CN104768899A - 氮化硅烧结体及使用其的耐磨件 - Google Patents
氮化硅烧结体及使用其的耐磨件 Download PDFInfo
- Publication number
- CN104768899A CN104768899A CN201380056980.0A CN201380056980A CN104768899A CN 104768899 A CN104768899 A CN 104768899A CN 201380056980 A CN201380056980 A CN 201380056980A CN 104768899 A CN104768899 A CN 104768899A
- Authority
- CN
- China
- Prior art keywords
- silicon nitride
- grain
- nitride sinter
- sinter
- boundary phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/587—Fine ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
- C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/14—Special methods of manufacture; Running-in
- F16C33/145—Special methods of manufacture; Running-in of sintered porous bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/32—Balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/58—Raceways; Race rings
- F16C33/62—Selection of substances
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
- C04B2235/3222—Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3232—Titanium oxides or titanates, e.g. rutile or anatase
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3239—Vanadium oxides, vanadates or oxide forming salts thereof, e.g. magnesium vanadate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3241—Chromium oxides, chromates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3244—Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3256—Molybdenum oxides, molybdates or oxide forming salts thereof, e.g. cadmium molybdate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3258—Tungsten oxides, tungstates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3817—Carbides
- C04B2235/3826—Silicon carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3817—Carbides
- C04B2235/3839—Refractory metal carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3865—Aluminium nitrides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/76—Crystal structural characteristics, e.g. symmetry
- C04B2235/767—Hexagonal symmetry, e.g. beta-Si3N4, beta-Sialon, alpha-SiC or hexa-ferrites
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/788—Aspect ratio of the grains
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
- C04B2235/85—Intergranular or grain boundary phases
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/963—Surface properties, e.g. surface roughness
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/40—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal
- F16C2206/58—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal based on ceramic nitrides
- F16C2206/60—Silicon nitride (Si3N4)l
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
- Rolling Contact Bearings (AREA)
Abstract
