CN111886672A - 基板加热系统以及基板处理装置 - Google Patents
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Abstract
本发明降低顶板与加热器的热膨胀的偏差以防止加热器的破损,包括:顶板2,载置基板W;加热器3,被设在顶板2的下表面;板温度检测部4,检测顶板2的温度;加热器温度检测部5,检测加热器3的温度;以及加热器控制部6,基于加热器3的检测温度与顶板2的检测温度来控制加热器3的输出,加热器控制部6控制加热器3的输出,以使加热器3的检测温度与顶板2的检测温度的检测温差不超过规定的温差上限值,且进行控制,以使顶板2的检测温度成为规定的设定温度。
Description
技术领域
本发明涉及一种基板加热系统以及基板处理装置。
背景技术
以往,作为对进行成膜等基板处理的基板进行加热的系统,有专利文献1所示的基板加热控制系统。
所述基板加热控制系统对载置基板的顶板(top plate)的温度进行检测,若所述顶板的检测温度低于规定的阈值,则利用预先准备的多个温度管理模式(随时间经过变更加热器的设定温度)来进行控制。若顶板的温度高于规定的阈值,则进行比例积分微分(Proportion Integration Differentiation,PID)控制。
但是,若在升温开始时将加热器的温度设定为高,则顶板与加热器的温差变大,有可能因顶板与加热器的热膨胀差导致加热器发生破损。
现有技术文献
专利文献
专利文献1:日本专利第3810726号公报
发明内容
发明所要解决的问题
因此,本发明是为了解决所述问题而完成,其主要的课题在于,降低顶板与加热器的热膨胀的偏差以防止加热器的破损。
解决问题的技术手段
即,本发明的基板加热系统的特征在于包括:顶板,载置基板;加热器,被设在所述顶板的下表面;板温度检测部,检测所述顶板的温度;加热器温度检测部,检测所述加热器的温度;以及加热器控制部,基于所述加热器的检测温度与所述顶板的检测温度,来控制所述加热器的输出,所述加热器控制部控制所述加热器的输出,以使所述加热器的检测温度与所述顶板的检测温度的检测温差不超过规定的温差上限值,且进行控制以使所述顶板的检测温度成为规定的设定温度。
若为此种本发明,则控制加热器的输出,以使加热器的检测温度与顶板的检测温度的检测温差不超过规定的温差上限值,因此能够降低顶板与加热器的热膨胀的偏差以防止加热器的破损。
具体而言,理想的是,所述加热器控制部基于所述检测温差来设定所述加热器的输出上限值。若为此结构,则能够使顶板的检测温度朝向设定温度上升,并且使加热器的检测温度与顶板的检测温度的检测温差不超过温差上限值。
详细而言,理想的是,所述加热器控制部在所述检测温差大于规定的温差目标值的情况下,从当前的输出上限值减去规定值而设定为下个输出上限值,在所述检测温差小于规定的温差目标值的情况下,将当前的输出上限值加上规定值而设定为下个输出上限值。
理想的是,所述加热器控制部在所述检测温差小于规定的温差目标值的情况下,若所述温差目标值与所述检测温差之差大于规定的阈值,则将当前的输出上限值加上规定值而设定为下个输出上限值,若所述温差目标值与所述检测温差之差小于规定的阈值,则不变更当前的输出上限值。若为此结构,则能够考虑温度控制的响应性的延迟,而使得加热器的检测温度与顶板的检测温度的检测温差不超过温差上限值。
理想的是,所述加热器控制部基于所述顶板的检测温度来切换所述温差目标值。随着顶板的检测温度上升,例如以温差目标值阶段性地变大的方式来进行切换,由此,能够缩短顶板的升温时间。
