CN111410524B - 一种ltcc微波介质材料及其制备方法 - Google Patents

一种ltcc微波介质材料及其制备方法 Download PDF

Info

Publication number
CN111410524B
CN111410524B CN202010188993.5A CN202010188993A CN111410524B CN 111410524 B CN111410524 B CN 111410524B CN 202010188993 A CN202010188993 A CN 202010188993A CN 111410524 B CN111410524 B CN 111410524B
Authority
CN
China
Prior art keywords
equal
powder
microwave dielectric
glass
ball milling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010188993.5A
Other languages
English (en)
Other versions
CN111410524A (zh
Inventor
陈涛
程凯
曹秀华
沓世我
付振晓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Fenghua Advanced Tech Holding Co Ltd
Original Assignee
Guangdong Fenghua Advanced Tech Holding Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Fenghua Advanced Tech Holding Co Ltd filed Critical Guangdong Fenghua Advanced Tech Holding Co Ltd
Priority to CN202010188993.5A priority Critical patent/CN111410524B/zh
Publication of CN111410524A publication Critical patent/CN111410524A/zh
Priority to JP2021544937A priority patent/JP7254195B2/ja
Priority to PCT/CN2021/078758 priority patent/WO2021185075A1/zh
Priority to KR1020217024601A priority patent/KR102618234B1/ko
Priority to US17/389,334 priority patent/US20210355035A1/en
Application granted granted Critical
Publication of CN111410524B publication Critical patent/CN111410524B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G41/00—Compounds of tungsten
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C12/00—Powdered glass; Bead compositions
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/6261—Milling
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62685—Treating the starting powders individually or as mixtures characterised by the order of addition of constituents or additives
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/62—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing gallium, indium or thallium
    • C09K11/621—Chalcogenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
    • H01B3/12—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances ceramics
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/40—Electric properties
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/90—Electrical properties
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
    • C04B2235/3203—Lithium oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3213—Strontium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3215—Barium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3232—Titanium oxides or titanates, e.g. rutile or anatase
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3258—Tungsten oxides, tungstates, or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3258—Tungsten oxides, tungstates, or oxide-forming salts thereof
    • C04B2235/326—Tungstates, e.g. scheelite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3409—Boron oxide, borates, boric acids, or oxide forming salts thereof, e.g. borax
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3418—Silicon oxide, silicic acids, or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3427—Silicates other than clay, e.g. water glass
    • C04B2235/3436—Alkaline earth metal silicates, e.g. barium silicate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/36—Glass starting materials for making ceramics, e.g. silica glass
    • C04B2235/365—Borosilicate glass
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567—Treatment time
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Insulating Materials (AREA)
  • Glass Compositions (AREA)

Abstract

本发明公开了一种LTCC微波介质材料，所述LTCC微波介质材料的材料组分如下：a Ba5Si8O21+(1‑a)(MgxCaySrzBa1‑x‑y‑z)WO4+Ba‑B‑Si玻璃；其中，0.4≤a≤0.8，0≤x≤1，0≤y≤1，0≤z≤1。本发明通过调整Ba5Si8O21及(MgxCaySrzBa1‑x‑y‑z)WO4的含量，可将谐振频率温度系数调节到近零，适用于高频通讯及射频领域。同时，本发明还公开一种LTCC微波介质材料的制备方法。

Description

一种LTCC微波介质材料及其制备方法
技术领域
本发明属于微波介质材料技术领域，具体涉及一种谐振频率温度系数近零的LTCC微波介质材料及其制备方法。
背景技术
随着5G通讯及万物互联时代的到来，高频应用成为趋势。小型化、高集成度和高可靠性成为5G通信器件的典型特点。用于5G通信器件集成技术的关键介质材料-低温共烧陶瓷材料(LTCC)成为研究热点。为减少信号传输损耗，加快信号传输速度，需要LTCC材料具备较低的介电常数及较高的Q值(即低损耗)；为提高信号传输的稳定性，需要材料具备近零的谐振频率温度系数。
申请号为“200910113981.X”的中国发明专利，将Ba5-xLaxTixNbxO15与BaCuB2O5及BaWO4复合，得到了Qf值高于10000GHz的低温烧结微波介质陶瓷，且其谐振频率温度系数近零；但由于Ba5-xLaxTixNbxO15介电常数较高，导致体系介电常数较高(35～45)，不符合低介电常数要求。为此，需开发新的复合材料体系，以满足低介电常数，且谐振频率温度系数近零的LTCC微波介质陶瓷需求。
发明内容
基于此，本发明的目的在于克服上述现有技术的不足之处而提供一种谐振频率温度系数近零的LTCC微波介质材料。
为实现上述目的，本发明所采取的技术方案为：一种LTCC微波介质材料，所述LTCC微波介质材料的材料组分如下：a Ba5Si8O21+(1-a)(MgxCaySrzBa1-x-y-z)WO4+Ba-B-Si玻璃；其中，0.4≤a≤0.8，0≤x≤1，0≤y≤1，0≤z≤1。
本发明通过将具有正谐振频率温度系数且介电常数较低的钡硅酸盐Ba5Si8O21与具有负谐振频率温度系数的钨酸盐(MgxCaySrzBa1-x-y-z)WO4复合，通过低熔点Ba-B-Si玻璃添加来降低体系烧结温度，得到了低介电常数，且谐振频率温度系数近零的LTCC微波介质陶瓷，适用于高频通讯及射频领域。
优选地，所述Ba-B-Si玻璃的重量为Ba5Si8O21、MgxCaySrzBa1-x-y-z重量之和的2～15％。这一选择可以更好的降低体系的烧结温度。
同时，本发明还提供一种所述的LTCC微波介质材料的制备方法，包括如下步骤：
(1)按照化学计量比Ba5Si8O21称取原料，将称量好的原料倒入球磨罐中，加入氧化锆球和去离子水，球磨4-12h，取出、烘干、过筛，将过筛后的粉末在1100-1250℃下煅烧，保温1-5h，冷却至室温，得到Ba5Si8O21粉体；
(2)按照化学计量比(MgxCaySrzBa1-x-y-z)WO4称取原料，将称量好的原料倒入球磨罐中，加入氧化锆球和去离子水，行星球磨4-12h，取出、烘干、过筛，将过筛后的粉末在700-1000℃下煅烧，保温1-5h，冷却至室温，得到(MgxCaySrzBa1-x-y-z)WO4粉体；
(3)将Ba-B-Si玻璃放入球磨罐中，加入氧化锆球和去离子水，球磨2-6h，取出、烘干，得到Ba-B-Si玻璃粉；
(4)将步骤(1)得到的Ba5Si8O21粉体、步骤(2)得到的(MgxCaySrzBa1-x-y-z)WO4粉体、步骤(3)得到的Ba-B-Si玻璃粉加入球磨罐中，加入氧化锆球和去离子水，球磨2-6h，取出、烘干、打粉，得到用于制备LTCC微波介质陶瓷的瓷粉；
(5)在步骤(4)所得瓷粉中添加PVA溶液造粒，并压制成圆柱状块体，在850-900℃下烧结，保温0.5-3h，得到LTCC微波介质陶瓷。
优选地，所述步骤(3)中的Ba-B-Si玻璃通过以下方法制备所得：
以SiO2、H3BO3、BaCO3、Na2CO3、Li2CO3、BaCO3、SrCO3、K2CO3、Al2O3、MgO、TiO2为原料，将称量好的原料倒入球磨罐中，加入氧化锆球和去离子水，行星球磨1-4h，取出、烘干，将烘干后的粉末在1200-1500℃下熔融，保温1-3h，将玻璃液高温取出，倒入去离子水中淬火，得到Ba-B-Si玻璃。
本申请制备方法中，采用固相法合成谐振频率温度系数(τf)为正值的钡硅酸盐Ba5Si8O21及τf为负值的钨酸盐AWO4(A可以是碱土金属元素中的任意一种或一种以上的组合)，采用高温熔融法制备Ba-B-Si(BBS)低熔点玻璃；通过控制Ba5Si8O21及AWO4的含量调节τf近零，通过BBS玻璃添加将体系烧结温度降低到900℃以下，得到τf近零的低介电常数LTCC微波介质陶瓷。
优选地，所述步骤(1)、步骤(2)中的过筛为：过200目筛。
优选地，所述步骤(5)中，PVA溶液的重量为瓷粉重量的7-10wt％。
优选地，所述步骤(2)中的原料为MgO、CaCO3、SrCO3、BaCO3和WO3。
优选地，所述步骤(1)中的原料为BaCO3和SiO2。
相对于现有技术，本发明的优势在于：
本申请所用原材料通过固相法合成，工艺简单、适合工业生产，所合成的Ba5Si8O21、(MgxCaySrzBa1-x-y-z)WO4及Ba-B-Si玻璃介电常数较低，经复合后得到的LTCC微波介质陶瓷具备较低的介电常数，通过调整Ba5Si8O21及(MgxCaySrzBa1-x-y-z)WO4的含量，可将谐振频率温度系数调节到近零，适用于高频通讯及射频领域。
具体实施方式
为更好的说明本发明的目的、技术方案和优点，下面将结合具体实施例对本发明作进一步说明。
本申请实施例中的LTCC微波介质材料的材料组分如下：a Ba5Si8O21+(1-a)(MgxCaySrzBa1-x-y-z)WO4+Ba-B-Si玻璃；其中，0.4≤a≤0.8，0≤x≤1，0≤y≤1，0≤z≤1；所述Ba-B-Si玻璃的重量为Ba5Si8O21、MgxCaySrzBa1-x-y-z重量之和的2～15％(b％)；
本申请实施例中的LTCC微波介质材料的制备方法如下：
(1)按照化学计量比Ba5Si8O21称取BaCO3及SiO2原料，将称量好的原料倒入球磨罐中，加入氧化锆球和去离子水，行星球磨4-12h，取出、烘干、过200目筛，将过筛后的粉末放到氧化铝坩埚中，在马弗炉中以1100-1250℃煅烧，保温1-5h，冷却至室温，得到Ba5Si8O21粉体；
(2)按照化学计量比(MgxCaySrzBa1-x-y-z)WO4取MgO、BaCO3、SrCO3、BaCO3及WO3原料(其中0≤x≤1，0≤y≤1，0≤z≤1)，将称量好的原料倒入球磨罐中，加入氧化锆球和去离子水，行星球磨4-12h，取出、烘干、过200目筛，将过筛后的粉末放到氧化铝坩埚中，在马弗炉中以700-1000℃煅烧，保温1-5h，冷却至室温，得到(MgxCaySrzBa1-x-y-z)WO4粉体；
(3)按照配比SiO2(45.8wt％)、H3BO3(39.6wt％)、BaCO3(5.3wt％)、Na2CO3(1.6wt％)、Li2CO3(0.7wt％)、BaCO3(1.5wt％)、SrCO3(1.1wt％)、K2CO3(1.9wt％)、Al2O3(1.2wt％)、MgO(0.8wt％)、TiO2(0.5wt％)，将称量好的原料倒入球磨罐中，加入氧化锆球和去离子水，行星球磨1-4h，取出、烘干，将烘干后的粉末放到氧化铝坩埚中，在高温炉中1200-1500℃熔融，保温1-3h，将玻璃液高温取出，倒入去离子水中淬火，得到Ba-B-Si玻璃，将Ba-B-Si玻璃放入球磨罐中，加入氧化锆球和去离子水，行星球磨2-6h，取出、烘干，得到Ba-B-Si玻璃粉；
(4)按照a Ba5Si8O21+(1-a)(MgxCaySrzBa1-x-y-z)WO4+b wt％Ba-B-Si玻璃的比例称取上述所Ba5Si8O21、(MgxCaySrzBa1-x-y-z)WO4及Ba-B-Si玻璃粉体，其中0.4≤a≤0.8，2≤b≤15；将称量好的粉体倒入球磨罐中，加入氧化锆球和去离子水，行星球磨2-6h，取出、烘干、打粉，得到用于制备LTCC微波介质陶瓷的瓷粉；
(5)在上述瓷粉中添加7-10wt％的PVA溶液造粒并压制成圆柱状块体，在850-900℃之间烧结，保温0.5-3h，得到LTCC微波介质陶瓷。
具体各实施例LTCC微波介质材料的材料组分及性能如表1所示，其中，介电常数及Qf值采用网络分析仪，以平行板反射法测试得到；τf值根据公式
Figure BDA0002414475310000041
计算得到，其中，T2和T1分别为80℃及25℃，f2和f1分别为温度T2及T1下样品的谐振频率。
表1具体实施例材料组分及对应样品微波介电性能
Figure BDA0002414475310000042
Figure BDA0002414475310000051
从表1可以看出，本申请得到的LTCC微波介质陶瓷具备较低的介电常数，通过调整Ba5Si8O21及(MgxCaySrzBa1-x-y-z)WO4的含量，可将谐振频率温度系数调节到近零，适用于高频通讯及射频领域。
最后所应当说明的是，以上实施例仅用以说明本发明的技术方案而非对本发明保护范围的限制，尽管参照较佳实施例对本发明作了详细说明，本领域的普通技术人员应当理解，可以对本发明的技术方案进行修改或者等同替换，而不脱离本发明技术方案的实质和范围。

Claims (7)

1.一种LTCC微波介质材料，其特征在于，所述LTCC微波介质材料的材料组分如下：aBa5Si8O21 +（1-a）(MgxCaySrzBa1-x-y-z)WO4 + Ba-B-Si玻璃；其中，0.4 ≤ a ≤ 0.8，0 ≤ x≤ 1，0 ≤ y ≤ 1，0 ≤ z ≤ 1，所述Ba-B-Si玻璃的重量为Ba5Si8O21、MgxCaySrzBa1-x-y-z重量之和的2~15%。
2.一种如权利要求1所述的LTCC微波介质材料的制备方法，其特征在于，包括如下步骤：
（1）按照化学计量比Ba5Si8O21称取原料，将称量好的原料倒入球磨罐中，加入氧化锆球和去离子水，球磨4-12h，取出、烘干、过筛，将过筛后的粉末在1100-1250℃下煅烧，保温1-5h，冷却至室温，得到Ba5Si8O21粉体；
（2）按照化学计量比(MgxCaySrzBa1-x-y-z)WO4称取原料，将称量好的原料倒入球磨罐中，加入氧化锆球和去离子水，行星球磨4-12h，取出、烘干、过筛，将过筛后的粉末在700-1000℃下煅烧，保温1-5h，冷却至室温，得到(MgxCaySrzBa1-x-y-z)WO4粉体；
（3）将Ba-B-Si玻璃放入球磨罐中，加入氧化锆球和去离子水，球磨2-6h，取出、烘干，得到Ba-B-Si玻璃粉；
（4）将步骤（1）得到的Ba5Si8O21粉体、步骤（2）得到的(MgxCaySrzBa1-x-y-z)WO4粉体、步骤（3）得到的Ba-B-Si玻璃粉加入球磨罐中，加入氧化锆球和去离子水，球磨2-6h，取出、烘干、打粉，得到用于制备LTCC微波介质陶瓷的瓷粉；
（5）在步骤（4）所得瓷粉中添加PVA溶液造粒，并压制成圆柱状块体，在850-900℃下烧结，保温0.5-3h，得到LTCC微波介质陶瓷。
3.如权利要求2所述的LTCC微波介质材料的制备方法，其特征在于，所述步骤（3）中的Ba-B-Si玻璃通过以下方法制备所得：
以SiO2、H3BO3、BaCO3、Na2CO3、Li2CO3、SrCO3、K2CO3、Al2O3、MgO、TiO2为原料，将称量好的原料倒入球磨罐中，加入氧化锆球和去离子水，行星球磨1-4h，取出、烘干，将烘干后的粉末在1200-1500℃下熔融，保温1-3h，将玻璃液高温取出，倒入去离子水中淬火，得到Ba-B-Si玻璃。
4.如权利要求2所述的LTCC微波介质材料的制备方法，其特征在于，所述步骤（1）、步骤（2）中的过筛为：过200目筛。
5.如权利要求2所述的LTCC微波介质材料的制备方法，其特征在于，所述步骤（5）中，PVA溶液的重量为瓷粉重量的7-10wt%。
6.如权利要求2所述的LTCC微波介质材料的制备方法，其特征在于，所述步骤（2）中的原料为MgO、CaCO3、SrCO3、BaCO3和WO3。
7.如权利要求2所述的LTCC微波介质材料的制备方法，其特征在于，所述步骤（1）中的原料为BaCO3和SiO2。
CN202010188993.5A 2020-03-17 2020-03-17 一种ltcc微波介质材料及其制备方法 Active CN111410524B (zh)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN202010188993.5A CN111410524B (zh) 2020-03-17 2020-03-17 一种ltcc微波介质材料及其制备方法
JP2021544937A JP7254195B2 (ja) 2020-03-17 2021-03-02 Ｌｔｃｃマイクロ波誘電体材料及びその製造方法
PCT/CN2021/078758 WO2021185075A1 (zh) 2020-03-17 2021-03-02 一种ltcc微波介质材料及其制备方法
KR1020217024601A KR102618234B1 (ko) 2020-03-17 2021-03-02 Ltcc 마이크로파 유전체 재료 및 이의 제조 방법
US17/389,334 US20210355035A1 (en) 2020-03-17 2021-07-29 Ltcc microwave dielectric material and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010188993.5A CN111410524B (zh) 2020-03-17 2020-03-17 一种ltcc微波介质材料及其制备方法

Publications (2)

Publication Number Publication Date
CN111410524A CN111410524A (zh) 2020-07-14
CN111410524B true CN111410524B (zh) 2022-03-04

Family

ID=71489041

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010188993.5A Active CN111410524B (zh) 2020-03-17 2020-03-17 一种ltcc微波介质材料及其制备方法

Country Status (5)

Country Link
US (1) US20210355035A1 (zh)
JP (1) JP7254195B2 (zh)
KR (1) KR102618234B1 (zh)
CN (1) CN111410524B (zh)
WO (1) WO2021185075A1 (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111410524B (zh) * 2020-03-17 2022-03-04 广东风华高新科技股份有限公司 一种ltcc微波介质材料及其制备方法
CN112079631B (zh) * 2020-09-22 2022-06-07 研创光电科技（赣州）有限公司 一种近零温度系数低介ltcc材料及其制备方法
CN114394827B (zh) * 2021-12-28 2022-12-23 南京工程学院 一种低介电常数硅酸盐微波介质陶瓷及其制备方法
CN115353387B (zh) * 2022-08-17 2023-10-03 电子科技大学 一种微波介质材料ErVO4及其制备方法
CN115611628A (zh) * 2022-10-20 2023-01-17 苏州晶讯科技股份有限公司 一种低温烧结陶瓷材料及其制备方法和应用
CN115925401B (zh) * 2022-11-10 2023-07-25 华中科技大学 一种低介硅酸盐微波介质陶瓷材料及其制备方法
CN116283282B (zh) * 2022-12-09 2024-03-08 玉林师范学院 钒基低介电常数微波介质陶瓷材料及其制备方法
CN116143508A (zh) * 2022-12-20 2023-05-23 无锡鑫圣慧龙纳米陶瓷技术有限公司 一种低介电常数高温度稳定型微波介质陶瓷及其制备方法
CN116283284A (zh) * 2023-02-17 2023-06-23 深圳市麦捷微电子科技股份有限公司 一种中温烧结微波介质陶瓷材料及其制备方法
CN116217213B (zh) * 2023-02-20 2024-02-27 武汉纺织大学 超低介电常数的硅基微波介质陶瓷的制备方法
CN117263683B (zh) * 2023-09-19 2024-04-16 江苏飞特尔通信有限公司 一种微波陶瓷材料及其制备方法和在与铜共烧制备5g ltcc滤波器中的应用

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004203646A (ja) * 2002-12-24 2004-07-22 Ngk Insulators Ltd 低温焼成磁器および電子部品
CN103570349A (zh) * 2012-07-26 2014-02-12 深圳市国华新材料科技股份有限公司 掺杂改性的复合钙钛矿型微波介质陶瓷Ba(Co,Nb)O3及其制备方法
CN106699150A (zh) * 2017-01-11 2017-05-24 北京元六鸿远电子科技股份有限公司 一种低温烧结低介c0g微波介质材料及其制备方法
CN106699178A (zh) * 2015-11-18 2017-05-24 信昌电子陶瓷股份有限公司 低温共烧陶瓷微波介电陶瓷
JP2018104209A (ja) * 2016-12-22 2018-07-05 株式会社村田製作所 誘電体磁器組成物および積層コンデンサ
CN110229004A (zh) * 2019-07-05 2019-09-13 电子科技大学 一种低温烧结微波介质陶瓷材料及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100444359B1 (ko) * 2001-12-21 2004-08-16 한국과학기술연구원 Ｌｔｃｃ용 저유전율 세라믹 조성물
TWI585793B (zh) * 2015-11-18 2017-06-01 Prosperity Dielectrics Co Ltd 低溫共燒陶瓷微波介電陶瓷及其製造方法
CN105801119B (zh) * 2016-05-11 2018-06-19 电子科技大学 一种微波介电ltcc材料及其制备方法
CN108409325A (zh) * 2018-05-15 2018-08-17 湖南先导电子陶瓷科技产业园发展有限公司 一种超低温烧结的高q值微波介质陶瓷材料制备工艺及产品
CN111410524B (zh) * 2020-03-17 2022-03-04 广东风华高新科技股份有限公司 一种ltcc微波介质材料及其制备方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004203646A (ja) * 2002-12-24 2004-07-22 Ngk Insulators Ltd 低温焼成磁器および電子部品
CN103570349A (zh) * 2012-07-26 2014-02-12 深圳市国华新材料科技股份有限公司 掺杂改性的复合钙钛矿型微波介质陶瓷Ba(Co,Nb)O3及其制备方法
CN106699178A (zh) * 2015-11-18 2017-05-24 信昌电子陶瓷股份有限公司 低温共烧陶瓷微波介电陶瓷
JP2018104209A (ja) * 2016-12-22 2018-07-05 株式会社村田製作所 誘電体磁器組成物および積層コンデンサ
CN106699150A (zh) * 2017-01-11 2017-05-24 北京元六鸿远电子科技股份有限公司 一种低温烧结低介c0g微波介质材料及其制备方法
CN110229004A (zh) * 2019-07-05 2019-09-13 电子科技大学 一种低温烧结微波介质陶瓷材料及其制备方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Temperature-stable BaAl2Si2O8–Ba5Si8O21-based low-permittivity;Xiao-Qiang Song;《Ceramics International》;20170801;第14453–14456页 *

Also Published As

Publication number Publication date
JP2022529563A (ja) 2022-06-23
KR20210118407A (ko) 2021-09-30
CN111410524A (zh) 2020-07-14
JP7254195B2 (ja) 2023-04-07
US20210355035A1 (en) 2021-11-18
WO2021185075A1 (zh) 2021-09-23
KR102618234B1 (ko) 2023-12-27

Similar Documents

Publication Publication Date Title
CN111410524B (zh) 一种ltcc微波介质材料及其制备方法
CN103265271B (zh) 频率温度系数可调低温烧结氧化铝陶瓷材料及制备方法
US10179749B2 (en) Low-temperature co-fired ceramic material and preparation method thereof
CN103232235B (zh) 一种低温烧结复合微波介质陶瓷材料及其制备方法
CN109836141B (zh) 一种高热导率低温共烧陶瓷材料及其制备方法
WO2022188219A1 (zh) 一种频率稳定型低介微波介质陶瓷材料及其制备方法
CN107986774B (zh) 低温烧结高介电常数微波介质陶瓷材料及其制备方法
CN104230329A (zh) 一种低温烧结微波陶瓷材料及其制备方法
CN108516825A (zh) 一种低介电微波介质陶瓷材料及其制备方法
CN101362647A (zh) 锂基低温烧结微波介质陶瓷材料及其制备
CN110436894A (zh) 一种低介电常数ltcc材料及其制备方法
CN109650871A (zh) 一种ZnAl2O4陶瓷体系材料及其制备方法
JP3737773B2 (ja) 誘電体セラミック組成物
CN108218406A (zh) 低介电常数低损耗的低温共烧陶瓷材料及其制备方法
CN113754439B (zh) 低介电常数的微波介质陶瓷及其制备方法和应用
CN102898027B (zh) 电子元器件封装材料用陶瓷粉及其生产方法
CN104671775A (zh) 一种Ba-Nd-Ti体系LTCC材料及制备方法
CN112830780B (zh) 一种调控剂、ltcc微波介质材料及其制备方法
CN111517771A (zh) 一种微波介质陶瓷材料及其制备方法
CN110723965A (zh) 一种无助熔剂ltcc微波陶瓷材料及其制备方法
CN106587991B (zh) 一种低温烧结复合微波介质陶瓷材料及其制备方法
CN115057695A (zh) 高q值低介电常数ltcc粉、ltcc材料及制备方法、生瓷带及制备方法和应用
CN110407579A (zh) 一种具有超高q值微波介质材料及其制备方法
CN104944786A (zh) 一种低温烧结低介玻璃陶瓷复合基板材料及其制备方法
CN116041062B (zh) 一种低温共烧陶瓷材料及其制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant