CN106065460B - 微型挤压丝锥复合涂层及其制备工艺和制备设备 - Google Patents
微型挤压丝锥复合涂层及其制备工艺和制备设备 Download PDFInfo
- Publication number
- CN106065460B CN106065460B CN201610343428.5A CN201610343428A CN106065460B CN 106065460 B CN106065460 B CN 106065460B CN 201610343428 A CN201610343428 A CN 201610343428A CN 106065460 B CN106065460 B CN 106065460B
- Authority
- CN
- China
- Prior art keywords
- minutes
- screw tap
- layer
- tin
- tic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 63
- 239000011248 coating agent Substances 0.000 title claims abstract description 60
- 239000002131 composite material Substances 0.000 title claims abstract description 34
- 238000002360 preparation method Methods 0.000 title claims abstract description 23
- 238000000151 deposition Methods 0.000 claims abstract description 25
- 238000005121 nitriding Methods 0.000 claims abstract description 16
- 239000011159 matrix material Substances 0.000 claims abstract description 15
- 238000009792 diffusion process Methods 0.000 claims abstract description 13
- 230000008021 deposition Effects 0.000 claims abstract description 11
- 239000006104 solid solution Substances 0.000 claims abstract description 9
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 claims abstract description 8
- 239000007789 gas Substances 0.000 claims description 55
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 35
- 229910052786 argon Inorganic materials 0.000 claims description 19
- 229910052757 nitrogen Inorganic materials 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 238000004140 cleaning Methods 0.000 claims description 12
- 238000005520 cutting process Methods 0.000 claims description 10
- 238000002161 passivation Methods 0.000 claims description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 9
- 238000011282 treatment Methods 0.000 claims description 8
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 7
- 230000003247 decreasing effect Effects 0.000 claims description 7
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 6
- 239000008367 deionised water Substances 0.000 claims description 6
- 229910021641 deionized water Inorganic materials 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 6
- 238000010849 ion bombardment Methods 0.000 claims description 6
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 6
- 239000003082 abrasive agent Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000000243 solution Substances 0.000 claims description 5
- 235000009496 Juglans regia Nutrition 0.000 claims description 4
- 235000011194 food seasoning agent Nutrition 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 230000000415 inactivating effect Effects 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 4
- 235000020234 walnut Nutrition 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 238000004873 anchoring Methods 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000018044 dehydration Effects 0.000 claims description 3
- 238000006297 dehydration reaction Methods 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 claims description 3
- 238000005496 tempering Methods 0.000 claims description 3
- 230000004913 activation Effects 0.000 claims description 2
- 238000012805 post-processing Methods 0.000 claims description 2
- GSJBKPNSLRKRNR-UHFFFAOYSA-N $l^{2}-stannanylidenetin Chemical compound [Sn].[Sn] GSJBKPNSLRKRNR-UHFFFAOYSA-N 0.000 claims 1
- 240000007049 Juglans regia Species 0.000 claims 1
- 238000002242 deionisation method Methods 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 238000000465 moulding Methods 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 20
- 238000005299 abrasion Methods 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 41
- 238000000034 method Methods 0.000 description 15
- 238000010891 electric arc Methods 0.000 description 10
- 238000005240 physical vapour deposition Methods 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 238000005477 sputtering target Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 230000008595 infiltration Effects 0.000 description 4
- 238000001764 infiltration Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 241000758789 Juglans Species 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000005022 packaging material Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 229910000734 martensite Inorganic materials 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- 238000001291 vacuum drying Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- 230000002929 anti-fatigue Effects 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 229910001651 emery Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000008207 working material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
- C23C8/38—Treatment of ferrous surfaces
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D6/00—Heat treatment of ferrous alloys
- C21D6/04—Hardening by cooling below 0 degrees Celsius
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
Abstract
本发明提供了一种微型挤压丝锥复合涂层，包括基体，还包括自内向外依次设置的N‑Fe固溶扩散层、纯Ti打底层、及若干层TiN‑TiC‑TiCN交替层。本发明还提供了所述复合涂层的制备工艺和制备设备，其采用等离子体辉光渗氮以及PVD物理气相沉积技术，沉积TiN‑TiC‑TiCN多层复合涂层，解决了现有丝锥基体强度不足、表面耐磨性欠佳以及丝锥表面自润滑和导热不理想的技术问题。本发明涂层表面显微硬度为Hv3300Kg力/cm2，涂层表面摩擦系数为0.20，丝锥的整体强度和表面加工性能大幅提高，平均寿命提高3倍。
Description
技术领域
本发明涉及微型挤压丝锥表面处理技术领域，特别是一种微型挤压丝锥复合涂层及其制备工艺和制备设备。
背景技术
挤压丝锥是利用金属塑性变形原理而加工内螺纹的一种新型螺纹刀具，挤压丝锥挤压内螺纹是无屑加工工艺，特别适用于强度较低、塑性较好的铜合金和铝合金，也可用于不锈钢和低碳钢等硬度低、塑性大的材料攻丝。微型机用挤压丝锥主要用于IT行业、钟表行业的精细螺纹加工，而这两个行业主要加工材料以SUS304、SUS316、SUS301等为主的不锈钢材料，此类材料普遍存在粘性大，导热性差以及加工硬化现象，导致丝锥加工螺纹时切削热聚积，切削温升较快，从而造成丝锥磨损严重，加工出的螺纹表面粗糙度差，使用寿命偏低，尤其当丝锥的加工进给量加大时，丝锥基体的表面强度不足，硬度不够，润滑性较差的特性尤为明显，丝锥一旦出现磨损，丝锥的加工阻力急剧加大，极大可能导致丝锥断裂，且丝锥磨损后，表面也变得粗糙，刀口极易粘附加工材料，产生积屑瘤，造成热量聚积，导致丝锥刀口崩裂。
由此可见现有的微型挤压丝锥存在着基体强度不足、表面耐磨性欠佳以及丝锥表面自润滑和导热不理想的缺陷，一种新型的微型挤压丝锥的表面强化处理方法亟需研发问世。
发明内容
为了克服现有技术的不足，本发明提供了一种微型挤压丝锥复合涂层及其制备工艺和制备设备，采用等离子体辉光渗氮以及PVD物理气相沉积技术，沉积TiN-TiC-TiCN多层复合涂层，解决了现有丝锥基体强度不足、表面耐磨性欠佳以及丝锥表面自润滑和导热不理想的技术问题。
本发明解决其技术问题所采用的技术方案是：
首先，本发明提供一种微型挤压丝锥复合涂层，包括基体，还包括自内向外依次设置的N-Fe固溶扩散层、纯Ti打底层、及若干层TiN-TiC-TiCN交替层。
作为一种举例说明，所述TiN-TiC-TiCN交替层为3~5层，优选为4层。
作为一种举例说明，所述N-Fe固溶扩散层厚度为12~18μm ，优选15μm；所述纯Ti打底层厚度为0.03~0.07μm，优选为0.05μm；所述TiN-TiC-TiCN交替层中TiN层、TiC层、TiCN层的厚度均为0.12~0.18μm，优选为0.15μm。
本发明还提供一种上述微型挤压丝锥复合涂层的制备设备，包括真空炉体和与之相连的真空系统、工作气体控制系统及加热控温系统，还包括设置在真空炉体内的固定有工件的工装转架，所述真空炉体内还配置有两对相向分布的平面溅射靶，真空炉体上配置有若干电弧靶，所述工件、平面溅射靶及电弧靶分别与偏压电源、溅射靶材电源、电弧靶材蒸发电源相连接。
作为一种举例说明，所述工装转架包括相互平行的主轴、副轴及设置在副轴上的基盘，所述基盘上固定有若干工件，所述副轴可自转及绕主轴公转，所述工件上还连接一可使其自转的自转装置。
作为一种举例说明，所述电弧靶的数量为12个，在真空炉体内侧面呈螺旋形分布。
作为一种举例说明，所述工作气体控制系统包括若干并列设置的气瓶，所述气瓶通过输气管与混气盒相连，混气盒通过出气管与设置在真空炉体内的若干并列设置的布气管相连，所述输气管上依次设置有气体减压阀、气体稳压阀及质量流量控制计。
本发明还提供一种利用上述设备制备所述微型挤压丝锥复合涂层的制备工艺，包括以下步骤：
步骤[1] 丝锥基体材料选择与热处理：基体材料采用M42粉末冶金高速钢，经1160℃真空加热，并经-196℃深冷处理后，560℃回火处理，硬度HRC66-67，经螺纹磨床磨制成型；
步骤[2] 磨制成型丝锥表面预处理：将丝锥装挂于清洗篮上，浸入带防锈蚀功能的金属清洗液中，超声波清洗20分钟；等离子水漂洗干净后经无水乙醇脱水，用压缩空气吹干，吹干后的丝锥装夹于刀具专用自动钝化机上卡套钝化10分钟，去毛刺、氧化膜、活化基体表面，可有效提高渗氮效果和PVD涂层结合强度；
步骤[3] 清洗线清洗：钝化后的丝锥经超声波脱蜡、超声波除油、去离子水漂洗、去离子水超声波清洗、热水漂洗、无水乙醇脱水，最后经烘箱热风烘干；
步骤[4] 等离子体渗氮：
a. 将经步骤（3）处理后的丝锥装卡在带有基盘公转、基盘自传和基盘上的工件二次自转的工装转架上，预设公转和自转速度均为1.5转/分钟，开始抽真空，当气压达到5*10-1Pa时，加热至530℃且至少保温20分钟，气压达到5*10-3Pa时，打开氩气质量流量控制计，通入60ml/分钟的氩气，调节截流阀，使气压稳定在2*100Pa，打开偏压电源，频率40KHz，占空比60%，偏压600V，辉光清洗丝锥表面，稳定时间30分钟；
b. 辉光清洗结束后，关闭氩气，通入流量分别为300ml/分钟和60ml/分钟的氮气和氢气，调节节流阀，使气压稳定在1.3*103Pa，偏压电源频率调至17KHz，占空比80%，偏压600V，进行等离子体辉光渗氮，时间30分钟，形成12~18μm 厚的N-Fe固溶扩散层；
步骤[5] 纳米多层多元复合涂层沉积：
a. 渗氮完成后，将温度降到350℃，调节节流阀并将真空抽至5*10-3Pa；
b. Ti离子轰击：打开氩气质量流量控制计通入30ml/分钟氩气，调节截流阀，使气压稳定在5*10-1Pa，开启偏压电源，频率40KHz，占空比60%，偏压在五分钟内从600V降至200V，电弧靶电流在五分钟内从120A降至70A；
c. 纯Ti打底：Ti离子轰击结束后沉积15分钟纯Ti；
d. 沉积TiN：逐渐减少氩气流量，十分钟内关闭，打开氮气质量流量控制控制计，通入氮气，十分钟内加到180ml/分钟，调节截流阀，使气压稳定在6.5*10-1Pa，然后沉积20分钟TiN；
e. 沉积TiC：打开乙炔质量流量控制计，十分钟内逐渐到150ml/分钟，同时逐渐减少氮气流量，十分钟内降到0，调节节流阀，使气压稳定在4.0*10-1Pa，然后沉积20分钟TiC；
f. 沉积TiCN：逐渐调节氮气流量，十分钟内加到90ml/分钟，同时逐渐减少乙炔流量，十分钟内降到90ml/分钟，气压稳定在4*10-1Pa，沉积20分钟TiCN；
j. 重复步骤d、e、f，直至涂层达到所需厚度后随炉冷却至120℃以下出炉。
步骤[6] 后处理：将冷却至室温的丝锥装夹于全自动钝化抛光机卡套上，抛光10分钟，去除涂层中的大液滴和尖角处的积瘤，净化涂层表面。
优选的，步骤[2]中钝化是所使用的钝化磨料为核桃粉，步骤[6]中使用300目的金刚石粉作为抛光磨料。
本发明的积极效果：
（1）本发明将等离子体辉光放电渗氮应用于微型挤压丝锥的表面强化处理，显著提高了材料表面的硬度，增加了表面耐磨性，由于是渗层，基体的抗疲劳性也有显著增加，考虑到微型丝锥的具体加工工况和几何形状，本发明通过控制等离子场的电参数、渗氮气压和氮气、氢气混合气体的比例来调节渗氮层的化学成份、厚度和表面应力状态，最终获得不出现化合物脆生相的单一扩散层的组织，并使表面处于压应力状态，在提高丝锥抗疲劳和抗蠕变变形强度的同时，可更好提高PVD沉积复合涂层的结合强度。
（2）本发明利用纳米多元复合涂层技术，对挤压丝锥本身进行了化学成分、组织结构及整体膜系的针对性设计，本发明复合涂层的本征应力释放、不同化学成分涂层之间硬度匹配更加科学合理，从而使纳米复合涂层的综合性能大幅提高。本发明采用等离子体渗氮后的TiN-TiC-TiCN纳米多层复合涂层沉积技术，可有效解决加工SUS304、SUS316、SUS301等不锈钢的精细螺纹加工难题。
（3）本发明得到微型丝锥基层表面为15μm的单一扩散层（N-Fe固溶体），表面显微硬度Hv≥700，渗层至最外层依次为纯Ti、TiN-TiC-TiCN交替的多层复合组织结构，其中TiN为应力梯度缓释层，TiC为高强度支撑层，TiCN为耐磨层和润滑层，兼具TiN的韧性和TiC的高硬度和低摩擦系数。
（4）本发明涂层表面显微硬度为Hv3300Kg力/cm2，涂层表面摩擦系数为0.20，丝锥的整体强度和表面加工性能大幅提高，平均寿命提高3倍。
总之本发明所述复合涂层，设计合理，具有较高的耐磨性能，且经久耐用。
附图说明
图1是本发明所述复合涂层的结构示意图；
图2是本发明所述制备设备的结构示意图；
图3是本发明所述工作气体控制系统的结构示意图。
具体实施方式
下面结合附图对本发明的优选实施例进行详细说明。
参照图1，本发明优选实施例提供一种微型挤压丝锥复合涂层，包括基体1，还包括自内向外依次设置的N-Fe固溶扩散层2、纯Ti打底层3、及若干层TiN-TiC-TiCN交替层，即TiN层4、TiC层5、TiCN层6组成的交替层。
所述TiN-TiC-TiCN交替层为4层。
所述N-Fe固溶扩散层厚度为15μm；所述纯Ti打底层厚度为0.05μm；所述TiN-TiC-TiCN交替层中TiN层、TiC层、TiCN层的厚度均为0.15μm。
参照图2和图3，本实施例还提供一种上述微型挤压丝锥复合涂层的制备设备，包括真空炉体7和与之相连的真空系统12、工作气体控制系统8及加热控温系统，还包括设置在真空炉体7内的固定有工件13的工装转架9，所述真空炉体7内还配置有两对相向分布的平面溅射靶10，真空炉体1上配置有若干电弧靶11，所述工件13、平面溅射靶10及电弧靶11分别与偏压电源14、溅射靶材电源、电弧靶材蒸发电源相连接。
优选的，所述工装转架9包括相互平行的主轴、副轴及设置在副轴上的基盘，所述基盘上固定有若干工件，所述副轴可自转及绕主轴公转，所述工件上还连接一可使其自转的自转装置。
所述电弧靶的数量为12个，在真空炉体内侧面呈螺旋形分布。
所述工作气体控制系统包括若干并列设置的气瓶15，分别为氢气瓶、氩气瓶、氮气瓶、乙炔气瓶，所述气瓶15通过输气管与混气盒19相连，混气盒19通过出气管与设置在真空炉体7内的若干并列设置的布气管20相连，所述输气管上依次设置有气体减压阀16、气体稳压阀17及质量流量控制计18。
本实施例还提供一种所述微型挤压丝锥复合涂层的制备工艺，其步骤为：
1. 依据丝锥基体材料的化学成分和特性优化热处理方案。
2. 依据丝锥加工工况、被加工材料的特性、以及丝锥磨损失效方式进行失效分析，确定表面渗、镀复合处理强化方案。
3. 依据丝锥的表面几何形状和磨损方式，结合渗、镀复合处理的特性，确定丝锥的渗、镀前预处理和涂层后处理方案。
4. 依据丝锥的表面几何形状和磨损方式以及被加工材料的特性需求设计丝锥基体渗氮层，包括成分、厚度、表面应力状态等。
5. 依据丝锥的加工工况和被加工材料的特性，以及不同膜系涂层的性能设计复合涂层，包括涂层成份、梯度结构、组织结构、缓释层及硬度匹配，涂层总体厚度与综合硬度的设计。
本发明所采用的技术方案根据丝锥基体M42粉末冶金高速钢的化学成份和特性确定严格的热处理工艺规范：基体材料采用M42粉末冶金高速钢，经1160℃真空加热、淬火，并经-196℃深冷处理后，560℃四次回火处理，硬度HRC66-67，增加深冷处理工序，使奥氏体完全转化为马氏体，并有效消除组织应力，同时马氏体基体析出超细大量碳化物，显著提高基体的耐磨性与刚性，稳定丝锥的加工尺寸。
本发明所采用的技术方案对微型机用挤压丝锥在加工SUS304、SUS316、SUS301等不锈钢精细螺纹时失效分析如下：此类材料普遍存在粘性大，导热性差以及加工硬化现象，导致丝锥加工螺纹时切削热聚积，切削温升较快，排屑困难，从而造成丝锥磨损严重，加工出的螺纹表面粗糙度差，使用寿命偏低，尤其当丝锥的加工进给量加大时，丝锥基体的表面强度不足，硬度不够，润滑性较差的特性表现尤为明显，丝锥一旦出现磨损，丝锥的加工阻力急剧加大，极大可能导致丝锥断裂，丝锥磨损后，表面也变得粗糙，刀口极易粘附加工材料，产生积屑瘤，造成热量聚积，导致丝锥刀口崩裂。
为了解决上述的现有丝锥基体强度不足，表面耐磨性欠佳以及丝锥表面自润滑和导热不理想的缺陷，本发明采用等离子体渗氮和PVD沉积纳米多层多元复合涂层的复合表面强化处理方法。
本发明所采用的技术方案对微型机用挤压丝锥渗、镀前的预处理和渗、镀后处理工艺规程为：
磨制成型丝锥表面预处理：①将丝锥装挂于专用清洗篮上，浸入带防锈蚀功能的金属清洗液中，超声波清洗20分钟。②去离子水漂洗干净③无水乙醇脱水，用压缩空气吹干。④吹干后的丝锥装夹于刀具专用自动钝化机上卡套钝化10分钟（钝化磨料为核桃粉），达到去毛刺、氧化膜、粗化及活化基体表面效果，可有效提高渗氮效果和PVD涂层结合强度。清洗线清洗：钝化后的丝锥经超声波脱蜡、超声波除油、去离子水漂洗、去离子水超声波清洗、热水漂洗、无水乙醇脱水，最后经烘箱热风烘干。
丝锥表面渗、镀复合强化处理，详细步骤如下：
步骤[1] 等离子体渗氮：
a. 将经步骤（3）处理后的丝锥装卡在带有基盘公转、基盘自传和基盘上的工件二次自转的工装转架上，预设公转和自转速度均为1.5转/分钟，开始抽真空，当气压达到5*10-1Pa时，加热至530℃且至少保温20分钟，气压达到5*10-3Pa时，打开氩气质量流量控制计，通入60ml/分钟的氩气，调节截流阀，使气压稳定在2*100Pa，打开偏压电源，频率40KHz，占空比60%，偏压600V，辉光清洗丝锥表面，稳定时间30分钟；
b. 辉光清洗结束后，关闭氩气，通入流量分别为300ml/分钟和60ml/分钟的氮气和氢气，调节节流阀，使气压稳定在1.3*103Pa，偏压电源频率调至17KHz，占空比80%，偏压600V，进行等离子体辉光渗氮，时间30分钟，形成12~18μm 厚的N-Fe固溶扩散层；
步骤[2] 纳米多层多元复合涂层沉积：
a. 渗氮完成后，将温度降到350℃，调节节流阀并将真空抽至5*10-3Pa；
b. Ti离子轰击：打开氩气质量流量控制计通入30ml/分钟氩气，调节截流阀，使气压稳定在5*10-1Pa，开启偏压电源，频率40KHz，占空比60%，偏压在五分钟内从600V降至200V，电弧靶电流在五分钟内从120A降至70A；
c. 纯Ti打底：Ti离子轰击结束后沉积15分钟纯Ti；
d. 沉积TiN：逐渐减少氩气流量，十分钟内关闭，打开氮气质量流量控制控制计，通入氮气，十分钟内加到180ml/分钟，调节截流阀，使气压稳定在6.5*10-1Pa，然后沉积20分钟TiN；
e. 沉积TiC：打开乙炔质量流量控制计，十分钟内逐渐到150ml/分钟，同时逐渐减少氮气流量，十分钟内降到0，调节节流阀，使气压稳定在4.0*10-1Pa，然后沉积20分钟TiC；
f. 沉积TiCN：逐渐调节氮气流量，十分钟内加到90ml/分钟，同时逐渐减少乙炔流量，十分钟内降到90ml/分钟，气压稳定在4*10-1Pa，沉积20分钟TiCN；
j. 重复步骤d、e、f，直至涂层达到所需厚度后随炉冷却至120℃以下出炉。
丝锥表面渗、镀复合强化后处理：将冷却至室温的丝锥装夹于全自动钝化、抛光机卡套上，抛光10分钟，去除涂层中的大液滴和尖角处的积瘤，净化涂层表面（磨料采用300M金刚石粉）。
本发明渗、镀前预处理以及PVD涂层后处理设备为刀具专用全自动钝化机，转速可调，正、反方向可调，上、下振幅可调，时间可调，预处理选用核桃粉作为磨料，可达到去毛刺、氧化膜、粗化及活化丝锥表面的作用，不仅提高PVD沉积涂层时与基体的结合强度，也避免沉积涂层过程中因尖角处的放电产生涂层积瘤。
涂层制备完成后选用300M的金刚石粉作为抛光磨料，去除沉积涂层过程中的大液滴和积瘤，也使涂层的整体表面粗糙度提高一个等级水平，减少加工阻力。
本发明采用的超声波清洗线具有超声波脱蜡、鼓泡、超声波除油、去离子水漂洗、超声波纯水清洗、热水漂洗、热风烘干等功能，脱蜡剂和金属清洗剂均为绿色环保无污染水剂。
本发明等离子渗氮和PVD沉积纳米多层多元复合涂层设备为自主研发的磁控溅射-多弧离子镀复合沉积设备（见附图2），该设备兼具等离子渗氮、碳-氮共渗以及沉积纳米多层多元复合涂层的功能，可实现同炉、顺序完成。
经过本发明工艺方法复合处理强化后的微型机用挤压丝锥，渗氮层为厚度为15μm的单一组织N-Fe固溶体扩散层，交替涂层单边厚度1.8μm，表层显微硬度为Hv≥3300Kg力/cm2，摩擦系数为0.2，膜基结合强度≥80N，涂层均匀致密，无大的液滴和缺陷。
本发明经上机实际使用后，比未经过渗、镀复合强化处理的同型号丝锥使用加工效率提高30%，且无明显蠕性变形和粘刀现象，排屑顺畅，使用寿命提高3倍。
以上所述的仅为本发明的优选实施例，所应理解的是，以上实施例的说明只是用于帮助理解本发明的方法及其核心思想，并不用于限定本发明的保护范围，凡在本发明的思想和原则之内所做的任何修改、等同替换等等，均应包含在本发明的保护范围之内。
Claims (5)
1.一种微型挤压丝锥复合涂层的制备工艺，其特征在于，包括以下步骤：
步骤[1]丝锥基体材料选择与热处理：基体材料采用M42粉末冶金高速钢，经1160℃真空加热，并经-196℃深冷处理后，560℃回火处理，硬度HRC66-67，经螺纹磨床磨制成型；
步骤[2]磨制成型丝锥表面预处理：将丝锥装挂于清洗篮上，浸入带防锈蚀功能的金属清洗液中，超声波清洗20分钟；等离子水漂洗干净后经无水乙醇脱水，用压缩空气吹干，吹干后的丝锥装夹于刀具专用自动钝化机上卡套钝化10分钟，达到去毛刺、氧化膜及活化基体表面的效果，可有效提高渗氮效果和PVD涂层结合强度；
步骤[3]清洗线清洗：钝化后的丝锥经超声波脱蜡、超声波除油、去离子水漂洗、去离子水超声波清洗、热水漂洗及无水乙醇脱水，最后经烘箱热风烘干；
步骤[4]等离子体渗氮：
a.将经步骤[3]处理后的丝锥装卡在带有基盘公转、基盘自传和基盘上的工件二次自转的工装转架上，预设公转和自转速度均为1.5转/分钟，开始抽真空，当气压达到5*10-1Pa时，加热至530℃且至少保温20分钟，气压达到5*10-3Pa时，打开氩气质量流量控制计，通入60ml/分钟的氩气，调节截流阀，使气压稳定在2*100Pa，打开偏压电源，频率40kHz，占空比60％，偏压600V，辉光清洗丝锥表面，稳定时间30分钟；
b.辉光清洗结束后，关闭氩气，通入流量分别为300ml/分钟和60ml/分钟的氮气和氢气，调节节流阀，使气压稳定在1.3*103Pa，偏压电源频率调至17kHz，占空比80％，偏压600V，进行等离子体辉光渗氮，时间30分钟，形成12～18μm厚的N-Fe固溶扩散层；
步骤[5]纳米多层多元复合涂层沉积：
a.渗氮完成后，将温度降到350℃，调节节流阀并将真空抽至5*10-3Pa；
b.Ti离子轰击：打开氩气质量流量控制计通入30ml/分钟氩气，调节截流阀，使气压稳定在5*10-1Pa，开启偏压电源，频率40kHz，占空比60％，偏压在五分钟内从600V降至200V，电弧靶电流在五分钟内从120A降至70A；
c.纯Ti打底：Ti离子轰击结束后沉积15分钟纯Ti；
d.沉积TiN：逐渐减少氩气流量，十分钟内关闭，打开氮气质量流量控制控制计，通入氮气，十分钟内加到180ml/分钟，调节截流阀，使气压稳定在6.5*10-1Pa，然后沉积20分钟TiN；
e.沉积TiC：打开乙炔质量流量控制计，十分钟内逐渐到150ml/分钟，同时逐渐减少氮气流量，十分钟内降到0，调节节流阀，使气压稳定在4.0*10-1Pa，然后沉积20分钟TiC；
f.沉积TiCN：逐渐调节氮气流量，十分钟内加到90ml/分钟，同时逐渐减少乙炔流量，十分钟内降到90ml/分钟，气压稳定在4*10-1Pa，沉积20分钟TiCN；
j.重复步骤d、e、f，直至涂层达到所需厚度后随炉冷却至120℃以下出炉；
步骤[6]后处理：将冷却至室温的丝锥装夹于全自动钝化抛光机卡套上，抛光10分钟，去除涂层中的大液滴和尖角处的积瘤，净化涂层表面。
2.根据权利要求1所述微型挤压丝锥复合涂层的制备工艺，其特征在于：步骤[2]中钝化是所使用的钝化磨料为核桃粉，步骤[6]中使用300目的金刚石粉作为抛光磨料。
3.一种根据权利要求1所述的制备工艺制备的微型挤压丝锥复合涂层，包括基体，其特征在于：还包括自内向外依次设置的N-Fe固溶扩散层、纯Ti打底层、及若干层TiN-TiC-TiCN交替层。
4.根据权利要求3所述的一种微型挤压丝锥复合涂层，其特征在于：所述TiN-TiC-TiCN交替层为3～5层，所述N-Fe固溶扩散层厚度为12～18μm；所述纯Ti打底层厚度为0.03～0.07μm；所述TiN-TiC-TiCN交替层中TiN层、TiC层、TiCN层的厚度均为0.12～0.18μm。
5.根据权利要求4所述的一种微型挤压丝锥复合涂层，其特征在于：所述TiN-TiC-TiCN交替层为4层，所述N-Fe固溶扩散层厚度为15μm；所述纯Ti打底层厚度为0.05μm；所述TiN-TiC-TiCN交替层中TiN层、TiC层、TiCN层的厚度均为0.15μm。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610343428.5A CN106065460B (zh) | 2016-05-23 | 2016-05-23 | 微型挤压丝锥复合涂层及其制备工艺和制备设备 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610343428.5A CN106065460B (zh) | 2016-05-23 | 2016-05-23 | 微型挤压丝锥复合涂层及其制备工艺和制备设备 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106065460A CN106065460A (zh) | 2016-11-02 |
| CN106065460B true CN106065460B (zh) | 2018-11-30 |
Family
ID=57420037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610343428.5A Active CN106065460B (zh) | 2016-05-23 | 2016-05-23 | 微型挤压丝锥复合涂层及其制备工艺和制备设备 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106065460B (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021219511A1 (de) * | 2020-04-30 | 2021-11-04 | Robert Bosch Gmbh | VERSCHLEIßSCHUTZBESCHICHTETES BAUTEIL SOWIE VERFAHREN ZUM BESCHICHTEN DESSELBEN |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107227440A (zh) * | 2017-03-04 | 2017-10-03 | 安徽智联投资集团有限公司 | 一种两相复合纳米涂层 |
| CN110055490A (zh) * | 2019-05-05 | 2019-07-26 | 兰州理工大学温州泵阀工程研究院 | 一种奥氏体不锈钢表层的复合处理方法 |
| CN110468379A (zh) * | 2019-08-27 | 2019-11-19 | 中国科学院金属研究所 | 一种配置热丝的电弧离子镀膜装置 |
| CN112628381B (zh) * | 2020-12-02 | 2022-05-10 | 东南大学 | 一种温度自适应润滑齿轮及其制备方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104561909A (zh) * | 2015-01-27 | 2015-04-29 | 大连理工常州研究院有限公司 | 一种离子渗氮及电弧离子镀膜的表面复合改性设备及方法 |
| CN104561910A (zh) * | 2015-01-27 | 2015-04-29 | 大连理工常州研究院有限公司 | 一种等离子体增强制备精密涂层的电弧离子镀设备及方法 |
| CN104911552A (zh) * | 2015-06-25 | 2015-09-16 | 西安交通大学 | 一种热挤压模具渗镀复合表面强化方法 |
| CN105154880A (zh) * | 2015-09-08 | 2015-12-16 | 上海应用技术学院 | 汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备工艺 |
| CN205803573U (zh) * | 2016-05-23 | 2016-12-14 | 圆兴(厦门)精密工具有限公司 | 微型挤压丝锥复合涂层及其制备设备 |
-
2016
- 2016-05-23 CN CN201610343428.5A patent/CN106065460B/zh active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104561909A (zh) * | 2015-01-27 | 2015-04-29 | 大连理工常州研究院有限公司 | 一种离子渗氮及电弧离子镀膜的表面复合改性设备及方法 |
| CN104561910A (zh) * | 2015-01-27 | 2015-04-29 | 大连理工常州研究院有限公司 | 一种等离子体增强制备精密涂层的电弧离子镀设备及方法 |
| CN104911552A (zh) * | 2015-06-25 | 2015-09-16 | 西安交通大学 | 一种热挤压模具渗镀复合表面强化方法 |
| CN105154880A (zh) * | 2015-09-08 | 2015-12-16 | 上海应用技术学院 | 汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备工艺 |
| CN205803573U (zh) * | 2016-05-23 | 2016-12-14 | 圆兴(厦门)精密工具有限公司 | 微型挤压丝锥复合涂层及其制备设备 |
Non-Patent Citations (2)
| Title |
|---|
| 等离子体氮化与物理气相沉积复合处理的研究进展;赵彦辉等;《机械工程材料》;20120620;第36卷(第6期);第1-4、71页 * |
| 高速钢表面PN_PVD复合处理工艺和性能研究;邓敏等;《武汉科技大学学报》;20090415;第32卷(第2期);第137-141页 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021219511A1 (de) * | 2020-04-30 | 2021-11-04 | Robert Bosch Gmbh | VERSCHLEIßSCHUTZBESCHICHTETES BAUTEIL SOWIE VERFAHREN ZUM BESCHICHTEN DESSELBEN |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106065460A (zh) | 2016-11-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106065460B (zh) | 微型挤压丝锥复合涂层及其制备工艺和制备设备 | |
| CN106893986B (zh) | 一种高硬度AlCrN纳米复合涂层及其制备工艺 | |
| CN107130222B (zh) | 高功率脉冲磁控溅射CrAlSiN纳米复合涂层及其制备方法 | |
| CN110016642A (zh) | 一种微织构梯度涂层刀具及其制备方法 | |
| CN104131250B (zh) | 一种梯度成分设计的纳米复合刀具涂层及其制备方法 | |
| CN104911552B (zh) | 一种热挤压模具渗镀复合表面强化方法 | |
| CN101307428A (zh) | 磁控溅射与多弧离子镀复合式真空镀膜方法 | |
| CN102899613B (zh) | AlTiN高速切削刀具涂层的制备方法 | |
| CN105908126B (zh) | 一种高Al含量的AlTiN复合涂层及制备方法 | |
| CN109182984B (zh) | 一种用于丝锥表面制备TiCN涂层的方法 | |
| CN106521451A (zh) | 一种金刚石粉体表面镀钨的方法 | |
| CN105088129B (zh) | 微纳织构化氮化钛固体润滑膜的制备方法 | |
| CN113073293B (zh) | 一种改善e690钢摩擦学性能的结构及方法 | |
| CN106893987A (zh) | 一种物理气相沉积Ta‑C涂层的制备方法及Ta‑C涂层 | |
| CN108251797A (zh) | 一种钛合金切削刀具用TiAlN/CrN多层涂层及其制备方法 | |
| CN109666906A (zh) | 一种高温抗氧化AlCrYN涂层及其制备方法和应用 | |
| CN106929799A (zh) | 耐高温防护涂层及其制备方法与应用 | |
| CN109182983B (zh) | 一种用于硬质合金旋转锉表面制备TiAlSiN涂层的方法 | |
| CN105970215A (zh) | 一种轴承的复合层制备方法及其轴承 | |
| CN108179393B (zh) | 一种CrAlSiCON纳米复合涂层及其制备方法 | |
| CN110117774A (zh) | 一种tc4钛合金表面涂层及其制备方法和tc4钛合金产品 | |
| CN205803573U (zh) | 微型挤压丝锥复合涂层及其制备设备 | |
| CN109333383A (zh) | 一种表面包覆CrN膜的电镀CBN砂轮及其制备方法 | |
| CN110387544B (zh) | 一种基于电火花沉积的氮碳化钛金属陶瓷复合涂层制备方法 | |
| CN103938157A (zh) | 一种ZrNbAlN超晶格涂层及制备方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Composite coating for micro extrusion tap, and preparation process and preparation device for composite coating Effective date of registration: 20191016 Granted publication date: 20181130 Pledgee: China Everbright Bank Limited by Share Ltd. Xiamen branch Pledgor: XIAMEN YUANXING PRECISION TOOL Co.,Ltd. Registration number: Y2019990000343 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201120 Granted publication date: 20181130 Pledgee: China Everbright Bank Limited by Share Ltd. Xiamen branch Pledgor: XIAMEN YUANXING PRECISION TOOL Co.,Ltd. Registration number: Y2019990000343 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Micro extrusion tap composite coating and its preparation process and equipment Effective date of registration: 20201126 Granted publication date: 20181130 Pledgee: Bank of China Limited Xiamen Haicang sub branch Pledgor: XIAMEN YUANXING PRECISION TOOL Co.,Ltd. Registration number: Y2020990001375 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20181130 Pledgee: Bank of China Limited Xiamen Haicang sub branch Pledgor: XIAMEN YUANXING PRECISION TOOL Co.,Ltd. Registration number: Y2020990001375 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Composite coating of micro extruded tap and its preparation process and equipment Granted publication date: 20181130 Pledgee: Bank of China Limited Xiamen Haicang sub branch Pledgor: XIAMEN YUANXING PRECISION TOOL Co.,Ltd. Registration number: Y2024980004501 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |