CN108535259B - 缺陷标注方法及装置、卷料和片的制造方法及卷料和片 - Google Patents

缺陷标注方法及装置、卷料和片的制造方法及卷料和片 Download PDF

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CN108535259B
CN108535259B CN201810169825.4A CN201810169825A CN108535259B CN 108535259 B CN108535259 B CN 108535259B CN 201810169825 A CN201810169825 A CN 201810169825A CN 108535259 B CN108535259 B CN 108535259B
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defect
pattern
printed
film
marks
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CN108535259A (zh
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井村圭太
越野哲史
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Sumitomo Chemical Co Ltd
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Sumitomo Chemical Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/8874Taking dimensions of defect into account
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/888Marking defects

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  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Making Paper Articles (AREA)
CN201810169825.4A 2017-03-03 2018-02-28 缺陷标注方法及装置、卷料和片的制造方法及卷料和片 Active CN108535259B (zh)

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JP2017-040931 2017-03-03
JP2017040931 2017-03-03

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CN108535259A CN108535259A (zh) 2018-09-14
CN108535259B true CN108535259B (zh) 2022-05-06

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JP (1) JP6978963B2 (enExample)
KR (1) KR102475056B1 (enExample)
CN (1) CN108535259B (enExample)
TW (1) TWI766952B (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021117273A1 (ja) * 2019-12-10 2021-06-17 日東電工株式会社 長尺光学積層体の検査方法及び検査システム
KR20230104169A (ko) * 2020-11-18 2023-07-07 닛토덴코 가부시키가이샤 시트상 제품의 제조 방법, 시트상 제품, 원반 및 중간체
JP7330253B2 (ja) * 2020-12-08 2023-08-21 住友化学株式会社 マーク付き光学積層体、及び、マーク付き光学積層体の製造方法
JP7594917B2 (ja) * 2021-01-08 2024-12-05 日東電工株式会社 光学積層フィルムの検査方法及びフィルム製品の製造方法
CN114604678A (zh) * 2022-03-11 2022-06-10 凌云光技术股份有限公司 一种消除缺陷定位误差的方法

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JPH1074812A (ja) * 1996-06-26 1998-03-17 Hitachi Ltd 被検査パターンの検査方法及び製造プロセス診断方法並びに半導体基板の製造方法
JP2000097869A (ja) * 1998-09-18 2000-04-07 Hitachi Ltd パターンの欠陥検査方法およびその装置
CN101210889A (zh) * 2006-12-30 2008-07-02 大元科技股份有限公司 全像式自动光学检测系统及方法
JP2011012986A (ja) * 2009-06-30 2011-01-20 Toppan Printing Co Ltd 印刷物検査装置
CN102099672A (zh) * 2008-07-18 2011-06-15 旭硝子株式会社 用于缺陷检查的图像数据的处理装置及方法、使用它们的缺陷检查装置及方法、使用它们的板状体的制造方法、以及存储介质
JP2015230298A (ja) * 2014-06-06 2015-12-21 株式会社ニューフレアテクノロジー 検査方法

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JP2000051941A (ja) * 1998-08-06 2000-02-22 Nkk Corp 薄鋼板への欠陥マーキング方法
DE60036939T2 (de) * 1999-03-18 2008-08-07 Jfe Steel Corp. Verfahren und vorrichtung zur markierung von fehlern
JP3890430B2 (ja) * 1999-08-24 2007-03-07 富士フイルム株式会社 表面検査方法及び装置
JP2001305070A (ja) 2000-04-19 2001-10-31 Sumitomo Chem Co Ltd シート状製品の欠陥マーキング方法および装置
JP4343456B2 (ja) 2001-04-03 2009-10-14 大日本印刷株式会社 シート状製品の欠陥マーキング方法および装置
JP4049723B2 (ja) * 2003-09-04 2008-02-20 沖電気工業株式会社 窒化物半導体素子の製造方法及び窒化物半導体素子の製造装置
JP2006071560A (ja) * 2004-09-03 2006-03-16 Fuji Photo Film Co Ltd 光ファイバの欠陥検出装置
JP2007192660A (ja) * 2006-01-19 2007-08-02 Fujifilm Corp フイルムの表面欠陥検出方法及び検出機
JP2008020321A (ja) * 2006-07-13 2008-01-31 Purex:Kk 欠陥マーキング装置付き欠陥布片検出装置
JP2009244064A (ja) * 2008-03-31 2009-10-22 Sumitomo Chemical Co Ltd 偏光フィルムの検査方法
JP5446232B2 (ja) * 2008-04-10 2014-03-19 凸版印刷株式会社 カラーフィルタ基板の欠陥検査装置および欠陥検査方法
JP2011065184A (ja) 2009-04-10 2011-03-31 Nitto Denko Corp 光学フィルムロール原反、およびそれを用いた画像表示装置の製造方法
KR101774074B1 (ko) * 2010-03-10 2017-09-01 쓰리엠 이노베이티브 프로퍼티즈 컴파니 웨브 제조 공정에서의 응용-특정된 반복 결함 검출 시스템
JP5223998B2 (ja) * 2010-11-29 2013-06-26 大日本印刷株式会社 評価用基板
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JP2014048206A (ja) * 2012-08-31 2014-03-17 Sharp Corp 欠陥分類装置、欠陥分類方法、制御プログラム、および記録媒体
JP6204697B2 (ja) * 2013-05-16 2017-09-27 住友化学株式会社 欠陥検査システム
JP6182806B2 (ja) * 2013-06-04 2017-08-23 住友化学株式会社 欠陥検査システム及びフィルムの製造装置
JP6177017B2 (ja) * 2013-06-12 2017-08-09 住友化学株式会社 欠陥検査システム
JP6641093B2 (ja) * 2015-03-20 2020-02-05 住友化学株式会社 光学フィルム及び積層光学フィルムの欠陥検査方法
KR101898835B1 (ko) * 2015-04-09 2018-09-13 스미또모 가가꾸 가부시키가이샤 적층 광학 필름의 결함 검사 방법, 광학 필름의 결함 검사 방법 및 적층 광학 필름의 제조 방법

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1074812A (ja) * 1996-06-26 1998-03-17 Hitachi Ltd 被検査パターンの検査方法及び製造プロセス診断方法並びに半導体基板の製造方法
JP2000097869A (ja) * 1998-09-18 2000-04-07 Hitachi Ltd パターンの欠陥検査方法およびその装置
CN101210889A (zh) * 2006-12-30 2008-07-02 大元科技股份有限公司 全像式自动光学检测系统及方法
CN102099672A (zh) * 2008-07-18 2011-06-15 旭硝子株式会社 用于缺陷检查的图像数据的处理装置及方法、使用它们的缺陷检查装置及方法、使用它们的板状体的制造方法、以及存储介质
JP2011012986A (ja) * 2009-06-30 2011-01-20 Toppan Printing Co Ltd 印刷物検査装置
JP2015230298A (ja) * 2014-06-06 2015-12-21 株式会社ニューフレアテクノロジー 検査方法

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JP6978963B2 (ja) 2021-12-08
TW201837456A (zh) 2018-10-16
TWI766952B (zh) 2022-06-11
CN108535259A (zh) 2018-09-14
KR20180101210A (ko) 2018-09-12
KR102475056B1 (ko) 2022-12-06
JP2018146580A (ja) 2018-09-20

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