CN112466746B - 一种膜状扩散源成型机 - Google Patents
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Abstract
本发明公开了一种膜状扩散源成型机,主要涉及半导体膜生产设备技术领域,包括底座、机架,在所述底座上设有成膜传送辊,在所述成膜传送辊一端设有喷涂装置、另一端设有分切装置,在所述喷涂装置一侧设有烘干装置,提高了横梁运动方向的约束,使得运动和行程不易受外部影响,使得喷头在喷涂是更加均匀,既提高了烘干效率,又使水汽能够及时的排出,保证了烘干的质量提高,增加了烘干装置的空间利用度,使得膜烘干过程更加高效、节能和环保,滑动套在导向轴的作用下,使得滑动套底端固接的切刀座上的切刀片在平辊带上进行切割,形成倾斜直线角度切割,调节快速便捷,导向传动的作用较稳定提高膜分切机分切产品质量的稳定性。
Description
技术领域
本发明主要涉及半导体膜生产设备技术领域,具体是一种膜状扩散源成型机。
背景技术
半导体材料是微电子和光电子器件的主要材料,特别是大规模集成电路芯片上元件的集成度越来越高,元件的尺寸越来越小,半导体薄膜是构成这类器件的基本材料。半导体薄膜主要是含有磷和硼的膜状扩散源,但是这种膜状扩散源的生产较为困难,目前没有公开的技术可以参考。
发明内容
鉴于现有技术中存在的不足和缺陷,本发明的目的在于提供一种膜状扩散源成型机。
为了解决上述技术问题,本发明采用如下技术方案:一种膜状扩散源成型机,其特征在于:包括底座、机架,在所述底座上设有成膜传送辊,在所述成膜传送辊一端设有喷涂装置、另一端设有分切装置,在所述喷涂装置一侧设有烘干装置。
作为本发明的进一步改进,所述成膜传送辊包括相互平行的两组水平滚轮和连接两个滚轮的不锈钢传送带。
作为本发明的进一步改进,喷涂装置包括乳液搅拌桶,所述乳液搅拌桶连接固定在横梁上的喷头,所述横梁两端套接在导向轨上,在外部变频电机的驱动下,横梁在导向轨上来回运动。
作为本发明的进一步改进,烘干装置包括鼓风机,所述鼓风机连接吸风管,在所述吸风管上等距设有负压风头,在相邻的两个所述负压风头之间设有固定在吸风管下部的固定架,所述固定架底部连接圆柱形套筒,所述圆柱形套筒一端设有风机、另一端设有导流板,在所述风机和导流板之间设有电加热丝,在所述负压风头正下、圆柱形套筒顶部水平处设有与机架侧面固定的倒锥形板。
作为本发明的进一步改进,所述分切装置包括张紧轮、倾斜传动平台,在所述倾斜传动平台上设有垂直于倾斜传动平台并与之相切的切刀片,切刀片通过刀座固定在滑动套上,所述滑动套套接在分切轴上,所述滑动套与分切轴螺纹连接,所述滑动套上部与导向轴连接,所述分切轴通过外部伺服电机进行驱动。
与现有技术相比,本发明具有的有益效果为:本发明提高了横梁运动方向的约束,使得运动和行程不易受外部影响,使得喷头在喷涂是更加均匀,既提高了烘干效率,又使水汽能够及时的排出,保证了烘干的质量提高,增加了烘干装置的空间利用度,使得膜烘干过更加高效、节能和环保,滑动套在导向轴的作用下,使得滑动套底端固接的切刀座上的切刀片在平辊带上进行切割,形成倾斜直线角度切割,调节快速便捷,导向传动的作用较稳定提高膜分切机分切产品质量的稳定性。
附图说明
下面结合附图对本发明作进一步的说明:
图1为本发明一种膜状扩散源成型机的结构示意图;
图中:1底座、2机架、3成膜传送辊、4喷涂装置、41乳液搅拌桶、42横梁、43喷头、44导向轨、5分切装置、51张紧轮、52倾斜传动平台、53切刀片、54滑动套、55分切轴、56导向轴、6烘干装置、61鼓风机、62吸风管、63负压风头、64固定架、65圆柱形套筒、66风机、67导流板、68电加热丝、69倒锥形板。
具体实施方式
为了本发明的技术方案和有益效果更加清楚明白,下面结合具体实施例对本发明进行进一步的详细说明。
图1为本发明一种膜状扩散源成型机的结构示意图,一种膜状扩散源成型机,其特在于:包括底座1、机架2,在所述底座1上设有成膜传送辊3,所述成膜传送辊3包括相互平行的两组水平滚轮和连接两个滚轮的不锈钢传送带,在所述成膜传送辊3一端设有喷涂装置4、另一端设有分切装置5,在所述喷涂装置4一侧设有烘干装置6,喷涂装置4包括乳液搅拌桶41,所述乳液搅拌桶41连接固定在横梁42上的喷头43,所述横梁42两端套接在导向轨44上,在外部变频电机的驱动下,横梁42在导向轨44上来回运动,烘干装置6包括鼓风机61,所述鼓风机61连接吸风管62,在所述吸风管62上等距设有负压风头63,在相邻的两个所述负压风头63之间设有固定在吸风管下部的固定架64,所述固定架64底部连接圆柱形套筒65,所述圆柱形套筒一端设有风机、另一端设有导流板,在所述风机和导流板之间设有电加热丝,在所述负压风头63正下方、圆柱形套筒65顶部水平处设有与机架2侧面固定的倒锥形板69,所述分切装置5包括张紧轮51、倾斜传动平台52,在所述倾斜传动平台52上设有垂直于倾斜传动平台52并与之相切的切刀片53,切刀片53通过刀座固定在滑动套54上,所述滑动套54套接在分切轴55上,所述滑动套54与分切轴55螺纹连接,所述滑动套54上部与导向轴56连接,所述分切轴55通过外部伺服电机进行驱动。
它是将加入磷和硼的纸浆通过喷或涂或粘附将其附于表面平整、光滑的基础上,然后将其干燥成膜;并至少一次在前一次纸膜层的基础上再次通过喷或涂或粘附附着加入磷和硼的纸浆,并再次进行干燥成膜;最后将各次附着后形成的成品由基础上剥离、分切。
风机66工作将电加热丝68加热的热空气经导流板67的导流,将热空气斜向吹下,斜向吹下的热空气与纸膜充分接触,带着蒸发烘干的水汽,一部分顺着成膜传送辊3的方向向上移动,另一部分在风机66负压作用下反向成膜传送辊的方向移动,增加烘干接触,提高干效率,鼓风机61带动吸风管62,在所述吸风管62上等距设有负压风头63,负压风头63形成负压环境,烘干的热蒸汽在负压风头63形成负压环境下上升,在所述负压风头63正下方、圆柱形套筒65顶部水平处设有与机架2侧固定的倒锥形板69,能够阻挡负压风头63直接吸取热空气,增加热空气与纸膜接触接触的时间,既提高了烘干效率,又使水汽能够及时的排出,保证了烘干的质量提高,增加了烘干装置的空间利用度,使得膜烘干过程更加高效、节能和环保。
乳液搅拌桶41提高了搅拌混合的效果,不容易凝结固化,导向轨44提高了支架横梁运动方向的约束,使得运动和行程不易受外部影响,使得喷头在喷涂是更加均匀。
外部伺服电机通过调整分切轴55上的滑动套54的位移,滑动套54在导向轴56的作用下,使得滑动套54底端固接的刀座上的切刀片53在倾斜传动平台52上进行切割,形成倾斜直线角度切割,调节快速便捷,导向传动的作用较稳定,使得切割误差减少,提高分切效率,张紧轮51可以及时地检测张力大小的变化,进而控制放卷机构改变与切刀机构的距离从而调整膜表面的张力,从而提高膜分切机分切产品质量的稳定性。
在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本明中的具体含义。应当理解,此处所描述的具体实施方式仅用于理解本发明,并不用于限定本发明,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
Claims (4)
1.一种膜状扩散源成型机,其特征在于:包括底座(1)、机架(2),在所述底座(1)上设有成膜传送辊(3),在所述成膜传送辊(3)一端设有喷涂装置(4)、另一端设有分切装置(5),在所述喷涂装置(4)一侧设有烘干装置(6);
所述烘干装置(6)包括鼓风机(61),所述鼓风机(61)连接吸风管(62),在所述吸风管(62)上等距设有负压风头(63),在相邻的两个所述负压风头(63)之间设有固定在吸风管下部的固定架(64),所述固定架(64)底部连接圆柱形套筒(65),所述圆柱形套筒一端设有风机、另一端设有导流板,在所述风机和导流板之间设有电加热丝,在所述负压风头(63)正下方、圆柱形套筒(65)顶部水平处设有与机架(2)侧面固定的倒锥形板(69);
所述膜状扩散源成型机用于将加入磷和硼的纸浆通过喷或涂将其附于表面平整、光滑的基础上,然后将其干燥成膜;并至少一次在前一次纸膜层的基础上再次通过喷或涂附着加入磷和硼的纸浆,并再次进行干燥成膜;最后将各次附着后形成的成品由基础上剥离、分切。
2.根据权利要求1所述的一种膜状扩散源成型机,其特征在于:所述成膜传送辊(3)包括相互平行的两组水平滚轮和连接两个滚轮的不锈钢传送带。
3.根据权利要求1所述的一种膜状扩散源成型机,其特征在于:喷涂装置(4)包括乳液搅拌桶(41),所述乳液搅拌桶(41)连接固定在横梁(42)上的喷头(43),所述横梁(42)两端套接在导向轨(44)上,在外部变频电机的驱动下,横梁(42)在导向轨(44)上来回运动。
4.根据权利要求1所述的一种膜状扩散源成型机,其特征在于:所述分切装置(5)包括张紧轮(51)、倾斜传动平台(52),在所述倾斜传动平台(52)上设有垂直于倾斜传动平台(52)并与之相切的切刀片(53),切刀片(53)通过刀座固定在滑动套(54)上,所述滑动套(54)套接在分切轴(55)上,所述滑动套(54)与分切轴(55)螺纹连接,所述滑动套(54)上部与导向轴(56)连接,所述分切轴(55)通过外部伺服电机进行驱动。
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