CN105705684A - 制造碳化硅半导体衬底的方法 - Google Patents

制造碳化硅半导体衬底的方法 Download PDF

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Publication number
CN105705684A
CN105705684A CN201480009899.1A CN201480009899A CN105705684A CN 105705684 A CN105705684 A CN 105705684A CN 201480009899 A CN201480009899 A CN 201480009899A CN 105705684 A CN105705684 A CN 105705684A
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CN
China
Prior art keywords
silicon carbide
main surface
substrate
carbon atoms
semiconductor substrate
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Pending
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CN201480009899.1A
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English (en)
Chinese (zh)
Inventor
玄番润
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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Publication of CN105705684A publication Critical patent/CN105705684A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02529—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/16—Controlling or regulating
    • C30B25/165—Controlling or regulating the flow of the reactive gases
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/18—Epitaxial-layer growth characterised by the substrate
    • C30B25/186—Epitaxial-layer growth characterised by the substrate being specially pre-treated by, e.g. chemical or physical means
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/18—Epitaxial-layer growth characterised by the substrate
    • C30B25/20—Epitaxial-layer growth characterised by the substrate the substrate being of the same materials as the epitaxial layer
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02378—Silicon carbide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02576—N-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02658—Pretreatments

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
CN201480009899.1A 2013-03-27 2014-03-26 制造碳化硅半导体衬底的方法 Pending CN105705684A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013-066491 2013-03-27
JP2013066491A JP2014189442A (ja) 2013-03-27 2013-03-27 炭化珪素半導体基板の製造方法
PCT/JP2014/058524 WO2014157332A1 (ja) 2013-03-27 2014-03-26 炭化珪素半導体基板の製造方法

Publications (1)

Publication Number Publication Date
CN105705684A true CN105705684A (zh) 2016-06-22

Family

ID=51624295

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480009899.1A Pending CN105705684A (zh) 2013-03-27 2014-03-26 制造碳化硅半导体衬底的方法

Country Status (4)

Country Link
US (1) US9269572B2 (enExample)
JP (1) JP2014189442A (enExample)
CN (1) CN105705684A (enExample)
WO (1) WO2014157332A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114303232A (zh) * 2019-08-06 2022-04-08 株式会社电装 SiC衬底的制造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102265623B1 (ko) * 2018-12-26 2021-06-22 한국세라믹기술원 증착공정에서 발생되는 탄화규소 부산물의 재생 방법
EP4289993A4 (en) * 2021-04-02 2024-03-27 Meishan Boya Advanced Materials Co., Ltd. METHOD FOR PREPARING COMPOSITE CRYSTAL, AND SYSTEM

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WO2006022282A1 (ja) * 2004-08-24 2006-03-02 Bridgestone Corporation 炭化ケイ素単結晶ウェハ及びその製造方法
CN101404249A (zh) * 2008-11-07 2009-04-08 中国电子科技集团公司第五十五研究所 一种制作基本上没有台阶形貌的碳化硅外延层的方法
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JP2010095431A (ja) * 2008-10-20 2010-04-30 Toyota Motor Corp ＳｉＣ薄膜形成装置
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CN102592976A (zh) * 2012-03-22 2012-07-18 西安电子科技大学 P型重掺杂碳化硅薄膜外延制备方法
CN103614779A (zh) * 2013-11-28 2014-03-05 中国电子科技集团公司第五十五研究所 一种提高碳化硅外延片片内n型掺杂浓度均匀性的方法

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US20070290211A1 (en) * 2004-03-26 2007-12-20 The Kansai Electric Power Co., Inc. Bipolar Semiconductor Device and Process for Producing the Same
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JP2006321696A (ja) * 2005-05-20 2006-11-30 Hitachi Cable Ltd 炭化珪素単結晶の製造方法
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JP4959763B2 (ja) * 2009-08-28 2012-06-27 昭和電工株式会社 ＳｉＣエピタキシャルウェハ及びその製造方法
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WO2006022282A1 (ja) * 2004-08-24 2006-03-02 Bridgestone Corporation 炭化ケイ素単結晶ウェハ及びその製造方法
CN101536157A (zh) * 2006-08-25 2009-09-16 住友电气工业株式会社 用于制造碳化硅衬底的方法以及碳化硅衬底
JP2010095431A (ja) * 2008-10-20 2010-04-30 Toyota Motor Corp ＳｉＣ薄膜形成装置
CN101404249A (zh) * 2008-11-07 2009-04-08 中国电子科技集团公司第五十五研究所 一种制作基本上没有台阶形貌的碳化硅外延层的方法
CN102534808A (zh) * 2010-12-14 2012-07-04 北京天科合达蓝光半导体有限公司 高质量碳化硅表面的获得方法
CN102592976A (zh) * 2012-03-22 2012-07-18 西安电子科技大学 P型重掺杂碳化硅薄膜外延制备方法
CN103614779A (zh) * 2013-11-28 2014-03-05 中国电子科技集团公司第五十五研究所 一种提高碳化硅外延片片内n型掺杂浓度均匀性的方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114303232A (zh) * 2019-08-06 2022-04-08 株式会社电装 SiC衬底的制造方法

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Publication number Publication date
WO2014157332A1 (ja) 2014-10-02
JP2014189442A (ja) 2014-10-06
US20150311069A1 (en) 2015-10-29
US9269572B2 (en) 2016-02-23

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Application publication date: 20160622