CN1116789C - 印刷电路板用铜箔及其制造方法和使用该铜箔的层叠体及印刷电路板 - Google Patents

印刷电路板用铜箔及其制造方法和使用该铜箔的层叠体及印刷电路板 Download PDF

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CN1116789C
CN1116789C CN97114996A CN97114996A CN1116789C CN 1116789 C CN1116789 C CN 1116789C CN 97114996 A CN97114996 A CN 97114996A CN 97114996 A CN97114996 A CN 97114996A CN 1116789 C CN1116789 C CN 1116789C
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copper foil
bta
layer
zinc
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土桥诚
栗原宏明
横田俊子
端洋志
高桥直臣
须户达哉
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Mitsui Mining and Smelting Co Ltd
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Abstract

提供改善耐伤性、其结果能使铜箔最小限度地发生伤痕和裂纹、而且能防止树脂粒子向铜箔的附着的印刷电路板制造用铜箔和该铜箔的制造方法。具备在表面上由锌或锌合金组成的第1层、以及为了具有提高的耐伤性由具有充分厚度的苯并三唑或其衍生物组成的第2层的印刷电路板用铜箔。

Description

印刷电路板用铜箔及其制造方法和 使用该铜箔的层叠体及印刷电路板
技术领域
本发明是关于制造印刷电路板(PCB)时使用的簿铜箔。更详细地说,是关于能够防止在加工时成为在铜箔上产生深伤痕和裂纹的原因的擦伤和压痕而引起的伤痕,从而具有改善能力的铜箔。
背景技术
已经知道,在要求日益增加的比较簿的铜箔(例如,厚1/2盎司/ft2或者18μm)中,在铜箔表面露出的场合,特别是在高温下显示出高延伸率的铜箔那样的较柔软的铜箔表面,该表面存在遭受由擦伤或者压痕引起的损伤的可能性。铜箔的损伤程度严重时,在铜箔上能产生裂纹,结果导致所得到的层叠体或部分完成的PCB被废弃处理。即使在铜箔的损伤程度不严重的情况下,层叠体由于其外观的原因,也有被废弃的情况。因此,希望尽可能避免由擦伤和压痕引起的损伤。
另外,在制造PCB时,经常成为问题的是发生树脂斑点。所谓树脂斑点是附着在铜箔表面的像环氧树脂那样的树脂粒子。这样的粒子,在形成电路时使用的蚀刻工序中阻碍蚀刻,其结果成为电路板被废弃或者再加工的原因。如果用苯并三唑(BTA)薄层覆盖铜箔,可以减小“树脂斑点”数。但是,在该产业界中,正在制作特别微细的电路,而且在经常存在小树脂粒子,不言而喻地需要改进。
在该产业界中,在从铜箔的制造直至将铜箔使用于印刷电路板的期间,经常需要对铜箔进行处理以防止铜箔生锈。作为这样的处理的一种,可举出使用苯并三唑和/或与此相关的化合物。例如,在美国专利申请No.08/496502的说明书中提出,在铜箔上涂覆苯并三唑和氨基三唑或其衍生物,进行防锈处理。
作为经受这样的防锈处理的典型例子,可以举出电沉积锌层或锌合金层,接着是铬酸盐层。另外,已经知道,设置锌层或锌合金层以及铬酸盐层后,在经受上述防锈处理的铜箔上,完全不会附着粉状环氧树脂。
美国专利申请No.08/686574的说明书揭示,使用苯并三唑和/或其异构体,能抑制环氧树脂粒子向铜箔附着,而且能抑制软钎焊处理时的铜箔变色。
在日本专利申请平6-85417(1994)中揭示,使用苯并三唑或其衍生物,能改善铜箔的软钎料附着性和保护层向铜箔的光泽面的附着力。
在日本专利申请平6-85455(1994)中揭示,使用苯并三唑或其衍生物,改善铜箔的耐湿性,延长处理过的铜箔的贮藏寿命。日本专利申请平6-85417中的使用苯并三唑或其衍生物的处理,是在铜箔的光泽面侧进行。铜箔首先镀锌或锌合金,接着进行铬酸盐处理,然后涂覆苯并三唑。
发明内容
本发明的目的在于,提供印刷电路板制造用铜箔,该铜箔比以往改善耐伤性、其结果能使铜箔的伤痕和裂纹的发生限制在最小程度、而且能够防止树脂粒子向铜箔附着。
本发明人对防止加工铜箔时的铜箔损伤进行了深入研究,结果发现实质上改善耐伤性的方法。按照本发明制作的铜箔,具有比以往进一步减少附着在露出的铜箔上的树脂粒子数的优点。
即本发明是印刷电路板用铜箔,其特征是,在上述铜箔的表面上涂敷由锌或锌合金组成第1层,以及为了赋予增进耐伤性涂覆具有充分厚度的由苯并三唑或其衍生物组成的第2层,以改善耐伤性。具有这样的层的本发明铜箔,比以往具有更高的耐伤性,其结果将铜箔表面的伤痕和裂纹的发生限制在最小限度。
具体而言,本发明提供了一种印刷电路板用铜箔,其包括通过在所述铜箔表面上涂覆由锌或锌合金组成的第1层和涂覆来自由苯并三唑和水组成的水溶液的苯并三唑的第2层,以及在所述第1层和第2层之间涂覆1.5mg/m2以下的铬酸盐层,所述第2层为至少5mg/m2以提供增加的耐伤性。
另外,本发明是关于设置具有所希望厚度的苯并三唑层的方法,该方法是以至少液温20℃、最好40-70℃的苯并三唑水溶液,以达到所希望厚度的充分时间接触铜箔表面。
此外,本发明是关于上述层叠体,该层叠体是由绝缘基板层和至少1层本发明的铜箔层组成的印刷电路板制造用层叠体,形成上述第1层和第2层的铜箔表面露出。
再有,本发明是关于至少具有1个使用本发明的铜箔制作成的层叠体的印刷电路板。
本发明还提供了一种在铜箔的光泽面上涂覆苯并三唑保护层的方法,其由以下步骤组成:(a)在所述铜箔表面上涂覆一层锌或锌合金层;(b)在(a)的锌或锌合金涂覆的铜箔上涂覆一层1.5mg/m2以下的铬酸盐层;(c)用由苯并三唑和水组成的水溶液接触来自(b)的所述铜箔以在所述铬酸盐层上堆积至少5mg/m2苯并三唑。
在本发明的印刷电路板用铜箔中,在铜箔表面设置由锌或锌合金组成的第1层,为了赋予所希望的增进的耐伤性,在该第1层上设置由足够的苯并三唑(以下称为BTA)或其衍生物组成的第2层。BTA的堆积量较好是至少5mg/m2,最好是5-8mg/m2
另外,在由锌或锌合金组成的第1层和由BTA或其衍生物组成的第2层之间,也可以设置铬酸盐层。该中间铬酸盐层最好充分薄,以不防碍BTA或其衍生物与锌或锌合金的结合。另外,铬酸盐的堆积量,以1.5mg/m2以下的均匀堆积物为佳。
另外,在本发明的方法中,使铜剥箔表面接触BTA或其衍生物的水溶液后,根据需要,可以用水除去已处理的铜箔表面上的与锌或锌合金层不粘结的剩余BTA或其衍生物。
以下,详细说明本发明层叠体和铜箔。
层叠体
印刷电路板是使用在玻璃纤维增强的环氧树脂等绝缘板上贴附簿铜箔的层叠体而制成。这样的层叠体,进行所希望的电路图案形状感光,刻蚀除去不要的铜箔部分,变成电路板。简单的电路板,仅在上述层叠体的一面或两面上形成电路。复杂的电路板(多层基板),在包含上述简单电路的层叠体上再层叠形成电路的基板(层)。
在制造层叠体和电路板时,在将它们加工的过程中,由于层叠体彼此之间或电路校彼此之间互相接触,其结果,可能在铜箔上产生擦伤,成为铜箔的深伤痕和裂纹的原因。这些铜箔的深伤痕和裂纹能导致层叠体和电路板报废。这样的铜箔损伤与外部因素有关,另一方面,在层叠体和电路板相互叠放的场合,例如,在它们相互重叠或者钻孔时,都会产生像这样的铜箔损伤。
其他的问题特别与厚度约1/2盎司/ft2(约18μm厚)的更薄的铜箔。在使用“预成形材料”薄片(部分硬化的纤维强化树脂薄片)组装电路板的场合,玻璃纤维压迫铜箔,产生相当于玻璃纤维的图案的变形。其次,在铜箔露出的薄片相互接近配置的场合,因铜箔的重量和变动而产生伤痕,其结果,实际上在铜箔上产生裂纹。对于这样的铜箔损伤,在制造具有极微细电路的电路板的场合,即为了达到电路的所希望的电性能,电路的形状和电路间的隔离必须十分精密的场合,是特别令人担心的。
