CN112458437A - 吸附装置、成膜装置、吸附方法、成膜方法及电子器件的制造方法 - Google Patents
吸附装置、成膜装置、吸附方法、成膜方法及电子器件的制造方法 Download PDFInfo
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- CN112458437A CN112458437A CN202010926186.9A CN202010926186A CN112458437A CN 112458437 A CN112458437 A CN 112458437A CN 202010926186 A CN202010926186 A CN 202010926186A CN 112458437 A CN112458437 A CN 112458437A
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- potential
- electrode
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- electrostatic chuck
- mask
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (21)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020190111120A KR102520050B1 (ko) | 2019-09-07 | 2019-09-07 | 흡착 장치, 성막장치, 흡착방법, 성막방법 및 전자 디바이스의 제조방법 |
KR10-2019-0111120 | 2019-09-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN112458437A true CN112458437A (zh) | 2021-03-09 |
Family
ID=74833995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010926186.9A Pending CN112458437A (zh) | 2019-09-07 | 2020-09-07 | 吸附装置、成膜装置、吸附方法、成膜方法及电子器件的制造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7007688B2 (zh) |
KR (1) | KR102520050B1 (zh) |
CN (1) | CN112458437A (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114347457A (zh) * | 2021-12-28 | 2022-04-15 | 广州国显科技有限公司 | 贴附系统及贴附方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070195482A1 (en) * | 2006-02-23 | 2007-08-23 | Varian Semiconductor Equipment Associates, Inc. | Johnsen-Rahbek electrostatic chuck driven with AC voltage |
CN103168114A (zh) * | 2010-10-19 | 2013-06-19 | 夏普株式会社 | 蒸镀装置、蒸镀方法和有机电致发光显示装置的制造方法 |
JP2015015372A (ja) * | 2013-07-05 | 2015-01-22 | 日新イオン機器株式会社 | 静電チャックシステムおよび半導体製造装置 |
CN108474110A (zh) * | 2016-12-12 | 2018-08-31 | 应用材料公司 | 用于在真空沉积工艺中保持基板的设备、用于在基板上进行层沉积的系统和用于保持基板的方法 |
JP2019099913A (ja) * | 2017-11-29 | 2019-06-24 | キヤノントッキ株式会社 | 成膜装置、成膜方法、及び有機el表示装置の製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06310589A (ja) * | 1993-04-26 | 1994-11-04 | Sony Corp | 静電吸着方法及び静電吸着装置 |
JP2002093895A (ja) * | 2000-09-11 | 2002-03-29 | Sharp Corp | 静電チャック装置 |
KR101289345B1 (ko) * | 2005-07-19 | 2013-07-29 | 주성엔지니어링(주) | 섀도우 마스크와 이를 이용한 정렬장치 |
JP4677397B2 (ja) * | 2006-12-11 | 2011-04-27 | 株式会社巴川製紙所 | 静電吸着方法 |
JP4620766B2 (ja) * | 2008-07-31 | 2011-01-26 | 東京エレクトロン株式会社 | はがし装置及びはがし方法 |
JP2011181462A (ja) * | 2010-03-03 | 2011-09-15 | Hitachi Displays Ltd | 表示パネルの製造方法 |
WO2015042309A1 (en) * | 2013-09-20 | 2015-03-26 | Applied Materials, Inc. | Substrate carrier with integrated electrostatic chuck |
KR102490641B1 (ko) * | 2015-11-25 | 2023-01-20 | 삼성디스플레이 주식회사 | 증착 장치 및 증착 방법 |
KR102520693B1 (ko) * | 2016-03-03 | 2023-04-11 | 엘지디스플레이 주식회사 | 유기발광소자의 증착장치 |
-
2019
- 2019-09-07 KR KR1020190111120A patent/KR102520050B1/ko active IP Right Grant
-
2020
- 2020-08-24 JP JP2020141210A patent/JP7007688B2/ja active Active
- 2020-09-07 CN CN202010926186.9A patent/CN112458437A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070195482A1 (en) * | 2006-02-23 | 2007-08-23 | Varian Semiconductor Equipment Associates, Inc. | Johnsen-Rahbek electrostatic chuck driven with AC voltage |
CN103168114A (zh) * | 2010-10-19 | 2013-06-19 | 夏普株式会社 | 蒸镀装置、蒸镀方法和有机电致发光显示装置的制造方法 |
JP2015015372A (ja) * | 2013-07-05 | 2015-01-22 | 日新イオン機器株式会社 | 静電チャックシステムおよび半導体製造装置 |
CN108474110A (zh) * | 2016-12-12 | 2018-08-31 | 应用材料公司 | 用于在真空沉积工艺中保持基板的设备、用于在基板上进行层沉积的系统和用于保持基板的方法 |
JP2019099913A (ja) * | 2017-11-29 | 2019-06-24 | キヤノントッキ株式会社 | 成膜装置、成膜方法、及び有機el表示装置の製造方法 |
Non-Patent Citations (1)
Title |
---|
王振亚等: ""ULVAC IH-860DSIC注入机系统解析"", 《电子工业专用设备》 * |
Also Published As
Publication number | Publication date |
---|---|
KR102520050B1 (ko) | 2023-04-07 |
KR20210029899A (ko) | 2021-03-17 |
JP2021042467A (ja) | 2021-03-18 |
JP7007688B2 (ja) | 2022-01-25 |
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CB03 | Change of inventor or designer information |
Inventor after: Kashiwashi Kazushi Inventor after: Shi Jingbo Inventor after: Kawabata Tomoyo Inventor after: Zhu Qiaowu Inventor after: Tomii Koji Inventor after: Kawatani teruyuki Inventor before: Kashiwashi Kazushi Inventor before: Shi Jingbo Inventor before: Kawabata Yasuyo Inventor before: Zhu Qiaowu Inventor before: Tomii Koji Inventor before: Kawatani teruyuki |
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CB03 | Change of inventor or designer information |