CN115403370A - 电介质组合物及层叠陶瓷电子部件 - Google Patents

电介质组合物及层叠陶瓷电子部件 Download PDF

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CN115403370A
CN115403370A CN202210550583.XA CN202210550583A CN115403370A CN 115403370 A CN115403370 A CN 115403370A CN 202210550583 A CN202210550583 A CN 202210550583A CN 115403370 A CN115403370 A CN 115403370A
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segregation
dielectric
powder
grain boundary
dielectric composition
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CN115403370B (zh
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井口俊宏
末田有一郎
并木亮太
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TDK Corp
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Abstract

一种电介质组合物,其具有:电介质颗粒,其包含以ABO3表示的钙钛矿型化合物作为主成分;晶界相,其位于电介质颗粒之间;以及偏析,其存在于晶界相的一部分,且至少含有Al、Si及O。而且,在偏析中,Al含量相对于Al及Si的合计含量的摩尔比(Al/(Al+Si))为0.45以上且0.75以下。

Description

电介质组合物及层叠陶瓷电子部件
技术领域
本公开涉及电介质组合物、及包含该电介质组合物的层叠陶瓷电子部件。
背景技术
如专利文献1所示,已知有将由电介质组合物构成的陶瓷层和内部电极层交替层叠的层叠陶瓷电子部件。在该层叠陶瓷电子部件中,在陶瓷层和内部电极层之间收缩率或线膨胀系数等特性存在差异。在由电介质组合物构成的陶瓷层中,由于该特性的不同,容易产生裂纹等结构缺陷,有时高温多湿环境下的耐久性降低。
现有技术文献
专利文献
专利文献1:日本特开2013-012418号公报
发明内容
发明所要解决的技术问题
本公开鉴于这种实际情况,其目的在于,提供一种相对于高温多湿环境的耐久性优异的电介质组合物及层叠陶瓷电子部件。
用于解决技术问题的手段
为了实现上述目的,本公开所涉及的电介质组合物具有:
电介质颗粒,其包含以ABO3表示的钙钛矿型化合物作为主成分;晶界相,其位于所述电介质颗粒之间;以及
偏析,其存在于所述晶界相的一部分,且至少含有Al、Si及O,
在所述偏析中,Al含量相对于Al及Si的合计含量的摩尔比(Al/(Al+Si))为0.45以上且0.75以下。
认为在本公开的电介质组合物中,通过具有上述特征,电介质颗粒间的接合强度提高。另外,认为假设即使在电介质组合物的内部产生裂纹的起点,通过存在于所述晶界相的规定的偏析,也能够抑制裂纹的进展。其结果,在本公开的电介质组合物、及包含该电介质组合物的层叠陶瓷电子部件中,能够充分抑制裂纹的产生,相对于高温多湿环境的耐久性提高。
优选的是,上述偏析中的上述摩尔比(Al/(Al+Si))为0.60以上。
优选的是,上述偏析还含有Ba,上述偏析中的Ba/Ti比大于上述电介质颗粒中的Ba/Ti比。
优选的是,上述偏析的平均粒径为0.05μm以上且0.20μm以下。
