CN105658377A - 研磨装置以及研磨方法 - Google Patents

研磨装置以及研磨方法 Download PDF

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Publication number
CN105658377A
CN105658377A CN201480054424.4A CN201480054424A CN105658377A CN 105658377 A CN105658377 A CN 105658377A CN 201480054424 A CN201480054424 A CN 201480054424A CN 105658377 A CN105658377 A CN 105658377A
Authority
CN
China
Prior art keywords
polished
structural unit
grinding structural
machining object
grinding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201480054424.4A
Other languages
English (en)
Chinese (zh)
Inventor
森永均
浅野宏
大月伸悟
玉井诚
玉井一诚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujimi Inc
Original Assignee
Fujimi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujimi Inc filed Critical Fujimi Inc
Publication of CN105658377A publication Critical patent/CN105658377A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/08—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding non-circular cross-sections, e.g. shafts of elliptical or polygonal cross-section
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/02—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/002—Grinding heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/107—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for glass plates while they are turning

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
CN201480054424.4A 2013-10-04 2014-10-02 研磨装置以及研磨方法 Pending CN105658377A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013-209602 2013-10-04
JP2013209602 2013-10-04
PCT/JP2014/076360 WO2015050186A1 (ja) 2013-10-04 2014-10-02 研磨装置及び研磨方法

Publications (1)

Publication Number Publication Date
CN105658377A true CN105658377A (zh) 2016-06-08

Family

ID=52778773

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480054424.4A Pending CN105658377A (zh) 2013-10-04 2014-10-02 研磨装置以及研磨方法

Country Status (7)

Country Link
US (1) US20160236314A1 (de)
EP (1) EP3053703A4 (de)
JP (2) JPWO2015050186A1 (de)
KR (1) KR20160067106A (de)
CN (1) CN105658377A (de)
TW (1) TW201529224A (de)
WO (1) WO2015050186A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019169813A1 (zh) * 2018-03-08 2019-09-12 北京铂阳顶荣光伏科技有限公司 磨边方法及装置
CN115365928A (zh) * 2022-08-23 2022-11-22 北京航空航天大学宁波创新研究院 一种研磨方法及研磨机
CN117773697A (zh) * 2024-02-23 2024-03-29 山东旭辉玻璃科技有限公司 一种用于农机玻璃的切割边角打磨设备

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015174180A (ja) * 2014-03-14 2015-10-05 株式会社東京精密 超音波面取り機
JP6398902B2 (ja) * 2014-08-19 2018-10-03 信越化学工業株式会社 インプリント・リソグラフィ用角形基板及びその製造方法
JP6568006B2 (ja) * 2016-04-08 2019-08-28 株式会社荏原製作所 研磨装置および研磨方法
US11799150B2 (en) 2020-07-17 2023-10-24 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling structure for hybrid-electric vehicle battery cell assemblies

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US5658189A (en) * 1994-09-29 1997-08-19 Tokyo Seimitsu Co., Ltd. Grinding apparatus for wafer edge
US20070066192A1 (en) * 2005-09-21 2007-03-22 Elpida Memory, Inc. Wafer-edge polishing system
CN101284365A (zh) * 2007-04-13 2008-10-15 奇美电子股份有限公司 基板的旋转装置、磨边装置及磨边方法
CN101612717A (zh) * 2009-07-17 2009-12-30 李留江 数控球轴承内圈沟道多功能磨床
CN201380419Y (zh) * 2009-03-02 2010-01-13 湖北新火炬科技股份有限公司 金刚滚轮磨削砂轮用于磨削轮毂总成内滚道的装置
JP2010182813A (ja) * 2009-02-04 2010-08-19 Noritake Super Abrasive Co Ltd Ｃｍｐパッドコンディショナー
US20110136411A1 (en) * 2009-12-03 2011-06-09 Masayuki Nakanishi Method and apparatus for polishing a substrate having a grinded back surface
CN102427913A (zh) * 2009-05-15 2012-04-25 旭硝子株式会社 玻璃端面磨削用磨具的加工位置设定方法
CN203077043U (zh) * 2012-02-03 2013-07-24 中村留精密工业株式会社 硬质脆性板的侧边加工装置

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JPS6165763A (ja) * 1984-09-06 1986-04-04 Nippon Sheet Glass Co Ltd 板状体の端面研磨装置
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EP2537634A1 (de) * 2011-06-21 2012-12-26 WENDT GmbH Verfahren zum Schleifen der umlaufenden Kantenfläche einer Verglasung

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5317836A (en) * 1991-11-27 1994-06-07 Shin-Etsu Handotai Co., Ltd. Apparatus for polishing chamfers of a wafer
US5658189A (en) * 1994-09-29 1997-08-19 Tokyo Seimitsu Co., Ltd. Grinding apparatus for wafer edge
US20070066192A1 (en) * 2005-09-21 2007-03-22 Elpida Memory, Inc. Wafer-edge polishing system
CN101284365A (zh) * 2007-04-13 2008-10-15 奇美电子股份有限公司 基板的旋转装置、磨边装置及磨边方法
JP2010182813A (ja) * 2009-02-04 2010-08-19 Noritake Super Abrasive Co Ltd Ｃｍｐパッドコンディショナー
CN201380419Y (zh) * 2009-03-02 2010-01-13 湖北新火炬科技股份有限公司 金刚滚轮磨削砂轮用于磨削轮毂总成内滚道的装置
CN102427913A (zh) * 2009-05-15 2012-04-25 旭硝子株式会社 玻璃端面磨削用磨具的加工位置设定方法
CN101612717A (zh) * 2009-07-17 2009-12-30 李留江 数控球轴承内圈沟道多功能磨床
US20110136411A1 (en) * 2009-12-03 2011-06-09 Masayuki Nakanishi Method and apparatus for polishing a substrate having a grinded back surface
CN203077043U (zh) * 2012-02-03 2013-07-24 中村留精密工业株式会社 硬质脆性板的侧边加工装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019169813A1 (zh) * 2018-03-08 2019-09-12 北京铂阳顶荣光伏科技有限公司 磨边方法及装置
CN115365928A (zh) * 2022-08-23 2022-11-22 北京航空航天大学宁波创新研究院 一种研磨方法及研磨机
CN117773697A (zh) * 2024-02-23 2024-03-29 山东旭辉玻璃科技有限公司 一种用于农机玻璃的切割边角打磨设备
CN117773697B (zh) * 2024-02-23 2024-05-14 山东旭辉玻璃科技有限公司 一种用于农机玻璃的切割边角打磨设备

Also Published As

Publication number Publication date
EP3053703A1 (de) 2016-08-10
US20160236314A1 (en) 2016-08-18
WO2015050186A1 (ja) 2015-04-09
JPWO2015050186A1 (ja) 2017-03-09
TW201529224A (zh) 2015-08-01
EP3053703A4 (de) 2017-07-26
KR20160067106A (ko) 2016-06-13
JP2018001406A (ja) 2018-01-11

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Application publication date: 20160608

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