耗性部材、及び窒化珪素焼結体の製造方法 |
WO2022210533A1 (ja) * | 2021-03-30 | 2022-10-06 | 株式会社 東芝 | 窒化珪素焼結体、耐摩耗性部材、及び窒化珪素焼結体の製造方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002265276A (ja) * | 2001-03-07 | 2002-09-18 | Hitachi Metals Ltd | 窒化ケイ素粉末および窒化ケイ素焼結体 |
CN1537086A (zh) * | 2001-07-24 | 2004-10-13 | ��ʽ���綫֥ | 氮化硅耐磨部件及其制造方法 |
CN101100388A (zh) * | 2007-07-17 | 2008-01-09 | 清华大学 | 高热导率氮化硅陶瓷材料及其制备方法 |
WO2009128386A1 (ja) * | 2008-04-18 | 2009-10-22 | 株式会社東芝 | 耐摩耗性部材、耐摩耗性機器および耐摩耗性部材の製造方法 |
JP2011072113A (ja) * | 2009-09-25 | 2011-04-07 | Toshiba Corp | インバータ用転がり軸受及びそれを用いたインバータモータ |
CN104768899A (zh) * | 2012-10-30 | 2015-07-08 | 株式会社东芝 | 氮化硅烧结体及使用其的耐磨件 |
CN107531579A (zh) * | 2015-04-07 | 2018-01-02 | 株式会社东芝 | 氮化硅烧结体及使用其的高温耐久性构件 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000169239A (ja) * | 1998-12-01 | 2000-06-20 | Sumitomo Electric Ind Ltd | 高熱伝導性窒化ケイ素焼結体及びその製造方法 |
DE10136499A1 (de) * | 2001-07-27 | 2003-02-13 | Hans-Joachim Kleebe | Verfahren zur gezielten Veränderung des Gefüges von Si¶3¶N¶4¶-Keramiken im Frühstadium der Verdichtung (1400-1700 DEG C) |
JP4874475B2 (ja) * | 2001-08-28 | 2012-02-15 | 株式会社東芝 | 電子機器用耐摩耗性部材とその製造方法、およびそれを用いた電子機器用ベアリング |
CN104692806B (zh) * | 2007-03-15 | 2017-04-26 | 株式会社东芝 | 滑动部件 |
CN103011873A (zh) * | 2012-11-28 | 2013-04-03 | 大连大友高技术陶瓷有限公司 | 一种氮化硅增韧陶瓷球的制备方法 |
DE102013202123C5 (de) * | 2013-02-08 | 2018-01-04 | Ks Gleitlager Gmbh | Gleitlagerverbundwerkstoff und hieraus hergestelltes Gleitlagerelement |
WO2014200014A1 (ja) * | 2013-06-13 | 2014-12-18 | 株式会社東芝 | 窒化珪素製耐摩耗性部材および窒化珪素焼結体の製造方法 |
JP6491964B2 (ja) * | 2014-09-25 | 2019-03-27 | 株式会社東芝 | 窒化珪素焼結体およびそれを用いた耐摩耗性部材 |
US10308560B2 (en) * | 2015-01-23 | 2019-06-04 | Kabushiki Kaisha Toshiba | High thermal conductive silicon nitride sintered body, and silicon nitride substrate and silicon nitride circuit board and semiconductor apparatus using the same |
CN112292912B (zh) * | 2018-08-29 | 2024-03-08 | 株式会社东芝 | 氮化硅基板及氮化硅电路基板 |
-
2019
- 2019-11-19 WO PCT/JP2019/045268 patent/WO2020121752A1/ja unknown
- 2019-11-19 CN CN202310221657.XA patent/CN116161969A/zh active Pending
- 2019-11-19 EP EP19895924.9A patent/EP3896300A4/en active Pending
- 2019-11-19 JP JP2020559887A patent/JP7402177B2/ja active Active
- 2019-11-19 CN CN201980073611.XA patent/CN112997017B/zh active Active
-
2021
- 2021-04-21 US US17/236,580 patent/US20210261467A1/en active Pending
-
2023
- 2023-12-01 JP JP2023203807A patent/JP2024019273A/ja active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002265276A (ja) * | 2001-03-07 | 2002-09-18 | Hitachi Metals Ltd | 窒化ケイ素粉末および窒化ケイ素焼結体 |
CN1537086A (zh) * | 2001-07-24 | 2004-10-13 | ��ʽ���綫֥ | 氮化硅耐磨部件及其制造方法 |
CN101100388A (zh) * | 2007-07-17 | 2008-01-09 | 清华大学 | 高热导率氮化硅陶瓷材料及其制备方法 |
WO2009128386A1 (ja) * | 2008-04-18 | 2009-10-22 | 株式会社東芝 | 耐摩耗性部材、耐摩耗性機器および耐摩耗性部材の製造方法 |
US20110039068A1 (en) * | 2008-04-18 | 2011-02-17 | Kabushiki Kaisha Toshiba | Wear resistant member, wear resistant device and method for manufacturing the wear resistant member |
JP2011072113A (ja) * | 2009-09-25 | 2011-04-07 | Toshiba Corp | インバータ用転がり軸受及びそれを用いたインバータモータ |
CN104768899A (zh) * | 2012-10-30 | 2015-07-08 | 株式会社东芝 | 氮化硅烧结体及使用其的耐磨件 |
CN107531579A (zh) * | 2015-04-07 | 2018-01-02 | 株式会社东芝 | 氮化硅烧结体及使用其的高温耐久性构件 |
Also Published As
Publication number | Publication date |
---|---|
EP3896300A1 (en) | 2021-10-20 |
JP7402177B2 (ja) | 2023-12-20 |
JP2024019273A (ja) | 2024-02-08 |
EP3896300A4 (en) | 2022-08-31 |
JPWO2020121752A1 (ja) | 2021-10-21 |
WO2020121752A1 (ja) | 2020-06-18 |
CN112997017B (zh) | 2023-03-24 |
CN112997017A (zh) | 2021-06-18 |
US20210261467A1 (en) | 2021-08-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN112997017B (zh) | 滑动构件及使用了其的轴承、发动机以及驱动装置 | |
JP5380277B2 (ja) | 窒化珪素焼結体とそれを用いた摺動部材 | |
JP6400478B2 (ja) | 耐磨耗性部材 | |
JP5100201B2 (ja) | 窒化珪素焼結体とそれを用いた摺動部材 | |
JP5944910B2 (ja) | 窒化珪素焼結体とその製造方法、およびそれを用いた耐摩耗性部材とベアリング | |
JP2013256397A (ja) | 転動体及びその製造方法 | |
JP6334413B2 (ja) | 窒化珪素焼結体およびそれを用いた摺動部材 | |
JP6037217B2 (ja) | 窒化珪素質焼結体の製造方法 | |
JP6037218B2 (ja) | 窒化珪素質焼結体およびそれを用いた摺動部材 | |
JP5989602B2 (ja) | 窒化珪素質焼結体及びその製造方法、並びにベアリング用転動体 | |
CN115916727A (zh) | 氮化硅烧结体、使用其的滚动体和轴承 | |
JP5945382B2 (ja) | 窒化珪素質焼結体および耐摩耗部材 | |
WO2003084895A1 (fr) | Element anti-usure en nitrure de silicium et procede de fabrication correspondant | |
JP7482316B2 (ja) | 窒化珪素焼結体、耐摩耗性部材、及び窒化珪素焼結体の製造方法 | |
WO2022210533A1 (ja) | 窒化珪素焼結体、耐摩耗性部材、及び窒化珪素焼結体の製造方法 | |
JP5349525B2 (ja) | 転動体 | |
WO2022210539A1 (ja) | 窒化珪素焼結体、耐摩耗性部材、及び窒化珪素焼結体の製造方法 | |
JP4939736B2 (ja) | 窒化けい素焼結体の製造方法 | |
JP5295983B2 (ja) | 窒化けい素製耐摩耗性部材の製造方法 | |
JP2008230922A (ja) | 窒化珪素焼結体とそれを用いた摺動部材 | |
JP2014088297A (ja) | セラミック転動体 | |
JP2002068844A (ja) | 快削性窒化珪素質焼結体及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |