CN109844940A - 散热构件及使用该散热构件的电子装置 - Google Patents
散热构件及使用该散热构件的电子装置 Download PDFInfo
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- CN109844940A CN109844940A CN201780065013.9A CN201780065013A CN109844940A CN 109844940 A CN109844940 A CN 109844940A CN 201780065013 A CN201780065013 A CN 201780065013A CN 109844940 A CN109844940 A CN 109844940A
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- 239000002245 particle Substances 0.000 claims abstract description 85
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 71
- 239000004411 aluminium Substances 0.000 claims abstract description 20
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 20
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000011224 oxide ceramic Substances 0.000 claims abstract description 14
- 229910052574 oxide ceramic Inorganic materials 0.000 claims abstract description 14
- 238000009825 accumulation Methods 0.000 claims abstract description 9
- 229910052593 corundum Inorganic materials 0.000 claims abstract description 8
- 229910001845 yogo sapphire Inorganic materials 0.000 claims abstract description 8
- 238000009826 distribution Methods 0.000 claims abstract description 5
- 239000011575 calcium Substances 0.000 claims description 17
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 16
- 229910052791 calcium Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 239000011777 magnesium Substances 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 12
- 229910052749 magnesium Inorganic materials 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 229910052681 coesite Inorganic materials 0.000 claims description 5
- 229910052906 cristobalite Inorganic materials 0.000 claims description 5
- 229910052682 stishovite Inorganic materials 0.000 claims description 5
- 229910052905 tridymite Inorganic materials 0.000 claims description 5
- 239000000306 component Substances 0.000 claims 14
- 239000000843 powder Substances 0.000 description 39
- 239000000523 sample Substances 0.000 description 32
- 238000000034 method Methods 0.000 description 31
- 239000000463 material Substances 0.000 description 21
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 13
- 241000721047 Danaus plexippus Species 0.000 description 11
- 239000000292 calcium oxide Substances 0.000 description 11
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 11
- 238000005245 sintering Methods 0.000 description 11
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 10
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- 238000010191 image analysis Methods 0.000 description 10
- 239000000919 ceramic Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
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- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 8
- 238000010304 firing Methods 0.000 description 6
- 239000000395 magnesium oxide Substances 0.000 description 6
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- 238000002425 crystallisation Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000012752 auxiliary agent Substances 0.000 description 3
- 238000013007 heat curing Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
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- 238000004445 quantitative analysis Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
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- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 235000013399 edible fruits Nutrition 0.000 description 2
- 238000005469 granulation Methods 0.000 description 2
- 230000003179 granulation Effects 0.000 description 2
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 2
- 239000000347 magnesium hydroxide Substances 0.000 description 2
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 239000007767 bonding agent Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
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- 238000010884 ion-beam technique Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
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- 238000013507 mapping Methods 0.000 description 1
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- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
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- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/04—Constructions of heat-exchange apparatus characterised by the selection of particular materials of ceramic; of concrete; of natural stone
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3731—Ceramic materials or glass
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- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
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- C09K5/14—Solid materials, e.g. powdery or granular
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- H01L23/12—Mountings, e.g. non-detachable insulating substrates
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- H01L23/15—Ceramic or glass substrates
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
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Abstract
本公开的散热构件由氧化铝质陶瓷构成,该氧化铝质陶瓷含有氧化铝的结晶粒子,在全部成分100质量%中、以将铝换算为Al2O3而得的值计,含有98质量%以上的铝。而且,所述结晶粒子的当量圆直径的平均值为1.6μm以上且2.4μm以下,所述结晶粒子的当量圆直径的累积分布曲线中的、累积10%时的当量圆直径(d10)与累积90%时的当量圆直径(d90)的差为2.1μm以上且4.2μm以下。
Description
技术领域
本公开涉及散热构件及使用该散热构件的电子装置。
背景技术
已知在由陶瓷构成的散热构件上搭载有半导体元件、发热元件、帕尔贴(Peltier)元件等各种电子部件的电子装置。在此,作为构成散热构件的陶瓷,采用即使在陶瓷中热传导率也高、能够降低由电磁波的辐射引起的对电子部件的障碍、进一步地包括原料费在内制造成本低廉的氧化铝质陶瓷。
例如,在专利文献1中公开了一种陶瓷散热模块,该陶瓷散热模块是为了降低发热元件的温度而使用的陶瓷散热模块,所述陶瓷散热模块包括陶瓷散热模块主体,其中,所述陶瓷散热模块主体的组成包括实质上重量百分率为70%以上的氧化铝。
在先技术文献
专利文献
专利文献1:日本特开2012-222339号公报
发明内容
本公开的散热构件由氧化铝质陶瓷构成,该氧化铝质陶瓷含有氧化铝的结晶粒子,在全部成分100质量%中、以将铝换算成Al2O3而得的值计,含有98质量%以上的铝。此外,氧化铝的结晶粒子的当量圆直径的平均值为1.6μm以上且2.4μm以下。而且,氧化铝的结晶粒子的当量圆直径的累积分布曲线中的累积10%时的当量圆直径(d10)与累积90%时的当量圆直径(d90)的差为2.1μm以上且4.2μm以下。
附图说明
图1是表示本公开的电子装置的一例的俯视图。
图2是图1所示的电子装置的剖视图。
图3是表示本公开的散热构件的一例的俯视图。
图4是图3所示的散热构件的剖视图。
图5是表示本公开的散热构件的其他例子的剖视图。
具体实施方式
近年来,由于电子部件的高输出化不断发展,因此电子部件的动作时产生的热量变大。因此,要求散热构件具有高的热传导率。
此外,近年来,由于逐步推进电子装置的小型化,因此要求构成电子装置的散热构件的薄壁化。在此,为了使散热构件薄壁化,需要散热构件的机械强度优异。
本公开的散热构件兼具优异的热传导率和机械强度。以下,参照附图,对本公开的散热构件以及使用该散热构件的电子装置详细地进行说明。
如图1以及图2所示,本公开的电子装置10具备散热构件1和位于散热构件1上的电子部件2。
在此,电子部件2是指半导体元件、帕尔贴元件、发光元件、电阻、电容器、电感以及开关电源等。此外,电子部件2也可以是还具备变压器、继电器、马达等的部件。
此外,如图2所示,电子部件2也可以经由接合材料3与散热构件1接合。这样,通过经由接合材料3将电子部件2接合于散热构件1,从而能够将在电子部件2的动作时产生的热传递至散热构件1。在此,接合材料3也可以是金属钎料、焊料、热固化性树脂粘接材料、润滑脂以及双面粘接带等。另外,热固化性树脂粘接剂也可以含有使热传导性提高的金属填料、无机填料等。
而且,本公开的散热构件1由氧化铝质陶瓷构成,该氧化铝质陶瓷含有氧化铝的结晶粒子(以下,也仅记载为结晶粒子),在全部成分100质量%中、以将铝换算成Al2O3而得的值计,含有98质量%以上的铝。此外,在本公开的散热构件1中,结晶粒子的当量圆直径的平均值为1.6μm以上且2.4μm以下,结晶粒子的当量圆直径的累积分布曲线中的累积10%时的当量圆直径(d10)与累积90%时的当量圆直径(d90)的差为2.1μm以上且4.2μm以下。
在此,结晶粒子的d10是指将各结晶粒子中的当量圆直径的值按照从小到大的顺序排列,以当量圆直径的最小值为基准时,相当于结晶粒子的全部个数的10%的当量圆直径的值。例如,在结晶粒子的个数为100个的情况下,从小的一方开始计数当量圆直径的值时成为第十个的当量圆直径的值是结晶粒子的d10。
此外,结晶粒子的d90是指将各结晶粒子中的当量圆直径的值按照从小到大的顺序排列,以当量圆直径的最小值为基准时,相当于结晶粒子的全部个数的90%的当量圆直径的值。例如,在结晶粒子的个数为100个的情况下,从小的一方开始计数当量圆直径的值时成为第九十个的当量圆直径的值是结晶粒子的d90。
另外,当量圆直径是指替换为与结晶粒子的面积相等的圆的情况下的圆的直径。
本公开的散热构件1通过满足这样的结构,兼具优异的热传导率和机械强度。在此,本公开的散热构件1兼具优异的热传导率和机械强度,这是因为本公开的散热构件1成为如下的结构:氧化铝的含量多,因此成为热传导率降低的重要因素的化合物等的含量被限制,并且各结晶粒子的当量圆直径适度地离散变化,不易产生各结晶粒子彼此的间隙。另外,优异的热传导率是指通过依据JIS R1611-2010的激光闪光法求得的值为28W/m·K以上。此外,优异的机械强度是指依据JIS R1601-2008的三点弯曲强度的值为400MPa以上。
相对于此,若全部成分100质量%中、铝的含量以换算成Al2O3而得的值计小于98质量%,则成为热传导率的降低重要因素的化合物等的含量变多,不具有优异的热传导率。
此外,若结晶粒子的当量圆直径的平均值小于1.6μm,则随着晶界的面积比率的增加,不具有优异的热传导率。此外,在结晶粒子的当量圆直径的平均值超过2.4μm时,容易发生结晶粒子的脱落,因此不具有优异的机械强度。
此外,若结晶粒子的d10与d90的差小于2.1μm,则成为容易产生各结晶粒子彼此的间隙的结构,因此不具有优异的机械强度。进而,由于产生的间隙,热传导率降低。此外,结晶粒子的d10与d90的差超过4.2μm时,晶界的面积比率增加,不具有优异的热传导率。进而,容易发生结晶粒子的脱落,机械强度降低。
在此,本公开的散热构件1中的氧化铝的含量可以通过以下的方法计算。首先,使用ICP发光分光分析装置(ICP)或者荧光X线分析装置(XRF),进行散热构件1中的铝(A1)的定量分析。然后,从测定的铝的含量换算成氧化铝(Al2O3)即可。
此外,结晶粒子的当量圆直径的平均值与结晶粒径的d10以及d90通过以下的方法计算即可。首先,将本公开的散热构件1切断。接着,使用截面抛光器(CP)对该切断面进行研磨,或者使用聚焦离子束(FIB)进行加工,由此得到加工面。然后,用氢氟酸等对该加工面进行化学蚀刻,或者在1400~1500℃下进行热处理,由此得到观察面。
接着,使用电子探针显微分析仪(EPMA),进行观察面的面分析。然后,通过面分析的颜色映射,确认铝的存在,在铝的存在位置处,将存在氧的结晶粒子视为氧化铝的结晶粒子。
接着,使用扫描型电子显微镜(SEM)拍摄与进行了上述面分析的范围相同部位的照片。然后,在该照片中,将氧化铝的结晶粒子的轮廓镶边为黑色。接着,使用进行了镶边的照片,应用图像解析软件“A像君(A像くん)”(注册商标,旭化成工程(株)制,另外,以下记为图像解析软件“A像君”的情况下,表示旭化成工程(株)制的图像解析软件。)的粒子解析这样的手法进行图像解析。另外,作为“A像君”的解析条件,例如将结晶粒子的亮度设为“明”,将二值化的方法设为“自动”,将阴影(shading)设为“有”即可。然后,通过该粒子解析,根据测定出的各结晶粒子的当量圆直径,计算结晶粒子的当量圆直径的平均值与结晶粒径的d10以及d90即可。
另外,在本公开的散热构件1中,结晶粒子的d10可以是0.6μm以上且1.0μm以下,结晶粒子的d90也可以是3.4μm以上且3.9μm以下。
此外,在本公开的散热构件1中,当量圆直径为3.0μm以上的结晶粒子的纵横比的平均值也可以为1.25以上且1.80以下。在此,结晶粒子的纵横比是指将结晶粒子的长径除以短径时的值。结晶粒子的长径是指结晶粒子的截面中的最大长度。结晶粒子的短径是指在长径的线段的中央与长径的线段正交的直线的长度。而且,若满足这样的结构,则成为更不易产生结晶粒子彼此的间隙的结构,本公开的散热构件1的机械强度进一步提高。
另外,当量圆直径为3.0μm以上的结晶粒子的纵横比的平均值只要通过以下的方法计算即可。首先,与上述计算结晶粒子的当量圆直径的平均值和结晶粒径的d10以及d90的方法相同地,应用“A像君”的粒子解析这样的手法进行图像解析。进行该图像解析后,计算各结晶粒子的长径以及短径,因此选出当量圆直径为3.0μm以上的结晶粒子,通过将长径除以短径来计算纵横比,求得其平均值即可。
此外,本公开的散热构件1也可以在构成散热构件1的全部成分100质量%中、以将硅、钙以及镁分别换算成SiO2、CaO以及MgO而得的值的总和计,含有0.5质量%以上且2.0质量%以下的硅、钙以及镁。这样,若含有上述含量的硅、钙以及镁,则本申请的散热构件1的机械强度更优异。
此外,本公开的散热构件1也可以是:将钙换算成CaO而得的值相对于将硅换算成SiO2而得的值的质量比CaO/SiO2为0.2以上且0.8以下。若满足这样的结构,则由于结晶粒子彼此致密化,因此本公开的散热构件1的机械强度进一步提高。
在此,本公开的散热构件1中的将硅、钙以及镁分别换算成SiO2、CaO以及MgO而得的含量通过与上述计算氧化铝的含量的方法相同的方法计算即可。具体地说,首先,使用ICP或者XRF,进行散热构件1中的硅(Si)、钙(Ca)以及镁(Mg)的定量分析。然后,从测定出的硅、钙以及镁的含量分别换算为氧化硅(SiO2)、氧化钙(CaO)以及氧化镁(MgO)即可。
此外,如图3以及图4所示,本公开的散热构件1也可以在表面具有多个突起4。在此,如图4所示,突起4是指在散热构件1的表面上与连结不具有突起4的部分的线相比更突出的部分。若满足这样的结构,则本公开的散热构件1通过多个突起4,容易对电子部件2动作时产生的热进行散热。
此外,本公开的散热构件1中的突起4由任何材料构成都可以,也可以由氧化铝质陶瓷构成。若满足这样的结构,则突起4为与散热构件1相同的材质,因此突起4因热膨胀的差而脱落的可能性降低,对电子部件2的动作时产生的热进行散热的特性持续。
在此,突起4由氧化铝质陶瓷构成是指,突起4在构成突起4的全部成分100质量%中、以将铝换算成Al2O3而得的值计,含有98质量%以上的铝。另外,关于突起4中的氧化铝的含量,只要通过与上述计算散热构件1中的氧化铝的含量的方法相同的方法计算即可。具体地说,从散热构件1削取多个突起4后,将其粉碎,使用ICP或者XRF进行铝的定量分析。然后,从测定的铝的含量换算成氧化铝即可。
此外,本公开的散热构件1中的突起4在俯视时的平均直径也可以为10μm以上且40μm以下。另外,此处的俯视时是指俯视散热构件1中的具有突起4的面。若满足这样的结构,则突起4从散热构件1脱落的可能性低,并且由于能够增大突起4的表面积,因此本公开的散热构件1更容易对电子部件2动作时产生的热进行散热。
在此,关于突起4的俯视时的平均直径,能够通过以下的方法计算。首先,如图3所示,使用SEM拍摄俯视具有突起4的表面的照片。接着,在该照片中,将突起4的轮廓镶边成黑色。然后,使用进行了镶边的照片,应用图像解析软件“A像君”的粒子解析这样的手法进行图像解析。然后,将通过该图像解析计算出的各突起4的当量圆直径的平均值作为突起4的俯视时的平均直径即可。另外,作为“A像君”的解析条件,例如将结晶粒子的亮度设为“明”,将二值化的方法设为“自动”,将阴影设为“有”即可。
另外,俯视突起4时的形状可以是任何形状,但如图3所示,例如,也可以是圆形。
此外,本公开的散热构件1是板状体,如图5所示,在板状体中具有空隙5,在将板状体沿厚度方向三等分时,与两侧区域B相比,空隙5也可以较多存在于中央区域A。
在此,如图5所示,中央区域A是指在散热构件1沿厚度方向切断的截面中、将从散热构件1的一个表面1a到另一个表面1b的距离三等分当中的正中间的区域。
另一方面,两侧区域B是指在散热构件1的厚度方向的截面中、将从散热构件1的表面1a到表面1b的距离三等分当中、靠散热构件1的表面1a以及表面1b侧的区域。换言之,两侧区域B是指在散热构件1的厚度方向的截面中、除去了中央区域A的区域。
若满足这样的结构,则在电子部件2动作时产生的热传递到散热构件1时,由于热通过热传导率高的部位而传递,因此在中央区域A中存在较多的热传导率比氧化铝低的空隙5,从而在中央区域A中热量容易向与散热构件1的厚度方向正交的方向传递,能够在整个散热构件1中对热进行散热。
在此,散热构件1的中央区域A以及两侧区域B中的空隙5的存在量只要通过以下的方法确认即可。首先,沿厚度方向切断散热构件1,通过上述计算结晶粒子的当量圆直径的平均值和结晶粒径的d10以及d90相同的方法得到观察面。接着,使用SEM拍摄观察面。然后,在拍摄的照片中,对空隙5的位置进行着色。接着,使用对空隙5的位置进行了着色的照片,分别在中央区域A以及两侧区域B中,应用图像解析软件“A像君”的粒子解析这样的手法进行图像解析。然后,通过该图像解析,计算中央区域A以及两侧区域B各自中的空隙5所占的面积比率,因此,通过比较该空隙5所占的面积比率,确认空隙5是否与两侧区域B相比较多存在于中央区域A即可。另外,作为“A像君”的解析条件,例如将结晶粒子的亮度设为“明”,将二值化的方法设为“自动”,将阴影设为“有”即可。
接着,对本公开的散热构件1的制造方法的一例进行说明。
首先,准备氧化铝(Al2O3)粉末、作为烧结助剂的碳酸钙(CaCO3)粉末、氢氧化镁(Mg(OH)2)粉末以及氧化硅(SiO2)粉末。
在此,作为氧化铝粉末,准备氧化铝粉末的当量圆直径的累积分布曲线中的累积50%时的当量圆直径(d50)为0.2μm、0.6μm、2.1μm这三种。然后,通过分别称量规定量的这三种氧化铝粉末并进行粉碎并混合,来制作d50为1.2μm以上且2.0μm以下、d10与d90的差为1.2μm以上且3.6μm以下的一次原料粉末。
接着,秤量一次原料粉末以及作为烧结助剂的各粉末,使得在构成散热构件1的全部成分100质量%中、以将铝换算成Al2O3而得的值计为98质量%以上。特别是,也可以称量一次原料粉末以及作为烧结助剂的各粉末,使得在构成散热构件1的全部成分100质量%中、将硅、钙以及镁分别换算成SiO2、CaO以及MgO而得的值的总和为0.5质量%以上且2.0质量%以下。进而,在散热构件1中,也可以调整作为烧结助剂的各粉末的比例,使得将钙换算成CaO而得的值相对于将硅换算成SiO2而得的值的质量比CaO/SiO2为0.2以上且0.8以下。
然后,相对于一次原料粉末、作为烧结助剂的各粉末、一次原料粉末以及作为烧结助剂的各粉末的总和100质量份,将3质量份以上且10质量份以下的水溶性丙烯酸树脂等粘合剂和100质量份的溶剂放入搅拌机内进行混合/搅拌,由此得到浆料。
接着,使用该浆料通过刮刀法形成片材。或者,使用通过利用喷雾造粒装置(喷雾干燥器)对浆料进行喷雾造粒而得到的颗粒,利用辊压法形成片材。
接着,通过模压或者激光加工,对上述片材进行加工,由此得到规定的制品形状的成形体。此时,若形成为形成有狭缝的成形体,则能够从一张成形体得到多个散热构件1,提高散热构件1的量产性。
然后,将得到的成形体放入大气(氧化)气氛的烧成炉(例如,辊式隧道炉、分批式气氛炉以及推进式隧道炉)中,在最高温度1540℃以上且1650℃以下的温度下保持1小时以上且6小时以下进行烧成,由此得到本公开的散热构件1。另外,在本公开的散热构件1中,为了使当量圆直径为3.0μm以上的结晶粒子的纵横比的平均值为1.25以上且1.80以下,只要在最高温度1560℃以上且1630℃以下的温度下进行烧成即可。
此外,为了形成在表面具有多个突起4的散热构件1,在烧成前的成形体的表面预先形成成为突起4的部分即可。例如,也可以将具有凹部的模具按压在成形体上,或者通过激光加工、喷砂处理切削成形体的表面,从而形成成为突起4的部分。或者,也可以使用筛等将成为突起4的粉末撒到成形体的表面。或者,在成为突起4的粉末中加入溶剂等制成浆料,也可以使用刷毛、辊等涂敷于成形体的表面。
在此,为了形成由氧化铝质陶瓷构成的突起4,使用氧化铝粉末作为成为突起4的粉末即可。此外,为了形成俯视时的平均直径为10μm以上且40μm以下的突起4,例如,作为成为突起4的粉末,使用烧成后成为上述直径那样的尺寸的球形的粉末即可。
此外,为了形成板状体、在板状体中具有空隙5、在将板状体沿厚度方向三等分时与两侧区域相比空隙5较多存在于中央区域的散热构件1,只要制作两片板状的片材,在两片片材中的一片上,除了形成空隙5的部分涂敷密接液,通过将这两片片材贴合来制作成形体即可。
此外,在本公开的散热构件1上,通过搭载电子部件2,能够得到本公开的电子装置10。另外,根据需要,也可以使用由金属钎料、焊料、热固化性树脂粘接材料、润滑脂以及双面粘接带等构成的接合材料3,将散热构件1与电子部件2接合。
以下,对本公开的实施例进行具体地说明,但本公开并不限定于这些实施例。
实施例1
制作使结晶粒子的当量圆直径、d10与d90的差不同的试样,测定热传导率以及机械强度来进行评价。
首先,准备d50为0.2μm、0.6μm、2.1μm的三种氧化铝粉末、和作为烧结助剂的碳酸钙粉末、氢氧化镁粉末以及氧化硅粉末。
接着,分别秤量三种规定量的氧化铝粉末,粉碎并混合,由此制作具有表1所示的d10、d50以及d90的一次原料粉末。
接着,秤量一次原料粉末以及作为烧结助剂的各粉末,使得将这些粉末在构成烧成后的各试样的全部成分100质量%中、氧化铝的含量成为表1所示的量。另外,对于作为烧结助剂的各粉末,秤量为在烧成后的各试样中换算成SiO2、CaO、MgO而得的值为5∶3∶2。
然后,相对于一次原料粉末、作为烧结助剂的各粉末、一次原料粉末以及作为烧结助剂的各粉末的总和100质量份,作为粘合剂将7质量份的水溶性丙烯酸树脂和作为溶剂将100质量份的水放入搅拌机内,将它们混合/搅拌,由此得到浆料。
接着,使用通过利用喷霧造粒装置对得到的浆料进行喷霧造粒而得到的颗粒,利用辊压法形成片材。
接着,将得到的成形体放入在大气气氛的烧成炉中,在最高温度1580℃的温度下保持4小时进行烧成,由此得到各试样。
接着,通过以下方法计算各试样中的、结晶粒子的当量圆直径的平均值和结晶粒径的d10以及d90。首先,切断各试样。接着,使用CP研磨切断面,在1500℃下进行热处理,由此得到观察面。然后,使用EPMA进行观察面的面分析,确定氧化铝的结晶粒子的位置。
接着,使用SEM拍摄与进行了上述面分析的范围相同部位的照片。然后,在该照片中,将结晶粒子的轮廓镶边为黑色,应用图像解析软件“A像君”的粒子解析这样的手法进行图像解析。在此,作为“A像君”的解析条件,将结晶粒子的亮度设为“明”,将二值化的方法设为“自动”,将阴影设为“有”。然后,通过该粒子解析,根据测定出的各结晶粒子的当量圆直径,计算结晶粒子的当量圆直径的平均值。此外,将各结晶粒子中的当量圆直径的值按照从小到大的顺序排列,在以当量圆直径的最小值为基准时,将相当于结晶粒子的全部个数的10%的当量圆直径的值设为d10。此外,将各结晶粒子中的当量圆直径的值按照从小到大的顺序排列,在以当量圆直径的最小值为基准时,将相当于晶粒子的全部个数的90%的当量圆直径的值设为d90。
接着,通过对各试样分别进行磨削加工,得到直径为10mm、厚度为2mm的试样A、宽度为4mm、厚度为3mm、长度为30mm的试样B。
然后,使用试样A,通过依据JIS R1611-2010的激光闪光法求得热传导率。
此外,使用试样B,依据JIS R1601-2008求得三点弯曲强度。将结果示于表1。
[表1]
根据表1的结果,试样No.2~4、6、9~11的三点弯曲强度为400MPa以上,并且热传导率为28W/m·K。由此可知,若由以将铝换算成Al2O3而得的值计,含有98质量%以上的铝的氧化铝质陶瓷构成,结晶粒子的当量圆直径的平均值为1.6μm以上且2.4μm以下,结晶粒子的d10与d90的差为2.1μm以上且4.2μm以下,则兼具优异的热传导率和机械强度。
实施例2
接着,制作使当量圆直径为3.0μm以上的结晶粒子的纵横比的平均值不同的试样,测定热传导率以及机械强度来进行评价。在各试样的制作中,除了将烧成时的最高温度设为表2所示的温度以外,通过与实施例1的No.3相同的方法制作试样No.13~18。另外,试样No.16是通过与实施例1的试样No.3相同的方法制作的试样。
接着,通过以下的方法计算各试样中的、当量圆直径为3.0μm以上的结晶粒子的纵横比的平均值。首先,通过与实施例1相同的方法,对将结晶粒子的轮廓镶边为黑色的照片,应用“A像君”的粒子解析这样的手法进行图像解析。然后,通过将通过该图像解析得到的、当量圆直径为3.0μm以上的各结晶粒子中的、长径除以短径来计算纵横比,求得其平均值。
然后,通过与实施例1相同的方法,进行热传导率以及三点弯曲强度的测定。将结果示于表2。另外,在表2中,“当量圆直径为3.0μm以上的结晶粒子的纵横比”仅记载为“纵横比”。
[表2]
根据表2的结果,试样No.14~17的三点弯曲强度为440MPa以上。由此可知,若当量圆直径为3.0μm以上的结晶粒子的纵横比的平均值为1.25以上且1.80以下,则机械强度进一步优异。
实施例3
接着,制作使硅、钙以及镁的含量不同的试样,测定热传导率以及机械强度来进行评价。在各试样的制作中,除了秤量一次原料粉末以及作为烧结助剂的各粉末以使得在构成烧成后的各试样的全部成分100质量%中换算成SiO2、CaO、MgO而得的值成为表3所示的值以外,通过与实施例1的No.3相同的方法制作试样No.19~28。另外,试样No.23是通过与实施例1的试样No.3相同的方法作制的试样。
然后,通过与实施例1相同的方法,进行热传导率以及三点弯曲强度的测定。将结果示于表3。
[表3]
根据表3的结果,试样No.20~27的三点弯曲强度为420MPa以上。由此可知,若以将硅、钙以及镁分别换算成SiO2、CaO以及MgO而得的值的总和计,含有0.5质量%以上且2.0质量%以下的硅、钙以及镁,则机械强度优异。
此外,试样No.20~27中,试样No.22~25的三点弯曲强度为440MPa以上,因此可知若质量比CaO/SiO2为0.2以上且0.8以下,则机械强度变得更优异。
附图标记说明
1:散热构件,
2:电子部件,
3:接合材料,
4:突起,
5:空隙,
10:电子装置。
Claims (9)
1.一种散热构件,由氧化铝质陶瓷构成,所述氧化铝质陶瓷含有氧化铝的结晶粒子,在全部成分100质量%中、以将铝换算为Al2O3而得的值计,含有98质量%以上的铝,
所述结晶粒子的当量圆直径的平均值为1.6μm以上且2.4μm以下,所述结晶粒子的当量圆直径的累积分布曲线中的累积10%时的当量圆直径(d10)与累积90%时的当量圆直径(d90)的差为2.1μm以上且4.2μm以下。
2.根据权利要求1所述的散热构件,其中,
当量圆直径为3.0μm以上的结晶粒子的纵横比的平均值为1.25以上且1.80以下。
3.根据权利要求1或者权利要求2所述的散热构件,其中,
在全部成分100质量%中、以将硅、钙以及镁分别换算为SiO2、CaO以及MgO而得的值的总和计,含有0.5质量%以上且2.0质量%以下的硅、钙以及镁。
4.根据权利要求3所述的散热构件,其中,
将所述钙换算为CaO而得的值相对于将所述硅换算为SiO2而得的值的质量比CaO/SiO2为0.2以上且0.8以下。
5.根据权利要求1~4中的任一项所述的散热构件,其中,
在表面具有多个突起。
6.根据权利要求5所述的散热构件,其中,
所述突起由氧化铝质陶瓷构成。
7.根据权利要求5或者权利要求6所述的散热构件,其中,
所述突起的俯视时的平均直径为10μm以上且40μm以下。
8.根据权利要求1~7中的任一项所述的散热构件,其中,
所述散热构件为板状体,在该板状体中具有空隙,在将所述板状体沿厚度方向三等分时,与两侧区域相比,所述空隙较多存在于中央区域。
9.一种电子装置,具备权利要求1~权利要求8中的任一项所述的散热构件和位于该散热构件上的电子部件。
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