ATE230294T1 - Flüssigkeitsbehälter und -abgabesystem mit physikalischem sorptionsmittel mit hoher kapazität - Google Patents

Flüssigkeitsbehälter und -abgabesystem mit physikalischem sorptionsmittel mit hoher kapazität

Info

Publication number
ATE230294T1
ATE230294T1 AT97930712T AT97930712T ATE230294T1 AT E230294 T1 ATE230294 T1 AT E230294T1 AT 97930712 T AT97930712 T AT 97930712T AT 97930712 T AT97930712 T AT 97930712T AT E230294 T1 ATE230294 T1 AT E230294T1
Authority
AT
Austria
Prior art keywords
sorbent
sorpent
high capacity
liquid reservoir
dispensing system
Prior art date
Application number
AT97930712T
Other languages
German (de)
English (en)
Inventor
Glenn M Tom
W Karl Olander
James V Mcmanus
Original Assignee
Advanced Tech Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/650,633 external-priority patent/US5704967A/en
Priority claimed from US08/650,634 external-priority patent/US5704965A/en
Application filed by Advanced Tech Materials filed Critical Advanced Tech Materials
Application granted granted Critical
Publication of ATE230294T1 publication Critical patent/ATE230294T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F17C7/02—Discharging liquefied gases
    • F17C7/04—Discharging liquefied gases with change of state, e.g. vaporisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/304—Linear dimensions, e.g. particle shape, diameter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Analytical Chemistry (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • External Artificial Organs (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
AT97930712T 1996-05-20 1997-05-20 Flüssigkeitsbehälter und -abgabesystem mit physikalischem sorptionsmittel mit hoher kapazität ATE230294T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/650,633 US5704967A (en) 1995-10-13 1996-05-20 Fluid storage and delivery system comprising high work capacity physical sorbent
US08/650,634 US5704965A (en) 1994-10-13 1996-05-20 Fluid storage and delivery system utilizing carbon sorbent medium
PCT/IB1997/000943 WO1997044118A1 (en) 1996-05-20 1997-05-20 Fluid storage and delivery system comprising high work capacity physical sorbent

Publications (1)

Publication Number Publication Date
ATE230294T1 true ATE230294T1 (de) 2003-01-15

Family

ID=27095914

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97930712T ATE230294T1 (de) 1996-05-20 1997-05-20 Flüssigkeitsbehälter und -abgabesystem mit physikalischem sorptionsmittel mit hoher kapazität

Country Status (9)

Country Link
EP (1) EP0854749B1 (https=)
JP (2) JPH11511233A (https=)
CN (1) CN1128652C (https=)
AT (1) ATE230294T1 (https=)
AU (1) AU713214B2 (https=)
CA (1) CA2225221C (https=)
DE (1) DE69718137T2 (https=)
TW (1) TW434038B (https=)
WO (1) WO1997044118A1 (https=)

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US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
WO1999041010A1 (fr) * 1998-02-17 1999-08-19 Kanebo, Limited Carbone active pour adsorption et stockage d'un compose gazeux
US6101816A (en) † 1998-04-28 2000-08-15 Advanced Technology Materials, Inc. Fluid storage and dispensing system
US6277342B1 (en) * 1999-08-23 2001-08-21 Air Products And Chemicals, Inc. Storage and safe delivery of hazardous specialty gases by acid/base reactions with ionic polymers
US6716271B1 (en) * 2002-10-29 2004-04-06 Advanced Technology Materials, Inc. Apparatus and method for inhibiting decomposition of germane
US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US6743278B1 (en) * 2002-12-10 2004-06-01 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US8002880B2 (en) 2002-12-10 2011-08-23 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US7494530B2 (en) 2002-12-10 2009-02-24 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US7648682B2 (en) * 2004-07-08 2010-01-19 Air Products And Chemicals, Inc. Wick systems for complexed gas technology
DE102006020847A1 (de) * 2006-05-04 2007-11-08 Robert Bosch Gmbh Verfahren und Vorrichtung zur Reinigung eines Gasspeichers
US8852303B2 (en) * 2009-12-21 2014-10-07 Southern Company Services, Inc. High pressure feeder and method of operating to feed granular or fine materials
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
KR20130098284A (ko) * 2010-06-25 2013-09-04 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 제논 및 다른 고부가가치 화합물의 회수
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
JP6085569B2 (ja) 2011-01-31 2017-02-22 インテグリス・インコーポレーテッド Ｃｏ２回収に利用される炭素熱分解生成物吸着剤並びにその製造及び使用方法
EP2855009A4 (en) * 2012-05-29 2016-04-13 Entegris Inc CARBON ADSORBENT FOR THE REMOVAL OF HYDROGEN SULFIDE FROM GAS, AND REGENERATION OF ADSORBENT
US9186650B2 (en) 2013-04-05 2015-11-17 Entegris, Inc. Adsorbent having utility for CO2 capture from gas mixtures
CN110665329B (zh) 2013-08-05 2022-05-24 纽麦特科技公司 递送用于离子注入的气体的方法
CN104267133B (zh) * 2014-09-02 2016-09-14 中国工程物理研究院材料研究所 一种测定气固表面吸附等温线的方法
KR101952698B1 (ko) 2014-10-27 2019-02-28 엔테그리스, 아이엔씨. 이온 주입 방법 및 장치
CN107107028B (zh) * 2014-12-04 2021-06-25 纽麦特科技公司 用于减少和提纯电子气体以及从烃流中除去汞的多孔聚合物
RU173726U1 (ru) * 2016-12-21 2017-09-07 федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технический университет имени Н.Э. Баумана (национальный исследовательский университет)" (МГТУ им. Н.Э. Баумана) Устройство для хранения и подачи природного газа потребителю
EP3431859A1 (de) * 2017-07-21 2019-01-23 Covestro Deutschland AG Verfahren zur leckage-sicheren speicherung von verflüssigtem chlor
US11745161B2 (en) * 2017-11-03 2023-09-05 Basf Corporation Arsine adsorbents
KR102785430B1 (ko) * 2017-11-17 2025-03-21 라시크 아이엔씨. 기재로부터의 프로세스 가스의 저장 및 전달을 위한 방법, 시스템, 및 디바이스
US10837603B2 (en) * 2018-03-06 2020-11-17 Entegris, Inc. Gas supply vessel
KR102522934B1 (ko) 2018-09-13 2023-04-17 엔테그리스, 아이엔씨. 흡착제 기반의 기계적으로 조절되는 가스 저장 및 전달 용기
CN109827864B (zh) * 2019-03-06 2021-04-13 苏州市环境科学研究所 土壤中单一污染源voc热脱附动力学试验方法
WO2020242863A1 (en) * 2019-05-24 2020-12-03 Entegris, Inc. Methods and systems for adsorbing organometallic vapor
US11577217B2 (en) * 2019-12-12 2023-02-14 Praxair Technology, Inc. Dopant fluid storage and dispensing systems utilizing high performance, structurally modified particulate carbon adsorbents
CN112744788B (zh) * 2020-12-16 2022-09-23 四川天采科技有限责任公司 一种氟硅酸法生产无水HF精制的FTrPSA深度脱水除杂的分离与净化方法
CN112591711B (zh) * 2020-12-16 2022-05-20 浙江天采云集科技股份有限公司 一种HF/HCl混合气体高纯度高收率的FTrPSA分离与净化提取方法
EP4403242A4 (en) * 2021-09-15 2025-08-13 Terumo Corp METHOD FOR REMOVING ETHYLENE OXIDE GAS, AND SYSTEM FOR REMOVING ETHYLENE OXIDE GAS USING SAME

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Also Published As

Publication number Publication date
CA2225221C (en) 2009-01-06
EP0854749A1 (en) 1998-07-29
CN1181716A (zh) 1998-05-13
TW434038B (en) 2001-05-16
CA2225221A1 (en) 1997-11-27
DE69718137T2 (de) 2003-10-09
DE69718137D1 (de) 2003-02-06
CN1128652C (zh) 2003-11-26
AU3457297A (en) 1997-12-09
EP0854749A4 (https=) 1998-07-29
JP2008196689A (ja) 2008-08-28
JPH11511233A (ja) 1999-09-28
EP0854749B1 (en) 2003-01-02
WO1997044118A1 (en) 1997-11-27
AU713214B2 (en) 1999-11-25

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