JP7360477B2 - 有機金属蒸気を吸着する方法およびシステム - Google Patents
有機金属蒸気を吸着する方法およびシステム Download PDFInfo
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Description
本出願は、米国特許法第119条の下で、2019年5月24日出願の米国仮特許出願第62/852,506号の利益を主張するものであり、その開示をすべての目的のためにその全体を参照により本明細書に組み込む。
Mx/n[(AlO2)x(SiO2)y]z・nH2O
[式中、xおよびyは、y/xが1以上の整数であり、nは、陽イオンMの価数であり、zは、各単位セル内の水分子の数である。]
として表されるアルカリまたはアルカリ土類元素のマイクロ多孔性結晶性アルミノケイ酸塩として記載されることがある。
Claims (14)
- 有機金属蒸気、第1のサイズを有する第1の粒子、第2のサイズを有する第2の粒子、および非有機金属蒸気を含むガス混合物からガス状有機金属蒸気を除去する方法であって、方法が、
ガス混合物を第1の粒子フィルターに通して、第1のサイズを有する第1の粒子を実質上除去することと、
ガス混合物を第1の粒子フィルターに通した後、ガス混合物を固体吸着剤に通し、かつ有機金属蒸気を固体吸着剤に吸着させることと、
有機金属蒸気を固体吸着剤に吸着させた後、ガス混合物を第2の粒子フィルターに通して、第1のサイズより小さい第2のサイズを有する第2の粒子を実質上除去することと、
を含む、方法。 - 非有機金属蒸気が、ガス状アンモニア、ガス状水素、ガス状窒素、およびそれらの組合せのうちの1つまたは複数を含む、請求項1に記載の方法。
- 有機金属蒸気が、トリメチルガリウムである、請求項1に記載の方法。
- 固体吸着剤が、炭素吸着剤、ゼオライト、シリカ、およびアルミナから選択される、請求項1に記載の方法。
- 第1の粒子が、有機金属粒子を含む、請求項1に記載の方法。
- 第2の粒子が、有機金属粒子を含む、請求項1に記載の方法。
- 有機金属蒸気、第1のサイズを有する第1の粒子、第2のサイズを有する第2の粒子、および非有機金属蒸気を含むガス混合物をろ過する方法であって、
ガス混合物を熱交換器に通すことによってガス混合物の温度を低下させて、冷ガス混合物を生成することと、
冷ガス混合物を第1の粒子フィルターに通して、第1のサイズを有する第1の粒子を実質上除去することと、
第1のサイズを有する第1の粒子が実質上除去された冷ガス混合物を固体吸着剤に通して、有機金属蒸気を固体吸着剤に吸着させることと、
第1のサイズを有する第1の粒子が実質上除去された冷ガス混合物を固体吸着剤に通した後、第1のサイズを有する第1の粒子が実質上除去された冷ガス混合物を第2の粒子フィルターに通して、第1のサイズより小さい第2のサイズを有する第2の粒子を実質上除去することと、を含む、方法。 - 非有機金属蒸気が、ガス状アンモニア、ガス状水素、ガス状窒素、およびそれらの組合せから選択される、請求項7に記載の方法。
- ガス混合物の温度を低下させる工程が、熱ガス混合物を、冷却要素中を流れる冷却液を有する該冷却要素を含む熱交換器に通すことを含み、冷却液が、摂氏30度未満の入口温度を有する、請求項7に記載の方法。
- 熱交換器を振動させて、有機金属材料が熱交換器の内面に集まるのを防ぐことをさらに含む、請求項7に記載の方法。
- ガス混合物が、
15~40体積パーセントのガス状アンモニウム、
0~60体積パーセントのガス状水素、
0~70体積パーセントのガス状窒素、および
有機金属蒸気
を含む、請求項7に記載の方法。 - 有機金属蒸気、粒子、および非有機金属蒸気を含むガス混合物をろ過するシステムであって、システムが、
熱交換器、
第1の粒子フィルター、
固体吸着剤、および
第2の粒子フィルター
を含み、
システムが、ガス混合物の流れを熱交換器に通してガス混合物を冷却し、第1の粒子フィルターに通してガス混合物から第1のサイズを有する第1の粒子を除去し、固体吸着剤に通してガス混合物から有機金属蒸気を除去し、第2の粒子フィルターに通して第1のサイズより小さい第2のサイズを有する第2の粒子を除去することができるように配置された、システム。 - 有機金属蒸気、粒子、および非有機金属蒸気を含むガス混合物をろ過する方法であって、
ガス混合物を熱交換器に通すことによってガス混合物の温度を低下させて、冷ガス混合物を生成することと、
熱交換器を振動させて、有機金属材料が熱交換器の内面に集まるのを防ぐことと、
冷ガス混合物を粒子フィルターに通して、粒子を実質上除去することと、
粒子が実質上除去された冷ガス混合物を固体吸着剤に通して、有機金属蒸気を固体吸着剤に吸着させることと
を含む、方法。 - 有機金属蒸気、粒子、および非有機金属蒸気を含むガス混合物をろ過するシステムであって、システムが、
熱交換器、
粒子フィルター、および
固体吸着剤
を含み、
システムが、ガス混合物の流れを熱交換器に通してガス混合物を冷却し、熱交換器を振動させて、有機金属材料が熱交換器の内面に集まるのを防ぎ、さらに、熱交換器によって冷却されたガス混合物の流れを粒子フィルターに通してガス混合物から粒子を除去し、固体吸着剤に通してガス混合物から有機金属蒸気を除去することができるように配置された、システム。
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US201962852506P | 2019-05-24 | 2019-05-24 | |
US62/852,506 | 2019-05-24 | ||
PCT/US2020/033841 WO2020242863A1 (en) | 2019-05-24 | 2020-05-20 | Methods and systems for adsorbing organometallic vapor |
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TWI798553B (zh) | 2023-04-11 |
US11712653B2 (en) | 2023-08-01 |
US20200368669A1 (en) | 2020-11-26 |
WO2020242863A1 (en) | 2020-12-03 |
TW202102294A (zh) | 2021-01-16 |
US20230405510A1 (en) | 2023-12-21 |
JP2022533450A (ja) | 2022-07-22 |
EP3976231A4 (en) | 2023-10-11 |
CN113939362A (zh) | 2022-01-14 |
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