CN107304050B - 多晶硅还原尾气回收方法及回收系统 - Google Patents
多晶硅还原尾气回收方法及回收系统 Download PDFInfo
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- CN107304050B CN107304050B CN201610240091.5A CN201610240091A CN107304050B CN 107304050 B CN107304050 B CN 107304050B CN 201610240091 A CN201610240091 A CN 201610240091A CN 107304050 B CN107304050 B CN 107304050B
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- gas
- reduction
- gas phase
- tail gas
- trichlorosilane
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
- C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
- C01B33/10763—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane from silicon
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/501—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion
- C01B3/503—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion characterised by the membrane
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Silicon Compounds (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610240091.5A CN107304050B (zh) | 2016-04-18 | 2016-04-18 | 多晶硅还原尾气回收方法及回收系统 |
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CN201610240091.5A CN107304050B (zh) | 2016-04-18 | 2016-04-18 | 多晶硅还原尾气回收方法及回收系统 |
Publications (2)
Publication Number | Publication Date |
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CN107304050A CN107304050A (zh) | 2017-10-31 |
CN107304050B true CN107304050B (zh) | 2019-07-23 |
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CN201610240091.5A Active CN107304050B (zh) | 2016-04-18 | 2016-04-18 | 多晶硅还原尾气回收方法及回收系统 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114620731B (zh) * | 2020-12-14 | 2024-02-23 | 新疆新特晶体硅高科技有限公司 | 一种多晶硅的还原尾气回收方法及其回收装置 |
CN112645976A (zh) * | 2020-12-23 | 2021-04-13 | 浙江天采云集科技股份有限公司 | 一种利用氯基CVD晶体薄膜生长制程尾气FTrPSA制备甲基氯硅烷类有机硅方法 |
CN114477093B (zh) * | 2022-01-27 | 2023-09-12 | 巴彦淖尔聚光硅业有限公司 | 一种多晶硅还原尾气回收系统 |
CN114477186B (zh) * | 2022-01-27 | 2023-04-25 | 巴彦淖尔聚光硅业有限公司 | 一种多晶硅冷氢化生产系统 |
CN114715901A (zh) * | 2022-03-28 | 2022-07-08 | 全椒亚格泰电子新材料科技有限公司 | 一种催化合成制备多氯硅烷的装置及其方法 |
Citations (8)
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CN101125276A (zh) * | 2007-09-04 | 2008-02-20 | 浙江开化合成材料有限公司 | 一种三氯氢硅生产尾气回收方法 |
CN102530951A (zh) * | 2010-12-24 | 2012-07-04 | 江苏中能硅业科技发展有限公司 | 生产粒状多晶硅的方法及装置 |
CN202575997U (zh) * | 2011-12-24 | 2012-12-05 | 江苏中能硅业科技发展有限公司 | 带硅粉处理装置的多晶硅还原炉 |
CN103058140A (zh) * | 2013-01-23 | 2013-04-24 | 内蒙古盾安光伏科技有限公司 | 多晶硅生产中副产物的回收系统以及回收方法 |
CN104140106A (zh) * | 2014-07-28 | 2014-11-12 | 中国恩菲工程技术有限公司 | 处理多晶硅还原尾气的方法 |
CN204039067U (zh) * | 2014-07-28 | 2014-12-24 | 中国恩菲工程技术有限公司 | 处理多晶硅还原尾气的系统 |
CN204057976U (zh) * | 2014-09-12 | 2014-12-31 | 新特能源股份有限公司 | 一种减少多晶硅还原炉尾气中硅粉含量的装置 |
CN105473210A (zh) * | 2013-08-28 | 2016-04-06 | 韩化石油化学株式会社 | 废气净化方法及用于该方法的装置 |
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2016
- 2016-04-18 CN CN201610240091.5A patent/CN107304050B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101125276A (zh) * | 2007-09-04 | 2008-02-20 | 浙江开化合成材料有限公司 | 一种三氯氢硅生产尾气回收方法 |
CN102530951A (zh) * | 2010-12-24 | 2012-07-04 | 江苏中能硅业科技发展有限公司 | 生产粒状多晶硅的方法及装置 |
CN202575997U (zh) * | 2011-12-24 | 2012-12-05 | 江苏中能硅业科技发展有限公司 | 带硅粉处理装置的多晶硅还原炉 |
CN103058140A (zh) * | 2013-01-23 | 2013-04-24 | 内蒙古盾安光伏科技有限公司 | 多晶硅生产中副产物的回收系统以及回收方法 |
CN105473210A (zh) * | 2013-08-28 | 2016-04-06 | 韩化石油化学株式会社 | 废气净化方法及用于该方法的装置 |
CN104140106A (zh) * | 2014-07-28 | 2014-11-12 | 中国恩菲工程技术有限公司 | 处理多晶硅还原尾气的方法 |
CN204039067U (zh) * | 2014-07-28 | 2014-12-24 | 中国恩菲工程技术有限公司 | 处理多晶硅还原尾气的系统 |
CN204057976U (zh) * | 2014-09-12 | 2014-12-31 | 新特能源股份有限公司 | 一种减少多晶硅还原炉尾气中硅粉含量的装置 |
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CN107304050A (zh) | 2017-10-31 |
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Application publication date: 20171031 Assignee: Xinte silicon based new materials Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2022990000325 Denomination of invention: Recovery method and system of polysilicon reduction tail gas Granted publication date: 20190723 License type: Common License Record date: 20220627 Application publication date: 20171031 Assignee: Inner Mongolia Xinte silicon material Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2022990000326 Denomination of invention: Recovery method and system of polysilicon reduction tail gas Granted publication date: 20190723 License type: Common License Record date: 20220627 |
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