CN1128652C - 包含高工作量的物理吸附剂的流体贮藏和分送系统 - Google Patents

包含高工作量的物理吸附剂的流体贮藏和分送系统 Download PDF

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Publication number
CN1128652C
CN1128652C CN97190176A CN97190176A CN1128652C CN 1128652 C CN1128652 C CN 1128652C CN 97190176 A CN97190176 A CN 97190176A CN 97190176 A CN97190176 A CN 97190176A CN 1128652 C CN1128652 C CN 1128652C
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CN
China
Prior art keywords
fluid
storage
adsorbent
carbon
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN97190176A
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English (en)
Chinese (zh)
Other versions
CN1181716A (zh
Inventor
格伦·M·汤姆
W·卡尔·奥兰德
詹姆斯·V·麦克曼那斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/650,634 external-priority patent/US5704965A/en
Priority claimed from US08/650,633 external-priority patent/US5704967A/en
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of CN1181716A publication Critical patent/CN1181716A/zh
Application granted granted Critical
Publication of CN1128652C publication Critical patent/CN1128652C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F17C7/02—Discharging liquefied gases
    • F17C7/04—Discharging liquefied gases with change of state, e.g. vaporisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/304—Linear dimensions, e.g. particle shape, diameter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • External Artificial Organs (AREA)
  • Separation Of Gases By Adsorption (AREA)
CN97190176A 1996-05-20 1997-05-20 包含高工作量的物理吸附剂的流体贮藏和分送系统 Expired - Lifetime CN1128652C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US08/650,634 US5704965A (en) 1994-10-13 1996-05-20 Fluid storage and delivery system utilizing carbon sorbent medium
US08/650,634 1996-05-20
US08/650,633 US5704967A (en) 1995-10-13 1996-05-20 Fluid storage and delivery system comprising high work capacity physical sorbent
US08/650,633 1996-05-20

Publications (2)

Publication Number Publication Date
CN1181716A CN1181716A (zh) 1998-05-13
CN1128652C true CN1128652C (zh) 2003-11-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN97190176A Expired - Lifetime CN1128652C (zh) 1996-05-20 1997-05-20 包含高工作量的物理吸附剂的流体贮藏和分送系统

Country Status (9)

Country Link
EP (1) EP0854749B1 (https=)
JP (2) JPH11511233A (https=)
CN (1) CN1128652C (https=)
AT (1) ATE230294T1 (https=)
AU (1) AU713214B2 (https=)
CA (1) CA2225221C (https=)
DE (1) DE69718137T2 (https=)
TW (1) TW434038B (https=)
WO (1) WO1997044118A1 (https=)

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US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
WO1999041010A1 (fr) * 1998-02-17 1999-08-19 Kanebo, Limited Carbone active pour adsorption et stockage d'un compose gazeux
US6101816A (en) † 1998-04-28 2000-08-15 Advanced Technology Materials, Inc. Fluid storage and dispensing system
US6277342B1 (en) * 1999-08-23 2001-08-21 Air Products And Chemicals, Inc. Storage and safe delivery of hazardous specialty gases by acid/base reactions with ionic polymers
US6716271B1 (en) * 2002-10-29 2004-04-06 Advanced Technology Materials, Inc. Apparatus and method for inhibiting decomposition of germane
US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US7494530B2 (en) 2002-12-10 2009-02-24 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US6743278B1 (en) * 2002-12-10 2004-06-01 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US8002880B2 (en) 2002-12-10 2011-08-23 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US7648682B2 (en) * 2004-07-08 2010-01-19 Air Products And Chemicals, Inc. Wick systems for complexed gas technology
DE102006020847A1 (de) * 2006-05-04 2007-11-08 Robert Bosch Gmbh Verfahren und Vorrichtung zur Reinigung eines Gasspeichers
US8852303B2 (en) * 2009-12-21 2014-10-07 Southern Company Services, Inc. High pressure feeder and method of operating to feed granular or fine materials
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
KR20130098284A (ko) 2010-06-25 2013-09-04 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 제논 및 다른 고부가가치 화합물의 회수
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
KR20140010390A (ko) 2011-01-31 2014-01-24 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 Co2 포집을 위한 유용성을 갖는 탄소 열분해물 흡착제 및 그의 제조 방법과 사용 방법
EP2855009A4 (en) * 2012-05-29 2016-04-13 Entegris Inc CARBON ADSORBENT FOR THE REMOVAL OF HYDROGEN SULFIDE FROM GAS, AND REGENERATION OF ADSORBENT
US9186650B2 (en) 2013-04-05 2015-11-17 Entegris, Inc. Adsorbent having utility for CO2 capture from gas mixtures
KR102179776B1 (ko) * 2013-08-05 2020-11-18 누맷 테크놀로지스, 인코포레이티드 전자 가스 저장을 위한 금속 유기 프레임워크
CN104267133B (zh) * 2014-09-02 2016-09-14 中国工程物理研究院材料研究所 一种测定气固表面吸附等温线的方法
KR101952698B1 (ko) 2014-10-27 2019-02-28 엔테그리스, 아이엔씨. 이온 주입 방법 및 장치
KR102301071B1 (ko) * 2014-12-04 2021-09-14 누맷 테크놀로지스, 인코포레이티드 전자 가스의 저감 및 정제 및 탄화수소 스트림으로부터의 수은제거를 위한 다공성 중합체
RU173726U1 (ru) * 2016-12-21 2017-09-07 федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технический университет имени Н.Э. Баумана (национальный исследовательский университет)" (МГТУ им. Н.Э. Баумана) Устройство для хранения и подачи природного газа потребителю
EP3431859A1 (de) * 2017-07-21 2019-01-23 Covestro Deutschland AG Verfahren zur leckage-sicheren speicherung von verflüssigtem chlor
CA3081437A1 (en) * 2017-11-03 2019-05-09 Basf Corporation Arsine adsorbents
SG11202004314VA (en) * 2017-11-17 2020-06-29 Rasirc Inc Method, system, and device for storage and delivery of process gas from a substrate
US10837603B2 (en) * 2018-03-06 2020-11-17 Entegris, Inc. Gas supply vessel
CN112689728B (zh) 2018-09-13 2022-12-13 恩特格里斯公司 基于吸附剂的机械调节式气体存储及输送容器
CN109827864B (zh) * 2019-03-06 2021-04-13 苏州市环境科学研究所 土壤中单一污染源voc热脱附动力学试验方法
JP7360477B2 (ja) * 2019-05-24 2023-10-12 インテグリス・インコーポレーテッド 有機金属蒸気を吸着する方法およびシステム
US11577217B2 (en) * 2019-12-12 2023-02-14 Praxair Technology, Inc. Dopant fluid storage and dispensing systems utilizing high performance, structurally modified particulate carbon adsorbents
CN112591711B (zh) * 2020-12-16 2022-05-20 浙江天采云集科技股份有限公司 一种HF/HCl混合气体高纯度高收率的FTrPSA分离与净化提取方法
CN112744788B (zh) * 2020-12-16 2022-09-23 四川天采科技有限责任公司 一种氟硅酸法生产无水HF精制的FTrPSA深度脱水除杂的分离与净化方法
WO2023042302A1 (ja) * 2021-09-15 2023-03-23 カンケンテクノ株式会社 酸化エチレンガスの除去方法及びそれを用いた酸化エチレンガス除去システム

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Also Published As

Publication number Publication date
EP0854749B1 (en) 2003-01-02
DE69718137T2 (de) 2003-10-09
CN1181716A (zh) 1998-05-13
EP0854749A1 (en) 1998-07-29
CA2225221A1 (en) 1997-11-27
TW434038B (en) 2001-05-16
AU3457297A (en) 1997-12-09
ATE230294T1 (de) 2003-01-15
JPH11511233A (ja) 1999-09-28
EP0854749A4 (https=) 1998-07-29
DE69718137D1 (de) 2003-02-06
AU713214B2 (en) 1999-11-25
WO1997044118A1 (en) 1997-11-27
CA2225221C (en) 2009-01-06
JP2008196689A (ja) 2008-08-28

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C06 Publication
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C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: ANGES INC.

Free format text: FORMER OWNER: ADVANCED TECHNOLOGY MATERIALS, INC.

Effective date: 20150519

C41 Transfer of patent application or patent right or utility model
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Effective date of registration: 20150519

Address after: Massachusetts, USA

Patentee after: MYKROLIS Corp.

Address before: American Connecticut

Patentee before: Advanced Technology Materials, Inc.

C56 Change in the name or address of the patentee
CP01 Change in the name or title of a patent holder

Address after: Massachusetts, USA

Patentee after: Entergris Co.

Address before: Massachusetts, USA

Patentee before: MYKROLIS Corp.

CX01 Expiry of patent term

Granted publication date: 20031126

CX01 Expiry of patent term