作为加热器控制部的具体的控制形态,理想的是,在所述顶板的检测温度低于从所述设定温度减去规定温度所得的阈值温度的情况下,控制所述加热器的输出,以使所述检测温差不超过所述温差上限值,在所述顶板的检测温度高于所述阈值温度的情况下,进行控制,以使所述顶板的检测温度成为所述设定温度。
理想的是,所述加热器控制部在所述加热器的检测温度超过规定的加热器温度上限值的情况下,使用规定的第一输出上限值来控制所述加热器的输出。
理想的是,所述加热器控制部在所述检测温差超过所述温差上限值的情况下,使用规定的第二输出上限值来控制所述加热器的输出。
发明的效果
根据像这样构成的本发明,能够降低顶板与加热器的热膨胀的偏差以防止加热器的破损。
附图说明
图1是表示本实施方式的基板加热系统的结构的示意图。
图2是本实施方式中的从加热器的电源接通直至升温完成为止的流程图。
图3是表示本实施方式中的输出上限值的运算处理的流程图。
图4是表示本实施方式中的设定温度与顶板的检测温度的时间序列的关系的图表。
图5是表示变形实施方式中的设定温度与顶板的检测温度的时间序列的关系的图表。
图6是表示变形实施方式的开始输出量的自动运算处理的流程图。
符号的说明
100:基板加热系统
W:基板
2:顶板
3:加热器
4:板温度检测部
5:加热器温度检测部
6:加热器控制部
具体实施方式
以下,参照图示来说明本发明的基板加热系统的一实施方式。
如图1所示,本实施方式的基板加热系统100被用于等离子体化学气相沉积(Chemical Vapor Deposition,CVD)装置或感应耦合等离子体(Induced Couple Plasma,ICP)溅镀装置等成膜装置,具体而言,被设在真空容器200内,将所载置的基板W加热至规定的设定温度。
具体而言,基板加热系统100包括:顶板2,载置基板W;加热器3,被设在顶板2的下表面;板温度检测部4,检测顶板2的温度TP;例如热电偶等加热器温度检测部5,检测加热器3的温度TH;以及加热器控制部6,基于加热器3的检测温度TH与顶板2的检测温度TP,来控制加热器3的输出。
本实施方式的加热器3通过使用闸流管(thyristor)等功率半导体器件的通电控制设备7来调整通电量。而且,加热器3是被顶板2与底板8夹着而设,由顶板2与底板8构成加热器板。而且,板温度检测部4是接触顶板2而设,例如能够使用热电偶等。进而,加热器温度检测部5是接触加热器3而设,例如能够使用热电偶等。这些温度检测部4的检测温度TH、TP被输入至加热器控制部6。
加热器控制部6对通电控制设备7输出控制信号以控制通电控制设备7,由此来控制加热器3的输出。另外,加热器控制部6包含专用或通用的计算机,所述专用或通用的计算机具有中央处理器(Central Processing Unit,CPU)、内部存储器、输入/输出接口、模拟数字(Analog Digital,AD)转换器等。此处,加热器控制部6也可使用可编程逻辑控制器(Programmable Logic Controller,PLC)来构成。
具体而言,加热器控制部6控制加热器3的输出,以使加热器3的检测温度TH与顶板2的检测温度TP的检测温差ΔT(=TH-TP)不超过规定的温差上限值ΔTMAX,且进行控制,以使顶板2的检测温度TP成为规定的设定温度TSET。
接下来,说明加热器控制部6的功能与基板加热系统100的动作。
基板加热系统100的动作的概略如图2所示。即,当加热器3被启动(ON)时,或者当设定温度TSET被变更至高温侧时,加热器控制部6对通电控制设备7输出控制信号而开始顶板2的升温(S1-1)。另外,设定温度TSET是由用户所输入的温度,以下考虑设为400℃的情况。
并且,加热器控制部6基于设定温度TSET与顶板2的检测温度TP的温差(偏差=TSET-TP),对加热器3的输出进行匝道控制(ramp control)及PID控制,由此来控制顶板2的检测温度TP成为设定温度TSET(S1-2)。此处,在匝道控制中,给予每隔单位时间(例如1分钟)使目标值逐次上升规定温度(例如1℃)的输入。
而且,加热器控制部6对顶板2的检测温度TP与设定温度TSET进行比较(S1-3)。若所述比较的结果为顶板2的检测温度TP小于设定温度TSET,则返回S1-2。另一方面,若顶板2的检测温度TP已到达设定温度TSET,则结束升温(S1-4)。
接下来,对加热器控制部6的具体的控制内容进行说明。
加热器控制部6在所述S1-2中,基于加热器3的检测温度TH与顶板2的检测温度TP的检测温差ΔT来设定加热器3的输出上限值(例如750℃),且对加热器3的输出进行匝道控制及PID控制,以使其不超过所述设定的输出上限值。
因此,加热器控制部6在升温开始(S1-1)后,判断是否设定输出上限值(S2-1)。具体而言,加热器控制部6对顶板2的检测温度TP、与从设定温度TSET减去规定温度(例如10℃)所得的阈值温度(=TSET-10℃)进行比较,若顶板2的检测温度TP低于阈值温度,则设定输出上限值(S2-2)。若顶板2的检测温度TP高于阈值温度,则不设定输出上限值,而对加热器3的输出进行匝道控制及PID控制,以使顶板2的检测温度TP成为设定温度TSET(S1-2)。
输出上限值对加热器3的检测温度TH及顶板2的检测温度TP的检测温差ΔT与规定的温差目标值α进行比较(S2-3)。
若检测温差ΔT小于温差目标值α(α>ΔT),则加热器控制部6对温差目标值α及检测温差ΔT之差(=α-ΔT)与规定的阈值β进行比较(S2-4)。此处,对于阈值β,考虑到通过S2-4的处理来防止顶板2的检测温度的急遽上升,能够通过实际的基板加热系统100的加热测试结果来规定。
若温差目标值α及检测温差ΔT之差(=α-ΔT)大于阈值β(α-ΔT>β)的情况时,将当前的输出上限值加上规定值而设定为下个输出上限值(S2-5)。而且,若α-ΔT≦β,则返回S2-3。
另一方面,在S2-3中,若检测温差ΔT大于温差目标值α(ΔT≧α),则加热器控制部6从当前的输出上限值减去规定值而设定为下个输出上限值(S2-6)。
继而,加热器控制部6基于在上文设定的输出上限值,来对加热器3的输出进行匝道控制及PID控制(S1-2)。
<本实施方式的效果>
根据像这样构成的本实施方式的基板加热系统100,控制加热器3的输出,以使加热器3的检测温度TH与顶板2的检测温度TP的检测温差ΔT不超过规定的温差上限值TMAX,因此能够降低顶板2与加热器3的热膨胀的偏差以防止加热器3的破损。而且,本实施方式中,加热器控制部6对加热器的输出进行匝道控制及PID控制,因此能够缩短升温时间。
<变形实施方式>
另外,本发明并不限于所述实施方式。
例如,如图5所示,加热器控制部6也可构成为,基于顶板2的检测温度TP来切换温差目标值α。图5中表示了下述情况,即,当检测温度TP到达50℃时,使温差目标值α从α1上升至α2。
而且,加热器控制部6在顶板的升温中将加热器的开始输出量设为1%,除此以外,也可从用户所设定的开始输出量进行输出控制,还可如图6所示,从通过自动运算求出的开始输出量进行输出控制。
以下对图6所示的自动运算进行说明。
当开始输出量的运算开始时(S3-1),加热器控制部6设定所述自动运算中的开始输出(S3-2)。此处,第一循环设定1%。第一循环以后设定经更新的值。
此设定后,加热器控制部6通过所设定的输出量来控制加热器3而开始升温(S3-3)。而且,加热器控制部6检测从升温开始直至检测温差ΔT为固定或下降为止的温差最大值γ并予以保存(S3-4)。另外,S3-4中,设γ不超过温差上限值ΔTMAX。
继而,加热器控制部6对温差目标值α与温差最大值γ进行比较(S3-5)。
若所述比较的结果为温差目标值α大于温差最大值γ(α>γ),则将当前的开始输出加上规定值(例如1%)而设为下个开始输出(S3-6)。随后,结束升温,当顶板2的检测温度下降至常温(例如25℃)时,再次从S3-2开始实施(S3-7)。
另一方面,在S3-5中,若温差目标值α小于温差最大值γ(α<γ),则结束升温(S3-8)。通过进行以上的处理,开始输出量的自动运算完成(S3-9)。通过像这样自动运算开始输出量,从升温刚开始后便能够一下子列举加热器的输出量,从而能够缩短升温时间。
而且,加热器控制部在加热器的检测温度超过规定的加热器温度上限值的情况下,也可使用规定的第一输出上限值来控制所述加热器的输出。
进而,加热器控制部在检测温差超过温差上限值的情况下,也可使用规定的第二输出上限值来控制加热器的输出。
除此以外,本发明并不限于所述实施方式,当然可在不脱离其主旨的范围内进行各种变形。
产业上的可利用性
根据本发明,能够降低顶板与加热器的热膨胀的偏差以防止加热器的破损。
Claims (9)
1.一种基板加热系统,包括:
顶板,载置基板;
加热器,被设在所述顶板的下表面;
板温度检测部,检测所述顶板的温度;
加热器温度检测部,检测所述加热器的温度;以及
加热器控制部,基于所述加热器的检测温度与所述顶板的检测温度,来控制所述加热器的输出,
所述加热器控制部控制所述加热器的输出,以使所述加热器的检测温度与所述顶板的检测温度的检测温差不超过规定的温差上限值,且进行控制以使所述顶板的检测温度成为规定的设定温度。
2.根据权利要求1所述的基板加热系统,其中
所述加热器控制部基于所述检测温差来设定所述加热器的输出上限值。
3.根据权利要求2所述的基板加热系统,其中
所述加热器控制部在所述检测温差大于规定的温差目标值的情况下,从当前的输出上限值减去规定值而设定为下个输出上限值,在所述检测温差小于规定的温差目标值的情况下,将当前的输出上限值加上规定值而设定为下个输出上限值。
4.根据权利要求3所述的基板加热系统,其中
所述加热器控制部在所述检测温差小于规定的温差目标值的情况下,若所述温差目标值与所述检测温差之差大于规定的阈值,则将当前的输出上限值加上规定值而设定为下个输出上限值,若所述温差目标值与所述检测温差之差小于规定的阈值,则不变更当前的输出上限值。
5.根据权利要求3或4所述的基板加热系统,其中
所述加热器控制部基于所述顶板的检测温度来切换所述温差目标值。
6.根据权利要求1至5中任一项所述的基板加热系统,其中
所述加热器控制部在所述顶板的检测温度低于从所述设定温度减去规定温度所得的阈值温度的情况下,控制所述加热器的输出,以使所述检测温差不超过所述温差上限值,在所述顶板的检测温度高于所述阈值温度的情况下,进行控制,以使所述顶板的检测温度成为所述设定温度。
7.根据权利要求1至6中任一项所述的基板加热系统,其中
所述加热器控制部在所述加热器的检测温度超过规定的加热器温度上限值的情况下,使用规定的第一输出上限值来控制所述加热器的输出。
8.根据权利要求1至7中任一项所述的基板加热系统,其中
所述加热器控制部在所述检测温差超过所述温差上限值的情况下,使用规定的第二输出上限值来控制所述加热器的输出。
9.一种基板处理装置,使用权利要求1至8中任一项所述的基板加热系统。
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CN114020073A (zh) * | 2021-10-11 | 2022-02-08 | 上海策立工程技术有限公司 | 基于加热炉pid上下限自适应的控制方法和系统 |
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