本发明提供一种氮化硅烧结体,其特征在于,包含氮化硅晶粒和晶界相,在拍摄该氮化硅烧结体的任意截面时,每100μm×100μm单位面积晶界相的面积比为15~35%。另外,所述每100μm×100μm单位面积的晶界相的面积比优选为15~25%。另外,氮化硅烧结体适于耐磨件。根据上述构成,可以提供加工性良好、滑动特性优良的氮化硅烧结体及使用其的耐磨件。
Description
技术领域
本发明涉及氮化硅烧结体及使用该氮化硅烧结体的耐磨件,特别是涉及加工性良好的氮化硅烧结体及使用该氮化硅烧结体的耐磨件。
背景技术
氮化硅烧结体利用其耐磨性作为轴承用滚珠或辊等耐磨件使用。作为以往的氮化硅烧结体的烧结组成,已知有氮化硅-氧化钇-氧化铝-氮化铝-氧化钛系等(专利文献1:日本特开2001-328869号公报)。,通过使用氧化钇、氧化铝、氮化铝、氧化钛作为具体的烧结助剂(烧结剂),得到具有改进的烧结性和优良的耐磨性的氮化硅烧结体。
另外,专利文献2(日本特开2003-34581号公报)中公开了使用氧化钇-MgAl2O4尖晶石-碳化硅-氧化钛作为烧结助剂的氮化硅烧结体。专利文献2中可将烧结温度设置为1600℃以下。
专利文献1和专利文献2的烧结体烧结性均良好,且具有优良的耐磨性。另一方面,这些以往的氮化硅烧结体的硬度高,具有难加工性。有必要使轴承用滚珠等耐磨件具有表面粗糙度Ra为0.1μm以下的平坦面作为滑动面。通常使用金刚石磨粒用于氮化硅烧结体的表面加工,然而,以往的氮化硅烧结体是难加工性材料,因此抛光加工的负荷大,成为成本上升的原因。
现有技术文献
专利文献
专利文献1:日本特开2001-328869号公报
专利文献2:日本特开2003-34581号公报
发明内容
发明要解决的课题
迄今为止的氮化硅烧结体,为了提高耐磨性,只着眼于提高断裂韧度等材料特性。通过切实提高材料特性,耐磨性提高。这种氮化硅烧结体最适用于在机械工具等高负荷环境下的轴承用滚珠。
另一方面,轴承用滚珠等耐磨件不限于在高负荷环境下使用的耐磨件,耐磨件还具有在电脑等的风扇电机用轴承这种低负荷环境下使用的用途。专利文献1和专利文献2记载的氮化硅烧结体因特性优良,也可以用于风扇电机用轴承。然而,氮化硅烧结体具有加工性差,成本高这样的问题。
本发明是为应对这样的问题而开发的,其目的在于,提供加工性良好的氮化硅烧结体。
解决课题的手段
为了实现上述目的,本发明的氮化硅烧结体的特征在于,包含氮化硅晶粒和晶界相,在拍摄该氮化硅烧结体的任意截面时,每100μm×100μm单位面积的晶界相的面积比为15~35%。
另外,优选所述每100μm×100μm单位面积的晶界相的面积比为15~25%。另外,优选在所述100μm×100μm单位面积中的长径L为1μm以上的氮化硅晶粒的面积比合计为60%以上,长径为1μm以上的氮化硅晶粒的任意长径比(长径L/短径S)均为7以下。
另外,在进行所述氮化硅烧结体的XRD分析时,优选在29.5~30.5°的范围检测出峰。另外,优选在所述29.5~30.5°范围的峰高度I29.5-30.5与β-氮化硅的最大峰高度Iβ-Si3N4的高度比(I29.5-30.5/Iβ-Si3N4)在0.05~0.25的范围。另外,所述29.5~30.5°范围的峰优选是归因于4A族元素-稀土元素-氧的化合物的峰。另外,所述29.5~30.5°范围的峰优选归因于铪-钇-氧的化合物。另外,所述氮化硅烧结体优选按氧化物换算含有2~8质量%的Al,按氧化物换算含有1~3.5质量%的稀土元素,按氧化物换算含有1~5质量%的4A族元素、5A族元素和6A族元素的任一种以上。另外,优选所述氮化硅烧结体的加工系数(machinable coefficient)在0.120~0.150的范围内。
本发明的耐磨件含有本发明的氮化硅烧结体。另外,所述氮化硅烧结体的滑动面优选为表面粗糙度Ra为0.1μm以下的抛光面。另外,优选所述耐磨件是轴承用滚珠。另外,所述轴承用滚珠优选是用于风扇电机的轴承用滚珠。
发明效果
在本发明的氮化硅烧结体中,晶界相的比率在100μm×100μm单位面积的微小区域被控制。因此,易进行抛光等表面加工。另外,通过控制氮化硅晶粒和晶界相中的化合物,可以实现加工性提高和耐磨性的兼顾。因此,本发明的氮化硅烧结体在应用于耐磨件时,在维持耐磨损特性的同时,可降低加工时间和加工成本。
附图说明
图1是表示轴承用滚珠的一例的透视图;
图2是表示测定氮化硅晶粒的长径比的方法的截面图。
具体实施方式
本发明的氮化硅烧结体的特征在于,包含氮化硅晶粒和晶界相,在拍摄该氮化硅烧结体的任意截面时,每100μm×100μm单位面积的晶界相的面积比为15~35%。
氮化硅烧结体具备成为主相的氮化硅晶粒和成为亚相的晶界相。晶界相主要由在烧结工序中使烧结助剂彼此或烧结助剂与氮化硅(含杂质氧)反应的化合物形成。烧结助剂为控制烧结性而添加,晶界相形成于氮化硅晶粒彼此的间隙(晶界)。通过晶界相强化氮化硅晶粒彼此的结合力。
比较氮化硅晶粒的硬度和晶界相的硬度时,通常,晶界相的硬度较低。因此认为,在对氮化硅烧结体实施抛光之前,通过增大比氮化硅晶粒软的晶界相的比例,降低氮化硅烧结体本身的硬度是有效的。确实,通过降低氮化硅烧结体的硬度,得到一定的效果。
如后所述,在耐磨件中应用氮化硅烧结体的情况下,根据用途要求表面粗糙度Ra为0.1μm以下的平坦性高的抛光面。抛光面用作滑动面。例如,在轴承用滚珠的情况下,通过将氮化硅烧结体的全部表面形成平坦面,可以提高滑动特性。通常,对于氮化硅烧结体的抛光来说,进行使用金刚石砂轮的抛光。在进行抛光时,认为增加比氮化硅晶粒软的晶界相的比例易进行抛光。
但是,在得到表面粗糙度Ra为0.1μm以下的平坦面的情况下,已知,由于氮化硅晶粒和晶界相的切削方法不同,所以难以得到清洁的平坦面。
根据本发明,通过在100μm×100μm单位面积的微小区域将晶界相的面积比设定在15~35%的范围,可以降低氮化硅晶粒和晶界相之间的硬度不同带来的加工性的波动,以提高加工性。晶界相的面积比低于15%时,晶界相过少,氮化硅烧结体的耐磨性降低。另外,晶界相的面积比超过35%时,晶界相过多,产生加工性的波动。因此,晶界相的比率为15~35%,优选为15~25%。本发明的氮化硅烧结体的构成使得,在任意截面,在100μm×100μm单位面积的微小区域,晶界相的面积比为15~35%的范围。
予以说明,晶界相的面积比的测定方法如下所述。首先,取得氮化硅烧结体的任意截面。对该截面实施镜面加工,以使表面粗糙度Ra为1μm以下。为了明确界定氮化硅晶粒和晶界相的区域,对所得镜面实施等离子体蚀刻处理。进行等离子体蚀刻处理时,氮化硅晶粒和晶界相的蚀刻率彼此不同,因此,某一方会比另一方更多地被蚀刻掉。
例如,在使用CF4的等离子体蚀刻中,氮化硅晶粒一方的蚀刻率更高(易蚀刻),所以氮化硅晶粒成为凹部,而晶界相为凸部。予以说明,蚀刻处理也可以通过使用酸和碱的化学蚀刻进行。
接着,对蚀刻处理后的镜面进行SEM图像拍摄(1000倍以上的倍率)。在SEM照片中可以根据对比度的差异区别氮化硅晶粒和晶界相。通常,晶界相观察为白色。通过进行蚀刻处理,可以使对比度的差异更清淅。通过图像解析SEM照片,可以测定单位面积的晶界相的面积比。予以说明,对于图像解析来说,通过使晶界相部分颜色变换来进行图像解析的方法是有效的。另外,在一视场中得不到100μm×100μm单位面积的情况下,可以进行多次拍摄,以合计得到100μm×100μm的单位面积。
本发明的氮化硅烧结体通过控制烧结体内部的微结构、特别是控制晶界相来提高加工性。在此所说的加工是指:使用固定磨粒的研磨加工、和使用游离磨粒的研磨加工等的、使磨粒与陶瓷表面相碰撞,通过该碰撞的冲击破坏表面的微结构而得到目标的尺寸和目标的表面粗糙度的加工。氮化硅烧结体与由金属等单一相构成的物质不同,是由具有不同的硬度和杨氏弹模量的氮化硅晶粒和晶界相这两相构成的复合材料。因此认为,在磨粒与氮化硅烧结体表面碰撞的情况下,首先是硬度低的晶界相、特别是无定形相脱离,然后引发被晶界相保持的氮化硅晶粒的脱粒。为了缩短氮化硅的加工时间,需要增大占据烧结体大部分的氮化硅晶粒的脱粒速度,因此,通过降低保持氮化硅晶粒的晶界相的量,特别是无定形相的量,以增大氮化硅晶粒的脱粒速度,可以缩短加工时间。
另外,优选上述100μm×100μm单位面积中的长径L为1μm以上的氮化硅晶粒的面积比合计为60%以上,长径为1μm以上的氮化硅晶粒的任意长径比(长径L/短径S)均为7以下。另外,在满足上述晶界相的量的基础上,为了更增大氮化硅晶粒的脱粒速度,优选以增大氮化硅晶粒的尺寸且减小长径比(长径/短径比)的方式进行调整。
上述100μm×100μm单位面积中的长径L为1μm以上的氮化硅晶粒的面积比的测定方法如下所述。首先,拍摄100μm×100μm单位面积的放大照片(1000倍以上的SEM照片)。
测定在该放大照片中映现的氮化硅晶粒的长径L,求出长径L为1μm以上的氮化硅晶粒的合计面积。如图2所示,在放大照片映现的氮化硅晶粒2中,将最长的对角线设为长径L,将在长径L的中点与长径L正交的线长设为短径S,测定长径L和短径S。
优选每个长径L为1μm以上的氮化硅晶粒的长径比(长径L/短径S)为7以下。通过使长径比小到7以下,可以防止氮化硅晶粒彼此超过需要地复杂地缠绕。其结果,在抛光时,氮化硅晶粒被磨去的体积大,而且不会发生氮化硅晶粒的复杂缠绕,所以氮化硅晶粒易于磨削。另外,如上所述,由于晶界相存在15~35%,所以长径L为1μm以上的氮化硅晶粒的面积比的上限为85%。另外,长径L低于1μm的氮化硅晶粒也可以存在。
另外,用XRD分析上述氮化硅烧结体时,优选在29.5~30.5°的范围检测出峰。首先,对XRD分析方法进行说明。在XRD分析中,将氮化硅烧结体的任意截面设为测定面。测定面设定为抛光至表面粗糙度Ra为1μm以下的抛光面。XRD分析在Cu靶(Cu-Kα)、管电压40kV、管电流40mA、扫描速度2.0°/min、缝隙(RS)0.15mm、扫描范围(2θ)10°~60°的测定条件下进行。
在29.5~30.5°的范围检测出的峰是基于晶界相成分的峰。基于晶界相成分检测峰是指在晶界相成分中存在结晶化合物。如专利文献1和专利文献2中公开的氮化硅烧结体等以往的氮化硅烧结体的晶界相为无定形相。在无定形相的情况下,即使进行XRD分析,也检测不出峰。由无定形相构成的晶界相与氮化硅晶粒相比具有低的杨氏弹模量和低硬度,起到保持氮化硅晶粒的作用。通过在晶界相成分中生成结晶化合物,提高生成结晶化合物的部分的杨氏弹模量和硬度,减弱保持氮化硅晶粒的作用,结果,可以提高加工性。
另外,优选在上述29.5~30.5°的范围内,峰高I29.5-30.5与β-氮化硅的最大峰高Iβ-Si3N4的高度比(I29.5-30.5/Iβ-Si3N4)在0.05~0.25的范围。β-氮化硅的最大峰高度Iβ-Si3N4为在26.7°~27.7°的范围检测到的峰。峰高度比(I29.5-30.5/Iβ-Si3N4)低于0.05时,结晶化合物的量过少,生成结晶化合物的效果不充分。另一方面,高度比(I29.5-30.5/Iβ-Si3N4)超过0.25时,结晶化合物的量过多,晶界相的强度降低,因此耐磨性可能会降低。
另外,上述29.5~30.5°范围的峰优选为归因于4A族元素-稀土元素-氧的化合物的峰。另外,上述29.5~30.5°范围的峰优选为铪-钇-氧的化合物。作为Hf-Y-O的化合物以外的化合物,优选为Zr-Y-O的化合物、Zr-Er-O的化合物、Hf-Er-O的化合物。
XRD的峰的位置和半宽度由结晶化合物的组成确定。可知,如果29.5~30.5°范围的峰存在,则4A族元素-稀土元素-氧的化合物作为结晶化合物存在。4A族元素是Ti(钛)、Zr(锆)和Hf(铪)的任一种以上。4A族元素与稀土元素和氧反应易于形成4A族元素-稀土元素-氧的结晶化合物。作为4A族元素,优选为铪或锆。铪或锆特别容易与氧反应,易于形成目标的结晶化合物。如本发明这样,铪或锆在控制晶界相的比例时有效。晶界相中生成的结晶化合物的定性分析可通过TEM等进行分析。如果比较Hf和Zr,从与氧和稀土元素反应的难易性考虑,更优选Hf。
另外,上述氮化硅烧结体优选为按氧化物换算含有2~8质量%的Al,按氧化物换算含有1~3.5质量%的稀土元素,按氧化物换算含有1~5质量%的4A族元素、5A族元素和6A族元素的任一种以上。Al、稀土元素、4A族元素、5A族元素和6A族元素是作为用于形成晶界相的烧结助剂使用的。另外,当这些元素在烧结工序中反应而成为晶界相成分时,只要这些元素在上述范围,则易于控制晶界相的比例。
Al的量按氧化物换算是指以Al2O3进行的换算。Al量按氧化物换算若低于2wt%或超过8wt%,则导致强度降低,作为耐磨件的耐久性降低。另外,作为Al成分的添加方法,只要是含有Al的成分,就没有特殊限定,优选为AlN、Al2O3和MgAl2O4尖晶石的任一种以上。特别优选并用添加Al2O3或MgAl2O4之一与AlN。
若将Al2O3或MgAl2O4与AlN并用,则AlN容易抑制氮化硅和SiO2向SiO的分解,因此,可以促进均匀的晶粒成长,使得晶界相组织的结晶性增高。另外,若将Al2O3或MgAl2O4与AlN并用,易于生成AlN和Al2O3或MgAl2O4与4A族元素和稀土元素的结晶性化合物。其结果,晶界相的氮化硅晶粒保持力降低,氮化硅晶粒的尺寸也变大,所以加工性提高。
另外,按稀土元素的氧化物换算,氮化硅烧结体含有1~3.5wt%的稀土元素的任一种以上。稀土元素优选为Y(钇)、La(镧)、Ce(铈)、Pr(镨)、Nd(钕)、Pm(钷)、Sm(钐)、Eu(铕)、Gd(钆)、Tb(铽)、Dy(镝)、Ho(钬)、Er(铒)、Tm(铥)、Yb(镱)、Lu(镥)的至少一种以上。另外,按氧化物换算是指以R2O3进行换算,其中R表示稀土元素。另外,稀土元素作为烧结助剂添加时,优选作为稀土氧化物粉末添加。稀土元素按氧化物换算少于1wt%时,烧结性降低,得不到充分的机械特性。另外,稀土元素超过3.5%时,则氮化硅晶粒的长径/短径比增大,加工性变差。
另外,氮化硅烧结体含有按氧化物换算1~5wt%的4A族元素、5A族元素和6A族元素的任一种以上。4A族元素是Ti(钛)、Zr(锆)、Hf(铪)。另外,5A族元素是V(钒)、Nb(铌)、Ta(钽)。另外,6A族元素是Cr(铬)、Mo(钼)、W(钨)。4A族元素的按氧化物换算是指以TiO2、ZrO2或HfO2进行换算。另外,5A族元素的按氧化物换算是指以V2O5,Nb2O5或Ta2O5进行换算。另外,6A族元素的按氧化物换算是指以Cr2O3、MoO3或WO3进行换算。
另外,作为烧结助剂添加4A族元素成分、5A族元素成分、或6A族元素成分时,优选作为氧化物、碳化物和氮化物的任一种添加。另外,含量低于1wt%时,添加效果不充分,含量超过5wt%时,烧结性反而变差。
由于上述4A族元素成分、5A族元素成分或6A族元素成分的存在,在由上述的Al成分和稀土元素成分形成的晶界相中生成结晶相,可以提高加工性。特别是,优选含有4A族元素成分和6A族元素成分两者。另外,在含有4A族元素成分和6A族元素成分两者的情况下,优选4A族元素成分作为氧化物添加,6A族元素成分作为碳化物添加。通过4A族元素的氧化物,得到在晶界相形成目标的结晶性化合物的效果,通过6A族元素的碳化物,得到提高强化晶界相的效果和提高滑动面的润滑性效果。
另外,优选氮化硅烧结体的加工系数在0.120~0.150的范围内。加工系数Mc是根据下述式(1)计算的值。
Mc=Fn9/8/(K1c 1/2·Hv5/8)……(1)
式(1)中,Fn为压陷载荷,在此为20kgf。20kgf的压陷载荷Fn是用于测定氮化硅烧结体的硬度及韧性的适宜的值。维氏硬度(Hv)根据JIS-R-1610来测定。断裂韧度值(K1c)根据JIS-R-1607的压痕断裂法(IF法)来测定。作为断裂韧度值的计算使用新原的公式。对于后述的轴承用滚珠,使用其截面测定。
加工系数Mc是表示使用压陷载荷(Fn)、维氏硬度(Hv)和断裂韧度值(K1c)的加工性的系数。这是横向裂纹破坏模型的关系式,Mc表示通过1粒磨粒除去的物质的量。加工系数Mc越大,意味着一次可以加工的量越大。
横向裂纹破坏模型是指作为研磨加工时除去材料的机制,由Evans和Marshall提出的模型。该模型中显示,1粒研磨磨粒通过材料表面时除去的物质的量(δV)与将磨粒垂直压入材料的力Fn、维氏硬度(Hv)和断裂韧度值(K1C)的关系中的[Fn9/8/(K1c 1/2·Hv5/8)]的值呈比例。在此,将δV用加工系数Mc代替。
加工大致分类为脆性模式和韧性模式。脆性模式相当于所谓“粗加工”,韧性模式相当于所谓“精加工”。磨损认为相当于韧性模式,因此,为了满足耐磨件要求的性能,在不降低韧性模式中的加工性的情况下改善脆性模式中的加工性是重要的。另外,作为磨损模型之一,认为是在晶界产生微小的预裂纹,因该微小预裂纹的传播而给材料表面带来破坏,结果产生磨损的机制。
表示磨损模型中的机械性接触的严重性的参数Sc.m由摩擦系数μ、最大赫兹应力Pmax、材料的晶粒直径d和断裂韧度值K1c,通过下式表示。
Sc.m=[(1+10·μ)·Pmax·(d1/2)]/K1c
参数Sc.m的值大意味着磨损大,参数Sc.m的值小意味着磨损小。通过减小材料的晶粒直径d或增大断裂韧度值K1c,可抑制磨损。
在考虑到这些点的情况下,优选加工系数Mc在0.120~0.150的范围。加工系数Mc低于0.120的情况下,通过磨粒的加工量小,所以氮化硅烧结体的加工时间增大。加工系数Mc超过0.150时,通过磨粒的氮化硅烧结体的加工量变得过大。若加工量大,虽然加工性提高,但作为耐磨件的耐久性降低。加工系数Mc为0.120~0.150范围的氮化硅烧结体可以在维持作为耐磨件的特性的同时提高加工性、降低制造成本。特别是,本发明的氮化硅烧结体控制每单位面积的晶界相的面积比,因此,易于得到表面粗糙度Ra为0.1μm以下的平坦面。
本发明的氮化硅烧结体适用于耐磨件。作为耐磨件,可举出轴承用滚珠、辊、制逆球(check ball)、耐磨垫、柱塞、滚子(koro)等。这些耐磨件与由金属部件或陶瓷制成的匹配部件滑动。为了提高滑动面的耐久性,优选对耐磨件抛光至表面粗糙度Ra为0.1μm以下。优选使滑动面平坦至表面粗糙度Ra为0.1μm以下,更优选为0.05μm以下,进一步优选为0.01μm以下。通过使滑动面平坦,可以提高氮化硅烧结体的耐久性,并且可以降低对匹配部件的冲击性。通过降低对匹配部件的冲击性,可以减少匹配部件的损耗,因此,可以提高组装有耐磨件的装置的耐久性。
本发明的氮化硅烧结体特别适用于如轴承用滚珠那样的对其整个表面进行过抛光的制品。图1表示轴承用滚珠的一例(图中,1表示轴承用滚珠)。另外,优选轴承用滚珠用于风扇电机用轴承。风扇电机是用于冷却个人电脑等电子设备的装置。在这种用于电子设备的风扇电机中,在工作中施加于轴承的负荷与一般机械工具用轴承相比非常小。施加到一般的风扇电机用轴承的负荷为5GPa以下,进一步为2GPa以下。在这样的范围,则氮化硅烧结体制轴承用滚珠所要求的耐久性比机械工具用轴承用滚珠的耐久性小。宁可通过使加工性良好来降低成本,具有巨大的经济上的益处。换言之,本发明的耐磨件适用于施加到轴承的负荷为5GPa以下的耐磨件。
接着,对制造方法进行说明。本发明的氮化硅烧结体只要具有上述构成,其制造方法就没有特殊限定,作为有效得到本发明的氮化硅烧结体的方法,可举出以下方法。
首先,准备氮化硅粉末。优选氮化硅粉末的氧含量为4质量%以下,含有85质量%以上的α-相型氮化硅,平均粒径为1.2μm以下、更优选为0.8μm以下。通过使α-Si3N4粉末在烧结工序中晶粒成长为β-Si3N4晶粒,可以得到耐磨性优良的氮化硅烧结体。
在本发明的氮化硅烧结体中,控制晶界相的面积比。为了进行这种控制,控制烧结助剂的量和将氮化硅晶粒的长径比控制为7以下是有效的。为了控制烧结助剂的量,添加量的控制和进行与氮化硅粉末的均匀分散是有效的。
优选烧结助剂的添加量按氧化物换算为2~8质量%的Al、按氧化物换算为1~3.5质量%的稀土元素、按氧化物换算为1~5质量%的4A族元素、5A族元素和6A族元素的任一种以上。烧结助剂粉末的平均粒径优选为1.8μm以下。
另外,为了氮化硅粉末和烧结助剂粉末的均匀分散,长时间进行混合工序是有效的。通过球磨机等进行破碎混合工序是有效的,优选实施破碎混合工序50小时以上的长时间。通过破碎混合工序,能够防止氮化硅粉末彼此之间、烧结助剂粉末彼此之间、以及氮化硅粉末和烧结助剂粉末粘合在一起而形成二次粒子。当氮化硅粉末和烧结助剂粉末的大部分为一次粒子,可以进行均匀分散。
另外,为了控制晶界相的面积比,即使少量的烧结助剂量也能有效进行充分的烧结。因此,为了进行这样的烧结,预先氧化氮化硅粉末的表面是有效的。通过使用带有氧化膜的氮化硅粉末,使氮化硅粉末活化,可以促进与烧结助剂的反应。
对氮化硅粉末的氧化处理可举出在大气中的热处理、水处理等。在大气中的热处理优选在600~1000℃范围的温度下实施。予以说明,若过度实施对氮化硅粉末的氧化处理,则氮化硅烧结体的耐磨性降低,因此,氧化膜的膜厚优选为0.5μm以下。
接着,在混合氮化硅粉末和烧结助剂粉末的原料混合物中添加粘合剂。原料混合物和粘合剂的混合使用球磨机等,根据需要在进行粉碎和造粒的同时实施。将原料混合物成形为希望的形状。成形工序通过模压法或冷等静压(CIP)等实施。成形压力优选为100MPa以上。对由成形工序得到的成形体进行脱脂。脱脂工序优选在300~600℃范围的温度下实施。脱脂工序在大气中或非氧化性气氛中实施,气氛没有特殊限定。
接着,在1600~1900℃范围的温度下烧结在脱脂工序中得到的脱脂体。烧结温度若低于1600℃,则氮化硅晶粒的晶粒生长可能不充分。即,从α-相型氮化硅向β-相型氮化硅的反应不充分,可能得不到致密的烧结体结构。该情况下,氮化硅烧结体作为材料的可靠性降低。烧结温度若超过1900℃时,氮化硅晶粒过于晶粒生长,因而加工性有可能降低。烧结工序可以通过常压烧结和加压烧结的任一种实施。烧结工序优选在非氧化性气氛中实施。作为非氧化性气氛,可举出氮气氛和氩气氛。
另外,在上述烧结工序中,优选装纳脱脂体的容器为多孔型容器。当容器为多孔型容器时,可以使烧结工序中的非氧化性气体在烧结炉内循环,可以均匀地向脱脂体提供热。其结果,实现晶界相的比例或晶界相中的结晶性化合物的存在等的均匀化。
予以说明,多孔型容器的孔隙率优选为30~60%的范围。孔隙率低于30%时,气孔的比例小,因此,不能充分获得非氧化性气体的循环效果。特别是对在多孔型容器中装入大量脱脂体的情况有影响。另外,孔隙率超过60%时,虽然得到非氧化性气体的循环效果,但因容器的强度降低,导致批量生产性下降。因此,多孔型容器的孔隙率优选为30~60%的范围。另外,容器的材质只要是耐得住烧结温度,就没有特殊限定。
烧结工序完成后,优选在非氧化性气氛中对烧结体实施30MPa以上的热等静压(HIP)处理。作为非氧化性气氛,可举出氮气氛和氩气氛。HIP处理温度优选为1500~1900℃的范围。通过实施HIP处理,可以削减氮化硅烧结体内的气孔。HIP处理压力低于30MPa时,不能充分获得这种效果。
对由此制造的氮化硅烧结体,在需要抛光的部位实施抛光来制作耐磨件。抛光优选使用金刚石磨粒实施。实施方式的氮化硅烧结体具有良好的加工性,因此可以降低从氮化硅烧结体制作耐磨件时的加工成本。
(实施例)
(实施例1~7和比较例1~5)
准备表1所示的氮化硅粉末和烧结助剂,制备原料粉末。压碎混合工序通过球磨机进行。
[表1]
在获得的原料混合物中添加粘合剂,所得混合物通过球磨机混合。
通过模压法将原料混合物成形为球体。将成形体干燥后在460℃脱脂。在氮气氛中,在1700~1750℃×5~6小时的条件下烧结脱脂体。另外,在实施例1~2和5~6中,在多孔型容器(孔隙率50%)中收纳多个脱脂体进行烧结工序。另外,实施例3使用孔隙率为60%的多孔型容器。另外,实施例4和7使用孔隙率为35%的多孔型容器。另外,比较例1~2使用孔隙率为10%的多孔型容器,比较例3~5使用孔隙率为50%的多孔型容器。
接着,对由此获得的烧结体实施HIP处理。HIP处理在100MPa的压力下,在1600℃×1小时的条件下实施。由此,制作实施例1~7和比较例1~5的氮化硅烧结体。
对各氮化硅烧结体进行切断加工而得到任意的截面,拍摄100μm×100μm单位面积的放大照片(SEM照片)。使用放大照片,测定每单位面积的晶界相的面积比、长径为1μm以上的氮化硅晶粒的面积比、氮化硅晶粒的长径比的最大值。另外,测定维氏硬度、断裂韧度值,以求出加工系数。其结果示于表2。
[表2]
在实施例1~7的氮化硅烧结体中,晶界相的面积比为15~34%,长径1μm以上的氮化硅晶粒的面积比为55%以上。另外,氮化硅晶粒的长径比的最大值均为7以下。另外,当两者面积比的合计值非100%时,其余部分为长径小于1μm的氮化硅晶粒的面积比。因此,对于各烧结体来说,确认基本上没有气孔(细孔)。
接着,通过XRD分析各氮化硅烧结体的截面。其结果示于表3。
[表3]
对于实施例1~7的氮化硅烧结体,峰(I29.5-30.5)和高度比(I29.5-30.5/Iβ-Si3N4)在优选范围内。另外,作为进行TEM分析的结果,检测出Hf-Y-O化合物的存在。另外,对于比较例1~2和4~5,虽然检测出峰(I29.5-30.5),但高度比(I29.5-30.5/Iβ-Si3N4)显示为较小的值。另外,在比较例3中未检测出峰(I29.5-30.5)。
接着,测定进行抛光的难易度。抛光使用具备#220型金刚石砂轮的研磨机,以40N压向试样,在研磨面积16mm×16mm、研磨机转速300rpm、试样(氮化硅烧结体)的转速150rpm下进行。通过这样的抛光,测定为了使表面粗糙度Ra为0.1μm而磨削约400μm所需的时间。其结果示于表4。
[表4]
试样No. | 抛光时间(min) |
实施例1 | 31 |
实施例2 | 30 |
实施例3 | 35 |
实施例4 | 43 |
实施例5 | 33 |
实施例6 | 35 |
实施例7 | 32 |
比较例1 | 54 |
比较例2 | 60 |
比较例3 | 100 |
比较例4 | 62 |
比较例5 | 67 |
由上表4所示可知,实施例的氮化硅烧结体的抛光时间短。
接着,使用与实施例1~7同样的制法,制作球状烧结体。然后,通过使用金刚石砂轮对球状烧结体进行抛光,使其表面粗糙度Ra为0.01μm,制作轴承用滚珠(直径9.525mm)。
耐久性试验是在最大接触压力5.1GPa、转速1200rpm的条件下,通过推力型轴承试验机测定在轴承钢(SUJ2)制板材上滚动轴承用滚珠的滚动寿命试验。将通过该试验即使经过400小时也没有在轴承用滚珠上发生表面裂纹和破碎等不良的试样作为良品,用“○”记号表示,将发生不良的试样用“×”表示。其结果示于表5。
[表5]
试样No. | 耐久性试验 |
实施例1 | ○ |
实施例2 | ○ |
实施例3 | ○ |
实施例4 | ○ |
实施例5 | ○ |
实施例6 | ○ |
实施例7 | ○ |
可知本实施例的氮化硅烧结体及使用该氮化硅烧结体的耐磨件的加工性良好,而且耐磨性优良。
符号说明
1……轴承用滚珠
2……氮化硅晶粒
Claims (13)
1.氮化硅烧结体,其特征在于,包含氮化硅晶粒和晶界相,在拍摄该氮化硅烧结体的任意截面时,每100μm×100μm单位面积的晶界相的面积比为15~35%。
2.权利要求1所述的氮化硅烧结体,其特征在于,所述每100μm×100μm单位面积的晶界相的面积比为15~25%。
3.权利要求1和2任一项所述的氮化硅烧结体,其特征在于,在100μm×100μm单位面积中的长径L为1μm以上的氮化硅晶粒的面积比合计为60%以上,且长径为1μm以上的氮化硅晶粒的任意长径比(长径L/短径S)均为7以下。
4.权利要求1~3任一项所述的氮化硅烧结体,其特征在于,在进行所述氮化硅烧结体的XRD分析时,在29.5~30.5°的范围检测出衍射峰。
5.权利要求4所述的氮化硅烧结体,其特征在于,在所述29.5~30.5°的范围,衍射峰高度I29.5-30.5与β-氮化硅的最大峰高度Iβ-Si3N4的高度比(I29.5-30.5/Iβ-Si3N4)在0.05~0.25的范围。
6.权利要求4~5任一项所述的氮化硅烧结体,其特征在于,所述29.5~30.5°范围的衍射峰是归因于4A族元素-稀土元素-氧的化合物的峰。
7.权利要求4~6任一项所述的氮化硅烧结体,其特征在于,所述29.5~30.5°范围的衍射峰归因于铪-钇-氧的化合物。
8.权利要求1~7任一项所述的氮化硅烧结体,其特征在于,所述氮化硅烧结体按氧化物换算含有2~8质量%的Al,按氧化物换算含有1~3.5质量%的稀土元素,按氧化物换算含有1~5质量%的4A族元素、5A族元素和6A族元素的任一种以上。
9.权利要求1~8任一项所述的氮化硅烧结体,其特征在于,所述氮化硅烧结体的加工系数在0.120~0.150的范围内。
10.耐磨件,其特征在于,含有权利要求1~9任一项所述的氮化硅烧结体。
11.权利要求10所述的耐磨件,其特征在于,所述氮化硅烧结体的滑动面是表面粗糙度Ra为0.1μm以下的抛光面。
12.权利要求10和11任一项所述的耐磨件,其特征在于,所述耐磨件是轴承用滚珠。
13.权利要求12所述的耐磨件,其特征在于,所述轴承用滚珠是用于风扇电机的轴承用滚珠。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012239654 | 2012-10-30 | ||
JP2012-239654 | 2012-10-30 | ||
PCT/JP2013/078447 WO2014069268A1 (ja) | 2012-10-30 | 2013-10-21 | 窒化珪素焼結体およびそれを用いた耐磨耗性部材 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104768899A true CN104768899A (zh) | 2015-07-08 |
CN104768899B CN104768899B (zh) | 2017-07-11 |
Family
ID=50627180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380056980.0A Active CN104768899B (zh) | 2012-10-30 | 2013-10-21 | 氮化硅烧结体及使用其的耐磨件 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9440887B2 (zh) |
EP (1) | EP2915793B1 (zh) |
JP (1) | JP6400478B2 (zh) |
CN (1) | CN104768899B (zh) |
WO (1) | WO2014069268A1 (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106132908A (zh) * | 2014-03-31 | 2016-11-16 | 日本精细陶瓷有限公司 | 氮化硅衬底的制造方法 |
CN112997017A (zh) * | 2018-12-11 | 2021-06-18 | 株式会社东芝 | 滑动构件及使用了其的轴承、发动机以及驱动装置 |
CN115667184A (zh) * | 2020-05-20 | 2023-01-31 | 株式会社东芝 | 氮化硅烧结体及采用其的耐磨损性部件以及氮化硅烧结体的制造方法 |
CN117083256A (zh) * | 2022-03-16 | 2023-11-17 | 株式会社东芝 | 氮化硅烧结体及使用了其的耐磨性构件 |
CN117229063A (zh) * | 2023-09-14 | 2023-12-15 | 铜川铜瓷特种陶瓷制造有限公司 | 一种高硬度耐磨的陶瓷柱塞及其制备工艺 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6416088B2 (ja) * | 2013-06-13 | 2018-10-31 | 株式会社東芝 | 窒化珪素製耐摩耗性部材および窒化珪素焼結体の製造方法 |
KR102543049B1 (ko) * | 2017-02-23 | 2023-06-14 | 스미토모 오사카 세멘토 가부시키가이샤 | 복합 소결체, 정전 척 부재, 및 정전 척 장치 |
WO2019059641A2 (ko) * | 2017-09-20 | 2019-03-28 | 주식회사 엘지화학 | 질화규소 소결체 제조를 위한 테이프 캐스팅용 슬러리 조성물 |
KR102094454B1 (ko) | 2017-09-20 | 2020-04-23 | 주식회사 엘지화학 | 질화규소 소결체 제조를 위한 테이프 캐스팅용 슬러리 조성물 |
US10816058B2 (en) * | 2018-03-16 | 2020-10-27 | Toyota Jidosha Kabushiki Kaisha | Torsional vibration damper and manufacturing method thereof |
US11441876B2 (en) | 2018-11-28 | 2022-09-13 | Jiangnan University | Multilayered bullet resistant member, preparation method and application thereof |
CN109443093B (zh) * | 2018-11-28 | 2020-06-12 | 江南大学 | 一种多层次防弹构件及其制备方法与应用 |
CN113874336B (zh) * | 2019-05-22 | 2023-03-28 | 住友大阪水泥股份有限公司 | 复合烧结体、静电卡盘部件、静电卡盘装置及复合烧结体的制造方法 |
WO2021225158A1 (ja) | 2020-05-07 | 2021-11-11 | Agc株式会社 | セラミックス焼結体の製造方法及びセラミックス焼結体 |
CN115667185A (zh) | 2020-05-26 | 2023-01-31 | 株式会社东芝 | 氮化硅烧结体、采用其的耐磨损性部件及氮化硅烧结体的制造方法 |
WO2023171511A1 (ja) * | 2022-03-10 | 2023-09-14 | デンカ株式会社 | セラミック焼結体及びその製造方法、並びに焼結助剤粉末 |
JP7408884B1 (ja) | 2022-03-10 | 2024-01-05 | デンカ株式会社 | 窒化ケイ素焼結体及び焼結助剤粉末 |
WO2024111483A1 (ja) * | 2022-11-25 | 2024-05-30 | デンカ株式会社 | セラミック焼結体及びその製造方法、接合体、並びにパワーモジュール |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1842506A (zh) * | 2004-05-20 | 2006-10-04 | 株式会社东芝 | 具有高导热性的氮化硅烧结体及氮化硅结构部件 |
JP2010241616A (ja) * | 2009-04-01 | 2010-10-28 | Toshiba Corp | 耐衝撃部材およびその製造方法 |
US20110039068A1 (en) * | 2008-04-18 | 2011-02-17 | Kabushiki Kaisha Toshiba | Wear resistant member, wear resistant device and method for manufacturing the wear resistant member |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5826076A (ja) * | 1981-08-10 | 1983-02-16 | 株式会社東芝 | セラミツクス焼結体及びその製造方法 |
JPH06298568A (ja) * | 1993-04-09 | 1994-10-25 | Toshiba Tungaloy Co Ltd | ウイスカー強化サイアロン基焼結体およびその被覆焼結体 |
JPH092878A (ja) * | 1995-02-08 | 1997-01-07 | Sumitomo Electric Ind Ltd | 窒化ケイ素系焼結体及びその製造方法 |
JP4744704B2 (ja) * | 2000-03-16 | 2011-08-10 | 株式会社東芝 | 耐摩耗性部材の製造方法 |
JP4795588B2 (ja) * | 2001-01-12 | 2011-10-19 | 株式会社東芝 | 窒化けい素製耐摩耗性部材 |
JP2003034581A (ja) | 2001-07-24 | 2003-02-07 | Toshiba Corp | 窒化けい素製耐摩耗性部材およびその製造方法 |
US7612006B2 (en) * | 2004-10-01 | 2009-11-03 | Yokohama Tlo Company, Ltd. | Conductive silicon nitride materials and method for producing the same |
EP2062864B1 (en) * | 2006-09-13 | 2013-10-02 | Kabushiki Kaisha Toshiba | Slide member and bearing utilizing the same |
WO2011102298A1 (ja) * | 2010-02-16 | 2011-08-25 | 株式会社東芝 | 耐摩耗性部材およびその製造方法 |
JP5944910B2 (ja) * | 2011-09-05 | 2016-07-05 | 株式会社東芝 | 窒化珪素焼結体とその製造方法、およびそれを用いた耐摩耗性部材とベアリング |
-
2013
- 2013-10-21 JP JP2014544438A patent/JP6400478B2/ja active Active
- 2013-10-21 US US14/438,756 patent/US9440887B2/en active Active
- 2013-10-21 WO PCT/JP2013/078447 patent/WO2014069268A1/ja active Application Filing
- 2013-10-21 CN CN201380056980.0A patent/CN104768899B/zh active Active
- 2013-10-21 EP EP13851652.1A patent/EP2915793B1/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1842506A (zh) * | 2004-05-20 | 2006-10-04 | 株式会社东芝 | 具有高导热性的氮化硅烧结体及氮化硅结构部件 |
US20110039068A1 (en) * | 2008-04-18 | 2011-02-17 | Kabushiki Kaisha Toshiba | Wear resistant member, wear resistant device and method for manufacturing the wear resistant member |
JP2010241616A (ja) * | 2009-04-01 | 2010-10-28 | Toshiba Corp | 耐衝撃部材およびその製造方法 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106132908A (zh) * | 2014-03-31 | 2016-11-16 | 日本精细陶瓷有限公司 | 氮化硅衬底的制造方法 |
CN112997017A (zh) * | 2018-12-11 | 2021-06-18 | 株式会社东芝 | 滑动构件及使用了其的轴承、发动机以及驱动装置 |
CN116161969A (zh) * | 2018-12-11 | 2023-05-26 | 株式会社东芝 | 滑动构件及使用了其的轴承、发动机以及驱动装置 |
CN115667184A (zh) * | 2020-05-20 | 2023-01-31 | 株式会社东芝 | 氮化硅烧结体及采用其的耐磨损性部件以及氮化硅烧结体的制造方法 |
CN115667184B (zh) * | 2020-05-20 | 2024-05-03 | 株式会社东芝 | 氮化硅烧结体及采用其的耐磨损性部件以及氮化硅烧结体的制造方法 |
CN117083256A (zh) * | 2022-03-16 | 2023-11-17 | 株式会社东芝 | 氮化硅烧结体及使用了其的耐磨性构件 |
CN117229063A (zh) * | 2023-09-14 | 2023-12-15 | 铜川铜瓷特种陶瓷制造有限公司 | 一种高硬度耐磨的陶瓷柱塞及其制备工艺 |
CN117229063B (zh) * | 2023-09-14 | 2024-03-05 | 铜川铜瓷特种陶瓷制造有限公司 | 一种高硬度耐磨的陶瓷柱塞及其制备工艺 |
Also Published As
Publication number | Publication date |
---|---|
US9440887B2 (en) | 2016-09-13 |
CN104768899B (zh) | 2017-07-11 |
JPWO2014069268A1 (ja) | 2016-09-08 |
JP6400478B2 (ja) | 2018-10-03 |
EP2915793A1 (en) | 2015-09-09 |
EP2915793A4 (en) | 2016-06-01 |
WO2014069268A1 (ja) | 2014-05-08 |
EP2915793B1 (en) | 2019-09-04 |
US20150251957A1 (en) | 2015-09-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104768899A (zh) | 氮化硅烧结体及使用其的耐磨件 | |
JP5732037B2 (ja) | 耐摩耗性部材およびその製造方法 | |
JP5886337B2 (ja) | 耐摩耗性部材およびそれを用いた耐摩耗性機器 | |
CN103764596B (zh) | 氮化硅烧结体及其制造方法、及使用其的耐磨部件和轴承 | |
JP6334413B2 (ja) | 窒化珪素焼結体およびそれを用いた摺動部材 | |
US9663407B2 (en) | Silicon nitride wear resistant member and method for producing silicon nitride sintered compact | |
JP6491964B2 (ja) | 窒化珪素焼結体およびそれを用いた耐摩耗性部材 | |
JP6321608B2 (ja) | 窒化珪素質焼結体、その製造方法、及びベアリング用転動体 | |
CN115667185A (zh) | 氮化硅烧结体、采用其的耐磨损性部件及氮化硅烧结体的制造方法 | |
JP5150064B2 (ja) | 耐磨耗性部材の製造方法 | |
JP2021001094A (ja) | 窒化珪素焼結体およびそれを用いた耐摩耗性部材 | |
JP6374207B2 (ja) | 窒化珪素質焼結体およびこれからなる耐衝撃磨耗性部材 | |
JP5349525B2 (ja) | 転動体 | |
JP4939736B2 (ja) | 窒化けい素焼結体の製造方法 | |
JP2004284832A (ja) | 窒化ケイ素系焼結体及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
EXSB | Decision made by sipo to initiate substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |