CN107800324B - 振子及制造方法、压电致动器及电机、机器人及输送装置 - Google Patents

振子及制造方法、压电致动器及电机、机器人及输送装置 Download PDF

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CN107800324B
CN107800324B CN201710729237.7A CN201710729237A CN107800324B CN 107800324 B CN107800324 B CN 107800324B CN 201710729237 A CN201710729237 A CN 201710729237A CN 107800324 B CN107800324 B CN 107800324B
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substrate
vibrator
wiring
support
substrates
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CN107800324A (zh
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荒川豊
古谷昇
小西晃雄
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Seiko Epson Corp
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Seiko Epson Corp
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H02N2/0085—Leads; Wiring arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G27/00—Jigging conveyors
    • B65G27/10—Applications of devices for generating or transmitting jigging movements
    • B65G27/16—Applications of devices for generating or transmitting jigging movements of vibrators, i.e. devices for producing movements of high frequency and small amplitude
    • B65G27/24—Electromagnetic devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/10—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of mechanical energy
    • B06B1/12—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of mechanical energy operating with systems involving reciprocating masses
    • B06B1/14—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of mechanical energy operating with systems involving reciprocating masses the masses being elastically coupled
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
CN201710729237.7A 2016-08-31 2017-08-23 振子及制造方法、压电致动器及电机、机器人及输送装置 Active CN107800324B (zh)

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JP2016-170176 2016-08-31
JP2016170176A JP6834262B2 (ja) 2016-08-31 2016-08-31 振動子、圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置および振動子の製造方法

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CN107800324B true CN107800324B (zh) 2022-03-08

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* Cited by examiner, † Cited by third party
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EP3211428A1 (en) * 2016-02-26 2017-08-30 Roche Diagnostics GmbH Transport device unit for a laboratory sample distribution system
JP7031244B2 (ja) 2017-11-17 2022-03-08 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
CN109039151B (zh) * 2018-09-14 2019-09-06 金陵科技学院 一种基于三足式振子的二自由度球形超声电机
JP7225917B2 (ja) * 2019-02-28 2023-02-21 セイコーエプソン株式会社 圧電駆動装置、圧電駆動装置の製造方法およびロボット
GB2595672B (en) * 2020-06-02 2022-09-07 Frito Lay Trading Co Gmbh Improvements in vibratory feeders
US12514123B2 (en) * 2021-05-12 2025-12-30 Hamamatsu Photonics K.K. Actuator device and actuator system
JP7696305B2 (ja) 2021-05-12 2025-06-20 浜松ホトニクス株式会社 アクチュエータ装置
JP7769558B2 (ja) 2021-05-12 2025-11-13 浜松ホトニクス株式会社 圧電ユニット及びアクチュエータ装置
US12527227B2 (en) * 2021-05-12 2026-01-13 Hamamatsu Photonics K.K. Actuator device
JP7728190B2 (ja) * 2022-01-17 2025-08-22 Tdk株式会社 振動デバイス

Citations (8)

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Publication number Priority date Publication date Assignee Title
EP0365231A2 (en) * 1988-10-15 1990-04-25 Seiko Instruments Inc. Progressive wave motor
CN1507687A (zh) * 2002-03-01 2004-06-23 ������������ʽ���� 压电致动器及具有压电致动器的钟表以及便携装置
JP2009128272A (ja) * 2007-11-27 2009-06-11 Panasonic Corp 圧電デバイスとこれを用いた電子機器、及び自動車
CN101847942A (zh) * 2009-03-26 2010-09-29 精工爱普生株式会社 压电电动机、液体喷射装置以及计时器
CN102197586A (zh) * 2008-08-27 2011-09-21 精工电子有限公司 压电振动器、振荡器、电子设备、电波钟以及压电振动器的制造方法
CN102386803A (zh) * 2010-09-02 2012-03-21 株式会社腾龙 压电致动器驱动电路以及压电致动器装置
CN102405591A (zh) * 2009-04-24 2012-04-04 三美电机株式会社 压电致动器及其制造方法
TW201325059A (zh) * 2011-12-06 2013-06-16 Seiko Epson Corp 壓電馬達、驅動裝置、電子零件搬送裝置、電子零件檢查裝置、印刷裝置、機器人手部、及機器人

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JPH0998590A (ja) 1995-07-24 1997-04-08 Nikon Corp 振動アクチュエータ
JP3719061B2 (ja) 1999-03-15 2005-11-24 セイコーエプソン株式会社 圧電アクチュエータ、時計および携帯機器
CN101039085A (zh) * 1998-12-21 2007-09-19 精工爱普生株式会社 压电驱动装置
JP2006340503A (ja) 2005-06-02 2006-12-14 Seiko Epson Corp 圧電アクチュエータ及びこれを備えた機器
JP2013250284A (ja) 2010-09-27 2013-12-12 Sharp Corp 表示装置、輝度制御方法、プログラム、およびコンピュータ読み取り可能な記録媒体
JP5857843B2 (ja) 2012-03-29 2016-02-10 セイコーエプソン株式会社 圧電モーター、ロボットハンドおよびロボット
JP6164044B2 (ja) * 2013-10-30 2017-07-19 セイコーエプソン株式会社 圧電モーター、ロボットハンド、ロボット、指アシスト装置、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置
JP2015211604A (ja) * 2014-04-30 2015-11-24 セイコーエプソン株式会社 圧電アクチュエーター
JP2016004989A (ja) * 2014-06-19 2016-01-12 Ｎｇｋエレクトロデバイス株式会社 光通信用パッケージ及び光モジュール
JP6398454B2 (ja) 2014-08-13 2018-10-03 セイコーエプソン株式会社 圧電駆動装置、ロボット、及び、それらの駆動方法
JP6828342B2 (ja) * 2016-09-23 2021-02-10 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置、プリンターおよび圧電アクチュエーターの製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0365231A2 (en) * 1988-10-15 1990-04-25 Seiko Instruments Inc. Progressive wave motor
CN1507687A (zh) * 2002-03-01 2004-06-23 ������������ʽ���� 压电致动器及具有压电致动器的钟表以及便携装置
JP2009128272A (ja) * 2007-11-27 2009-06-11 Panasonic Corp 圧電デバイスとこれを用いた電子機器、及び自動車
CN102197586A (zh) * 2008-08-27 2011-09-21 精工电子有限公司 压电振动器、振荡器、电子设备、电波钟以及压电振动器的制造方法
CN101847942A (zh) * 2009-03-26 2010-09-29 精工爱普生株式会社 压电电动机、液体喷射装置以及计时器
CN102405591A (zh) * 2009-04-24 2012-04-04 三美电机株式会社 压电致动器及其制造方法
CN102386803A (zh) * 2010-09-02 2012-03-21 株式会社腾龙 压电致动器驱动电路以及压电致动器装置
TW201325059A (zh) * 2011-12-06 2013-06-16 Seiko Epson Corp 壓電馬達、驅動裝置、電子零件搬送裝置、電子零件檢查裝置、印刷裝置、機器人手部、及機器人

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US20180062065A1 (en) 2018-03-01
US11581477B2 (en) 2023-02-14
CN107800324A (zh) 2018-03-13
JP2018038188A (ja) 2018-03-08
JP6834262B2 (ja) 2021-02-24

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