TW434038B - Adsorption-desorption apparatus and process for supplying a fluid reagent - Google Patents

Adsorption-desorption apparatus and process for supplying a fluid reagent Download PDF

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Publication number
TW434038B
TW434038B TW086115282A TW86115282A TW434038B TW 434038 B TW434038 B TW 434038B TW 086115282 A TW086115282 A TW 086115282A TW 86115282 A TW86115282 A TW 86115282A TW 434038 B TW434038 B TW 434038B
Authority
TW
Taiwan
Prior art keywords
fluid
carbon
adsorption
storage
adsorbent
Prior art date
Application number
TW086115282A
Other languages
English (en)
Chinese (zh)
Inventor
Glenn M Tom
W Karl Olander
James V Mcmanus
Original Assignee
Advanced Tech Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/650,634 external-priority patent/US5704965A/en
Priority claimed from US08/650,633 external-priority patent/US5704967A/en
Application filed by Advanced Tech Materials filed Critical Advanced Tech Materials
Application granted granted Critical
Publication of TW434038B publication Critical patent/TW434038B/zh

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F17C7/02Discharging liquefied gases
    • F17C7/04Discharging liquefied gases with change of state, e.g. vaporisation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407Constructional details of adsorbing systems
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00Use of gas-solvents or gas-sorbents in vessels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2253/00Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10Inorganic adsorbents
    • B01D2253/102Carbon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2253/00Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30Physical properties of adsorbents
    • B01D2253/302Dimensions
    • B01D2253/304Linear dimensions, e.g. particle shape, diameter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/45Gas separation or purification devices adapted for specific applications
    • B01D2259/4525Gas separation or purification devices adapted for specific applications for storage and dispensing systems
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338Pressure regulators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388Arrangement of valves, regulators, filters
    • F17C2205/0391Arrangement of valves, regulators, filters inside the pressure vessel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • External Artificial Organs (AREA)
  • Separation Of Gases By Adsorption (AREA)
TW086115282A 1996-05-20 1997-10-15 Adsorption-desorption apparatus and process for supplying a fluid reagent TW434038B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/650,634 US5704965A (en) 1994-10-13 1996-05-20 Fluid storage and delivery system utilizing carbon sorbent medium
US08/650,633 US5704967A (en) 1995-10-13 1996-05-20 Fluid storage and delivery system comprising high work capacity physical sorbent
PCT/IB1997/000943 WO1997044118A1 (en) 1996-05-20 1997-05-20 Fluid storage and delivery system comprising high work capacity physical sorbent

Publications (1)

Publication Number Publication Date
TW434038B true TW434038B (en) 2001-05-16

Family

ID=27095914

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086115282A TW434038B (en) 1996-05-20 1997-10-15 Adsorption-desorption apparatus and process for supplying a fluid reagent

Country Status (9)

Country Link
EP (1) EP0854749B1 (https=)
JP (2) JPH11511233A (https=)
CN (1) CN1128652C (https=)
AT (1) ATE230294T1 (https=)
AU (1) AU713214B2 (https=)
CA (1) CA2225221C (https=)
DE (1) DE69718137T2 (https=)
TW (1) TW434038B (https=)
WO (1) WO1997044118A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495499B (zh) * 2009-12-21 2015-08-11 Southern Co Services Inc 高壓進料器及顆粒或細料物質進料之操作方法
TWI798553B (zh) * 2019-05-24 2023-04-11 美商恩特葛瑞斯股份有限公司 吸附有機金屬蒸氣之方法及系統
TWI829317B (zh) * 2021-09-15 2024-01-11 日商康肯環保設備有限公司 環氧乙烷氣體之除去方法及使用其之環氧乙烷氣體除去系統

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
WO1999041010A1 (fr) * 1998-02-17 1999-08-19 Kanebo, Limited Carbone active pour adsorption et stockage d'un compose gazeux
US6101816A (en) 1998-04-28 2000-08-15 Advanced Technology Materials, Inc. Fluid storage and dispensing system
US6277342B1 (en) * 1999-08-23 2001-08-21 Air Products And Chemicals, Inc. Storage and safe delivery of hazardous specialty gases by acid/base reactions with ionic polymers
US6716271B1 (en) * 2002-10-29 2004-04-06 Advanced Technology Materials, Inc. Apparatus and method for inhibiting decomposition of germane
US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US7494530B2 (en) 2002-12-10 2009-02-24 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US6743278B1 (en) * 2002-12-10 2004-06-01 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US8002880B2 (en) 2002-12-10 2011-08-23 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US7648682B2 (en) * 2004-07-08 2010-01-19 Air Products And Chemicals, Inc. Wick systems for complexed gas technology
DE102006020847A1 (de) * 2006-05-04 2007-11-08 Robert Bosch Gmbh Verfahren und Vorrichtung zur Reinigung eines Gasspeichers
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
KR20130098284A (ko) 2010-06-25 2013-09-04 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 제논 및 다른 고부가가치 화합물의 회수
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
KR20140010390A (ko) 2011-01-31 2014-01-24 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 Co2 포집을 위한 유용성을 갖는 탄소 열분해물 흡착제 및 그의 제조 방법과 사용 방법
EP2855009A4 (en) * 2012-05-29 2016-04-13 Entegris Inc CARBON ADSORBENT FOR THE REMOVAL OF HYDROGEN SULFIDE FROM GAS, AND REGENERATION OF ADSORBENT
US9186650B2 (en) 2013-04-05 2015-11-17 Entegris, Inc. Adsorbent having utility for CO2 capture from gas mixtures
KR102179776B1 (ko) * 2013-08-05 2020-11-18 누맷 테크놀로지스, 인코포레이티드 전자 가스 저장을 위한 금속 유기 프레임워크
CN104267133B (zh) * 2014-09-02 2016-09-14 中国工程物理研究院材料研究所 一种测定气固表面吸附等温线的方法
KR101952698B1 (ko) 2014-10-27 2019-02-28 엔테그리스, 아이엔씨. 이온 주입 방법 및 장치
KR102301071B1 (ko) * 2014-12-04 2021-09-14 누맷 테크놀로지스, 인코포레이티드 전자 가스의 저감 및 정제 및 탄화수소 스트림으로부터의 수은제거를 위한 다공성 중합체
RU173726U1 (ru) * 2016-12-21 2017-09-07 федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технический университет имени Н.Э. Баумана (национальный исследовательский университет)" (МГТУ им. Н.Э. Баумана) Устройство для хранения и подачи природного газа потребителю
EP3431859A1 (de) * 2017-07-21 2019-01-23 Covestro Deutschland AG Verfahren zur leckage-sicheren speicherung von verflüssigtem chlor
CA3081437A1 (en) * 2017-11-03 2019-05-09 Basf Corporation Arsine adsorbents
SG11202004314VA (en) * 2017-11-17 2020-06-29 Rasirc Inc Method, system, and device for storage and delivery of process gas from a substrate
US10837603B2 (en) * 2018-03-06 2020-11-17 Entegris, Inc. Gas supply vessel
CN112689728B (zh) 2018-09-13 2022-12-13 恩特格里斯公司 基于吸附剂的机械调节式气体存储及输送容器
CN109827864B (zh) * 2019-03-06 2021-04-13 苏州市环境科学研究所 土壤中单一污染源voc热脱附动力学试验方法
US11577217B2 (en) * 2019-12-12 2023-02-14 Praxair Technology, Inc. Dopant fluid storage and dispensing systems utilizing high performance, structurally modified particulate carbon adsorbents
CN112591711B (zh) * 2020-12-16 2022-05-20 浙江天采云集科技股份有限公司 一种HF/HCl混合气体高纯度高收率的FTrPSA分离与净化提取方法
CN112744788B (zh) * 2020-12-16 2022-09-23 四川天采科技有限责任公司 一种氟硅酸法生产无水HF精制的FTrPSA深度脱水除杂的分离与净化方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4761395A (en) * 1987-03-24 1988-08-02 Advanced Technology Materials, Inc. Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom
US4749384A (en) * 1987-04-24 1988-06-07 Union Carbide Corporation Method and apparatus for quick filling gas cylinders
US4723967A (en) * 1987-04-27 1988-02-09 Advanced Technology Materials, Inc. Valve block and container for semiconductor source reagent dispensing and/or purification
US4738693A (en) * 1987-04-27 1988-04-19 Advanced Technology Materials, Inc. Valve block and container for semiconductor source reagent dispensing and/or purification
US4744221A (en) * 1987-06-29 1988-05-17 Olin Corporation Zeolite based arsine storage and delivery system
DE3843313A1 (de) * 1988-12-22 1990-06-28 Wacker Chemitronic Verfahren zur entfernung von gasfoermigen kontaminierenden, insbesondere dotierstoffverbindungen aus halogensilanverbindungen enthaltenden traegergasen
US5385689A (en) * 1993-06-29 1995-01-31 Novapure Corporation Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495499B (zh) * 2009-12-21 2015-08-11 Southern Co Services Inc 高壓進料器及顆粒或細料物質進料之操作方法
TWI798553B (zh) * 2019-05-24 2023-04-11 美商恩特葛瑞斯股份有限公司 吸附有機金屬蒸氣之方法及系統
TWI829317B (zh) * 2021-09-15 2024-01-11 日商康肯環保設備有限公司 環氧乙烷氣體之除去方法及使用其之環氧乙烷氣體除去系統

Also Published As

Publication number Publication date
EP0854749B1 (en) 2003-01-02
DE69718137T2 (de) 2003-10-09
CN1181716A (zh) 1998-05-13
EP0854749A1 (en) 1998-07-29
CA2225221A1 (en) 1997-11-27
CN1128652C (zh) 2003-11-26
AU3457297A (en) 1997-12-09
ATE230294T1 (de) 2003-01-15
JPH11511233A (ja) 1999-09-28
EP0854749A4 (https=) 1998-07-29
DE69718137D1 (de) 2003-02-06
AU713214B2 (en) 1999-11-25
WO1997044118A1 (en) 1997-11-27
CA2225221C (en) 2009-01-06
JP2008196689A (ja) 2008-08-28

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