优选的是,上述晶界相的平均厚度为0.01μm以上且0.15μm以下。
优选的是,上述偏析的含有比例为0.05个/μm2以上且2.00个/μm2以下。
另外,优选的是,上述钙钛矿型化合物为钛酸钡。
附图说明
图1是表示本公开的一个实施方式的层叠陶瓷电容器的截面的示意图。
图2是将图1所示的陶瓷层10放大的截面图。
符号说明
2……层叠陶瓷电容器
4……元件主体
4a……端面
4b……侧面
10……陶瓷层
12……内部电极层
20……电介质颗粒
21……晶界相
21a……晶界多重点
21b……二颗粒晶界
22……偏析
6……外部电极
具体实施方式
在本实施方式中,作为本公开的陶瓷电子部件的一例,对图1所示的层叠陶瓷电容器2进行说明。层叠陶瓷电容器2具有元件主体4和形成于该元件主体4的外表面的一对外部电极6。
图1所示的元件主体4的形状通常为大致长方体状,具有在X轴方向上相对的两个端面4a、在Y轴方向上相对的两个侧面4b、在Z轴方向上相对的两个侧面4b。但是,元件主体4的形状没有特别限制,也可以是椭圆柱状、圆柱状、其它的棱柱状等。另外,元件主体4的外形尺寸也没有特别限制,例如,能够将X轴方向的长度L0设为0.4mm~5.7mm,将Y轴方向的宽度W0设为0.2mm~5.0mm,将Z轴方向的高度T0设为0.2mm~3.0mm。此外,在本实施方式中,X轴、Y轴、Z轴相互垂直。
而且,元件主体4具有与包含X轴及Y轴的平面实际上平行的陶瓷层10和内部电极层12,在元件主体4的内部,陶瓷层10和内部电极层12沿着Z轴方向交替地层叠。在此,“实际上平行”是指大部分平行,但也可以具有稍微不平行的部分,陶瓷层10和内部电极层12也可以稍微具有凹凸或倾斜。
陶瓷层10由后述的电介质组合物构成。而且,陶瓷层10的每1层的平均厚度(层间厚度)没有特别限制,例如,能够设为100μm以下,优选为30μm以下。另外,关于陶瓷层10的层叠数,根据期望的特性确定即可,没有特别限定。例如,能够设为20层以上,更优选设为50层以上。
另一方面,内部电极层12层叠于各陶瓷层10之间,其层叠数根据陶瓷层10的层叠数确定。而且,内部电极层12的每1层的平均厚度没有特别限制,例如,能够设为3.0μm以下。此外,陶瓷层10的平均厚度及内部电极层12的平均厚度通过如下计算即可,即,使用金属显微镜观察如图1所示那样的截面,在至少5个部位以上测量各层(10、12)的厚度。
另外,内部电极层12以一个端部在元件主体4的X轴方向上相对的两个端面4a交替露出的方式层叠。而且,一对外部电极6分别形成于元件主体4的一个端面4a上,并与交替配置的内部电极层12的露出端电连接。通过这样形成内部电极层12及外部电极6,利用外部电极6和内部电极层12构成电容器电路。即,存在于容量区域内的陶瓷层10被极性不同的内部电极层12夹持,可对陶瓷层10施加电压。
内部电极层12由导电性材料构成,优选含有Ni作为主成分。具体而言,内部电极层12的导电性材料优选为纯Ni、或含有85wt%以上的Ni的Ni系合金,Ni系合金中可包含选自Mn、Cu、Cr等中的1种以上的元素。另外,在内部电极层12中,除了上述的导电性材料之外,还可以包含具有与陶瓷层10的主成分一样的组成的钙钛矿型化合物的颗粒作为通用材料。另外,在内部电极层12中也可以微量地(例如0.1质量%以下程度)含有S或P等非金属成分,也可以包含空隙。此外,在内部电极层12中包含通用材料或空隙等的情况下,有时在内部电极层12形成电极(导电性材料)不存在的中断部分。
一对外部电极6能够包含烧附电极层、或树脂电极层、镀敷电极层等,可以由单一电极层构成,也可以通过层叠多个电极层而构成。例如,外部电极6能够设为烧附电极层-镀Ni层-镀Sn层的三层结构(按照记载的顺序层叠),在该情况下,镀Sn层位于外部电极6的最表面,因此,外部电极6的锡焊润湿性变得良好。
另外,如图1所示,各外部电极6一体地具有形成于元件主体4的端面4a的端面部和形成于各侧面4b的X轴方向的一端的延长部。即,一对外部电极6分别以从元件主体4的端面4a绕入侧面4b的方式形成,以在X轴方向上相互不接触的方式绝缘。
此外,外部电极6的延长部不是必须的,外部电极6也可以仅由端面部构成。或者,在将层叠陶瓷电容器2表面安装于基板的情况下,外部电极6的延长部只要形成于至少与基板的安装面相对的侧面4b即可,也可以不形成于与安装面相反侧的侧面4b上。
接着,详细叙述陶瓷层10的电介质组合物。
陶瓷层10的电介质组合物包含以通式ABO3表示的钙钛矿型化合物作为主成分。在此,陶瓷层10的主成分(电介质组合物的主成分)是指陶瓷层10中占80摩尔%以上的成分。在本实施方式中,作为主成分的钙钛矿型化合物优选为钛酸钡(BT),该钛酸钡能够以组成式(Ba(1-a-b)SraCab)m(Ti(1-c-d)ZrcHfd)O3表示。
在上述组成式中,符号a、b、c、d、m分别表示元素比率,各元素比率没有特别限定,能够设定成公知的范围。例如,m表示A位点相对于B位点的元素比率,通常能够设为1.0~1.1的范围。另外,a表示Sr占A位点的元素比率,b表示Ca占A位点的元素比率。在本实施方式中,优选设为0≤a+b≤0.1。另外,c表示Zr占B位点的元素比率,d表示Hf占B位点的元素比率。在本实施方式中,优选设为0≤c+d≤0.15。此外,上述组成式中的氧(O)的元素比率也可以稍微偏离化学计量组成。
另外,陶瓷层10中,除了上述的主成分之外,还可以包含副成分。作为副成分,例如,可举出:Mn化合物、Mg化合物、Cr化合物、Ni化合物、稀土元素化合物、Si化合物、Li化合物、B化合物、V化合物、Al化合物、Ca化合物等,副成分的种类、组合、及其添加量没有特别限定。
此外,陶瓷层10的成分组成只要通过电感耦合等离子体发光光谱分析(ICP)、激光烧蚀ICP质量分析(LA-ICP-MS)、荧光X射线分析(XRF)、能量色散型X射线分析(EDX)、具有波长色散型X射线光谱仪(WDS)的电子探针显微分析仪(EPMA)等进行分析即可。
包含上述成分的陶瓷层10具有图2所示那样的内部组织,在陶瓷层10中包含作为母相的电介质颗粒20、位于电介质颗粒20之间的晶界相21、以及存在于晶界相21的一部分的偏析22。
电介质颗粒20由上述的陶瓷层10的主成分(钙钛矿型化合物)构成。在陶瓷层10中包含副成分的情况下,在电介质颗粒20中,除了主成分之外,还可以固溶副成分。另外,电介质颗粒20也可以通过副成分固溶而具有核-壳结构。电介质颗粒20的平均粒径能够设为1μm以下,优选设为0.20μm~2.00μm。
此外,电介质颗粒20的平均粒径能够通过使用扫描电子显微镜(SEM)或扫描透射电子显微镜(STEM)等观察如图2所示的陶瓷层10的截面并对得到的截面照片进行图像分析而测定。例如,电介质颗粒20的平均粒径只要通过测量至少5个以上的电介质颗粒20的圆当量直径计算即可。
关于存在于电介质颗粒20之间的晶界相21,含有主成分的构成元素或副成分元素。而且,该晶界相21由晶界多重点21a和二颗粒晶界21b构成。晶界多重点21a是被至少3个电介质颗粒20包围的晶界,二颗粒晶界21b是位于相邻的两个电介质颗粒20之间的晶界。在本实施方式中,二颗粒晶界21b的平均厚度优选为0.01μm以上且0.15μm以下。此外,二颗粒晶界21b的厚度通过使用STEM或TEM以10万倍以上的高倍观察陶瓷层10的截面而测定即可,优选在至少5个部位以上测定二颗粒晶界21b的厚度并计算平均值。
如图2所示,偏析22存在于晶界多重点21a的一部分和/或二颗粒晶界21b的一部分。该偏析22是Al和Si的合计含量高于电介质颗粒20的复合氧化物的相,至少含有Al、Si、及O(氧)。此外,偏析22中,除了Al及Si以外,还可以含有主成分的构成元素(Ba、Sr、Ca、Ti、Zr、或Hf等)或副成分元素等,特别优选含有Ba。
另外,偏析22具有规定的元素比。具体而言,偏析22中,Al含量相对于Al及Si的合计含量的摩尔比MR(即,Al/(Al+Si))为0.45以上且0.75以下,优选为0.60以上且0.75以下。认为通过满足该摩尔比MR的偏析22存在于晶界相21的一部分,从而能够提高相邻的电介质颗粒20之间的接合强度。另外,认为假设即使在陶瓷层10上产生裂纹的起点,通过存在于晶界相21的偏析22,也能够抑制裂纹的进展。其结果,能够抑制在陶瓷层10上产生裂纹,并且本实施方式的层叠陶瓷电容器2相对于高温多湿环境呈现优异的耐久性。
此外,当对偏析22进行成分分析时,也可检测电介质颗粒20的构成元素。当将偏析22中所含的除氧之外的元素的总含量设为100摩尔时,Al含量及Si含量的和优选为至少20摩尔%以上。另外,在偏析22中含有Ba的情况下,偏析22中的Ba相对于Ti的摩尔比(以下,称为Ba/Ti比)优选比电介质颗粒20中的Ba/Ti比高。更具体而言,电介质颗粒20中的Ba/Ti比为1.1以下程度,与之相对,偏析22的Ba/Ti比优选为1.20以上,其上限没有特别限定。
如上所述,Ba是构成电介质颗粒20的主成分的元素,认为通过在偏析22中包含该Ba,相邻的电介质颗粒20之间的接合强度进一步提高。其结果,能够更有效地抑制陶瓷层10中的裂纹,并且能够进一步提高相对于高温多湿环境的耐久性。
偏析22的详细的组成没有特别限定,但偏析22的结晶体系优选为六方晶系。作为六方晶系的复合氧化物,例如,可举出BaAl2Si2O8。通过偏析22为上述那样的六方晶系的复合氧化物,能够进一步提高相对于高温多湿环境的耐久性。
在本实施方式中,偏析22优选并用由EDX或WDS进行的测绘分析和点分析来特定。例如,在图2所示那样的元件主体4的截面中,实施测绘分析,并从Al的测绘图像特定Al偏析的区域。在此,“Al偏析的区域”是指Al浓度比电介质颗粒20高的区域,从Al的测绘图像上可视觉特定。在特定了Al偏析的区域后,在该区域实施点分析,并测定该区域中的摩尔比MR。然后,如果测定的摩尔比MR为0.45~0.75的范围内,则判断为特定的区域为本实施方式的偏析22。测绘分析及点分析中的测定视野及分辨率等测定条件适当设定为可进行偏析的解析的条件即可,没有特别限定。
偏析22的平均粒径能够设为0.35μm以下,优选在0.05μm以上且0.20μm以下的范围内。该平均粒径通过考虑晶界相21的平均厚度而设计,通过将偏析22的平均粒径设为上述的范围内,从而能够更有效地抑制陶瓷层10的裂纹。此外,偏析22的平均粒径通过利用EDX或WDS特定至少5个以上的偏析22后,并通过图像分析测定特定的偏析22的圆当量直径而算出即可。
另外,在本实施方式中,以陶瓷层10中的单位截面积中所含的偏析22的个数N(单位:个/μm2)定义陶瓷层10中的偏析22的含有比例。该个数N能够设为0.01个/μm2~3.5个/μm2的范围内,优选设为0.05个/μm2以上。另外,当考虑到偏析22产生的对相对介电常数的影响时,个数N优选为2.00个/μm2以下。通过这样将个数N设为0.05~2.00个/μm2的范围内,能够同时实现高温多湿环境下的耐久性的提高和高的相对介电常数。此外,个数N通过利用SEM或STEM在多个视野内观察图2所示那样的陶瓷层10的截面,并测量存在于至少合计10μm2以上的截面的截面中的偏析22的个数而算出即可。
此外,在晶界相21中,除了上述的偏析22以外,还可以存在副成分引起的其它的偏析。作为其它的偏析,可举出不含有Al而含有Si的偏析、含有稀土元素的偏析等。另外,在陶瓷层10中,除了上述的电介质颗粒20及偏析22之外,还可以存在空隙或副相颗粒。
接着,说明图1所示的层叠陶瓷电容器2的制造方法的一例。
首先,对元件主体4的制造工序进行说明。在元件主体4的制造工序中,准备在烧成后成为陶瓷层10的电介质用膏和在烧成后成为内部电极层12的内部电极用膏。
电介质用膏使用作为电介质组合物的主成分的钙钛矿型化合物的粉末(以下,称为主成分粉末)和在烧成后成为偏析22的偏析用粉末制造。主成分粉末通过将BaCO3粉末或TiO2粉末等初始原料通过湿式混合等方式均匀地混合后,进行煅烧处理而得到。也可以对煅烧的主成分粉末适当实施粉碎或分级等处理。对于偏析用粉末,也与主成分粉末一样,通过将Al2O3粉末或SiO2粉末等(在使偏析22含有Ba的情况下,还添加BaCO3粉末)以规定的比率混合,并进行煅烧处理而得到。对于偏析用粉末,优选还适当实施粉碎处理等,调制偏析22的粒径。
接着,将主成分粉末和偏析用粉末添加至有机载体中进行混炼,得到电介质用膏。在此,有机载体是将粘合剂溶解于有机溶剂中得到的材料。使用的粘合剂没有特别限定,例如,可以从聚乙烯醇缩丁醛、丙烯酸、乙基纤维素等各种粘合剂适当选择。另外,使用的有机溶剂也没有特别限定,例如,可以从甲基乙基酮、甲醇、乙醇、丙酮、甲苯、萜品醇、丁基卡必醇等各种有机溶剂适当选择。
此外,上述的电介质用膏为有机系的涂料,电介质用膏也可以是混炼了混合粉末和水系媒介的水系涂料。在该情况下,水系媒介通过使水溶性的粘合剂或分散剂等溶解于水中而制作。使用的水溶性粘合剂也没有特别限定,例如,能够使用聚乙烯醇、水溶性丙烯酸树脂、水溶性聚乙烯醇缩丁醛树脂等。另外,在电介质用膏中,也可以根据需要,含有选自各种分散剂、增塑剂、电介质、副成分化合物、玻璃粉等的添加物。
另一方面,内部电极用膏可以通过将纯Ni粉末或Ni合金粉末等导电性材料、或在正式烧成后成为上述的Ni或Ni合金的各种氧化物、有机金属化合物、树脂酸盐等与上述那样的有机载体一起混炼而制备。此时,在内部电极用膏中,也可以添加电介质用膏中所含的主成分粉末作为通用材料。通用材料发挥在烧成过程中抑制导电性粉末的烧结的作用。
接着,通过刮刀法等方法将电介质用膏片材化,从而得到陶瓷生坯片材。然后,在该陶瓷生坯片材上,通过丝网印刷等各种印刷法或转印法,以规定的图案涂布内部电极用膏。然后,将形成有内部电极图案的生片层叠至多层后,沿层叠方向进行压制,由此,得到母层叠体。此外,此时,以陶瓷生坯片材位于母层叠体的层叠方向的上表面及下表面的方式,层叠陶瓷生坯片材和内部电极图案。
通过切割或压切将通过上述工序得到的母层叠体切断成规定的尺寸,得到多个生坯芯片。生坯芯片也可以根据需要,为了除去增塑剂等而进行固化干燥,也可以在固化干燥后使用卧式离心滚筒机等进行滚筒研磨。在滚筒研磨中,将生坯芯片与介质及研磨液一起投入滚筒容器内,对该滚筒容器赋予旋转运动或振动等。通过该滚筒研磨,对在切断时产生的毛刺等不需要部位进行研磨,在生坯芯片的角部形成圆角(角R)。此外,滚筒研磨后的生坯芯片通过用水等清洗液进行清洗并使其干燥。
接着,对上述中得到的生坯芯片实施脱粘合剂处理、烧成处理、再氧化处理,得到元件主体4。
脱粘合剂处理的条件只要根据陶瓷层10的主成分组成或内部电极层12的主成分组成适当确定即可,没有特别限定。例如,优选将升温速度设为5~300℃/小时,优选将保持温度设为180~400℃,优选将温度保持时间设为0.5~24小时。另外,脱粘合剂气氛设为空气或还原性气氛。
脱粘合剂处理后,烧成(正式烧成)生坯芯片。在烧成处理中,优选将升温速度设为50~500℃/小时,将保持温度设为1250℃以上且1350℃以下,将保持时间设为0.5~8小时。另外,烧成气氛优选设为还原性气氛。具体而言,作为气氛气体,例如优选加湿使用N2和H2的混合气体,并将烧成气氛中的氧分压设为1.0×10-14~1.0×10-10MPa。
为了在晶界相21形成偏析22,如上述以高温加热生坯芯片后,以5~100℃/小时的降温速度缓慢冷却。然后,在缓慢冷却至700℃以下后,再次升温,以950℃~1150℃保持0.5~8小时,由此,对元件主体4实施再氧化处理。在该再氧化处理中,优选使用加湿的N2气体等作为气氛气体,优选将退火气氛中的氧分压设为1.0×10-9~1.0×10-5MPa。此外,在气氛气体的加湿中,例如可以使用润湿剂等,在该情况下,水温优选为5~75℃程度。另外,再氧化处理中的升温速度及降温速度优选设为50~500℃/小时。
如上述,认为将生坯芯片以高温烧成后缓慢冷却,在规定的条件下进行再加热(再氧化处理),由此,可在晶界相21的一部分形成偏析22,相邻的电介质颗粒间被牢固地烧结(接合)。
接着,在通过上述而得到的元件主体4的外表面形成一对外部电极6。外部电极6的形成方法没有特别限定。例如,在形成烧附电极作为外部电极6的情况下,在通过浸渍法将包含玻璃粉的导电性膏体涂布于元件主体4的端面后,以规定的温度加热元件主体4即可。另外,在形成树脂电极作为外部电极6的情况下,将包含热固性树脂的导电性膏体涂布于元件主体4的端面上,然后以热固性树脂固化的温度加热元件主体4即可。另外,也可以在通过上述的方法形成烧附电极或树脂电极后,实施溅射、蒸镀、电解镀、或无电解镀等,形成具有多层结构的外部电极6。
通过上述的工序,可得到具有外部电极6的层叠陶瓷电容器2。
(实施方式的总结)
本实施方式的层叠陶瓷电容器2具有将由规定的电介质组合物构成的陶瓷层10和内部电极层12交替层叠的元件主体4。而且,陶瓷层10的电介质组合物包含以钙钛矿型化合物为主成分的电介质颗粒20、位于电介质颗粒20之间的晶界相21、以及存在于晶界相21的一部分的偏析22。另外,偏析22至少含有Al、Si及O,偏析22中的摩尔比MR成为0.45以上且0.75以下。
通过层叠陶瓷电容器2具有上述特征,在高温多湿环境下,绝缘电阻不易降低,相对于高温多湿环境的耐久性提高。耐久性提高的原因未必明确,但认为是由于,通过含有规定元素的偏析22,提高了电介质颗粒间的接合强度。
一般而言,在由电介质陶瓷构成的陶瓷层和由Ni构成的内部电极层中,收缩率或线膨胀系数等材料特性不同,由于该特性的不同,在陶瓷层的内部产生应力。因此,认为当对元件主体施加外力或热影响等负荷时,在陶瓷层的内部产生裂纹,导致绝缘特性的降低或耐久性的降低。在本实施方式的层叠陶瓷电容器2中,认为通过存在于晶界相21的偏析22,容易引起相邻的电介质颗粒间的构成元素的相互扩散,提高该电介质颗粒间的接合强度。另外,认为即使在陶瓷层10的内部产生裂纹的起点,通过位于晶界相21的偏析22,也能够抑制裂纹的进展。其结果,能够抑制在陶瓷层10产生裂纹,本实施方式的层叠陶瓷电容器2相对于高温多湿环境呈现优异的耐久性。
认为通过在偏析22中含有Ba,进一步提高电介质颗粒间的接合强度,能够进一步提高相对于高温多湿环境的耐久性。
以上,对本公开的实施方式进行了说明,但本发明丝毫不限定于上述的实施方式,能够在不脱离本公开宗旨的范围内进行各种改变。
例如,在本实施方式中,示例了层叠陶瓷电容器2作为层叠陶瓷电子部件,但本公开的层叠陶瓷电子部件例如也可以是带通滤波器、层叠三端子滤波器、压电元件、热敏电阻、变阻器等。
另外,在本实施方式中,将陶瓷层10和内部电极层12沿Z轴方向进行了层叠,但层叠方向也可以是X轴方向或Y轴方向。在该情况下,只要根据内部电极层12的露出面形成外部电极6即可。另外,内部电极层12也可以经由通孔电极引出于元件主体4的外表面,在该情况下,通孔电极和外部电极6进行电接合。
实施例
以下,基于更详细的实施例说明本公开,但本发明不限定于这些实施例。
(实验1)
在实验1中,通过以下的顺序制作了实施例1~5的电容器试样。
实施例1~5
首先,准备了作为电介质用膏的原料的主成分粉末和偏析用粉末。具体而言,实施例1~5中的主成分粉末设为通过水热合成法得到的钛酸钡粉末(BaTiO3粉末)。另外,在实施例1~2中,制备了Al-Si-O系的复合氧化物粉末作为偏析用粉末,在实施例3~5中,制备了Ba-Al-Si-O系的复合氧化物粉末作为偏析用粉末。这些偏析用粉末如下得到,将Al2O3粉末、SiO2粉末、BaCO3粉末等初始原料以规定的比率湿式混合,在煅烧后,利用球磨机进行粉碎。此外,在实施例1~5中,分别以不同的配合比混合初始原料,根据该初始原料的配合比制备偏析22中的摩尔比MR。
接着,通过混炼主成分粉末、偏析用粉末、有机载体、以及副成分粉末(MgCO3粉末、Al2O3粉末、SiO2粉末、CaCO3粉末、V2O5粉末、MnCO3粉末、Dy2O3粉末),得到电介质用膏。另外,混炼Ni粉末、作为通用材料的钛酸钡粉末、以及有机载体,得到内部电极用膏。
接着,使用上述的电介质用膏和内部电极用膏,通过片材法制造了生坯芯片。然后,对该生坯芯片实施脱粘合剂处理、烧成处理、及再氧化处理,得到元件主体4。
具体而言,脱粘合剂处理的条件设为升温速度:50℃/小时;保持温度:250℃;温度保持时间:10小时;气氛:大气中。
另外,烧成处理的条件设为升温速度:200℃/小时;保持温度:1270℃;保持时间:2小时;气氛气体:加湿的N2+H2混合气体;氧分压:1.0×10-12MPa;直到500℃的降温速度:50℃/小时。
在上述的条件下烧成,缓慢冷却至500℃后,实施再氧化处理。再氧化处理的条件设为升温速度:200℃/小时;保持温度:1050℃;保持时间:2时间;气氛气体:加湿后的N2气体;氧分压:1.0×10-7MPa;降温速度:200℃/小时。
通过上述的工序得到的元件主体4的尺寸为L0×W0×T0=2.0mm×1.25mm×1.25mm。另外,在元件主体4中,被内部电极层12夹持的陶瓷层10的层叠数设为80,陶瓷层10的平均厚度设为10μm,内部电极层12的平均厚度TE设为1.5μm。
接着,在上述的元件主体4的外表面上按照记载的顺序形成含有Cu的烧附电极层、镀Ni层、以及镀Sn层。通过以上的工序,得到实施例1~5的电容器试样。
另外,在实验1中,通过以下所示的顺序得到比较例1~6的电容器试样。
比较例1
在比较例1中,不使用偏析用原料粉末而准备电介质用膏。即,比较例1中的电介质用膏通过混合主成分粉末(钛酸钡粉末)、副成分粉末(与实施例1相同的副成分)、以及有机载体而制作。比较例1中的上述以外的实验条件与实施例1同样,从而得到比较例1的电容器试样。
比较例2
在比较例2中,混合主成分粉末(钛酸钡粉末)、Al2O3粉末、副成分粉末(与实施例1相同的副成分)、以及有机载体,得到电介质用膏。即,在比较例2中,使用Al2O3粉末来代替偏析用粉末,制备了电介质用膏。比较例2中的上述以外的实验条件与实施例1同样,从而得到比较例2的电容器试样。
比较例3
在比较例3中,混合主成分粉末(钛酸钡粉末)、SiO2粉末、副成分粉末(与实施例1相同的副成分)、以及有机载体,得到电介质用膏。即,在比较例3中,使用SiO2粉末来代替偏析用粉末,制备电介质用膏。比较例3中的上述以外的实验条件与实施例1同样,从而得到比较例3的电容器试样。
比较例4~6
在比较例4~6中,准备摩尔比MR与实施例1~5不同的复合氧化物粉末,使用该复合氧化物粉末制备电介质用膏。比较例4~6中的上述以外的实验条件与实施例1同样,从而得到比较例4~6的电容器试样。
对实验1中制造的各实施例及各比较例的电容器试样实施以下所示的评价。
偏析的解析
在实验1中,通过STEM观察各电容器试样的截面,此时通过WDS进行测绘分析及点分析,由此,特定存在于晶界相21的偏析。将各实施例及各比较例的测定结果在表1中示出。此外,表1所示的摩尔比MR是Al含量相对于Al和Si的合计含量的比。
耐久性评价
为了评价电容器试样在高温多湿环境下的耐久性,进行了压力蒸煮偏差试验(PCBT)。具体而言,在对电容器试样施加了100V的电压的状态下,使该电容器试样长时间暴露于温度121℃、湿度95%、气压2.026×105Pa的环境下。就暴露时间而言,在条件1下设为24小时,在条件2下,为了在比条件1残酷的条件下评价耐久性而设为240小时。然后,在PCBT前后测定电容器试样的绝缘电阻,将PCBT后的绝缘电阻相对于试验前的绝缘电阻降低至1/10以下的试样判断为不合格(NG)。条件1的试验样品数设为80个,条件2的试验样品数设为400个,算出各实施例及各比较例中的NG率(成为NG的样品数/试验样品数(80))。此外,将条件1(PCBT24小时)的NG率:0/80设为耐久性的合格与否基准,条件2的NG率越低,判断为耐久性越良好。将实验1的评价结果在表1中示出。
表1
Figure BDA0003654941360000141
如表1所示可知,在实施例1~5中,能够确认到形成有摩尔比MR处于0.45~0.75的范围内的偏析22,高温多湿环境下的耐久性比各比较例提高。另外,在条件2的PCBT(240h)中,与实施例1~2相比,实施例3~5的NG率变低。根据该结果可知,通过在偏析22中含有Ba,高温多湿环境下的耐久性特别良好。
(实验2)
在实验2中,调整偏析22的平均粒径的水准、及晶界相21的平均厚度的水准,得到实施例11~14的电容器试样。偏析22的平均粒径根据制备偏析用粉末时的粉碎条件进行控制,晶界相21的平均厚度根据副成分的添加量进行控制。实验2中的上述以外的实验条件与实验1的实施例1一样,并实施了与实验1一样的评价。将实验2的评价结果在表2中示出。
表2
Figure BDA0003654941360000151
根据表2所示的结果可知,偏析22的平均粒径优选为0.05μm以上且0.20μm以下。
(实验3)
在实验3中,调整偏析22的含有比例(陶瓷层10的单位截面中所含的偏析22的个数N)的水准,制作了实施例21~24的电容器试样。个数N根据电介质用膏中的偏析用粉末的添加量进行控制。实验3中的上述以外的实验条件设为与实验1的实施例1同样,并实施了与实验1同样的评价。
另外,在实验3中,测定了电容器试样的相对介电常数。相对介电常数通过使用LCR测试仪(KEYSIGT TECHNOLOGIES公司制造:E4981A电容表)测定静电电容而算出。具体而言,在静电电容的测定中,将测定温度设为20℃,对电容器试样输入频率1kHz、输入信号电平(测定电压)1Vrms的信号。然后,基于电介质层的厚度、有效电极面积、以及测定的静电电容算出相对介电常数(无单位)。此外,关于各实施例,对10个样品实施上述的测定,并算出其平均值。在本实施例中,相对介电常数将2500以上判断为良好。将实验3的评价结果在表3中示出。
表3
Figure BDA0003654941360000161
根据表3的结果可知,个数N优选为0.05个/μm2以上。另外,可知鉴于对相对介电常数的影响,个数N优选为2.0个/μm2以下。

Claims (8)

1.一种电介质组合物,其中,
具有:
电介质颗粒,其包含以ABO3表示的钙钛矿型化合物作为主成分;
晶界相,其位于所述电介质颗粒之间;以及
偏析,其存在于所述晶界相的一部分,且至少含有Al、Si及O,
在所述偏析中,Al含量相对于Al及Si的合计含量的摩尔比Al/(Al+Si)为0.45以上且0.75以下。
2.根据权利要求1所述的电介质组合物,其中,
所述偏析中的所述摩尔比Al/(Al+Si)为0.60以上。
3.根据权利要求1或2所述的电介质组合物,其中,
所述偏析还含有Ba,
所述偏析中的Ba/Ti比大于所述电介质颗粒中的Ba/Ti比。
4.根据权利要求1或2所述的电介质组合物,其中,
所述偏析的平均粒径为0.05μm以上且0.20μm以下。
5.根据权利要求1或2所述的电介质组合物,其中,
所述晶界相的平均厚度为0.01μm以上且0.15μm以下。
6.根据权利要求1或2所述的电介质组合物,其中,
所述偏析的含有比例为0.05个/μm2以上且2.00个/μm2以下。
7.根据权利要求1或2所述的电介质组合物,其中,
所述钙钛矿型化合物为钛酸钡。
8.一种层叠陶瓷电子部件,其包含权利要求1~7中任一项所述的电介质组合物。
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