铜箔
制造层叠体和PCB时使用的铜箔,通常是在含有铜盐的溶液中电沉积在转筒上而制成。该铜箔可以具有各种厚度,使用较多的是具有18-36μm厚度的铜箔。18-36μm的值相当于1/2盎司/ft2。使用厚的铜箔和薄的铜箔,薄的铜箔比厚的铜箔更容易经受深刻的损伤,在本发明中可以使用厚的铜箔和薄的铜箔中的任一个,对铜箔的厚度没有特别限定。在本行业中,随着向要求更狭小电路和电路间隔的方向发展,像这样的簿铜箔更成为一般。
在制造层叠体和PCB时,铜箔容易氧化和产生其他的锈蚀。因此,通常在铜箔上设置保护铜箔不生锈、帮助改善铜箔向基板的结合力的被膜。为此使用锌或锌合金,也可以使用电路板技术的从业者周知的其他物质。另外,设置由锌或其他的金属组成的第1层后,也可以设置铬酸盐层。由锌或锌合金组成的层(镀锌层),通常在铜箔的一面或两面进行电沉积,而铬酸盐层也可以电沉积或者被覆在第1层上。
以下,表示在铜箔表面上形成镀锌层时常用的条件。
      焦磷酸锌浓度    1-10g/L(作为锌)
      焦磷酸钾浓度    1-150g/L
      pH              9-12
      液温            室温
      电流密度        0.1-1A/dm2
以下,表示将镀锌的铜箔进行铬酸盐处理时常用的条件。
      铬酸浓度        0.05-10g/L
      pH              9-13
      电流密度        0.1-5A/dm2
与转筒邻接的铜箔侧面具有低的粗造度,即该侧面是极平滑的,该侧面通常称为光泽面。与此相反一侧的面通常是比光泽面凸凹不平的,是无光泽面。作为惯例,为了能够与基板形成强固结合,使铜箔的粗造面(无光泽面)重合在基板上。因此,铜箔的光泽面露出,在加工时遭受损伤的是光泽面。最近有人指出,在基板上重合铜箔的光泽面的场合(即无光泽面露出),可以达到改善电路的图像分辨率。但是,为了对光泽面进行粗造化处理,得到铜箔与基板的足够的结合力,必须在光泽面上电沉积铜。本发明尤其能够适用于铜箔的光泽面。因为光泽面特别容易遭受损伤。本发明可以以铜箔的无光泽面作为对象,也可以以施行粗造化处理的光泽面作为对象。
在铜箔的表面上堆积BTA的簿膜是公知的,这样的薄膜,有助于防止阻碍电路形成时的蚀刻的树脂粒子(树脂斑点)向铜箔表面附着。微细的电路和间隔是必不可缺少的PCB,产生树脂的斑点是特别成问题的。
旨在防止发生这种树脂斑点而涂敷的BTA的量,是约1mg/m2。但是,本发明人发现,如果能形成更厚的BTA层,则该BTA层能充分保护铜箔不遭受上述的擦伤。因此,具有这样的保护层的铜箔和制作这种铜箔的方法都包括在本发明之中。
BTA(苯并三唑)是适用于本发明的优选化合物。但是,也可以使用BTA的衍生物代替BTA,或者使用BTA的衍生物作为添加剂,尽管与使用以下所示的BTA的场合相比性能会有些不同。作为这样的苯并三唑的衍生物,可举出羧基苯并三唑;甲苯基三唑;以及它们的钠盐;或者它们的氨化合物,例如一醚胺盐、环己胺盐、二异丙胺盐、吗啉盐等。在提到“BTA”的场合,除以下所示的实施例以外,指TBA本身或其衍生物、或它们的混合物。
如以下的实施例所示那样,得到最好结果的是,相对铜箔使用5mg/m2、最好5-8mg/m2的量的BTA的场合。已知对能涂敷的BTA的量和结合在锌合金层上的BTA的量要限制。过剩的BTA不能充分结合在锌层或锌合金层上,而产生表面的问题。作为结果,这种过剩的BTA通常在使用铜箔前洗掉,但是,该洗掉过程并不是必不可少的。已知为了在铜箔上堆积所希望量的BTA,至少在实用的时间内,温度(液温)必须至少是20℃。较好的温度是40℃以上、最好的温度是40-70℃。在这些温度下,若使BTA水溶液接触锌层或锌合金层约2-10秒,则可以充分涂敷所希望的多量BTA层。参照后述的实施例8和图8,认为BTA的浓度是不重要的,通常,认为0.5-19g/L是合适的。如以下的实施例所示那样,十分适合使用BTA浓度约3g/L的溶液。
不一定必须在锌层或锌合金层上涂敷铬酸盐。如果不成为设置BTA层的障碍,也可以涂敷铬酸盐。因为考虑BTA与锌层的化学结合,设置像铬酸盐层那样的中间层,可能会不防碍设置多量的BTA层的能力。认为应该在锌层或锌合金层上涂覆仅约1.5mg/m2的铬酸盐。
在以下的实施例中,在厚18μm的铜箔的光泽面上设置由锌(20mg/m2)组成的第1层。在设置该层时,使用含有焦磷酸锌6.0g/L(作为锌)和焦磷酸钾100g/L的电解液.其他的条件是,电解液的pH是10.5,液温是室温,电流密度是1A/dm2,反应时间是2秒.将设置锌层的铜箔在含有铬酸盐1.0g/L的溶液中浸渍2秒,在锌层上涂敷铬酸盐附着层。该溶液的pH是12.0。在某几个实施例中,上述溶液中的电流密度设定为0.1A/dm2,也进行电沉积铬酸盐。另外,在其他的实施例中,不流过电流也形成铬酸盐层。
在铜箔上设置锌层或铬酸盐层后,在原来的温度,在该铜箔上将含有3g/L的BTA的水溶液浇淋3秒钟来设置BTA层。此后,用水洗去剩余的BTA。将堆积BTA的铜箔切成5×5cm的片,将该铜箔在25mL的0.2N硫酸溶液中浸渍10分钟,测定BTA的堆积量。使用高速液相色谱法(HPLC)测定硫酸中的BTA的浓度。即,将20μL的试料注人装填TSK GEL ODS 80 TM填充剂的、内径4.6mm、长250mm的柱(柱温:40℃)中,使用乙腈∶水的体积比为50∶50的混合物、以1.0ml/min萃取BTA。
擦伤试验
对涂敷各种量的BTA而得到的铜箔进行擦伤试验。即,将2片分别层叠在预成形体上的10cm×10cm的铜箔片重叠,使涂敷BTA的面彼此相对,通过橡皮带在2个重合的铜箔片上施加6.9kg的载荷。在施加6.9kg载荷的状态使铜箔片错开3cm,使2片铜箔片摩擦接合,测定是否形成达到铜箔和基板之间的粘结剂那样深的伤痕。铜箔的伤痕引起铜箔的裂纹,在市售的印刷电路板中,若铜箔产生裂纹,则该电路板就被废弃处理。
树脂斑点试验
在报道以下的树脂斑点试验的例子中,其结果是将粉状环氧树脂散布在层叠体露出的铜箔面上而得到的。用不锈钢板作为隔板组装这样的一组层叠体。将由该层叠体和不锈钢板组成的组合件加热压接而层叠。然后,求出附着在不锈钢板和层叠体的露出的铜箔表面上的树脂粒子数。
附图简要说明
图1是表示铜箔的伤痕数与BTA的堆积量的关系曲线图。
图2是表示达规定量的BTA堆积量时的BTA溶液的液温与接触时间的关系曲线图。
实施例
实施例1
在厚18μm的电解铜箔的一面上,通过电沉积像上述那样进行20mg/m2的镀锌和铬酸盐处理。再使已进行镀锌和铬酸盐处理的铜箔表面与液温60℃的BTA溶液(3g/L)接触3秒钟,水洗的结果,BTA的堆积量是8.2mg/m2
实施例2
在厚18μm的电解铜箔的光泽面上,像上述那样进行20mg/m2的镀锌,将该铜箔的光泽面浸入铬酸盐溶液中,进行铬酸盐处理(无电流流动)。再使已进行镀锌和铬酸盐处理的铜箔表面与液温60℃的BTA溶液(3g/L)接触3秒钟,水洗的结果,BTA的堆积量是7.9mg/m2
除铬酸盐处理时的电流密度为0A/dm2以外,镀锌和铬酸盐处理中使用的浴液组成和设定条件与实施例1相同。
实施例3
在厚18μm的电解铜箔的光泽面上,像上述那样进行20mg/m2的镀锌,将该铜箔的光泽面浸入铬酸盐溶液中,进行铬酸盐处理。再使已进行镀锌和铬酸盐处理的铜箔表面与液温50℃的BTA溶液(3g/L)接触5秒钟,水洗的结果,BTA的堆积量是6.5mg/m2
在镀锌和铬酸盐处理中使用的浴液组成和设定条件与实施2相同。
比较例1
在厚18μm的电解铜箔的光泽面上,像上述那样进行20mg/m2的镀锌,将该铜箔的光泽面浸入铬酸盐溶液中,进行铬酸盐处理。再使已进行镀锌和铬酸盐处理的铜箔表面与液温50℃的BTA溶液(3g/L)接触1秒钟,水洗的结果,BTA的堆积量是3.0mg/m2
在镀锌和铬酸盐处理中使用的浴液组成和设定条件与实施2相同。
比较例2
在厚18μm的电解铜箔的光泽面上,利用电沉积进行20mg/m2的镀锌和铬酸盐使用处理。再使已进行镀锌和铬酸盐处理的铜箔表面与液温50℃的BTA溶液(3g/L)接触1秒钟,水洗的结果,BTA的堆积量是2.0mg/m2
在镀锌和铬酸盐处理中使用的浴液组成和设定条件与实施1相同。
比较例3
在厚18μm的电解铜箔的光泽面上,利用电沉积进行20mg/m2的镀锌和铬酸盐使用处理。再使已进行镀锌和铬酸盐处理的铜箔表面与液温30℃的BTA溶液(3g/L)接触1秒钟,水洗的结果,BTA的堆积量是1.1mg/m2
在镀锌和铬酸盐处理中使用的浴液组成和设定条件与实施1相同。
比较例4
在厚18μm的电解铜箔的光泽面上,利用电沉积进行20mg/m2的镀锌和铬酸盐使用处理。使铜箔表面接触BTA溶液。
在镀锌和铬酸盐处理中使用的浴液组成和设定条件与实施1相同。
对各实施例和比较例的铜箔试料进行上述擦伤试验。其结果示于表1中。
                     表1
 实施例及比较例  苯并三唑的堆积量  裂纹的数目
    实施例1      8.2      0
    实施例2      7.9      0
    实施例3      6.5      1
    比较例1      3.0      6
    比较例2      2.0      7
    比较例3      1.1      10
    比较例4      0.0      16
如从表1所示的结果看到的那样,在铜箔表面引起裂纹的铜箔表面上的深伤痕数,随附着在其表面上的BTA的堆积量增加而减少。另外,BTA的堆积量超过5mg/m2时,铜箔的抗擦伤能力急剧提高。
图1是将BTA的堆积量与由深伤痕引起的裂纹数的关系的上述数据绘制成曲线。
按照本发明处理的铜箔能够抑制铜箔表面发生深的伤痕。因比,对避免因擦过铜箔而引起的开路的缺点是有用的。
实施例4
在已进行镀锌和铬酸盐处理的铜箔上,以按照本发明能确立堆积多量BTA层的条件的一系列液温及与铜箔的接触时间,使用BTA浓度2.5g/L的溶液,设置BTA层。它们的绘制成曲线的结果示于图2中。在使用具有一定液温的BTA溶液的情况下,接触时间越长,BTA堆积量越多。提高液温,可以缩短接触时间。液温的范围可以大体从室温至约60-70℃。另外,在接触时间为10秒以下的场合,可以得到所希望的堆积量,即至少得到5mg/m2的BTA层。
实施例5
使用几种市售的铜箔试料,在各个市售的铜箔表面上已进行了镀锌和铬酸盐处理。将这些铜箔在BTA浓度为3g/L的溶液(液温28℃和60℃两种)中浸渍1秒。从BTA溶液中取出铜箔,2秒钟后,用水冲洗铜箔,然后进行干燥。接着,测定附着在铜箔上的BTA量。结果示于下述的表2中。
表2
    铜箔  铜箔的厚度(μm)       表面分析(mg/m2)           BTA(mg/m2)
   Zn    Cr    28℃    60℃
三井金属矿业社制(3EC-3)     35   19.8    1.0    3.3    6.5
三井金属矿业社制(3EC-3)     18   21.4    1.0    -    6.2
ゲ-ルド社制     35   13.7    3.3    0.8    2.9
ゲ-ルド社制     18   10.4    2.8    0.5    2.8
サ-キツトフオィル社制     35   15.7    1.5    3.8    5.9
福田金属箔粉社制     35   7.1    1.5    2.0    4.4
为了对铜箔赋予耐擦伤性而在铜箔上堆积约5-8mg/m2堆积量的BTA层的场合,得到应使铬酸盐层的堆积量不应太多。铬酸盐层的堆积量,以最多约1.5mg/m2为宜。铬酸盐处理要考虑不防碍BTA层与锌层或锌合金层的结合。另外,由于铬酸盐层的存在,在水洗铜箔时,要考虑洗掉一些BTA的可能性。

Claims (11)

1.印刷电路板用铜箔,其包括通过在所述铜箔表面上涂覆由锌或锌合金组成的第1层和涂覆来自由苯并三唑和水组成的水溶液的苯并三唑的第2层,以及在所述第1层和第2层之间涂覆1.5mg/m2以下的铬酸盐层,所述第2层为至少5mg/m2以提供增加的耐伤性。
2.权利要求1所述的铜箔,其中,在温度至少20℃下,使由苯并三唑和水组成的水溶液与含所述第1层的铜箔接触,堆积所述苯并三唑的第2层。
3.权利要求2所述的铜箔,其中,所述堆积温度是40-70℃。
4.权利要求2所述的铜箔,其中,堆积第2层后,进行水洗。
5.权利要求1所述的铜箔,其中,所述第1层和第2层涂覆在所述铜箔的光泽面上。
6.具备基板层和权利要求1中记载的至少1层铜箔层的层叠体,其特征在于,含有所述第1层和第2层的铜箔表面露出。
7.印刷电路板,其特征在于,具备至少1个权利要求6记载的层叠体。
8.在铜箔的光泽面上涂覆苯并三唑保护层的方法,其由以下步骤组成:
(a)在所述铜箔表面上涂覆一层锌或锌合金层;
(b)在(a)的锌或锌合金涂覆的铜箔上涂覆一层1.5mg/m2以下的铬酸盐层;
(c)用由苯并三唑和水组成的水溶液接触来自(b)的所述铜箔以在所述铬酸盐层上堆积至少5mg/m2苯并三唑。
9.权利要求8所述的方法,其中,以至少20℃的温度将所述溶液涂覆在所述铜箔上。
10.权利要求9所述的方法,其中,以40-70℃的温度将所述溶液涂覆在所述铜箔上。
11.权利要求8所述的方法,其中,堆积步骤(c)中的所述层后,进行水洗。
CN97114996A 1996-06-17 1997-06-16 印刷电路板用铜箔及其制造方法和使用该铜箔的层叠体及印刷电路板 Expired - Lifetime CN1116789C (zh)

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JP4309602B2 (ja) 2001-04-25 2009-08-05 メック株式会社 銅または銅合金と樹脂との接着性を向上させる方法、ならびに積層体
US6770976B2 (en) 2002-02-13 2004-08-03 Nikko Materials Usa, Inc. Process for manufacturing copper foil on a metal carrier substrate
JP4330979B2 (ja) * 2003-11-13 2009-09-16 福田金属箔粉工業株式会社 表面処理電解銅箔
US7383629B2 (en) * 2004-11-19 2008-06-10 Endicott Interconnect Technologies, Inc. Method of making circuitized substrates utilizing smooth-sided conductive layers as part thereof
JP4884298B2 (ja) * 2007-05-17 2012-02-29 日本化薬株式会社 樹脂層付き銅箔
CN103221583B (zh) * 2010-11-22 2015-05-13 三井金属矿业株式会社 表面处理铜箔
JP2012158828A (ja) * 2011-02-03 2012-08-23 Furukawa Electric Co Ltd:The 表面処理銅箔及びその製造方法
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EP0814644B1 (en) 2001-10-24
ID17285A (id) 1997-12-18
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CN1174491A (zh) 1998-02-25
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TW369785B (en) 1999-09-11
ES2162160T3 (es) 2001-12-16

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