CN116096579B - 喷墨头、喷墨头的制造方法以及喷墨记录装置 - Google Patents

喷墨头、喷墨头的制造方法以及喷墨记录装置 Download PDF

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Publication number
CN116096579B
CN116096579B CN202080103807.1A CN202080103807A CN116096579B CN 116096579 B CN116096579 B CN 116096579B CN 202080103807 A CN202080103807 A CN 202080103807A CN 116096579 B CN116096579 B CN 116096579B
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CN
China
Prior art keywords
flow path
substrate
nozzle
inkjet head
silicon
Prior art date
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Active
Application number
CN202080103807.1A
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English (en)
Chinese (zh)
Other versions
CN116096579A (zh
Inventor
佐藤洋平
下村明久
吉田仁纪
香西洋明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Publication of CN116096579A publication Critical patent/CN116096579A/zh
Application granted granted Critical
Publication of CN116096579B publication Critical patent/CN116096579B/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/18—Ink recirculation systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14467—Multiple feed channels per ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN202080103807.1A 2020-09-09 2020-09-09 喷墨头、喷墨头的制造方法以及喷墨记录装置 Active CN116096579B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/034053 WO2022054153A1 (ja) 2020-09-09 2020-09-09 インクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録装置

Publications (2)

Publication Number Publication Date
CN116096579A CN116096579A (zh) 2023-05-09
CN116096579B true CN116096579B (zh) 2025-06-17

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080103807.1A Active CN116096579B (zh) 2020-09-09 2020-09-09 喷墨头、喷墨头的制造方法以及喷墨记录装置

Country Status (5)

Country Link
US (1) US12172443B2 (https=)
EP (1) EP4212343B1 (https=)
JP (1) JPWO2022054153A1 (https=)
CN (1) CN116096579B (https=)
WO (1) WO2022054153A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7413332B2 (ja) * 2021-09-29 2024-01-15 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012076396A (ja) * 2010-10-04 2012-04-19 Fujifilm Corp インクジェットヘッドの製造方法およびインクジェットヘッド
CN103085481A (zh) * 2011-11-08 2013-05-08 富士胶片株式会社 液滴喷出头的制造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006256223A (ja) 2005-03-18 2006-09-28 Seiko Epson Corp 液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法
JP2007106050A (ja) * 2005-10-14 2007-04-26 Sharp Corp インクジェットヘッド及びインクジェットヘッドの製造方法
KR20080004225A (ko) * 2006-07-05 2008-01-09 삼성전자주식회사 잉크젯 헤드의 노즐 플레이트 및 그 제조방법
US9056465B2 (en) * 2010-12-21 2015-06-16 Baumer Innotec Ag Ink-jet print head with integrated optical monitoring of the nozzle function
JP2012218289A (ja) * 2011-04-08 2012-11-12 Ricoh Co Ltd ノズルプレートの製造方法、ノズルプレートおよび液滴吐出ヘッド
JP5645863B2 (ja) 2012-03-14 2014-12-24 富士フイルム株式会社 ノズルプレートの製造方法
JP6686815B2 (ja) * 2016-09-16 2020-04-22 コニカミノルタ株式会社 インクジェットヘッド、インクジェット記録装置及びインクジェットヘッドの製造方法
JP6878157B2 (ja) * 2017-06-09 2021-05-26 富士フイルム株式会社 液滴吐出ヘッドの製造方法、画像形成装置の製造方法、液滴吐出ヘッド及び画像形成装置
JP6885475B2 (ja) * 2017-12-26 2021-06-16 コニカミノルタ株式会社 インクジェットヘッドの製造方法、インクジェット記録装置の製造方法、インクジェットヘッド及びインクジェット記録装置
EP3845387B1 (en) * 2018-08-29 2023-06-14 Konica Minolta, Inc. Inkjet head and inkjet recording apparatus
US11845277B2 (en) * 2019-01-11 2023-12-19 Konica Minolta, Inc. Inkjet head, method of manufacturing inkjet head, and inkjet recording method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012076396A (ja) * 2010-10-04 2012-04-19 Fujifilm Corp インクジェットヘッドの製造方法およびインクジェットヘッド
CN103085481A (zh) * 2011-11-08 2013-05-08 富士胶片株式会社 液滴喷出头的制造方法

Also Published As

Publication number Publication date
JPWO2022054153A1 (https=) 2022-03-17
EP4212343B1 (en) 2025-03-19
CN116096579A (zh) 2023-05-09
EP4212343A1 (en) 2023-07-19
EP4212343A4 (en) 2023-10-11
WO2022054153A1 (ja) 2022-03-17
US12172443B2 (en) 2024-12-24
US20240025174A1 (en) 2024-01-25

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