CN108039351B - 一种阵列基板及其制备方法、显示装置 - Google Patents

一种阵列基板及其制备方法、显示装置 Download PDF

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Publication number
CN108039351B
CN108039351B CN201711266313.1A CN201711266313A CN108039351B CN 108039351 B CN108039351 B CN 108039351B CN 201711266313 A CN201711266313 A CN 201711266313A CN 108039351 B CN108039351 B CN 108039351B
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thin film
film transistor
layer
pattern
buffer layer
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CN108039351A (zh
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顾鹏飞
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Priority to CN201711266313.1A priority Critical patent/CN108039351B/zh
Publication of CN108039351A publication Critical patent/CN108039351A/zh
Priority to EP18886758.4A priority patent/EP3723130A4/en
Priority to US16/607,937 priority patent/US11133366B2/en
Priority to JP2019561891A priority patent/JP7140780B2/ja
Priority to PCT/CN2018/111710 priority patent/WO2019109748A1/zh
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/126—Shielding, e.g. light-blocking means over the TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6723—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device having light shields
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6758—Thin-film transistors [TFT] characterised by the insulating substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H10D86/021—Manufacture or treatment of multiple TFTs
    • H10D86/0212—Manufacture or treatment of multiple TFTs comprising manufacture, treatment or coating of substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/411—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by materials, geometry or structure of the substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
    • H10D86/423—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electroluminescent Light Sources (AREA)
CN201711266313.1A 2017-12-04 2017-12-04 一种阵列基板及其制备方法、显示装置 Active CN108039351B (zh)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201711266313.1A CN108039351B (zh) 2017-12-04 2017-12-04 一种阵列基板及其制备方法、显示装置
EP18886758.4A EP3723130A4 (en) 2017-12-04 2018-10-24 ARRAY SUBSTRATE AND MANUFACTURING METHOD FOR IT AND DISPLAY DEVICE
US16/607,937 US11133366B2 (en) 2017-12-04 2018-10-24 Array substrate and method of manufacturing the same, and display device
JP2019561891A JP7140780B2 (ja) 2017-12-04 2018-10-24 アレイ基板及びその製造方法、表示装置
PCT/CN2018/111710 WO2019109748A1 (zh) 2017-12-04 2018-10-24 阵列基板及其制备方法、显示装置

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Application Number Priority Date Filing Date Title
CN201711266313.1A CN108039351B (zh) 2017-12-04 2017-12-04 一种阵列基板及其制备方法、显示装置

Publications (2)

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CN108039351A CN108039351A (zh) 2018-05-15
CN108039351B true CN108039351B (zh) 2021-01-26

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US (1) US11133366B2 (https=)
EP (1) EP3723130A4 (https=)
JP (1) JP7140780B2 (https=)
CN (1) CN108039351B (https=)
WO (1) WO2019109748A1 (https=)

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CN108039351B (zh) 2017-12-04 2021-01-26 京东方科技集团股份有限公司 一种阵列基板及其制备方法、显示装置
KR102612577B1 (ko) * 2018-08-13 2023-12-08 엘지디스플레이 주식회사 박막 트랜지스터 기판, 쉬프트 레지스터 및 표시장치
CN109659347B (zh) * 2018-12-19 2021-02-26 武汉华星光电半导体显示技术有限公司 柔性oled显示面板以及显示装置
CN110416232B (zh) * 2019-08-22 2021-11-12 合肥鑫晟光电科技有限公司 阵列基板及其制作方法、显示面板和显示装置
KR102853446B1 (ko) * 2019-10-11 2025-09-02 삼성디스플레이 주식회사 표시 장치와 그의 제조 방법
CN111725324B (zh) * 2020-06-11 2021-11-02 武汉华星光电半导体显示技术有限公司 薄膜晶体管、阵列基板及其制造方法
CN112259612B (zh) * 2020-10-23 2024-07-05 合肥鑫晟光电科技有限公司 显示基板及其制作方法、显示装置
CN112768497B (zh) * 2021-01-07 2022-08-23 武汉华星光电半导体显示技术有限公司 一种阵列基板及其制备方法、显示面板
US12250853B2 (en) * 2021-10-25 2025-03-11 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display device with connected shielding layer and gate electrode layer and manufacturing method thereof
KR20230073405A (ko) * 2021-11-18 2023-05-26 삼성디스플레이 주식회사 표시 장치
KR102924487B1 (ko) 2021-11-19 2026-02-06 삼성디스플레이 주식회사 박막트랜지스터, 박막트랜지스터 어레이 기판 및 박막트랜지스터의 제조 방법
CN115763481B (zh) * 2021-12-09 2026-02-03 友达光电股份有限公司 主动元件基板
CN115472665A (zh) * 2022-10-27 2022-12-13 合肥鑫晟光电科技有限公司 一种显示基板及其制备方法、显示装置

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Publication number Publication date
US11133366B2 (en) 2021-09-28
EP3723130A4 (en) 2021-09-01
CN108039351A (zh) 2018-05-15
EP3723130A1 (en) 2020-10-14
JP2021506098A (ja) 2021-02-18
JP7140780B2 (ja) 2022-09-21
WO2019109748A1 (zh) 2019-06-13
US20200411624A1 (en) 2020-12-31

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