CN113646590A - 低湿空气供给装置 - Google Patents

低湿空气供给装置 Download PDF

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CN113646590A
CN113646590A CN202080010255.XA CN202080010255A CN113646590A CN 113646590 A CN113646590 A CN 113646590A CN 202080010255 A CN202080010255 A CN 202080010255A CN 113646590 A CN113646590 A CN 113646590A
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air
unit
low
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air supply
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増田克洋
上田晃
山口雅文
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Nihon Spindle Manufacturing Co Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F24F3/1411—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by absorbing or adsorbing water, e.g. using an hygroscopic desiccant
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
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    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
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    • B01D53/06—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
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    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F1/00—Room units for air-conditioning, e.g. separate or self-contained units or units receiving primary air from a central station
    • F24F1/02—Self-contained room units for air-conditioning, i.e. with all apparatus for treatment installed in a common casing
    • F24F1/029—Self-contained room units for air-conditioning, i.e. with all apparatus for treatment installed in a common casing characterised by the layout or mutual arrangement of components, e.g. of compressors or fans
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    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F1/00—Room units for air-conditioning, e.g. separate or self-contained units or units receiving primary air from a central station
    • F24F1/02—Self-contained room units for air-conditioning, i.e. with all apparatus for treatment installed in a common casing
    • F24F1/0358—Self-contained room units for air-conditioning, i.e. with all apparatus for treatment installed in a common casing with dehumidification means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/044—Systems in which all treatment is given in the central station, i.e. all-air systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
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    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/80—Water
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B01D2259/4009—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating using hot gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4508—Gas separation or purification devices adapted for specific applications for cleaning air in buildings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F24F2003/144—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by dehumidification only
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    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F24F2003/1458—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification using regenerators
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    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F24F2003/1458—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification using regenerators
    • F24F2003/1464—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification using regenerators using rotating regenerators

Abstract

本发明提供一种可实现小型化的低湿空气供给装置。低湿空气供给装置(1)将低湿空气供给至无尘室(100)内。该低湿空气供给装置(1)具备：输入部(3)，与无尘室(100)内连接，并且输入无尘室(100)内的空气(A R1)；冷却部(4)，冷却空气(AR1)；除湿部(7)，对已被冷却的空气(A R2)进行除湿；及供给部(8)，与无尘室(100)内连接，并且将由除湿部(7)进行了除湿的空气(AR4)供给至无尘室(100)内。供给部(8)由空气(AR4)能够通过的箱状的导管(81)构成，导管(81)为构成低湿空气供给装置(1)的最外层的框体(20)的一部分。

Description

低湿空气供给装置
技术领域
本发明涉及一种低湿空气供给装置。
背景技术
已知有一种在保持着适于各种作业的环境的状态下进行该作业的无尘室。在无尘室有时连接有供给调节了温度及湿度的空气的装置(例如，参考专利文献1)。专利文献1中记载的装置具备：干式除湿机，吸引处理空气并对其进行除湿；温湿度调节机构，将由干式除湿机进行了除湿的空气调节成规定的温湿度；送风机，送出由温湿度调节机构调节了温湿度的空气；及框体，容纳干式除湿机、温湿度调节机构及送风机。
在该专利文献1中记载的装置中，例如，干式除湿机与温湿度调节机构依次经由排出管和连通通道而连接在一起。排出管配置于框体内。与框体同样地，排出管为空心体。因此，专利文献1中记载的装置成为在空心体的内侧进一步具有空心体的结构。在这种结构中，在空心体彼此之间形成有间隙，而该间隙成为死区。死区可能会成为导致装置大型化的原因。因此，例如在设置空间有限的屋内，不适合设置装置。
以往技术文献
专利文献
专利文献1：日本专利第3280605号公报
发明内容
发明要解决的技术课题
本发明的目的在于提供一种可实现小型化的低湿空气供给装置。
用于解决技术课题的手段
本发明的低湿空气供给装置的一种实施方式为将低湿空气供给至干燥室内的低湿空气供给装置，所述低湿空气供给装置的特征在于，具备：
输入部，与所述干燥室内连接，并且输入所述干燥室内的空气；
冷却部，冷却经由所述输入部输入的空气；
除湿部，对由所述冷却部进行了冷却的空气进行除湿；及
供给部，与所述干燥室内连接，并且将由所述除湿部进行了除湿的空气供给至所述干燥室内，
所述输入部、所述冷却部、所述除湿部及所述供给部中的至少一个由空气能够通过的箱状的导管构成，
所述导管为构成所述低湿空气供给装置的最外层的框体的一部分。
发明效果
根据本发明，至少供给部由空气能够通过的箱状的空心导管构成。而且，该导管的一部分外表面或整个外表面作为低湿空气供给装置的框体的一部分而发挥功能。由此，例如能够将作为供给部而发挥功能的导管配置在以往可能会成为死区的空间内从而填补该空间，即，能够有效地利用死区。这种结构有助于供给装置的小型化，由此可实现供给装置的小型化。
附图说明
图1为本发明的低湿空气供给装置的主要部分的框图。
图2为本发明的低湿空气供给装置的主视图。
图3为本发明的低湿空气供给装置的右视图。
图4为沿图2中的A-A线剖切的剖视图。
图5为沿图2中的B-B线剖切的剖视图。
图6为从图2中的箭头C方向观察时的图。
图7为沿图4中的D-D线剖切的剖视图。
图8为沿图5中的E-E线剖切的剖视图。
具体实施方式
以下，基于附图所示的最佳实施方式对本发明的低湿空气供给装置进行详细说明。
图1为本发明的低湿空气供给装置的主要部分的框图。图2为本发明的低湿空气供给装置的主视图。图3为本发明的低湿空气供给装置的右视图。图4为沿图2中的A-A线剖切的剖视图。图5为沿图2中的B-B线剖切的剖视图。图6为从图2中的箭头C方向观察时的图。图7为沿图4中的D-D线剖切的剖视图。图8为沿图5中的E-E线剖切的剖视图。另外，以下，为了方便说明，将水平方向上的一个方向称为“X轴方向”，将水平方向上的与X轴方向正交的方向称为“Y轴方向”，将铅垂方向称为“Z轴方向”。并且，将图1、图3、图5～图7中的上侧称为“上(或上方)”，将下侧称为“下(或下方)”。并且，在低湿空气供给装置内，空气强制性地流动，因此，有时基于该气流称作“上游侧”、“下游侧”。
图1中所示的低湿空气供给装置(以下，简称为“供给装置”)1为将低湿空气(即，空气AR4)供给至室内以使露点温度成为-20度以下的装置。作为室内，并不受特别限定，例如，可举出无尘室(包括干燥室或干燥间(booth))100内等。并且，在无尘室100内，例如能够在维持着适于锂离子电池的制造作业或怕湿的材料(粉体等)的处理作业等各种作业的环境的状态下进行该作业。
如图2～图5所示，供给装置1具备框架2、输入部3、冷却部4、吸引部5A、分支部6、除湿部7、供给部8、第1加热部10A、中继部9、第2加热部10B、排出部5B及框体20。以下，对各部分的结构进行说明。
框架2为支承输入部3、冷却部4、吸引部5A、分支部6、除湿部7、供给部8、第1加热部10A、中继部9、第2加热部10B、排出部5B及框体20的支承体。
如图2所示，框架2具有下侧框架21和在下侧框架21的上侧与下侧框架21分开配置的上侧框架22。如此，框架2构成为具有下层和上层的双层结构。另外，框架2的层数并不只限于两层，例如，也可以为三层以上。
并且，框架2具有设置于下侧框架21的多个腿部(调节支脚)23和多个脚轮24。各腿部23能够在将供给装置1设置于地面200上的所期望的位置上之后将供给装置1固定在该位置上。脚轮24在基于各腿部23的固定被解除的状态下能够使供给装置1在地面200上沿所期望的方向移动。
框体20为构成低湿空气供给装置1的最外层整体的罩部件。框体20能够覆盖框架2、输入部3、冷却部4、吸引部5A、分支部6、除湿部7、供给部8、第1加热部10A、中继部9、第2加热部10B及排出部5B。另外，框体20例如具有多个罩部件，而各罩部件通过螺纹紧固等而固定于框架2。
输入部3为输入无尘室100内的空气AR1的输入口。如图2及图3所示，输入部3配置于框架2的下侧框架21之上，并且朝向Y轴方向上的负侧以圆管状突出。由此，能够将输入部3连接于无尘室100内。而且，通过使吸引部5A工作，能够经由输入部3输入无尘室100内的空气AR1。另外，输入部3的形状并不只限定于圆管状。
另外，关于输入部3的配置数量，在图2所示的结构中为四个，但是并不只限于此，也可以为一个、两个、三个或五个以上。并且，在输入无尘室100内的空气AR1时，可以使用全部(四个)输入部3，也可以使用四个中的一个、两个或三个输入部3。如此，在供给装置1中，还能够选择各输入部3的使用与否。
在输入部3的下游侧连接有冷却部4。冷却部4配置于框架2的下侧框架21之上，并且冷却经由输入部3输入的空气AR1。通过该冷却，空气AR1成为空气AR2。
冷却部4具有：冷却线圈41，供制冷剂(未图示)通过；及控制部(制冷机)42，控制制冷剂向冷却线圈41的供给量或供给速度等。
冷却线圈41由卷绕成线圈状的管体(未图示)构成。而且，通过使空气AR1与有制冷剂通过的状态的管体接触，空气AR1被冷却而成为空气AR2。并且，通过控制部42能够调节冷却线圈41的冷却能力，即，能够调节对空气AR1的冷却程度。
在冷却线圈41的下游侧(即，X轴方向上的正侧)连接有吸引部5A。吸引部5A也与冷却部4同样配置于框架2的下侧框架21之上。吸引部5A能够将输入无尘室100内的空气AR1的吸引力施加于输入部3，并使空气AR1继续流向下游侧。
吸引部5A具有基于通电进行旋转的风扇51。通过使该风扇51旋转，能够强制性地使空气AR1或空气AR1被冷却而成的空气AR2顺畅地从上游侧(冷却部4侧)流向下游侧(除湿部7侧)。另外，虽然取决于风扇51的转速，风扇51有时也可以进一步对空气AR2进行冷却及除湿。
在吸引部5A的下游侧(即，Z轴方向上的正侧)连接有分支部6。分支部6配置于框架2的上侧框架22之上，且使空气AR2朝向彼此不同的两个方向分支。以下，将从分支部6分支后的空气AR2中的一个分支空气AR2称为“空气AR2-1”，将另一个分支空气AR2称为“空气AR2-2”。
在分支部6的下游侧(即，X轴方向上的负侧)连接有除湿部7。空气AR2-1及空气AR2-2均通过除湿部7。而且，空气AR2-1被除湿。另一方面，空气AR2-2用在除湿部7的除湿功能的维持上。
如图6所示，除湿部7具有吸附水分的吸附材料71和容纳吸附材料71的壳体72。
吸附材料71呈圆柱状或圆板状，且配置成其中心轴与X轴方向平行。吸附材料71例如含有硅胶或沸石等，在空气AR2-1通过后述的吸附材料71的除湿区域711时，能够吸附空气AR2-1中所包含的水分。由此，能够对空气AR2-1进行除湿。通过该除湿，空气AR2-1成为空气AR3。
壳体72将吸附材料71支承为能够向图6中的逆时针方向(箭头α71)旋转。并且，壳体72具有：圆形开口部73，分别朝向X轴方向上的正侧和负侧开口，并且暴露有吸附材料71；及肋74，将开口部73分隔成三个区域。将被肋74分隔的开口部73的各区域从图6中的下侧区域朝向逆时针方向依次称为“第1区域731”、“第2区域733”及“第3区域732”。
而且，吸附材料71根据旋转角度而到达第1区域731～第3区域732中的任一区域。吸附材料71的到达第1区域731的部分成为对空气AR2-1进行除湿的除湿区域711。关于吸附材料71的到达第2区域733的部分，被第2加热部10B加热而成的空气AR5通过再生区域713，由此吸附材料71内的水分被蒸发，吸附材料71的除湿功能得以再生。吸附材料71的到达第3区域732的部分成为基于空气AR2-2的通过而冷却吸附材料71的预冷区域712。
如此，即使吸附材料71吸附水分导致除湿功能下降，除湿部7也能够利用被第2加热部10B加热的空气AR5而使被吸附材料71吸附的水分蒸发掉。由此，除湿部7的除湿功能得以再生，能够再次进行除湿，由此，能够稳定地反复进行除湿。
在除湿部7的除湿区域711的下游侧(即，X轴方向上的负侧)连接有供给部8。供给部8的与除湿部7相反的一侧与无尘室100内连接。该供给部8配置于框架2的上侧框架22之上。并且，在供给部8内配置有由基于通电而发热的加热器构成的第1加热部10A。被除湿部7除湿后的空气AR3通过供给部8的内部的同时被第1加热部10A加热而成为空气AR4。空气AR4供给至无尘室100内。空气AR4为以使露点温度成为-20度以下的方式供给的低湿空气。如此，供给装置1能够将调节了湿度及温度的空气AR4迅速且稳定地供给至无尘室100内。
如图7所示，供给部8由空气AR4(空气AR3)能够通过的箱状的空心导管81构成。另外，导管81的横截面形状在图7所示的结构中为四边形，但是并不只限于此。
在本实施方式中，导管81具有面朝X轴方向上的正侧的外表面811、面朝X轴方向上的负侧的外表面812、面朝Z轴方向上的正侧的外表面813、面朝Z轴方向上的负侧的外表面814及面朝Y轴方向上的正侧的外表面815。而且，如图2～图4所示，所有外表面811～外表面815的一部分或整体作为供给装置1的框体20的一部分而发挥功能，即，兼作框体20的一部分(作为框体20的一部分)。由此，例如能够将作为供给部8而发挥功能的导管81配置在以往可能会成为死区的空间内从而填补该空间，即，能够有效地利用死区。这种结构有助于供给装置1的小型化。
导管81具有：导管主体82，由金属材料制成；及绝热层83，配置于导管主体82的外侧且由绝热材料构成。由此，能够防止通过导管81(即，供给部8)的空气AR4的温度发生变化的同时将该空气AR4供给至无尘室100内。
作为构成导管主体82的金属材料，其并不受特别限定，例如，可以使用铝或不锈钢等各种金属材料。作为构成绝热层83的绝热材料，其并不受特别限定，例如，可以使用玻璃棉或岩绵等各种绝热材料。
如图5所示，在除湿部7的预冷区域712的下游侧(即，X轴方向上的负侧)连接有中继部9。中继部9的与预冷区域712相反的一侧与除湿部7的再生区域713连接。中继部9配置于框架2的上侧框架22之上。并且，在中继部9内配置有由基于通电而发热的加热器构成的第2加热部10B。这样的中继部9为经由分支部6分支的空气AR2-2依次经过除湿部7及第2加热部10B后再次到达除湿部7(即返回到除湿部7为止)的流路。空气AR2-2通过中继部9内的同时被第2加热部10B加热而成为空气AR5。空气AR5通过除湿部7的再生区域713从而使吸附材料71中的水分蒸发以使其干燥。由此，在再生区域713中，除湿功能得以再生。
如图8所示，中继部9由空气AR2-2(空气AR5)能够通过的箱状的空心导管91构成。另外，导管91的横截面形状在图8所示的结构中为四边形，但是并不只限于此。并且，如图5所示，导管91在X轴方向上的负侧具有使空气AR2-2在通过导管91的期间转换方向的方向转换部94。
在本实施方式中，导管91具有面朝Y轴方向上的正侧的外表面911、面朝Y轴方向上的负侧的外表面912、面朝Z轴方向上的正侧的外表面913、面对Z轴方向上的负侧的外表面914及面朝X轴方向上的负侧的外表面915。而且，如图2～图4所示，外表面911～外表面915中的外表面911、外表面912、外表面913及外表面915的一部分或整体作为供给装置1的框体20的一部分而发挥功能。由此，与上述同样，例如能够将作为中继部9而发挥功能的导管91配置在以往可能会成为死区的空间内从而填补该空间，即，能够有效地利用死区。由此，与导管81结合而能够进一步实现供给装置1的小型化。
导管91具有：导管主体92，由金属材料制成；及绝热层93，配置于导管主体92的外侧且由绝热材料构成。由此，能够防止通过中继部9的空气AR5的温度变化及对导管91的温度影响的同时将该空气AR5送入再生区域713。由此，能够利用空气AR5使处于再生区域713中的吸附材料71充分地干燥。
在除湿部7的再生区域713的下游侧(即，X轴方向上的正侧)连接有排出部5B。排出部5B配置于框架2的上侧框架22之上。排出部5B能够将使空气AR5朝向外部排出的排出力施加于排出部5B的上游侧。
排出部5B具有基于通电进行旋转的风扇52。通过该风扇52的旋转，能够强制性地使空气AR5顺畅地流向排出方向(即，下游侧)。
如上所述，供给装置1构成为小型化的结构。而且，优选地，能够将供给装置1的俯视时的最大长度缩小至2000mm以下。尤其优选地，能够将供给装置1的X轴方向上的总长度LX缩小至2000mm以下。并且，优选地，能够将供给装置1的Y轴方向上的宽度LY缩小至例如总长度LX的50％以上且75％以下。通过上述大小，能够实现地面200上的供给装置1的设置空间(设置面积)的省空间化。
如上所述，框架2构成为具有下侧框架21(即，下层)和上侧框架22(即，上层)的双层结构。而且，输入部3、冷却部4及吸引部5A配置在下侧框架21之上。并且，分支部6、除湿部7、供给部8、中继部9、第1加热部10A、第2加热部10B及排出部5B配置在上侧框架22之上。通过采用这样的双层结构，能够实现供给装置1的省空间化，并且地面200上的载置状态变得稳定。
以上，根据附图所示的实施方式对本发明的低湿空气供给装置进行了说明，但是本发明并不只限于此，构成低湿空气供给装置的各部分也可以替换成能够发挥相同功能的任意结构。并且，也可以追加设置任意结构物。
并且，在低湿空气供给装置1中，供给部8由导管81构成，中继部9由导管91构成，但是，输入部3、冷却部4、吸引部5A、排出部5B、分支部6及除湿部7中的一个或多个也可以具有像供给部8及中继部9那样的导管结构。
符号说明
1-低湿空气供给装置(供给装置)，2-框架，21-下侧框架，22-上侧框架，23-腿部(调节支脚)，24-脚轮，3-输入部，4-冷却部，41-冷却线圈，42-控制部(制冷机)，5A-吸引部，5B-排出部，51-风扇，52-风扇，6-分支部，7-除湿部，71-吸附材料，711-除湿区域，712-预冷区域，713-再生区域，72-壳体，73-开口部，731-第1区域，732-第3区域，733-第2区域，74-肋，8-供给部，81-导管，811-外表面，812-外表面，813-外表面，814-外表面，815-外表面，82-导管主体，83-绝热层，9-中继部，91-导管，911-外表面，912-外表面，913-外表面，914-外表面，915-外表面，92-导管主体，93-绝热层，94-方向转换部，10A-第1加热部，10B-第2加热部，20-框体，100-无尘室，200-地面，AR1-空气，AR2-空气，AR2-1-空气，AR2-2-空气，AR3-空气，AR4-空气，AR5-空气，LX-总长度，LY-宽度，α71-箭头。

Claims (8)

1.一种低湿空气供给装置，其将低湿空气供给至干燥室内，所述低湿空气供给装置的特征在于，具备：
输入部，与所述干燥室内连接，并且输入所述干燥室内的空气；
冷却部，冷却经由所述输入部输入的空气；
除湿部，对由所述冷却部进行了冷却的空气进行除湿；及
供给部，与所述干燥室内连接，并且将由所述除湿部进行了除湿的空气供给至所述干燥室内，
所述输入部、所述冷却部、所述除湿部及所述供给部中的至少一个由空气能够通过的箱状的导管构成，
所述导管为构成所述低湿空气供给装置的最外层的框体的一部分。
2.根据权利要求1所述的低湿空气供给装置，其特征在于，
还具备第1加热部，所述第1加热部配置于所述导管内并且对通过所述导管的空气进行加热。
3.根据权利要求2所述的低湿空气供给装置，其特征在于，具备：
分支部，使由所述冷却部进行了冷却的空气朝向与所述除湿部不同的方向分支；及
第2加热部，对经由所述分支部分支后的空气进行加热，
所述除湿部具有吸附由所述冷却部进行了冷却的空气中所包含的水分的吸附材料，在所述吸附材料吸附了水分时，利用被第2加热部加热的空气使被所述吸附材料吸附的水分蒸发，由此能够进行再除湿。
4.根据权利要求3所述的低湿空气供给装置，其特征在于，
经由所述分支部分支后的空气经过所述第2加热部后到达所述除湿部为止的流路由所述导管构成。
5.根据权利要求1至4中任一项所述的低湿空气供给装置，其特征在于，
所述导管在其外侧具有由绝热材料构成的绝热层。
6.根据权利要求1至5中任一项所述的低湿空气供给装置，其特征在于，
所述低湿空气供给装置构成为多层结构，所述多层结构具有：
下层，配置有所述输入部及所述冷却部；及
上层，位于所述下层的上侧，并且配置有所述除湿部及所述供给部。
7.根据权利要求6所述的低湿空气供给装置，其特征在于，
还具备风扇，所述风扇配置于所述冷却部与所述除湿部之间并且使空气强制性地从所述冷却部侧流向所述除湿部侧，
所述风扇配置于所述下层。
8.根据权利要求1至7中任一项所述的低湿空气供给装置，其特征在于，
所述低湿空气供给装置的俯视时的最大长度为2000mm以下。
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CN104048371A (zh) * 2014-02-13 2014-09-17 深圳市优利美科技有限公司 节能除湿机及其除湿方法
WO2016022056A1 (en) * 2014-08-05 2016-02-11 Corroventa Avfuktning Ab Method and device for dehumidification
CN106288055A (zh) * 2016-08-30 2017-01-04 欧伏电气股份有限公司 一种小型层式结构转轮除湿机
CN108709260A (zh) * 2018-07-10 2018-10-26 深圳市优利美科技有限公司 可循环再生空气的节能除湿机

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