JP2022533450A - 有機金属蒸気を吸着する方法およびシステム - Google Patents
有機金属蒸気を吸着する方法およびシステム Download PDFInfo
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- JP2022533450A JP2022533450A JP2021569549A JP2021569549A JP2022533450A JP 2022533450 A JP2022533450 A JP 2022533450A JP 2021569549 A JP2021569549 A JP 2021569549A JP 2021569549 A JP2021569549 A JP 2021569549A JP 2022533450 A JP2022533450 A JP 2022533450A
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- Prior art keywords
- coil
- gas mixture
- heat exchanger
- hollow
- organometallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 125000002524 organometallic group Chemical group 0.000 title claims abstract description 114
- 238000000034 method Methods 0.000 title claims abstract description 75
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 62
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 36
- 229910021529 ammonia Inorganic materials 0.000 claims description 30
- 150000002902 organometallic compounds Chemical class 0.000 claims description 24
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- 229910052739 hydrogen Inorganic materials 0.000 claims description 17
- 229910052757 nitrogen Inorganic materials 0.000 claims description 17
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- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical group C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 claims description 10
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- 238000010586 diagram Methods 0.000 description 1
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- 125000005842 heteroatom Chemical group 0.000 description 1
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- 239000011159 matrix material Substances 0.000 description 1
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- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
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- 150000004767 nitrides Chemical class 0.000 description 1
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- 125000001190 organyl group Chemical group 0.000 description 1
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- 238000012545 processing Methods 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- 235000012239 silicon dioxide Nutrition 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
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- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- PORFVJURJXKREL-UHFFFAOYSA-N trimethylstibine Chemical compound C[Sb](C)C PORFVJURJXKREL-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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- 239000010937 tungsten Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
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Abstract
Description
本出願は、米国特許法第119条の下で、2019年5月24日出願の米国仮特許出願第62/852,506号の利益を主張するものであり、その開示をすべての目的のためにその全体を参照により本明細書に組み込む。
Mx/n[(AlO2)x(SiO2)y]z・nH2O
[式中、xおよびyは、y/xが1以上の整数であり、nは、陽イオンMの価数であり、zは、各単位セル内の水分子の数である。]
として表されるアルカリまたはアルカリ土類元素のマイクロ多孔性結晶性アルミノケイ酸塩として記載されることがある。
Claims (22)
- 有機金属蒸気および非有機金属蒸気を含有するガス混合物からガス状有機金属蒸気を除去する方法であって、ガス混合物を固体吸着剤に通すことと、有機金属蒸気を固体吸着剤に吸着させることとを含む、方法。
- ガス混合物が、周囲流れ圧力で、摂氏0~50度の範囲の温度で固体吸着剤を通る、請求項1に記載の方法。
- 非有機金属蒸気が、ガス状アンモニア、ガス状水素、ガス状窒素、およびそれらの組合せのうちの1つまたは複数を含む、請求項1または2に記載の方法。
- 有機金属蒸気が、ガリウムを含む、請求項1から3のいずれか一項に記載の方法。
- 有機金属蒸気が、トリメチルガリウムである、請求項4に記載の方法。
- 固体吸着剤が、炭素吸着剤、ゼオライト、シリカ、およびアルミナから選択される、請求項1から5のいずれか一項に記載の方法。
- 固体吸着剤が、1グラム当たり100~1500平方メートルの範囲の表面積を有する、請求項1から6のいずれか一項に記載の方法。
- 固体吸着剤が、3~8オングストロームの範囲の平均細孔サイズを有する、請求項1から7のいずれか一項に記載の方法。
- 有機金属蒸気、粒子、および非有機金属蒸気を含有するガス混合物をろ過する方法であって、方法が、
ガス混合物を熱交換器に通すことによってガス混合物の温度を低下させて、冷ガス混合物を生成することによってことと;
冷ガス混合物を粒子フィルターに通して、粒子を除去することと;
冷ガス混合物を固体吸着剤に通して、有機金属蒸気を吸着剤に吸着させることと
を含む、方法。 - ガス混合物が、ガス状アンモニア、ガス状水素、ガス状窒素、およびそれらの組合せから選択される非有機金属蒸気を含む、請求項9に記載の方法。
- ガス混合物が、摂氏50度超の温度を有する、請求項9または10に記載の方法。
- ガス混合物の温度を摂氏0~40度の範囲の温度に低下させることをさらに含む、請求項11に記載の方法。
- ガス混合物の温度を低下させる工程が、熱ガス混合物を、冷却要素中を流れる冷却液を有する該冷却要素を含む熱交換器に通すことを含み、冷却液が、摂氏30度未満の入口温度を有する、請求項9から12のいずれか一項に記載の方法。
- 熱交換器が、
本体入口、本体出口、および本体内容積部を含む中空熱交換器本体と;
熱交換器本体内容積部内に位置し、かつコイル入口、コイル出口、およびコイル入口とコイル出口との間の複数のコイルターンを含む中空コイル本体と
を含む向流コイル型熱交換器であり、
ガス混合物が、本体入口から中空熱交換器本体に入り、内容積部を通って中空コイルの外面を通過し、本体出口から中空熱交換器本体を出、
冷却液が、コイル入口から中空コイル本体に入り、中空熱交換器本体を通るガス混合物の流れの方向とは逆の方向に中空コイル本体を流れ、コイル出口から中空コイル本体を出る、請求項9から13のいずれか一項に記載の方法。 - 熱交換器が、
熱交換器本体内容積部内に位置し、かつ第2のコイル入口、第2のコイル出口、および第2のコイル入口と第2のコイル出口との間の複数の第2のコイルターンを含む第2の中空コイル本体を含み:
冷却液が、第2のコイル入口から第2の中空コイル本体に入り、中空熱交換器本体を通る熱ガス混合物の流れの方向とは逆の方向に第2の中空コイル本体を流れ、第2のコイル出口から第2の中空コイル本体を出る、請求項16に記載の方法。 - 熱交換器を振動させて、有機金属材料が熱交換器の内面に集まるのを防ぐことをさらに含む、請求項9から15のいずれか一項に記載の方法。
- 熱ガス混合物が、
15~40体積パーセントのガス状アンモニウム、
0~60体積パーセントのガス状水素、
0~70体積パーセントのガス状窒素、および
有機金属化合物
を含む、請求項9から16のいずれか一項に記載の方法。 - 有機金属化合物が、トリメチルガリウムである、請求項17に記載の方法。
- ガス混合物が、アンモニアを含み:
冷ガス混合物から粒子を除去した後および冷ガス混合物から有機金属蒸気を除去した後、冷ガス混合物からアンモニアを回収することをさらに含む、請求項9から18のいずれか一項に記載の方法。 - 有機金属蒸気、粒子、および非有機金属蒸気を含有するガス混合物をろ過するシステムであって:ガス混合物の流れを熱交換器に通してガス混合物を冷却し、粒子フィルターに通してガス混合物から粒子を除去し、固体吸着剤に通してガス混合物から有機金属蒸気を除去することができるように配置されている、熱交換器、粒子フィルター、および固体吸着剤を含む、システム。
- 熱交換器が、
本体入口、本体出口、および本体内容積部を含む中空熱交換器本体と、
熱交換器本体内容積部内に位置し、かつコイル入口、コイル出口、およびコイル入口とコイル出口との間の複数のコイルターンを含む中空コイル本体と
を含む向流コイル型熱交換器であり、
ガス混合物が、本体入口から中空熱交換器本体に入り、内容積部を通って中空コイルの外面を通過し、本体出口から中空熱交換器本体を出、
冷却液が、コイル入口から中空コイル本体に入り、中空熱交換器本体を通るガス混合物の流れの方向とは逆の方向に中空コイル本体を流れ、コイル出口から中空コイル本体を出る、請求項20に記載のシステム。 - 熱交換器が、
熱交換器本体内容積部内に位置し、かつ第2のコイル入口、第2のコイル出口、および第2のコイル入口と第2のコイル出口との間の複数の第2のコイルターンを含む第2の中空コイル本体を含み、
冷却液が、第2のコイル入口から第2の中空コイル本体に入り、中空熱交換器本体を通るガス混合物の流れの方向とは逆の方向に第2の中空コイル本体を流れ、第2のコイル出口から第2の中空コイル本体を出る、請求項21に記載のシステム。
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0291192A (ja) * | 1988-08-16 | 1990-03-30 | Uhde Gmbh | 固体ガス化より得られた粗ガスの精製方法および装置 |
JPH07323211A (ja) * | 1994-05-30 | 1995-12-12 | Kanken Techno Kk | 半導体製造排ガス除害方法とその装置 |
JPH10503268A (ja) * | 1994-10-13 | 1998-03-24 | アドバンスド.テクノロジー.マテリアルス.インコーポレイテッド | 気体化合物の貯蔵と送出のシステム |
JPH10238422A (ja) * | 1997-02-26 | 1998-09-08 | Suzuki Motor Corp | 燃料蒸発ガス制御装置 |
JP2001353420A (ja) * | 2000-04-10 | 2001-12-25 | Osaka Oxygen Ind Ltd | 化合物半導体の製造装置から生ずる排気ガスから半導体特殊材料ガスの回収 |
US20060011064A1 (en) * | 2002-12-10 | 2006-01-19 | Carruthers J D | Gas storage and dispensing system with monolithic carbon adsorbent |
JP2013245131A (ja) * | 2012-05-25 | 2013-12-09 | Japan Pionics Co Ltd | アンモニアの回収方法及びそれを用いたアンモニアの再利用方法 |
JP2014169383A (ja) * | 2013-03-04 | 2014-09-18 | Osaka Gas Co Ltd | メタンガス濃縮方法 |
JP2015000842A (ja) * | 2013-06-18 | 2015-01-05 | 日本パイオニクス株式会社 | アンモニアの回収方法及びそれを用いたアンモニアの再利用方法 |
JP2017164683A (ja) * | 2016-03-16 | 2017-09-21 | 株式会社Ihi | 二酸化炭素の回収方法及び回収装置 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1398205A (en) | 1919-05-16 | 1921-11-22 | Charles W Sirch | Filter |
US5037624A (en) * | 1987-03-24 | 1991-08-06 | Advanced Technology Materials Inc. | Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements |
US6132492A (en) | 1994-10-13 | 2000-10-17 | Advanced Technology Materials, Inc. | Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same |
US5581903A (en) | 1994-11-22 | 1996-12-10 | Botich; Leon A. | Apparatus for heating purge gas and transmitting microwave energy for desiccant regeneration |
EP0854749B1 (en) * | 1996-05-20 | 2003-01-02 | Advanced Technology Materials, Inc. | Fluid storage and delivery system comprising high work capacity physical sorbent |
US5980608A (en) | 1998-01-07 | 1999-11-09 | Advanced Technology Materials, Inc. | Throughflow gas storage and dispensing system |
US6391385B1 (en) | 1999-10-18 | 2002-05-21 | Advanced Technology Materials, Inc. | Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents |
US6500487B1 (en) * | 1999-10-18 | 2002-12-31 | Advanced Technology Materials, Inc | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions |
EP1176120A1 (en) * | 2000-07-28 | 2002-01-30 | Japan Pionics Co., Ltd. | Process for purifying ammonia |
BRPI0516136A (pt) * | 2004-09-27 | 2008-08-26 | Gallium Entpr Pty Ltd | método e equipamento para desenvolvimento de uma pelìcula de nitreto de um metal do grupo (iii) e a pelìcula de nitreto do metal do grupo (iii) |
US7314506B2 (en) * | 2004-10-25 | 2008-01-01 | Matheson Tri-Gas, Inc. | Fluid purification system with low temperature purifier |
JP2008013406A (ja) * | 2006-07-06 | 2008-01-24 | Air Water Inc | アンモニアの回収方法、アンモニアの再利用方法、アンモニアの回収装置、およびアンモニアの再利用装置 |
FR2949553B1 (fr) * | 2009-09-02 | 2013-01-11 | Air Liquide | Procede de production d'au moins un gaz pauvre en co2 et d'un ou plusieurs fluides riches en co2 |
US8500887B2 (en) * | 2010-03-25 | 2013-08-06 | Exxonmobil Research And Engineering Company | Method of protecting a solid adsorbent and a protected solid adsorbent |
KR101211625B1 (ko) | 2010-11-03 | 2012-12-12 | 코아텍주식회사 | 습식 스크러버와 촉매 반응 스크러버를 이용한 엘이디 제조공정 배출가스의 연속 제거 방법 및 장치 |
US8409895B2 (en) | 2010-12-16 | 2013-04-02 | Applied Materials, Inc. | Gallium nitride-based LED fabrication with PVD-formed aluminum nitride buffer layer |
US9073039B2 (en) | 2012-07-13 | 2015-07-07 | Adavanced Fuel Research, Inc. | Carbon sorbent for reversible ammonia sorption |
CN202893187U (zh) | 2012-11-09 | 2013-04-24 | 叶爱民 | 适用于氮化镓有机金属气相沉积设备内的尾气处理装置 |
TWI609984B (zh) | 2012-11-20 | 2018-01-01 | 賽斯瓦斯股份有限公司 | 用以回收無水氨之方法及系統 |
CN203693103U (zh) | 2014-01-23 | 2014-07-09 | 毛立波 | 一种快捷折叠式货架 |
CN108658042B (zh) | 2018-05-29 | 2019-11-08 | 四川天采科技有限责任公司 | 一种led-mocvd制程尾气全温程变压吸附全组分回收再利用方法 |
CN108744882B (zh) * | 2018-05-29 | 2021-02-26 | 浙江天采云集科技股份有限公司 | 一种led-mocvd制程废气全温程变压吸附提氨再利用的方法 |
-
2020
- 2020-05-20 US US16/879,514 patent/US11712653B2/en active Active
- 2020-05-20 EP EP20814991.4A patent/EP3976231A4/en active Pending
- 2020-05-20 JP JP2021569549A patent/JP7360477B2/ja active Active
- 2020-05-20 WO PCT/US2020/033841 patent/WO2020242863A1/en unknown
- 2020-05-20 KR KR1020217037795A patent/KR102660643B1/ko active IP Right Grant
- 2020-05-20 CN CN202080038624.6A patent/CN113939362A/zh active Pending
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-
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- 2023-07-31 US US18/228,298 patent/US20230405510A1/en active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0291192A (ja) * | 1988-08-16 | 1990-03-30 | Uhde Gmbh | 固体ガス化より得られた粗ガスの精製方法および装置 |
JPH07323211A (ja) * | 1994-05-30 | 1995-12-12 | Kanken Techno Kk | 半導体製造排ガス除害方法とその装置 |
JPH10503268A (ja) * | 1994-10-13 | 1998-03-24 | アドバンスド.テクノロジー.マテリアルス.インコーポレイテッド | 気体化合物の貯蔵と送出のシステム |
JPH10238422A (ja) * | 1997-02-26 | 1998-09-08 | Suzuki Motor Corp | 燃料蒸発ガス制御装置 |
JP2001353420A (ja) * | 2000-04-10 | 2001-12-25 | Osaka Oxygen Ind Ltd | 化合物半導体の製造装置から生ずる排気ガスから半導体特殊材料ガスの回収 |
US20060011064A1 (en) * | 2002-12-10 | 2006-01-19 | Carruthers J D | Gas storage and dispensing system with monolithic carbon adsorbent |
JP2006509974A (ja) * | 2002-12-10 | 2006-03-23 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | モノリス炭素吸着剤を備えたガス貯蔵・計量分配システム |
JP2013245131A (ja) * | 2012-05-25 | 2013-12-09 | Japan Pionics Co Ltd | アンモニアの回収方法及びそれを用いたアンモニアの再利用方法 |
JP2014169383A (ja) * | 2013-03-04 | 2014-09-18 | Osaka Gas Co Ltd | メタンガス濃縮方法 |
JP2015000842A (ja) * | 2013-06-18 | 2015-01-05 | 日本パイオニクス株式会社 | アンモニアの回収方法及びそれを用いたアンモニアの再利用方法 |
JP2017164683A (ja) * | 2016-03-16 | 2017-09-21 | 株式会社Ihi | 二酸化炭素の回収方法及び回収装置 |
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