CN107841726B - 全自动镀膜机 - Google Patents
全自动镀膜机 Download PDFInfo
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- CN107841726B CN107841726B CN201711394591.5A CN201711394591A CN107841726B CN 107841726 B CN107841726 B CN 107841726B CN 201711394591 A CN201711394591 A CN 201711394591A CN 107841726 B CN107841726 B CN 107841726B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
Description
Claims (6)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711394591.5A CN107841726B (zh) | 2017-12-21 | 2017-12-21 | 全自动镀膜机 |
PCT/CN2018/096865 WO2019119804A1 (zh) | 2017-12-21 | 2018-07-24 | 基板架回传装置及基板架回传方法、全自动镀膜机 |
JP2018552075A JP2020507534A (ja) | 2017-12-21 | 2018-07-24 | 基板トレイ返送装置、基板トレイ返送方法及び全自動塗布機 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711394591.5A CN107841726B (zh) | 2017-12-21 | 2017-12-21 | 全自动镀膜机 |
Publications (2)
Publication Number | Publication Date |
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CN107841726A CN107841726A (zh) | 2018-03-27 |
CN107841726B true CN107841726B (zh) | 2022-07-01 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201711394591.5A Active CN107841726B (zh) | 2017-12-21 | 2017-12-21 | 全自动镀膜机 |
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CN (1) | CN107841726B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019119804A1 (zh) * | 2017-12-21 | 2019-06-27 | 北京铂阳顶荣光伏科技有限公司 | 基板架回传装置及基板架回传方法、全自动镀膜机 |
CN109112498B (zh) * | 2018-11-01 | 2020-07-28 | 凯盛信息显示材料(黄山)有限公司 | 一种手机pc板磁控溅射镀膜生产线及其生产工艺 |
CN110923657A (zh) * | 2020-01-08 | 2020-03-27 | 深圳市顺捷真空技术有限公司 | 一种真空镀膜机用的工件上料机构 |
CN112896913B (zh) * | 2021-01-15 | 2022-07-26 | 四川众友机械有限责任公司 | 用于三联齿轮加工的料架系统 |
CN112830222B (zh) * | 2021-01-27 | 2022-07-05 | 浙江宝鸿新材料股份有限公司 | 一种镀膜机的钢板装卸系统 |
CN112962081B (zh) * | 2021-02-01 | 2023-07-18 | 肇庆宏旺金属实业有限公司 | 一种钢板连续镀膜生产线及镀膜工艺 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100603100B1 (ko) * | 1999-05-06 | 2006-07-20 | 동경 엘렉트론 주식회사 | 유리 기판의 반송 시스템 |
JP4313593B2 (ja) * | 2003-03-26 | 2009-08-12 | エスペック株式会社 | 熱処理ユニット |
CN200981891Y (zh) * | 2006-08-28 | 2007-11-28 | 深圳豪威真空光电子股份有限公司 | 基片架镀膜装置 |
JP2009091075A (ja) * | 2007-10-05 | 2009-04-30 | Panasonic Corp | 基板移載方法及び基板移載装置 |
CN101629280B (zh) * | 2009-04-17 | 2011-06-29 | 钰衡科技股份有限公司 | 连续式镀膜设备的循环输送系统 |
CN201506634U (zh) * | 2009-09-03 | 2010-06-16 | 东莞宏威数码机械有限公司 | 基片传输装置 |
JP5653083B2 (ja) * | 2010-06-24 | 2015-01-14 | マイクロ・テック株式会社 | ワーク搬送装置 |
CN202323010U (zh) * | 2011-11-19 | 2012-07-11 | 蚌埠玻璃工业设计研究院 | 一种真空镀膜用基片水平输送装置 |
CN202499902U (zh) * | 2012-03-16 | 2012-10-24 | 北京北仪创新真空技术有限责任公司 | 可实现自动翻转的基片架 |
CN102644058B (zh) * | 2012-04-23 | 2013-10-16 | 北京遥测技术研究所 | 一种真空镀膜机用基片翻转装置 |
CN202601596U (zh) * | 2012-05-31 | 2012-12-12 | 北京京东方光电科技有限公司 | 一种基板传送装置及真空传送设备 |
CN202989277U (zh) * | 2012-11-26 | 2013-06-12 | 深圳市创益科技发展有限公司 | 一种连续卧式磁控溅射设备的基片传送装置 |
CN203807548U (zh) * | 2013-12-16 | 2014-09-03 | 湘潭宏大真空技术股份有限公司 | 一种立式真空溅射镀膜生产线 |
CN103849845B (zh) * | 2014-03-07 | 2016-01-27 | 东莞鑫泰玻璃科技有限公司 | 磁控溅射镀膜生产线 |
CN104805410B (zh) * | 2015-04-21 | 2017-04-12 | 爱发科豪威光电薄膜科技(深圳)有限公司 | 磁控溅射镀膜机 |
CN205045491U (zh) * | 2015-07-17 | 2016-02-24 | 惠州易晖能源科技股份有限公司 | 一种用于物理气相沉积镀膜的基片自动装卸系统 |
CN205771971U (zh) * | 2016-05-24 | 2016-12-07 | 肇庆市科润真空设备有限公司 | 薄片玻璃镀膜用的升降式输送装置 |
CN207596955U (zh) * | 2017-12-21 | 2018-07-10 | 北京铂阳顶荣光伏科技有限公司 | 全自动镀膜机 |
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2017
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Address after: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 3001, room 6, building No. 7, Rongchang East Street, Beijing economic and Technological Development Zone, Beijing, Daxing District 100176, China Applicant before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20210420 Address after: No. 201, No. 1 A, No. 1 A (Shenzhen Qianhai business secretary Co., Ltd.), Qianhai Shenzhen Hong Kong cooperation zone, Qianhai Applicant after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
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Effective date of registration: 20210915 Address after: 201203 3rd floor, no.665 Zhangjiang Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Applicant after: Shanghai zuqiang Energy Co.,Ltd. Address before: 518066 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant before: Shenzhen Zhengyue development and Construction Co.,Ltd. |
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